JPH0322330A - Fluorescent character display tube - Google Patents

Fluorescent character display tube

Info

Publication number
JPH0322330A
JPH0322330A JP1156971A JP15697189A JPH0322330A JP H0322330 A JPH0322330 A JP H0322330A JP 1156971 A JP1156971 A JP 1156971A JP 15697189 A JP15697189 A JP 15697189A JP H0322330 A JPH0322330 A JP H0322330A
Authority
JP
Japan
Prior art keywords
display tube
fluorescent display
thin film
thick film
wiring conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1156971A
Other languages
Japanese (ja)
Inventor
Hiroaki Kawasaki
博明 川崎
Hiroshi Sakurada
桜田 弘
Junichiro Kogure
純一郎 小暮
Toshinori Suzuki
鈴木 利儀
Yuji Nomura
野村 裕司
Kazuyuki Yano
矢野 和行
Nobuo Akiba
秋葉 信夫
Yoshimasa Uzawa
鵜沢 良正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Futaba Corp
Original Assignee
Futaba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futaba Corp filed Critical Futaba Corp
Priority to JP1156971A priority Critical patent/JPH0322330A/en
Priority to KR1019900009020A priority patent/KR940007874B1/en
Publication of JPH0322330A publication Critical patent/JPH0322330A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)

Abstract

PURPOSE:To reduce the package size of a fluorescent character display tube by providing a thick conductor at the tip of a thin wiring conductor, and fixing an IC ball bump to the thick conductor. CONSTITUTION:A thick conductor 10 is provided at the tip of a thin wiring conductor 2a, an IC chip 12 with an IC metal ball bump 11 is fixed on its surface, i.e., the IC chip 12 is fixed on a substrate by the flip chip method, thus connection strength is excellent, reliability is high, and a fluorescent character display tube is normally operated at a high lighting ambient temperature for on-vehicle use with severe vibration. A chip fitting section can be made smaller than the conventional one, the whole fluorescent character display tube is made small, and the mounting density can be increased.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は蛍光表示管に係り、特に蛍光表示管のガラス基
板を外囲器より延長して設け、該延長部分に蛍光表示管
駆動用のICチップを配設した通称「チップ・オン・グ
ラス(Chip on Glass) J (以下CO
Gと称する。)構造の蛍光表示管に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a fluorescent display tube, and in particular, the glass substrate of the fluorescent display tube is provided to extend from the envelope, and the extended portion is provided with a tube for driving the fluorescent display tube. A device equipped with an IC chip, commonly known as "Chip on Glass" J (hereinafter referred to as CO)
It is called G. ) Concerning the structure of a fluorescent display tube.

[従来技術1 近年、蛍光表示管は、オーディオ製品や家電製品以外に
車のインストルメン1・パネルにも使用されており、車
載用蛍光表示管と称している。この車載用蛍光表示管は
、取付場所が制限されるために、蛍光表示管の駆動回路
をICチップに納め、このICチップを蛍光表示管に一
体に配設した蛍光表示管が提供されている。そして、I
Cチップを蛍光表示管の真空外囲器内に配設したものを
チップ・イン・グラス(C−I−G)と称し、ICチッ
プを真空外囲器の外側に配設したものをC−0−Gと称
している。C−0−Gタイプの蛍光表示管は、C・■・
Gタイプに比較し、ICチップを蛍光表示管の封着工程
後に配設できるために、封着時の400〜500°Cの
高温中にICチップを通さなくてもよい利点や、ICチ
ップが損傷していた場合に交換が可能であるという長所
を有している。
[Prior art 1] In recent years, fluorescent display tubes have been used not only in audio products and home appliances but also in car instruments and panels, and are called in-vehicle fluorescent display tubes. Since the mounting location of this in-vehicle fluorescent display tube is limited, a fluorescent display tube is provided in which the driving circuit of the fluorescent display tube is housed in an IC chip, and this IC chip is integrally arranged in the fluorescent display tube. . And I
A device in which a C chip is placed inside the vacuum envelope of a fluorescent display tube is called a chip-in-glass (C-I-G), and a device in which an IC chip is placed outside the vacuum envelope is called a C- It is called 0-G. C-0-G type fluorescent display tubes are C・■・
Compared to the G type, the IC chip can be placed after the sealing process of the fluorescent display tube, so there is no need to pass the IC chip through the high temperature of 400 to 500°C during sealing, and the IC chip is It has the advantage that it can be replaced if it is damaged.

又、車載用の蛍光表示管は、取付場所がエンジンの近く
であることから環境温度が高く、振動もあるために、I
Cチップと配線導体の接続強度も強いものが要求されて
いた。
In addition, because fluorescent display tubes for automobiles are installed near the engine, the environmental temperature is high and there is vibration, so the I
A strong connection between the C chip and the wiring conductor was also required.

