JPH03208555A - Circulating feeding device of grinding liquid of wire saw - Google Patents

Circulating feeding device of grinding liquid of wire saw

Info

Publication number
JPH03208555A
JPH03208555A JP483390A JP483390A JPH03208555A JP H03208555 A JPH03208555 A JP H03208555A JP 483390 A JP483390 A JP 483390A JP 483390 A JP483390 A JP 483390A JP H03208555 A JPH03208555 A JP H03208555A
Authority
JP
Japan
Prior art keywords
abrasive liquid
wire
grindliquid
abrasive
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP483390A
Other languages
Japanese (ja)
Inventor
Yasumasa Matsukura
松倉 保正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAKATORI HAITETSUKU KK
Takatori Corp
Original Assignee
TAKATORI HAITETSUKU KK
Takatori Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAKATORI HAITETSUKU KK, Takatori Corp filed Critical TAKATORI HAITETSUKU KK
Priority to JP483390A priority Critical patent/JPH03208555A/en
Publication of JPH03208555A publication Critical patent/JPH03208555A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/025Use, recovery or regeneration of abrasive mediums

Landscapes

  • Engineering & Computer Science (AREA)
  • Mining & Mineral Resources (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To feed a grindliquid to the lower face of a wire, by providing a nozzle which feeds the grindliquid to the lower face of a wire with its overflowing from the upper slit in an oblong hole shape to the lower part approaching position of a travelling wire at the outside of a multigrooved roller group and feeding the grindiquid by the grindiquid feeding pump of a grindliquid tank to this nozzle. CONSTITUTION:When the grindliquid of a grindiquid tank 11 inside is fed to a nozzle 6 by a grindliquid feeding pump 14, the grindiquid is overflowed from an oblong hole shaped slit 7, a travelling wire 1 is passed through in the state of being dipped in a line like grindliquid partially and the grindiquid is surely fed to the lower face thereof. So, abrasive grains can be pulled sufficiently into the space between the wire 1 lower face and a work 2, and the working accuracy and productivity can be improved by increasing the lapping efficiency. Also, one part of the grindliquid discharged from the grindliquid feeding pump 14 is injected in the inner wall circumferential direction of the grindliquid tank 11 by a grindliquid stirring nozzle 19 to cause a spiral movement of abrasive grain inside the tank. Accordingly the abrasive grain performs a self stirring and does not settle.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 この発明は、走行するワイヤを用いてワークを切断する
ワイヤソーの砥液循環供給装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an abrasive liquid circulation supply device for a wire saw that cuts a workpiece using a running wire.

〈従来の技術〉 ワイヤソーは複数の多溝ローラ群の外側にワイヤを多重
並列状に巻付け、多溝ローラを正逆転させることにより
ワイヤを多溝ローラ間で往復動させ、多溝ローラ間を移
動するワイヤでワークを切断するようになっており、ワ
ークとワイヤの間に砥液を介在させながらラッピング加
工によって切断を行なう。
<Conventional technology> A wire saw wraps wires in parallel in multiple layers around the outside of a group of multi-groove rollers, and rotates the multi-groove rollers in forward and reverse directions to move the wire back and forth between the multi-groove rollers. The workpiece is cut with a moving wire, and cutting is performed by lapping while an abrasive liquid is interposed between the workpiece and the wire.

上記のようなワイヤソーで効果的な切断を得るには、ワ
イヤの許容付加張力を最大限に有効利用すると共に、第
2図に示すように、ワイヤlの下部に砥液を供給し、ワ
イヤlとワーク2の間に砥粒3を確実に介在させるよう
にしなければならない。
In order to obtain effective cutting with a wire saw as described above, in addition to making maximum use of the allowable additional tension of the wire, as shown in FIG. It is necessary to ensure that the abrasive grains 3 are interposed between the workpiece 2 and the workpiece 2.

また、砥液はラッピング液に砥液を混合したものである
ため、ワイヤに対する砥液の供給装置においては、砥液
の沈澱対策を講じる必要がある。
Further, since the abrasive liquid is a mixture of the lapping liquid and the abrasive liquid, it is necessary to take measures against sedimentation of the abrasive liquid in the apparatus for supplying the abrasive liquid to the wire.

従来のワイヤソーにおいて、ワイヤに対する砥液の供給
は、多溝ローラ群の内側でスライス加工空間の上部に、
多孔状又は長孔状のスリットを有するノズルを下向きに
配置し、このノズルから砥液を滴下又は噴射させてスラ
イス加工部へ移動するワイヤ上に供給する構造になって
いる。
In conventional wire saws, abrasive liquid is supplied to the wire at the top of the slicing space inside the multi-groove roller group.
A nozzle having a porous or elongated slit is disposed facing downward, and the abrasive liquid is dripped or sprayed from the nozzle and supplied onto the wire moving to the slicing section.

また、上記のようなノズルを用いた装置とは別に、砥l
夜供給効率を改善するため、スライスせんとするワーク
とワイヤを砥液の中に浸漬させるディッピング方式も提
案されている。
In addition to the device using the above-mentioned nozzle, there is also an abrasive
In order to improve feeding efficiency at night, a dipping method has also been proposed in which the workpiece to be sliced and the wire are immersed in abrasive liquid.

更にノズルに砥液を供給する従来の砥液供給装置は、円
筒状平底の砥冫夜タンク上に砥液供紹ポンプ装置と砥粒
沈澱防止用の砥液撹拌装置を別個に設置した構造になっ
ている。
Furthermore, the conventional abrasive liquid supply device that supplies abrasive liquid to the nozzle has a structure in which an abrasive liquid supply pump device and an abrasive liquid stirring device to prevent abrasive grain sedimentation are installed separately on a cylindrical flat-bottomed abrasive tank. It has become.

〈発明が解決しようとする課題〉 ところで、ワイヤに砥液を供給する従来のノズル構造は
、ノズルの配置位置が多溝ローラ群の内側にあるため、
ワークの上昇移動により砥液供給効率のよい位置への配
置は困難であり、必然的に走行ワイヤから遠く離れた供
給効率の悪い、スライス加工空間のデッドスペースであ
る上部取り付けを余儀なくされる。
<Problems to be Solved by the Invention> By the way, in the conventional nozzle structure for supplying abrasive liquid to the wire, the nozzle is located inside the multi-groove roller group.
Due to the upward movement of the workpiece, it is difficult to place it in a position where the abrasive liquid can be efficiently supplied, and it is inevitably necessary to mount the workpiece at the upper part, which is a dead space in the slicing processing space, where the supply efficiency is poor and the workpiece is far away from the running wire.

このため、砥液が粘性、表面張力等によりスポット状に
ワイヤ上面へ落下し、ワイヤの掛け幅内全域に対して均
一に砥液を供給することができず、局部的になり易く、
落差による落下衝撃でワイヤに振動を与え、ラッピング
効率にムラが生じ、加工精度と生産性の低下を招くとい
う問題がある。
For this reason, the abrasive liquid falls onto the top surface of the wire in spots due to viscosity, surface tension, etc., making it impossible to uniformly supply the abrasive liquid to the entire wire hanging width, and it tends to be localized.
There is a problem in that the drop impact caused by the drop causes vibrations to the wire, causing uneven wrapping efficiency and reducing processing accuracy and productivity.

また、上部よりワイヤ上面に砥液を供給しているため、
ワイヤ自身が高速度で走行運動していることも相俟って
砥液が十二分にワイヤ下面に行き届く前にスライス加工
部に達し、すでにスライスされたワークの溝部へ不必要
な供給を繰り返すことになる。
In addition, since the abrasive liquid is supplied from the top to the top of the wire,
Coupled with the fact that the wire itself is running at high speed, the abrasive liquid reaches the slicing section before it reaches the bottom surface of the wire, and is repeatedly supplied unnecessarily to the grooves of the already sliced workpiece. It turns out.

特にスライス加工厚さが薄くなり、ワイヤピッチが細か
くなると、砥液の粘性、表面張力等により、ワイヤ下面
への確実な砥液供給はますます困難になる。
In particular, as the slicing thickness becomes thinner and the wire pitch becomes finer, it becomes increasingly difficult to reliably supply the abrasive liquid to the lower surface of the wire due to the viscosity, surface tension, etc. of the abrasive liquid.

