JPH03220515A - Focus position detection system - Google Patents

Focus position detection system

Info

Publication number
JPH03220515A
JPH03220515A JP2016907A JP1690790A JPH03220515A JP H03220515 A JPH03220515 A JP H03220515A JP 2016907 A JP2016907 A JP 2016907A JP 1690790 A JP1690790 A JP 1690790A JP H03220515 A JPH03220515 A JP H03220515A
Authority
JP
Japan
Prior art keywords
line sensor
image
focus position
glass
wedgelike
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016907A
Other languages
Japanese (ja)
Other versions
JP2770521B2 (en
Inventor
Yoshito Narimatsu
成松 義人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2016907A priority Critical patent/JP2770521B2/en
Publication of JPH03220515A publication Critical patent/JPH03220515A/en
Application granted granted Critical
Publication of JP2770521B2 publication Critical patent/JP2770521B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To facilitate focus position confirmation by providing wedgelike glass fitted with a driving part which varies the focus position of incident light between a prism and a line sensor. CONSTITUTION:Light which is split by the hatched part of the prism 2 is transmitted through the wedgelike glass 5 for focus position confirmation to form an image through the line sensor 6 for focus position detection. The formed image of this line sensor 6 corresponds to the projection drawing 13 of the sensor for detection on a picked-up body and is parallel to the moving direction 10 of a radiometer as the image pickup body, and the image is so picked up so that the same image in each image pickup cycle moves on the line sensor 6 as the radiometer moves. In such a case, the wedgelike glass driving part moves one of two wedgelike glass plates 5 gradually to vary the thickness of the wedgelike glass 5 in the optical path. Consequently, the image formation position on the line sensor 6 is set equally to the image formation position of an image pickup line sensor 4. Consequently, the focus position can accurately be detected in a short time.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はラインセンサを有する撮像装置に使用される焦
点位置検出方式に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a focal position detection method used in an imaging device having a line sensor.

〔従来の技術〕[Conventional technology]

従来、この種の撮像装置の焦点位置検出方式に関しては
、温度等の環境に対し、安定した焦点位置を保つ方式や
あらかじめ取得した環境に対する焦点位置の移動量のデ
ータにより焦点調整を行う装置がある。また、リアルタ
イムで画像を見ながらマニュアルで調整したり、異なる
ターゲットに対する画像データの統計処理による焦点位
置の確認を行う方式等もあった。しかし、従来例では焦
点位置確認用と画像撮像用のセンサは共用する構成であ
った。
Conventionally, regarding the focus position detection method of this type of imaging device, there are methods that maintain a stable focus position in response to environments such as temperature, and devices that adjust the focus based on previously acquired data on the amount of movement of the focus position relative to the environment. . There have also been methods in which manual adjustments are made while viewing images in real time, and methods in which the focal position is confirmed through statistical processing of image data for different targets. However, in the conventional example, the sensor for confirming the focus position and for capturing the image are commonly used.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来の焦点位置検出方式では、焦点位置検出器
周辺の環境条件変化に対する補正およびマニアル調整の
みなので、次のような欠点がある。
The above-described conventional focus position detection method only requires correction and manual adjustment for changes in environmental conditions around the focus position detector, and therefore has the following drawbacks.

(1〉環境条件が厳しい時あるいは環境に対し、敏感に
焦点位置が変動する放射計には使用できない。
(1> Cannot be used in harsh environmental conditions or in radiometers whose focal position changes sensitively depending on the environment.

(2)マニュアルおよび異なるターゲットを利用する場
合にセンサを共用する方式なので、焦点位置確認に長い
時間が必要であり、がっ、ずれが生じている場合に、前
後どちらにずれているがが不明である。
(2) Since the sensor is shared when using manual and different targets, it takes a long time to confirm the focus position, and when a shift occurs, it is unclear whether it is shifted forward or backward. It is.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の焦点位置検出方式は連続して移動する対象物の
移動方向と直角方向の入射光を撮像するラインセンサを
有する撮像装置の焦点位置検出方式において、撮像する
入射光がら一部の光を分割するプリズムと、前記対象物
の移動方向と平行な方向の入射光を撮像するラインセン
サと、前記プリズムと前記ラインセンサとの間に入射光
の焦点位置を変える駆動部付きのくさびガラスとを有す
る。
The focus position detection method of the present invention is a focus position detection method for an imaging device that has a line sensor that images incident light in a direction perpendicular to the moving direction of a continuously moving object. A dividing prism, a line sensor that captures an image of incident light in a direction parallel to the moving direction of the object, and a wedge glass with a drive unit that changes the focal position of the incident light between the prism and the line sensor. have

〔実施例〕〔Example〕

次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第■図および第2図は本発明の一実施例の構成図、およ
び動作例を示す斜視図、第3図、第4図は本実施例を説
明する特性図である。
FIG. 3 and FIG. 2 are block diagrams of one embodiment of the present invention and perspective views showing an example of operation, and FIGS. 3 and 4 are characteristic diagrams illustrating the present embodiment.

第1図および第2図において、通常の撮像時には撮像物
からの光が集光計1で集光されプリズム2、平板ガラス
3を透過し撮像用ラインセンサ4上に焦点をむすび結像
する。ここで、撮像物である放射計が進行方向10に移
動すると、撮像用ラインセンサ4で光電変換された信号
が切換器8の点線方向に接続され、信号処理回路9に入
力されて処理されることにより、帯状の2次元像が得ら
れる。なおこの2次元像は第2図の撮像用センサの投影
図12に対応し進行方10に対して直角の2次元像であ
る。一方、第2図に示すプリズム2の斜線部で分割され
た光が焦点位置確認用のくさびガラス5を透過し、焦点
位置検出用のラインセンサ6により結像される。このラ
インセンサ6の結像画像は撮像物上の検出用センサの投
影図13に対応し、撮像物である放射計の移動方向10
に平行であり、この放射計の移動に伴い、各撮像周期ご
とに同一画像がラインセンサ6上を移動する様に撮像さ
れる。焦点位置の確認時には切換器8をラインセンサ6
 屯+1 (図の実線)に接続して信号処理圏11@ 
9に入力する。このような条件のもとでくさびガラス駆
動部7により徐々に2枚のうちの1枚のくさびガラス5
を動かし、光路中のくさびガラス5の厚さを変化させる
。ここでラインセンサ6の結像位置は撮像用ラインセン
サ4の結像位置と同じ位置となるように設定されている
。今、くさびガラス6を信号処理回路って得られた画像
の一画素ずつ移動させて行く場合に、焦点位置がずれて
いると、ラインセンサ6の出力は第3図に示すように画
素番号の画素ごとに階段状に変化する。また、焦点が合
った状態では、ラインセンサ6の出力は第4図に示すよ
うに、撮像物からの光か一定のうちは変化せず撮像物の
エツジエ1において放射計からの入射光が変化した所で
急しゅんに変化するが、そのあとの画素はまた同じで一
定の出力となる。このような特性データをもとに集光計
の焦点位置の調整を行うことにより正確な焦点調整が可
能となる。
1 and 2, during normal imaging, light from an object to be imaged is collected by a concentrator 1, transmitted through a prism 2 and a flat glass 3, and focused on an imaging line sensor 4 to form an image. Here, when the radiometer, which is the imaging object, moves in the traveling direction 10, the signal photoelectrically converted by the imaging line sensor 4 is connected to the dotted line direction of the switch 8, and is input to the signal processing circuit 9 and processed. As a result, a band-shaped two-dimensional image is obtained. Note that this two-dimensional image corresponds to the projection view 12 of the imaging sensor in FIG. 2, and is a two-dimensional image perpendicular to the direction of travel 10. On the other hand, the light divided by the hatched portion of the prism 2 shown in FIG. 2 passes through the wedge glass 5 for focal position confirmation, and is imaged by the line sensor 6 for focal position detection. The image formed by the line sensor 6 corresponds to the projection diagram 13 of the detection sensor on the object to be imaged, and the moving direction 10 of the radiometer, which is the object to be imaged.
As the radiometer moves, the same image is captured moving on the line sensor 6 at each imaging cycle. When checking the focus position, switch 8 is switched to line sensor 6.
Connect to Tun+1 (solid line in the figure) and signal processing area 11@
Enter 9. Under these conditions, the wedge glass drive unit 7 gradually moves one of the two wedge glasses 5.
to change the thickness of the wedge glass 5 in the optical path. Here, the imaging position of the line sensor 6 is set to be the same as the imaging position of the imaging line sensor 4. Now, when the wedge glass 6 is moved pixel by pixel of the image obtained by the signal processing circuit, if the focal position is shifted, the output of the line sensor 6 will change to the pixel number as shown in Figure 3. It changes stepwise for each pixel. In addition, in the focused state, the output of the line sensor 6 does not change as long as the light from the imaged object changes as shown in Figure 4, but the incident light from the radiometer changes at the edge 1 of the imaged object At that point, the output changes suddenly, but after that, the output of the pixels remains the same and constant. Accurate focus adjustment becomes possible by adjusting the focus position of the condenser based on such characteristic data.

なお、このくさびガラス駆動部7と集光計1の焦点位置
調整とを連動して行うことにより簡単、かつ、単時間の
焦点調整も可能である。
By linking the wedge glass drive unit 7 and the focus position adjustment of the condenser 1, simple and single-time focus adjustment is also possible.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は撮像系とは別に、プリズム
で分割した光を受ける像の移動方向に平行なうインセン
サと、くさびガラスの移動により焦点位置を変化させる
機能を加えることにより、連続的に焦点位置を変化させ
ながら、撮像を行うことにより、短時間で精度良く、焦
点位置を検出できる効果がある。また、ラインセンサを
移動方向に平行に置くことにより、エツジとして使用で
きる対象物は小さい物でよいことになり、対象物の選定
が容易となる効果がある。
As explained above, the present invention has an in-sensor parallel to the moving direction of the image that receives light split by a prism, and a function to change the focal position by moving a wedge glass, in addition to the imaging system. By performing imaging while changing the focal position, there is an effect that the focal position can be detected with high accuracy in a short time. Furthermore, by placing the line sensor parallel to the moving direction, a small object can be used as an edge, which has the effect of making it easier to select the object.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例のi成因、第2図は本実施例
の斜視図、第3図、第4図は本実施例の画素信号の状態
を示し、それぞれ焦点位置のずれた状態、焦点位置の合
った状態の説明図である。 工・・・集光計、2・・プリズム、3・・・平板ガラス
、4・・・撮像用ラインセンサ、5・・・くさびガラス
、6・・・ラインセンサ、7・・・くさびガラス駆動部
、8・・・切換器、9・・・信号処理回路、10・・・
撮像系進行方向、11・・・撮像物のエツジ、■2・・
・撮像用ラインセンサの投影図、13・・・ラインセン
サ6の投影図。
FIG. 1 shows the i-factor of one embodiment of the present invention, FIG. 2 is a perspective view of this embodiment, and FIGS. 3 and 4 show the states of pixel signals of this embodiment, each with a shifted focus position. FIG. 3 is an explanatory diagram of a state in which the focal position is aligned. Engineering: Concentrator, 2: Prism, 3: Flat glass, 4: Imaging line sensor, 5: Wedge glass, 6: Line sensor, 7: Wedge glass drive Part, 8...Switcher, 9...Signal processing circuit, 10...
Direction of movement of the imaging system, 11...Edge of the object to be imaged, ■2...
- Projected view of the imaging line sensor, 13... Projected view of the line sensor 6.

Claims (1)

【特許請求の範囲】[Claims] 連続して移動する対象物の移動方向と直角方向の入射光
を撮像するラインセンサを有する撮像装置の焦点位置検
出方式において、撮像する入射光から一部の光を分割す
るプリズムと、前記対象物の移動方向と平行な方向の入
射光を撮像するラインセンサと、前記プリズムと前記ラ
インセンサとの間に入射光の焦点位置を変える駆動部付
きのくさびガラスとを有することを特徴とする焦点位置
検出方式。
In a focal position detection method of an imaging device having a line sensor that images incident light in a direction perpendicular to the moving direction of a continuously moving object, the object includes a prism that splits part of the light from the incident light to be imaged; a line sensor that captures an image of incident light in a direction parallel to the direction of movement of the prism; and a wedge glass with a drive unit that changes the focal position of the incident light between the prism and the line sensor. Detection method.
JP2016907A 1990-01-25 1990-01-25 Focus position detection method Expired - Lifetime JP2770521B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016907A JP2770521B2 (en) 1990-01-25 1990-01-25 Focus position detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016907A JP2770521B2 (en) 1990-01-25 1990-01-25 Focus position detection method

Publications (2)

Publication Number Publication Date
JPH03220515A true JPH03220515A (en) 1991-09-27
JP2770521B2 JP2770521B2 (en) 1998-07-02

Family

ID=11929210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016907A Expired - Lifetime JP2770521B2 (en) 1990-01-25 1990-01-25 Focus position detection method

Country Status (1)

Country Link
JP (1) JP2770521B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09197251A (en) * 1996-01-23 1997-07-31 Olympus Optical Co Ltd Automatic focusing device
WO2000019261A1 (en) * 1998-09-25 2000-04-06 Nikon Corporation Image formation position adjusting device, exposure system, image formation adjusting method and exposure method
JP2005292543A (en) * 2004-04-01 2005-10-20 Matsushita Electric Ind Co Ltd Focusing mechanism
JP2009053398A (en) * 2007-08-27 2009-03-12 Mitsutoyo Corp Microscope and three-dimensional information acquisition method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09197251A (en) * 1996-01-23 1997-07-31 Olympus Optical Co Ltd Automatic focusing device
WO2000019261A1 (en) * 1998-09-25 2000-04-06 Nikon Corporation Image formation position adjusting device, exposure system, image formation adjusting method and exposure method
JP2010135803A (en) * 1998-09-25 2010-06-17 Nikon Corp Exposure apparatus, exposure method, and substrate
JP2005292543A (en) * 2004-04-01 2005-10-20 Matsushita Electric Ind Co Ltd Focusing mechanism
JP2009053398A (en) * 2007-08-27 2009-03-12 Mitsutoyo Corp Microscope and three-dimensional information acquisition method

Also Published As

Publication number Publication date
JP2770521B2 (en) 1998-07-02

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