しかしながら、従来のC−0−G蛍光表示管は、第6図
の要部切欠き平面図および第6図のA−A線切断々面図
に示すような構造のものが特開昭60一163079号
で公知である。この従来例において21は、ガラス基板
であり蛍光表示管の陽極基板21AとICチップ取付基
板21Bが一体になった構造である。前記陽極基板2l
A上にはAt薄膜による配線導体22が陽極基板21A
よりチップ取付基板21Bにまで延設されていた。この
配線導体22上には絶縁層23、陽極導体24、蛍光体
層25が積層配設された蛍光表示管の構造である。
However, the conventional C-0-G fluorescent display tube has a structure as shown in the cutaway plan view of the main part in Fig. 6 and the cross-sectional view taken along the line A-A in Fig. 6. It is known from No. 163079. In this conventional example, 21 is a glass substrate, and has a structure in which an anode substrate 21A of a fluorescent display tube and an IC chip mounting substrate 21B are integrated. The anode substrate 2l
A wiring conductor 22 made of an At thin film is placed on the anode substrate 21A.
It was extended to the chip mounting board 21B. This structure is a fluorescent display tube in which an insulating layer 23, an anode conductor 24, and a phosphor layer 25 are laminated on the wiring conductor 22.

前記陽極導体24を蛍光体層25により陽極セグメント
を構戊し、この陽極セグメントが複数配設されて数字等
のパターンを表示する陽極表示部26を構威している。
The anode conductor 24 is formed into anode segments by a phosphor layer 25, and a plurality of these anode segments are arranged to form an anode display section 26 that displays patterns such as numbers.

前記陽極表示部26に対面した上方にはメッシュ状の制
御電極27及びフィラメント状の陰極28が配設されて
いる。又前記陽極表示部26、制御電極27、陰極28
等の電極を覆うように箱形の容器部29が陽極基板21
周縁に配設されフリット・ガラスからなる封着材によっ
て気密に封着されて、外囲器が形或されていた。
A mesh-like control electrode 27 and a filament-like cathode 28 are arranged above the anode display section 26 . Further, the anode display section 26, the control electrode 27, and the cathode 28
A box-shaped container part 29 covers the anode substrate 21 so as to cover the electrodes such as
The envelope was formed by being hermetically sealed with a sealant made of frit glass disposed around the periphery.

そして、前記配線導体22は、外囲器より外側のチップ
取付基板21Bにまで延長して設けられ、その先端には
ガラス粉末を含まないAgペーストによるボンデングパ
ッド部30が配設されていた。また、ICチップ31は
エポキシ接着材32によりIC取付基板1Bに接着固定
していた。そして、ICチップ上のAl電極と、前記パ
ッド部30間をAu線33を用い例えばサーモソニック
法でワイヤーボンデングされていた。さらにICチップ
の上からシリコン系あるいはエボキシ系のプラスチック
により保護膜34をコートされていた。
The wiring conductor 22 was provided extending to the chip mounting board 21B outside the envelope, and a bonding pad portion 30 made of Ag paste containing no glass powder was provided at the tip thereof. Further, the IC chip 31 was adhesively fixed to the IC mounting board 1B using an epoxy adhesive 32. Then, wire bonding was performed between the Al electrode on the IC chip and the pad portion 30 using an Au wire 33, for example, by a thermosonic method. Furthermore, a protective film 34 was coated over the IC chip with silicone or epoxy plastic.

[発明が解決しようとする課題] しかしながら、従来のワイヤーボンデングによるC−0
.0構造の蛍光表示管は次のような問題点を有していた
[Problem to be solved by the invention] However, C-0 by conventional wire bonding
.. The fluorescent display tube with zero structure had the following problems.

(1)ワイヤーボンデング方式のICチップの結合方法
は、ボンデングマシンにより基板上のICとボンデング
バッド間を結合させるためにICチップの周囲にワイヤ
ーの配設スペースとポンデングマシンのキャピラリーが
入るだけの場所的な余裕が必要となり、第6図の平面図
に示すように、長方形の外囲器の長い辺の方向に基板を
延長して、広い延長部分を形成し、この延長部分にIC
チップを取り付けていた。したがって、蛍光表示管全体
は大きくなり、実装密度を高くするのに問題を有してい
た。
(1) The wire bonding method for bonding IC chips uses a wire placement space around the IC chip and a capillary of the bonding machine to bond between the IC on the board and the bonding pad using a bonding machine. As shown in the plan view of Figure 6, the board was extended in the direction of the long side of the rectangular envelope to form a wide extension, and in this extension IC
The chip was installed. Therefore, the entire fluorescent display tube becomes large, which poses a problem in increasing the packaging density.

(2)蛍光表示管は、点灯すると陽極は発熱し、ガラス
基板は加熱される。この熱は、ICチップを固定する有
機系接着材や、保護している樹脂膜にも伝わる。前記接
着材や保護膜はいずれも合或樹脂であるので、長時間経
過すると、接着強度が弱くなり、ワイヤーのボンデング
が剥離するものもあり信頼性に欠けるという問題点を有
していた。
(2) When a fluorescent display tube is turned on, the anode generates heat and the glass substrate is heated. This heat is also transmitted to the organic adhesive that fixes the IC chip and the resin film that protects it. Since both the adhesive material and the protective film are made of composite resin, the adhesive strength becomes weak over a long period of time, and the wire bonding may peel off, resulting in a lack of reliability.

(3)蛍光表示管におけるAl配線は一般には50pm
幅であり特に配線密度が高いC−0−Gタイプの場合は
30pmllligである。又Agペーストによるボン
デングバッドは、スクリーン印刷で被着させる厚膜なの
で200〜300pmのliを有していた。したがって
、30pmのAl配線上に200〜300pmにAgの
ボンデングパッド部が積層されることになるが、Al配
線の材質であるA1は非常に酸化し易い金属であるので
、A1配線を形戒してからAgのボンデングバッド部を
形成するまでにAlの表面が酸化してA1とAgの間に
良好な電気的導通が得られないという問題点も有してい
た。
(3) Al wiring in fluorescent display tubes is generally 50 pm
In the case of the C-0-G type, which has a particularly high wiring density, it is 30 pmllig. Furthermore, the bonding pad made of Ag paste had an li of 200 to 300 pm since it was a thick film applied by screen printing. Therefore, an Ag bonding pad part will be laminated at 200 to 300 pm on top of the 30 pm Al wiring, but since A1, which is the material of the Al wiring, is a metal that oxidizes very easily, the A1 wiring is There is also a problem in that the surface of Al is oxidized between the time when the Ag bonding pad portion is formed and good electrical continuity cannot be obtained between A1 and Ag.

(4)さらに、Al薄膜配線とAg厚膜がオーバーラッ
プする部分は、蛍光表示管の製造工程上で400〜60
0°Cの温度が加えられると、A1がAgの中に拡散し
てしまい、Alの接続部が断線する現象が発生するとい
う問題点も有していた。
(4) Furthermore, the area where the Al thin film wiring and the Ag thick film overlap is
There was also a problem in that when a temperature of 0°C was applied, A1 diffused into Ag, causing a phenomenon in which the Al connection part was disconnected.

本発明は、前述の問題点を解決したC−0−G構造の蛍
光表示管を提供することを目的とするものである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a fluorescent display tube having a C-0-G structure that solves the above-mentioned problems.

[課題を解決するための手段] 前述の目的を達或するために本発明の構或は、蛍光表示
管のガラス基板を外囲器より延長し、該延長部分にIC
チップによる蛍光表示管駆動部を配設した蛍光表示管に
おいて、前記蛍光表示管駆動部は、前記ガラス基板の延
長部分に延設された導電性薄膜による配線導体と、該配
線導体に接続して配設された導電性ペーストによる厚膜
導体と、該厚膜導体上に金属ボールバンプにより固定さ
れたICチップを有することを特徴とするものである。
[Means for Solving the Problem] In order to achieve the above-mentioned object, the structure of the present invention is such that the glass substrate of the fluorescent display tube is extended from the envelope, and an IC is installed in the extended portion.
In a fluorescent display tube equipped with a fluorescent display tube drive section using a chip, the fluorescent display tube drive section includes a wiring conductor made of a conductive thin film extending to an extended portion of the glass substrate, and a wiring conductor connected to the wiring conductor. It is characterized by having a thick film conductor made of conductive paste disposed thereon, and an IC chip fixed on the thick film conductor by metal ball bumps.

又、前記配線導体がAl薄膜により形或されていること
を特徴とする。
The present invention is also characterized in that the wiring conductor is formed of an Al thin film.

又、前記厚膜導体がAgのみか、又は、Agを主成分と
してPt又はPdを混合した導電物質とガラスソルダー
を含有していることを特徴とする。
Further, the thick film conductor is characterized in that it contains only Ag or a conductive material containing Ag as a main component mixed with Pt or Pd and a glass solder.

又、厚膜導体が前記配線導体の先端部上面に積層された
ドット状であることを特徴とする。
Further, it is characterized in that the thick film conductor is laminated on the top surface of the tip of the wiring conductor in a dot shape.

又、厚膜導体が前記薄膜配線導体の先端に接続する厚膜
配線部を有し、該厚膜配線部の先端部にICチップに配
設された金属ボール・バンプを固着したことを特徴とす
る。
Further, the thick film conductor has a thick film wiring portion connected to the tip of the thin film wiring conductor, and a metal ball/bump disposed on the IC chip is fixed to the tip of the thick film wiring portion. do.

又、薄膜配線導体の先端に薄膜配線導体より幅の広い薄
膜接続部を配股し、該薄膜接続部に接続する厚膜導体が
前記薄膜接続部より小さい幅の厚膜接続部を有している
ことを特徴とする。
Further, a thin film connecting portion wider than the thin film wiring conductor is arranged at the tip of the thin film wiring conductor, and a thick film conductor connected to the thin film connecting portion has a thick film connecting portion having a width smaller than the thin film connecting portion. It is characterized by

さらに、本発明は、蛍光表示管のガラス基板を外囲器よ
り延長し、該延長部分にICチップによる蛍光表示管駆
動部を配設した蛍光表示管において、前記蛍光表示管駆
動部は、前記ガラス基板の延長部分に外囲器内より延設
されたAl薄膜による薄膜配線導体と、該薄膜配線導体
に接続するように配設された導電性ペーストによる厚膜
配線導体と、該厚膜配線導体の先端部以外の厚膜導体及
び前記薄膜配線導体上に積層配設された絶縁層と、前記
厚膜配線導体上にはんだボールバンプが固定されたIC
チップを有することを特徴とする。
Furthermore, the present invention provides a fluorescent display tube in which a glass substrate of the fluorescent display tube is extended from an envelope, and a fluorescent display tube driving section using an IC chip is disposed in the extended portion, wherein the fluorescent display tube driving section is A thin film wiring conductor made of an Al thin film extending from the inside of the envelope to an extended portion of the glass substrate, a thick film wiring conductor made of a conductive paste arranged to be connected to the thin film wiring conductor, and the thick film wiring. An IC in which an insulating layer is laminated on a thick film conductor other than the tip of the conductor and the thin film wiring conductor, and a solder ball bump is fixed on the thick film wiring conductor.
It is characterized by having a chip.

[作用] 本発明は、薄膜配線導体の先端に厚膜導体を設け、その
表面にICの金属ボールバンブを有するICチップを固
着させた構或、すなわち、フリップチップ方式でICチ
ップを基板上にはんだ付等の融着で固着させたので、従
来のワイヤーボンデング方式に比較して、接続強度が優
れ、信頼性が高く、点灯させる環境温度が高く、振動の
はげしい車載用でも正常に作用する。
[Function] The present invention has a structure in which a thick film conductor is provided at the tip of a thin film wiring conductor, and an IC chip having an IC metal ball bump is fixed to the surface of the thick film conductor. Since it is fixed by fusion such as soldering, it has superior connection strength and reliability compared to conventional wire bonding methods, and works normally even in automotive applications where the lighting environment is high and has strong vibrations. .

又、Al薄膜配線導体の先端に幅の広い薄膜接続部を配
設し、それに対応してAg厚膜導体の基部にも前記薄膜
接続部よりやや狭い厚膜接続部を配設したので、加熱工
程においてAlが多少Ag中に拡散しても、残っている
A1が多いので断線はしない。
In addition, a wide thin film connection part was provided at the tip of the Al thin film wiring conductor, and a thick film connection part slightly narrower than the thin film connection part was also provided at the base of the Ag thick film conductor correspondingly, so that heating Even if some Al diffuses into Ag during the process, there will be no disconnection because there is a large amount of Al remaining.

[実施例] 以下図面に従って本発明の実施例を説明する。[Example] Embodiments of the present invention will be described below with reference to the drawings.

第1図は、本発明の蛍光表示管の第1実施例の平面図で
あり、第2図は、同実施例の断面図であり、第3図は、
同実施例の要部の拡大断面図である。第4図は、本発明
の蛍光表示管の第2実施例の要部の断面図であり、第5
図は、第2実施例のA1薄膜配線導体と厚膜配線導体と
の接続部を示す平面図、第6図は、従来例の一部を切欠
いた平面図であり、第7図は、従来例の断面図である。
FIG. 1 is a plan view of a first embodiment of the fluorescent display tube of the present invention, FIG. 2 is a sectional view of the same embodiment, and FIG. 3 is a
FIG. 3 is an enlarged sectional view of a main part of the same embodiment. FIG. 4 is a sectional view of the main part of the second embodiment of the fluorescent display tube of the present invention, and FIG.
The figure is a plan view showing the connecting part between the A1 thin film wiring conductor and the thick film wiring conductor of the second embodiment, FIG. 6 is a partially cutaway plan view of the conventional example, and FIG. 7 is a plan view of the conventional example. FIG. 3 is an example cross-sectional view.

[実施例1] 11図〜第3図において、1はガラス基板であり、この
ガラス基板1上には導電性薄膜をスパッタリング法で全
面に被着し、フォトリソグラフィ法で配線導体2a及び
陽極導体2bのパターンを形戒する。本実施例では導電
性薄膜がAl薄膜の場合を説明する。前記陽極導体2b
を除いたガラス基板上に絶縁層3を積層形成させる。そ
して、陽極導体2b上には蛍光体層4を被着形戒する。
[Example 1] In FIGS. 11 to 3, 1 is a glass substrate. A conductive thin film was deposited on the entire surface of the glass substrate 1 by sputtering, and a wiring conductor 2a and an anode conductor were formed by photolithography. Practice pattern 2b. In this embodiment, a case where the conductive thin film is an Al thin film will be explained. The anode conductor 2b
An insulating layer 3 is laminated and formed on the glass substrate except for. Then, a phosphor layer 4 is deposited on the anode conductor 2b.