更に砥液内に粗大異物、加工物破損片等が混入し、ノズ
ルに供給された場合、多溝ローラ群の内側からの砥液供
給は、即多溝ローラのV溝部への異物喰込みを余儀なく
され、ワイヤ脱線によるワーク破損片の増加と不良品の
多発及び多溝ローラの損傷発生を招き、ひいてはワイヤ
の断線事故、砥液の廃却及び交換へと悪循環する。
Furthermore, if coarse foreign matter, broken pieces of the workpiece, etc. get mixed into the abrasive liquid and are supplied to the nozzle, supplying the abrasive liquid from inside the multi-groove roller group will immediately prevent the foreign matter from being bitten into the V-groove portion of the multi-groove roller. Unavoidably, this leads to an increase in the number of broken pieces of workpieces due to wire derailment, frequent occurrence of defective products, and damage to the multi-groove roller, which in turn leads to a vicious cycle of wire breakage accidents and the need to discard and replace the abrasive liquid.

次に、ワークとワイヤを砥液の中に浸漬させるディッピ
ング方式は、砥液の密封と沈澱対策が繁雑となり、ワイ
ヤの巻き付けやワークの取り付け等の作業性が悪く、し
かも浸漬槽による多溝ローラ軸間距離の増加はワイヤの
剛性低下を招くという問題がある。
Next, the dipping method, in which the workpiece and wire are immersed in the abrasive liquid, requires complicated sealing of the abrasive liquid and countermeasures against sedimentation, poor workability such as winding the wire and attaching the workpiece, and the multi-groove roller due to the dipping tank. There is a problem in that an increase in the distance between the axes causes a decrease in the rigidity of the wire.

また、砥液の密封は浸漬されたワークと多溝ローラ間の
相対温度差が一層顕著になり易く、ワイヤ間隔の変化に
より加工精度の低下を招くという問題がある。
Furthermore, sealing of the abrasive liquid tends to make the relative temperature difference between the immersed workpiece and the multi-groove roller more pronounced, and there is a problem that the change in the wire spacing causes a decrease in processing accuracy.

更に、従来の砥液供給装置は、砥液タンク上に砥液供給
ポンプと砥液撹拌装置を別個に設置しているため、全体
の構造が繁雑で両装置取り付けの関係から砥液タンクの
コンパクト化には限界があり、しかもタンク底部が平底
であるため、比重の重い砥粒はタンク外周隅底部に沈澱
しやすいという問題がある。
Furthermore, in conventional abrasive liquid supply devices, the abrasive liquid supply pump and abrasive liquid agitation device are installed separately on the abrasive liquid tank, resulting in a complex overall structure and the need to make the abrasive liquid tank more compact due to the installation of both devices. Moreover, since the bottom of the tank is flat, there is a problem that abrasive grains with heavy specific gravity tend to settle at the bottom of the outer periphery of the tank.

また、従来の砥液供給装置において、簡易砥液撹拌装置
として、タンク下部からのエア噴出撹拌方式があるが、
この方式を採用しても十分な砥液撹拌は望めず、タンク
内周辺への砥粒沈澱は必至であり、特に粘度の低い油性
、水溶性のラッピング液を使用した場合は、砥粒の沈澱
は一層顕著である。
In addition, in conventional abrasive liquid supply devices, there is a simple abrasive liquid agitation device that uses an air jet agitation method from the bottom of the tank.
Even if this method is adopted, sufficient abrasive liquid agitation cannot be expected, and abrasive grains will inevitably settle around the inside of the tank. Especially when using oil-based or water-soluble lapping liquid with low viscosity, abrasive grains will settle. is even more remarkable.

そこで、この発明の課題は、上記のような問題点を解決
するため、ワイヤの掛け幅内全域の下面側へ砥液を均一
に供給することにより、ラッピング効果を平均化して加
工精度と生産性の向上を図り、しかも多溝ローラの損傷
やワイヤの脱線事故の発生を未然に防止させ、多溝ロー
ラとワークの相対温度差を平均化することができると共
に、小型で砥液撹拌効果が優れ、砥粒の沈澱発生を防止
することができるワイヤソーの砥液循環供給装置を提供
することにある。
Therefore, in order to solve the above-mentioned problems, the object of this invention is to uniformly supply the abrasive liquid to the lower surface of the entire width of the wire, thereby averaging out the lapping effect and improving machining accuracy and productivity. In addition, it is possible to prevent multi-groove roller damage and wire derailment accidents, and to even out the relative temperature difference between the multi-groove roller and the workpiece.It is also small and has an excellent abrasive liquid stirring effect. Another object of the present invention is to provide an abrasive liquid circulation supply device for a wire saw that can prevent precipitation of abrasive grains.

