Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Azbil Corp
Original Assignee
Azbil Corp
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Filing date
Publication date
Application filed by Azbil CorpfiledCriticalAzbil Corp
Priority to JP16607982ApriorityCriticalpatent/JPS5956136A/ja
Publication of JPS5956136ApublicationCriticalpatent/JPS5956136A/ja
Publication of JPH0322572B2publicationCriticalpatent/JPH0322572B2/ja
G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms