JPH0321213B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention controls the temperature of a processed object in a low-temperature plasma atmosphere in a low-temperature plasma processing apparatus for continuously low-temperature plasma treating textile products such as knitted fabrics, woven fabrics, non-woven fabrics, or films. The present invention relates to a method and apparatus that enable this.

Conventionally, in the industrial process of continuously processing fabrics such as woven fabrics, woven fabrics, non-woven fabrics, textile products such as strings and carpets, or films such as strings and carpets, for example, in the process before dyeing, water repellent impurities attached to the fibers are removed,
Alternatively, there is a scouring process that makes the fabric hydrophilic so that the dye solution can easily penetrate into the fabric, and a finishing process that imparts properties such as flexibility, water repellency, antistatic, stain resistance, and water absorption after dyeing, but both processes are water-based. It was being processed.

For example, in the scouring process, fabrics containing cotton are coated with an alkaline scouring aid such as caustic soda or soda ash, and then steamed at around 100°C for 20 minutes or more or boiled in an aqueous solution containing alkali and scouring aids to make them water repellent. In order to make the impurities solubilized in water, and then to remove the chemicals adhering to the treated fabric and the solubilized impurities, it was necessary to repeatedly wash the fabric with water and then dry it after washing with water. .

In addition, in the finishing process, it is necessary to apply a finishing agent dissolved or dispersed in water and then pass it through a dryer to evaporate and remove the moisture. was necessary.

However, with such treatment means, the cost of the treatment chemicals is high, a large amount of heat is required to cause the chemicals to react with the fabric, and furthermore, in the case of the scouring process, the residual liquid contained in the treated fabric, Alternatively, a large number of water washers are required to remove impurities and/or deposits, a large amount of water resources are required to be supplied to each of these washers, and a device is required to dispose of the washed waste liquid. Currently, processing of fabrics requires a large amount of water resources, heat energy equipment, etc., which is expensive. Furthermore, since the waste liquid discharged from water washing machines inevitably contains chemicals, problems such as waste liquid pollution arise, and the treatment of the waste liquid also requires a large amount of equipment and personnel costs. However, it was economically insufficient, especially in the textile processing industry.

For this reason, it has recently been proposed to treat textile products such as fabrics in a low-temperature plasma atmosphere to obtain, for example, desizing, scouring effects, or finishing effects on the fabrics. (hereinafter simply referred to as plasma) By changing the temperature of the fabric during treatment, the effect of plasma treatment on textile products can be changed even if the degree of vacuum and high frequency energy in the reactor are constant. The present invention has been made with an eye to what can be done. In other words, even if the degree of vacuum and high-frequency energy within the plasma reactor are constant, by increasing the temperature of the textile product in the plasma atmosphere within the reactor, the plasma reaction rate on the textile product will increase and the plasma reaction treatment will increase. It can save time. Furthermore, when a textile product with low heat resistance is subjected to plasma treatment, it is desirable to lower the temperature of the textile product in the plasma atmosphere. That is, by lowering the temperature of the textile product in the plasma atmosphere, the processing time is extended, but it is possible to prevent the textile product, which has weak heat resistance, from being scorched or thinned. Therefore, if it is possible to adjust the temperature of the textile product in the plasma atmosphere according to the quality of the textile product to be plasma treated, it will be possible to efficiently adjust the temperature of the textile product according to the quality of the textile product, without causing a decrease in its quality. Plasma treatment can be performed.

The present invention has been made in view of the above, and has a simplified structure that allows the temperature of the processed object (textile products, film, etc.) in the plasma atmosphere to be adjusted. The object of the present invention is to provide a temperature control method and device.

The present invention will be explained in detail below based on embodiments shown in the drawings.

1 is a reactor capable of continuous treatment, and this reactor 1 has an inlet 3 for continuously introducing a fabric 2 to be subjected to low-temperature plasma treatment into this reactor 1;
A discharge port 4 is provided for continuously withdrawing the fabric in the reactor 1. In addition, although it is possible to continuously insert the fabric into each of the inlet port 3 and outlet port 4, the inside of the reactor 1 is kept under vacuum (0.1~
10Torr, preferably 0.5 to 2Torr) are provided with sealing mechanisms 5 and 6.
Such sealing mechanisms 5 and 6 can seal the inlet and outlet of the reactor 1 by using a known sealing mechanism developed by the present inventors. Furthermore, inside this reactor 1, a low-temperature plasma treatment mechanism is provided, and this low-temperature plasma treatment mechanism includes a high-frequency generation electrode 7 installed above the transfer path of the moving fabric 2, and a high-frequency generation electrode 7 installed below One of the high-frequency generating electrodes 7 is supplied with high-frequency waves from an oscillator (not shown) installed outside the reactor 1, and the other high-frequency generating electrode 7 is Earth electrode 8 is grounded. The above-mentioned high-frequency generating electrode 7 is formed in a flat shape using a wire mesh or a porous metal plate, and the ground electrode 8 is formed by bending a metal tube into a meandering and flat shape at close intervals as shown in FIG. This is what I did. 9 is a gas nozzle made of an insulating material for blowing out gas toward the entire surface of the high-frequency generating electrode 7;
Reference numeral 0 denotes an intake duct made of an insulating material and formed to surround the ground electrode 8, and this intake duct 10 is connected to a vacuum pump (not shown). Reference numeral 11 denotes a fabric guide roll disposed within the reactor 1, which allows the fabric to be transferred into a fabric passage 12 formed between the upper and lower pair of electrodes 7 and 8. In addition, hot water, water, oil, gas, etc. can flow into the metal pipe forming the earth electrode 8 from the outside of the reactor 1, and the fluid passing through the metal pipe flows into the reactor 1.
The temperature of the fluid can also be measured with a thermometer 13 installed outside.

The above is the configuration of this embodiment.Next, to describe its function, first, a vacuum pump (not shown) is used.
After reducing the pressure in the reactor 1 to a degree of vacuum of 0.5 to 5 Torr, air, oxygen, or other gas is supplied into the reactor 1 from the gas nozzle 9 to reduce the vacuum in the reactor 1. Adjust so that the temperature is approximately 1 Torr. Therefore, a high frequency power source (not shown)
A higher frequency, for example 13.56 MHz, is supplied to the high frequency generation electrode to generate plasma. By moving the fabric 2 into the atmosphere of the plasma thus generated and the gas excited by this plasma, that is, into the fabric passage 12 between the electrodes 7 and 8, the low-temperature plasma acts on the fibers of the fabric 2, causing the fabric to By continuing to generate the plasma, the plasma atmosphere is heated, and when this heating temperature is increased,
If the fabric 2 to be treated is, for example, a synthetic fiber with poor heat resistance, the fabric may become thin or scorched, so it is necessary to lower the temperature of the fabric to be treated running in the plasma atmosphere. There is. Therefore, by passing cold water, for example, into the metal tube 8 that also serves as the earth electrode, the electrode is cooled, and the workpiece 2 traveling in the plasma atmosphere is brought close to the cooling electrode 8. Alternatively, the temperature of the object to be processed in the plasma atmosphere can be lowered by bringing the object into contact with the object and moving the object, thereby preventing deterioration in the quality of the object.

On the other hand, in the case of a fabric to be treated that has high heat resistance, the plasma reaction time can be accelerated by increasing the temperature of the fabric to be treated in the plasma atmosphere. By circulating a heating fluid to heat the metal tube 8, and further moving the workpiece 2 traveling in the plasma atmosphere in close proximity to or in contact with the metal tube 8,
It is possible to effectively increase the temperature of the object to be processed in the plasma atmosphere.

As described above, the present invention forms an electrode by bending a metal tube that can flow into a low-temperature plasma reactor for low-temperature plasma treatment of textile products or films, and generates a low-temperature plasma atmosphere by the electrode. Since the temperature of the object to be processed passing through the electrode is controlled by the fluid flowing through the electrode, the temperature of the object to be processed in the plasma atmosphere can be adjusted depending on the object to be processed. By controlling the temperature, it is possible to speed up the processing time of low-temperature plasma treatment, prevent damage to the object to be treated due to high temperatures, and even apply low-temperature plasma gas to the inner core of textile products to achieve effective low-temperature treatment. There are effects such as being able to obtain plasma-treated fabrics.

[Brief explanation of the drawing]

The drawings all show an embodiment of an effective device for carrying out the invention, with FIG. 1 being a sectional view thereof and FIG. 2 being a plan view of only the ground electrode. 1... Reactor, 2... Fabric, 3... Inlet, 4
... Outlet, 5, 6 ... Seal mechanism, 7 ... High frequency generation electrode, 8 ... Earth electrode, 9 ... Gas nozzle, 10 ... Intake duct, 11 ... Guide roll, 12 ... Fabric passage, 13 ……thermometer.

Claims (1)

[Claims] 1. In a low temperature plasma reactor for low temperature plasma treatment of textile products, films, etc., an electrode plate is formed using a metal tube through which a heat medium can flow, and the electrode plate is formed in the thickness direction of the electrode plate. A low-temperature plasma generating electrode plate with a gap formed to provide ventilation is installed inside the electrode, and the temperature of the object to be processed passing through the low-temperature plasma atmosphere generated by this electrode plate is controlled within the electrode. A method for controlling the temperature of a processed object in a low-temperature plasma atmosphere, the method comprising controlling the temperature of a workpiece in a low-temperature plasma atmosphere. 2. In a low-temperature plasma processing apparatus having a reactor for treating textile products, films, etc. with low-temperature plasma, an electrode plate through which a temperature control fluid can flow is formed in the reactor, and ventilation is provided in the thickness direction of the electrode plate. 1. An apparatus for controlling the temperature of a processed object in a low-temperature plasma atmosphere, characterized in that a low-temperature plasma generating electrode plate having a gap formed therein is disposed.