この蛍光体層4の上方にはメッシュ状の制御電極5及び
フィラメント状陰極6が配設されている。そして、これ
らの電極を覆うように側面板7と前面板8からなる箱形
の容器部9が前記ガラス基板1上に封着して蛍光表示管
を構或している。
A mesh-like control electrode 5 and a filament-like cathode 6 are arranged above the phosphor layer 4 . A box-shaped container portion 9 consisting of a side plate 7 and a front plate 8 is sealed onto the glass substrate 1 so as to cover these electrodes, thereby constructing a fluorescent display tube.

前記ガラス基板1は、前記容器部9の短辺側に延長して
設けられ、この延長部分に前述の蛍光表示管から配線導
体2aが延長されて後述するICチップの金属ボール・
バンブに対応するようにパターン形成されている。この
配線導体2Aの幅は100pm以上ありその先端にはド
ット状の厚膜導体10を形成させる。厚膜導体10はA
gを主成分としPdを少量混合した導電性粉体に低融点
ガラスソルダーを混合し、ビークルによりペースト化さ
せた、導電性ペーストをスクリーン印刷法により配線導
体2aの先端に形成させる。前記導電性粉体は前述のA
g−Pdの他にAgのみか又はAg−Ptでも可能であ
る。又、前記配線導体2a上には保護のための絶縁層3
がスクリーン印刷法により形或されている。そして、前
記絶縁層3や厚膜導体10等の厚膜は、スクリーン印刷
法で被着させた後酸化雰囲気中の焼或炉で焼或すること
によりビークルを蒸発させて基板上に固着させる。
The glass substrate 1 is provided extending to the short side of the container portion 9, and a wiring conductor 2a is extended from the above-mentioned fluorescent display tube to this extended portion, and a metal ball of an IC chip, which will be described later, is connected to the glass substrate 1.
It is patterned to correspond to the bumps. The width of this wiring conductor 2A is 100 pm or more, and a dot-shaped thick film conductor 10 is formed at the tip thereof. The thick film conductor 10 is A
A conductive powder containing g as a main component and a small amount of Pd mixed with a low melting point glass solder is made into a paste using a vehicle, and a conductive paste is formed on the tip of the wiring conductor 2a by a screen printing method. The conductive powder is the above-mentioned A
In addition to g-Pd, only Ag or Ag-Pt is also possible. Further, an insulating layer 3 for protection is provided on the wiring conductor 2a.
is formed by screen printing method. The thick films such as the insulating layer 3 and the thick film conductor 10 are deposited by screen printing and then burned in a furnace in an oxidizing atmosphere to evaporate the vehicle and fix them onto the substrate.

次に金属ボール・バンブ11の配設されたICチップ1
2を前記厚膜導体10上に加熱固着させる。金属ポール
・バンブ11の材質は、Au, Ag, Ni, Cu
,はんだ等各種の種類があるが、本実施例では、ガラス
基板であるのであまり高温に加熱できないためにはんだ
金属を使ったはんだボール・バンプ11の配設されたI
Cチップを採用した。したがって180〜280°Cに
加熱することによりICチップを確実に厚膜導体10に
融着することができる。
Next, the IC chip 1 on which the metal ball bump 11 is arranged
2 is heat-fixed onto the thick film conductor 10. The material of the metal pole bump 11 is Au, Ag, Ni, Cu.
, solder, etc., but in this example, since the substrate is a glass substrate, it cannot be heated to a very high temperature, so solder balls and bumps 11 using solder metal are provided.
Adopted C chip. Therefore, the IC chip can be reliably fused to the thick film conductor 10 by heating to 180 to 280°C.

さらに、保護膜13としての合或樹脂をICチップ周辺
にモールドして蛍光表示管が完或する。
Further, a composite resin serving as a protective film 13 is molded around the IC chip to complete the fluorescent display tube.

[実施例21 実施例1は、延長部の薄膜配線導体がある程度幅がとれ
る蛍光表示管に適用されるのであるが、実施例2は、薄
膜配線導体が50pm以下と絽い場合の蛍光表示管であ
る。外囲器内の蛍光表示管の溝戒は実施例1と同じであ
るので説明を省略し、ICチップの取付部のみを説明す
る。外囲器内から延長したA1薄膜配線導体2aは、線
幅が50pm以下であり、配線実装密度を高くできるよ
うになっている。
[Example 21 Example 1 is applied to a fluorescent display tube in which the thin film wiring conductor in the extension part has a certain width, but Example 2 is applied to a fluorescent display tube in which the thin film wiring conductor has a thickness of 50 pm or less. It is. Since the grooves of the fluorescent display tube in the envelope are the same as in the first embodiment, their explanation will be omitted, and only the IC chip mounting portion will be explained. The A1 thin film wiring conductor 2a extending from the inside of the envelope has a line width of 50 pm or less, so that the wiring packaging density can be increased.

