JPH0320946A - Manufacture of sample for transmission electron microscope - Google Patents

Abstract

PURPOSE:To observe the cross section at the specific position of a sample by scraping the sample at the vicinity of the cross section observation position, and boring a deep groove near it except the cross section observation position with a focused ion beam. CONSTITUTION:A sample 1 is mechanically polished to the position of about 500nm near the cross section observation position 3. A groove 5 with the depth about 1.0mum deeper than the cross section observation position 3 located at 0.5mum from the sample surface with a focused ion beam 4. When the sample 1 is penetrated with an electron beam 6 at the position shown in the figure, the sample 1 can be observed at the specific cross section observation position 3.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for preparing a specimen for a transmission electron microscope.

In order to observe a sample using a conventional transmission electron microscope, it is necessary to make the sample as thin as possible. Therefore, it is difficult to prepare a sample for cross-sectional observation, and various methods have been devised.

Hereinafter, a conventional general method for preparing a sample for cross-sectional observation will be described with reference to the drawings.

FIG. 2 is an explanatory diagram of a conventional method for preparing a sample for cross-sectional observation, where 1 is an observation sample and 2 is an ion beam for thinning the sample.

The sample preparation method will be explained below.

The sample 1 as shown in FIG. 2a without being separated was heated to about 0.05 mm using a diamond forceps as shown in FIG. 2b. Cut into SrMn thickness. Next, after making the film as thin as possible to 10 to 20 μm using a mechanical polishing method, as a final finish, as shown in Figure 2C, an etching method using an ion beam 2 is used to achieve a film thickness of 1 that can be observed with a transmission electron microscope. The sample is thinned and used for cross-sectional observation.

Problems to be Solved by the Invention However, the conventional method for preparing a sample for a transmission electron microscope has a problem in that it is difficult to prepare a sample for observing a cross section of a specific portion.

Means for Solving the Problem In order to solve this problem, the method for preparing a sample for a transmission electron microscope of the present invention is to prepare a sample from one side of the sample by a mechanical or chemical method near the cross-sectional observation position. After polishing, a groove deeper than the cross-sectional observation position is dug using a focused ion beam from the sample surface very close to the polished side surface, leaving the cross-sectional observation position.

Function: This sample preparation method uses a mechanical polishing method that enables highly accurate positioning and a focused ion beam method to reduce the thickness of the cross section of the sample, making it easy to observe the cross section of a specific part using a transmission electron microscope. It becomes possible.

EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings.

FIG. 1 shows a method for preparing a sample for a transmission electron microscope according to an embodiment of the present invention. Click on Figure 1 and click 1.
3 is an observation sample, 3 is a portion requiring cross-sectional observation, 4 is a focused ion beam, and 6 is a groove dug by the focused ion beam 4.

The sample preparation method will be explained below.

1. First, mechanical polishing is performed at a position 1 approximately 500 nm from one side of the sample 1 as shown in FIG. 1a, near the cross-sectional observation position 30 (FIG. 1b). Next, leaving the cross-section observation position 3, the focused ion beam 4 is used from the sample surface approximately 300 nm away from the polished side to a depth of about 1.5 μm deeper than the cross-section observation position 3, which is 0.5 μm from the sample surface. Dig a groove 5 of 0 μm (Fig. 1C).

The sample prepared by this method is arranged as shown in Figure 3.
Cross-sectional observation using a transmission electron microscope is possible.

Effects of the Invention The present invention uses a mechanical polishing method that enables highly accurate positioning and a focused ion beam method to prepare a specimen for cross-sectional observation. This realizes the preparation of specimens for microscopy.

[Brief explanation of the drawing]

Figure 1 is a diagram showing a sample preparation method for a transmission electron microscope according to an embodiment of the present invention, Figure 2 is a diagram showing a conventional sample preparation method for a transmission electron microscope, and Figure 3 is a diagram showing a method for preparing a sample for a transmission electron microscope. FIG. 2 is an observation layout diagram of a sample prepared by the method of the invention using a transmission electron microscope. 1... Observation sample, 2... Ion beam for sample polishing, 3... Cross section observation location, 4...
... Focused ion beam, 5... Groove dug by focused ion beam, 6... Electron beam.

Claims (1)

[Claims] After polishing the sample from one side of the sample mechanically or chemically to near the cross-sectional observation position, the cross-sectional observation position is left and a focused ion beam is used from the sample surface very close to the polished side to remove the cross-sectional observation position. A method for preparing specimens for transmission electron microscopy, which is characterized by digging deep grooves.