JPH03209200A - Aperture for shaping shape of charged particle beam - Google Patents

Abstract

PURPOSE:To prolong the life of an aperture and to allow the adjustment of the quantity of a charged particle beam by varying the opening diameter of the aperture for shaping the shape of the charged particle beam. CONSTITUTION:The opening spacing of the aperture for shaping the shape of the charged particle beam can be arbitrarily set by moving x-direction shielding plates 1, 2 along a supporting shaft 3 and moving y-direction shielding plates 4, 5 along the supporting shaft 6 and, therefore, the life of the aperture is prolonged. In addition, the quantity of the charged particle beam is adjusted by adjusting the opening spacing.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention provides a beam shape shaping aperture for ion implanters and bundle ion beam devices that utilize particle beam gold, and that can be used continuously over a long period of time. Concerning something that is made to work.

[Traditional Keiyu]

FIG. 2 is a perspective section showing an aperture for shaping the beam shape of the secondary beam; FIG. 8 is a sectional view taken along the line mm in FIG. 2;

In the figure VC button, (7) shows the aperture body, and (8) shows the opening metal.

A conventional beam shape aperture is designed to divide the divergence of a charged particle beam by 1 and shape the beam to a size of '5--H'.

The aperture body (7) is oriented perpendicularly to the charged particle beam.
Since tK is fixed, the position of the opening {8} is also determined. As shown in FIG. 3, the fr surface of the opening (8) of the housing is tapered to suppress divergence.

[Problem to be solved by the invention]

The conventional aperture for a rigid beam shape is i'(
Therefore, when a charged particle beam is irradiated with the aperture VC5 for a long period of time, the shape of the aperture of the aperture is scraped by the charged particle beam, resulting in a sharp shape, which impairs the ability to collect the particle beam. There were problems such as deterioration of timing performance in terms of controllability.

This invention has been developed in order to solve the above-mentioned problems, and it is an object of the present invention to maintain the aperture diameter of the aperture of the beam shape shaping aperture at a desired diameter when the aperture is fixed.

Means for Solving Problem C] The aperture for shaping the shape of a charged particle beam according to the present invention has an aperture diameter of t by providing an OJ movement mechanism to the aperture shape.

[Effect]

Do you want to indulge in this invention? The aperture for shaping the particle beam is restored to the shape of the partial chamber carved by the charged particle beam by the aperture-shaped opening mechanism.

By completely changing the shape of the casing and aperture, it is also possible to adjust the size of the charged particle beam.

〔Decoration〕

Hereinafter, the real demon example of this invention will be explained.

Fig. 1 is a $+ perspective view of the aperture for shaping the shape of the particle beam shown in the first step of the invention. part of particle beam k
! Filter cutting plates 41 for shaping the cutting beam shape. 61 is a cutting board in the y direction, (31 is a temporary cutting ill.
r4, plate 41, 161 This is a support shaft for cJJwJ in all directions.

The charged particle beam shaping aperture configured as described above has a cross section in the X direction. ;! 1 is the support shaft 131i
c, and the y-direction cross-section plates i41 and f51 move along the support axis {6).

〔Effect of the invention〕

As described above, in this invention, since the aperture distance 14e of the aperture for shaping the shape of the VC processing particle beam can be set arbitrarily, the length of the aperture can be increased to 4 times.
By fully adjusting the aperture spacing, the amount of charged particle beam can be reduced by 1.
k: 8IiI1i?

[Brief explanation of drawings]

Figure i1 is a perspective view of an aperture for shaping a charged particle beam according to one embodiment of the present invention, and Figure 2 is a perspective view of an aperture for shaping a charged particle beam according to the present invention. FIG. 2 is a rT plane view showing the button ML in FIG. 2; 1 in the figure, +1+, ;! Temporary cutting in the lboχ direction, '4
1, 161 shows the y-direction blocking plate, 31 shows the χ-direction support pongee, 6) shows the y-direction support shaft 〇

Claims (1)

[Claims] An aperture for shaping a charged particle beam, characterized in that the device extracts charged particles using an electric field, and is equipped with a mechanism that can vary the aperture diameter of the aperture for shaping the shape of the charged particle beam.