そして、Al薄膜配線導体2aの先端には、第5図に示
すように約150〜200pmの幅をした長方形の薄膜
接続部14がAl薄膜で、前記Al薄膜配線導体に連続
して配設されている。このAl薄膜接続部14の上面に
、Al薄膜接続部14より幅が狭く長さも短い厚膜接続
部15を薄膜配線2aの接続部から一定間隔ズラして積
層配設する。この厚膜接続部15に連続して厚膜配線導
体16が配設され、その先端にICチップ12のはんだ
ボール・バンプ11が固着される。厚膜接続部15及び
厚膜配線導体16は、実施例1と同じ導電ペーストをス
クリーン印刷法により被着させた後400〜500°C
で焼成することにより表面に導電層を形成させる。
At the tip of the Al thin film wiring conductor 2a, as shown in FIG. 5, a rectangular thin film connection part 14 having a width of approximately 150 to 200 pm is provided as an Al thin film and continuous to the Al thin film wiring conductor. ing. On the upper surface of this Al thin film connection part 14, a thick film connection part 15 which is narrower in width and shorter in length than the Al thin film connection part 14 is stacked and arranged at a predetermined distance from the connection part of the thin film wiring 2a. A thick film wiring conductor 16 is disposed continuously to the thick film connection portion 15, and a solder ball/bump 11 of the IC chip 12 is fixed to the tip of the thick film wiring conductor 16. The thick film connection portion 15 and the thick film wiring conductor 16 were coated with the same conductive paste as in Example 1 by screen printing, and then heated at 400 to 500°C.
A conductive layer is formed on the surface by firing.

又、薄膜配線導体、薄膜接続部、厚膜接続部及び厚膜配
線導体上に積層配設された絶縁層3は二層から構或して
、保護をより強化している。又、後述するオーバーコー
ト用の樹脂がICチップの下側に流れ込みやすいように
二層目の絶縁層は一層目より外側にしておく。
Further, the insulating layer 3 laminated on the thin film wiring conductor, the thin film connecting portion, the thick film connecting portion, and the thick film wiring conductor is composed of two layers to further strengthen protection. Further, the second insulating layer is placed outside of the first layer so that overcoat resin, which will be described later, can easily flow under the IC chip.

本実施例ではA1薄膜とAg厚膜の接続部が配線導体2
aより幅の広い面と面で接触している構或であるので、
蛍光表示管の製造工程中で加熱されても、多少はAg中
にAlが拡散するであろうが、Alの方が面積が広いの
で断線することはなく、確実に導通できることになる。
In this example, the connection part between the A1 thin film and the Ag thick film is the wiring conductor 2.
Since it is in contact with a surface wider than a,
Even when heated during the manufacturing process of a fluorescent display tube, some amount of Al will diffuse into Ag, but since Al has a larger area, there will be no disconnection, and conduction can be ensured.

又Ag厚膜は、スクリーン印刷法で被着させるので精度
があまり高くないが、Al薄膜接続部よりAg厚膜接続
部の方が面積が小さいので多少の印刷ズレがあっても両
者は接触することになる。
Furthermore, since the Ag thick film is applied by screen printing, the accuracy is not very high, but since the area of the Ag thick film connection is smaller than that of the Al thin film connection, even if there is some printing misalignment, the two will contact each other. It turns out.

さらに、又、Al薄膜とAg厚膜の接続部を蛍光表示管
の外囲器中に配設することにより、導電I生の信頼性を
上げることが可能である。
Furthermore, by arranging the connecting portion between the Al thin film and the Ag thick film in the envelope of the fluorescent display tube, it is possible to improve the reliability of the conductive I.

次にICチップのはんだボール・バンブを前記厚膜配線
導体上に載置した状態で加熱してはんだを溶融して、厚
膜配線導体の表面にあるAgに融着する。
Next, the solder balls and bumps of the IC chip placed on the thick film wiring conductor are heated to melt the solder and are fused to the Ag on the surface of the thick film wiring conductor.

最後に合或樹脂を保護膜13としてICチップ周囲にオ
ーバーコートする。
Finally, a coating resin is overcoated around the IC chip as a protective film 13.

[効果J 本発明は、以上説明したようにC.O.G構造の蛍光表
示管において、薄膜配線導体の先に厚膜導体を設け、こ
の厚膜導体にICのはんたボール・バンブを固着させた
構或であるので次のような効果を有する。
[Effect J] As explained above, the present invention provides C. O. In the fluorescent display tube of the G structure, a thick film conductor is provided at the end of the thin film wiring conductor, and the solder balls and bumps of the IC are fixed to the thick film conductor, so that the following effects are obtained.

(1)従来のワイヤーボンデング方式よりICチップの
実装面積が小さい為、チップ取付部を従来より小さくで
き、蛍光表示管のパッケージサイズを小さくすることが
可能となる効果を有する。
(1) Since the mounting area of the IC chip is smaller than that of the conventional wire bonding method, the chip mounting part can be made smaller than the conventional method, which has the effect of making it possible to reduce the package size of the fluorescent display tube.

(2)Al薄膜配線の端部に薄膜接続部を設けて、Ag
厚膜導体と接続させたのでAlの拡散による断線がなく
なりAl薄膜配線とAg厚膜導体との間に良好な電気的
導通が得られた。
(2) A thin film connection section is provided at the end of the Al thin film wiring, and Ag
Since it was connected to a thick film conductor, there was no disconnection due to Al diffusion, and good electrical continuity was obtained between the Al thin film wiring and the Ag thick film conductor.

(3)ICチップをはんだポール・バンプでAg厚膜導
体と融着させるので、熱や振動にも強い接続機構であり
、電気的に信頼性に優れた蛍光表示管を提供できる効果
を有する。
(3) Since the IC chip is fused to the Ag thick film conductor using solder poles and bumps, the connection mechanism is resistant to heat and vibration, and has the effect of providing a fluorescent display tube with excellent electrical reliability.

(4)Al薄膜とAg厚膜の接触部の双方に幅広の接続
部を設けたので、Ag厚膜ペーストの印刷位置ズレによ
る導通不良がなくなるという効果を有する。
(4) Since wide connecting portions are provided at both the contact portions between the Al thin film and the Ag thick film, there is an effect that poor conductivity due to misalignment of the printing position of the Ag thick film paste is eliminated.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の蛍光表示管の平面図、第2図は、本
発明の第1実施例の断面図、第3図は、本発明の第1実
施例の要部の拡大断面図、第4図は、本発明の第2実施
例の断面図、第5図は、本発明の第2実施例の要部の平
面図、第6図は、従来のCOG構造の蛍光表示管の一部
を切欠いた平面図、第7図は、第6図のA−A線切断断
面図である。 1・・・・・ガラス基板 3・・・・・絶縁層 10・・・厚膜導体 12・・・ICチップ 15・.・厚膜接続部 2a・・・・・薄膜配線導体 4・・・・・・・蛍光体層 1工・・・・・金属ボール・バンブ (はんだボール・バンプ) 14・・・・薄膜接続部 16・・・・厚膜配線導体
FIG. 1 is a plan view of a fluorescent display tube of the present invention, FIG. 2 is a cross-sectional view of the first embodiment of the present invention, and FIG. 3 is an enlarged cross-sectional view of essential parts of the first embodiment of the present invention. , FIG. 4 is a sectional view of the second embodiment of the present invention, FIG. 5 is a plan view of the main part of the second embodiment of the present invention, and FIG. 6 is a diagram of a conventional COG structure fluorescent display tube. The partially cutaway plan view, FIG. 7, is a cross-sectional view taken along the line A--A in FIG. 6. 1...Glass substrate 3...Insulating layer 10...Thick film conductor 12...IC chip 15...・Thick film connection part 2a...Thin film wiring conductor 4...Phosphor layer 1 work...Metal ball/bump (solder ball/bump) 14...Thin film connection part 16... Thick film wiring conductor

Claims (9)

【特許請求の範囲】[Claims] (1)蛍光表示管のガラス基板を容器部より延長し、該
延長部分にICチップによる蛍光表示管駆動部を配設し
た蛍光表示管において、前記蛍光表示管駆動部は、前記
ガラス基板の延長部分に延設された導電性薄膜による配
線導体と、該配線導体に接続して配設された導電性ペー
ストによる厚膜導体と、該厚膜導体上に金属ボール・バ
ンプにより固定されたICチップを有することを特徴と
する蛍光表示管。
(1) In a fluorescent display tube in which a glass substrate of the fluorescent display tube is extended from a container part and a fluorescent display tube driving section using an IC chip is disposed in the extended portion, the fluorescent display tube driving section is an extension of the glass substrate. A wiring conductor made of a conductive thin film extending over a portion, a thick film conductor made of a conductive paste connected to the wiring conductor, and an IC chip fixed on the thick film conductor with metal balls and bumps. A fluorescent display tube comprising:
(2)前記配線導体がAl薄膜により形成されている請
求項1記載の蛍光表示管。
(2) The fluorescent display tube according to claim 1, wherein the wiring conductor is formed of an Al thin film.
(3)前記厚膜導体がAgのみか又はAgを主成分とし
てPt又はPdを混合した導電物質とガラスソルダーを
含有している請求項1記載の蛍光表示管。
(3) The fluorescent display tube according to claim 1, wherein the thick film conductor contains only Ag or a conductive material containing Ag as a main component mixed with Pt or Pd and a glass solder.
(4)前記厚膜導体が前記配線導体の先端部上面に積層
されたドット状である請求項1記載の蛍光表示管。
(4) The fluorescent display tube according to claim 1, wherein the thick film conductor has a dot shape laminated on the upper surface of the tip end of the wiring conductor.
(5)前記厚膜導体が前記薄膜配線導体の先端に接続す
る厚膜配線部を有し、該厚膜配線部の先端部にICチッ
プに配設された金属ボール・バンプを固着した請求項1
記載の蛍光表示管。
(5) The thick film conductor has a thick film wiring portion connected to the tip of the thin film wiring conductor, and a metal ball/bump disposed on an IC chip is fixed to the tip of the thick film wiring portion. 1
The fluorescent display tube described.
(6)前記薄膜配線導体の先端に薄膜配線導体より幅の
広い薄膜接続部を配設し、該薄膜接続部に接続する厚膜
導体が前記薄膜接続部より小さい幅の厚膜接続部を有し
ている請求項1、2、3、又は5記載の蛍光表示管。
(6) A thin film connecting portion wider than the thin film wiring conductor is provided at the tip of the thin film wiring conductor, and a thick film conductor connected to the thin film connecting portion has a thick film connecting portion having a width smaller than the thin film connecting portion. 6. The fluorescent display tube according to claim 1, 2, 3, or 5.
(7)蛍光表示管のガラス基板を外囲器より延長し、該
延長部分にICチップによる蛍光表示管駆動部を配設し
た蛍光表示管において、前記蛍光表示管駆動部は、前記
ガラス基板の延長部分に外囲器内より延設されたAl薄
膜による薄膜配線導体と、該薄膜配線導体に接続するよ
うに配設された導電性ペーストによる厚膜配線導体と、
該厚膜配線導体の先端部以外の厚膜配線導体及び前記薄
膜配線導体上に積層配設された絶縁層と、前記厚膜配線
導体上にはんだボール・バンプが固定されたICチップ
を有することを特徴とする蛍光表示管。
(7) In a fluorescent display tube in which a glass substrate of the fluorescent display tube is extended from an envelope, and a fluorescent display tube drive section using an IC chip is disposed in the extended portion, the fluorescent display tube drive section is connected to the glass substrate. A thin film wiring conductor made of an Al thin film extending from the inside of the envelope to the extension part, and a thick film wiring conductor made of a conductive paste arranged to be connected to the thin film wiring conductor.
It has an insulating layer laminated on the thick film wiring conductor other than the tip portion of the thick film wiring conductor and the thin film wiring conductor, and an IC chip having solder balls and bumps fixed on the thick film wiring conductor. A fluorescent display tube featuring
(8)前記厚膜配線導体がAgのみか又はAgを主成分
としてPt又はPdを混合した導電物質と低融点ガラス
ソルダーを含有している請求項7記載の蛍光表示管。
(8) The fluorescent display tube according to claim 7, wherein the thick film wiring conductor contains only Ag or a conductive material containing Ag as a main component mixed with Pt or Pd and a low melting point glass solder.
(9)Al薄膜配線導体の先端を配線より幅広に形成し
た薄膜接続部と、厚膜配線導体の基部に厚膜配線より幅
広で、かつ、前記薄膜接続部より幅が狭く形成した厚膜
接続部とを積層させた請求項7又は8記載の蛍光表示管
(9) A thin film connection portion in which the tip of the Al thin film wiring conductor is formed wider than the wiring, and a thick film connection formed in the base of the thick film wiring conductor to be wider than the thick film wiring and narrower than the thin film connection portion. 9. The fluorescent display tube according to claim 7 or 8, wherein the fluorescent display tube has a laminated structure.
JP1156971A 1989-06-20 1989-06-20 Fluorescent character display tube Pending JPH0322330A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1156971A JPH0322330A (en) 1989-06-20 1989-06-20 Fluorescent character display tube
KR1019900009020A KR940007874B1 (en) 1989-06-20 1990-06-19 Fluorescent character display tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1156971A JPH0322330A (en) 1989-06-20 1989-06-20 Fluorescent character display tube

Publications (1)

Publication Number Publication Date
JPH0322330A true JPH0322330A (en) 1991-01-30

Family

ID=15639331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1156971A Pending JPH0322330A (en) 1989-06-20 1989-06-20 Fluorescent character display tube

Country Status (2)

Country Link
JP (1) JPH0322330A (en)
KR (1) KR940007874B1 (en)

Also Published As

Publication number Publication date
KR940007874B1 (en) 1994-08-26
KR910001862A (en) 1991-01-31

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