〈課題を解決するための手段〉 上記のような課題を解決するため、第1の発明は、多溝
ローラ群の外側で走行ワイヤの下部接近位置に長孔状の
上部スリットから砥液を溢出させてワイヤの下面に供給
するノズルを設け、このノズルに砥液タンクの砥液供給
ポンプで砥液を供給するように構成したちのである。
<Means for Solving the Problems> In order to solve the above-mentioned problems, the first invention provides a method in which abrasive liquid overflows from an elongated upper slit at a lower approach position of the running wire outside the multi-groove roller group. A nozzle is provided on the lower surface of the wire, and the abrasive liquid is supplied to this nozzle by an abrasive liquid supply pump in an abrasive liquid tank.

第2の発明は、砥液タンクの内部に砥液供粕ポンプを収
納し、この砥液供給ポンプの吐出口とノズルを接続する
砥液供給路に、砥液の一部な砥液タンクの内壁円周方向
に噴射する砥液撹拌ノズルと分岐状に設けた構成とした
ちのである。
In the second invention, an abrasive liquid supply pump is housed inside an abrasive liquid tank, and a part of the abrasive liquid tank, which is a part of the abrasive liquid, is connected to an abrasive liquid supply path that connects a discharge port of this abrasive liquid supply pump and a nozzle. It has a branched configuration with an abrasive stirring nozzle that sprays the abrasive liquid in the circumferential direction of the inner wall.

第3の発明は、砥液タンクが上部円筒で下部が円錐のす
り鉢状に形成されている構成としたものである。
In a third aspect of the present invention, the abrasive liquid tank is formed in the shape of a mortar with a cylindrical upper part and a conical lower part.

く作用〉 砥液タンク内の砥液を砥液供給ポンプでノズルに供給す
ると、砥液が長孔状のスリットから溢出し、走行ワイヤ
は部分的にライン状の砥液に浸漬された状態で通過し、
その下面に確実に砥液が供給されるため、ワイヤ下面と
ワーク間へ十二分に砥粒を引き込ませることが可能とな
り、ラツビング効率を高めて加工精度と生産性の向上を
図ることができる。
When the abrasive liquid in the abrasive liquid tank is supplied to the nozzle with the abrasive liquid supply pump, the abrasive liquid overflows from the long hole-shaped slit, and the running wire is partially immersed in the line-shaped abrasive liquid. pass through,
Since the abrasive liquid is reliably supplied to the lower surface of the wire, it is possible to sufficiently draw the abrasive grains between the lower surface of the wire and the workpiece, increasing rubbing efficiency and improving machining accuracy and productivity. .

また、砥液供給ポンプから吐出した砥液の一部は砥液撹
拌ノズルで砥液タンクの内壁円周方向に噴射され、タン
ク内砥液に渦巻運動を起こさせ、自己撹拌により砥粒の
沈澱発生を確実に防止する。
In addition, a part of the abrasive liquid discharged from the abrasive liquid supply pump is sprayed in the circumferential direction of the inner wall of the abrasive liquid tank by an abrasive liquid stirring nozzle, causing a swirling motion in the abrasive liquid in the tank, and self-stirring causes the abrasive grains to settle. Reliably prevent occurrence.

〈実施例〉 以下、この発明の実施例を添付図面に基づいて説明する
<Example> Hereinafter, an example of the present invention will be described based on the accompanying drawings.

第1図と第3図のように、ワイヤソーは、両側に配置し
た多溝ローラ4、4の外側にワイヤlを多重並列状に巻
付け、両多溝ローラ4と4間の下部にワーク2を支持す
るワークテーブル5を昇降動自在に配置し、多溝ローラ
4、4を正逆転させることによりワイヤ1を多溝ローラ
4、4間で往復動させ、ワーク2をワークテーブル5で
上昇させながら多溝ローラ4と4間の下部を移動するワ
イヤ1で切断するようになっている。
As shown in FIGS. 1 and 3, the wire saw has wires 1 wound in parallel in multiple layers around the outside of multi-groove rollers 4 and 4 arranged on both sides, and a work piece 2 placed between both multi-groove rollers 4 and 4. A work table 5 supporting the is disposed so as to be movable up and down, and the wire 1 is reciprocated between the multi-groove rollers 4 and 4 by reciprocating the multi-groove rollers 4 and 4, and the work 2 is raised by the work table 5. Meanwhile, the wire 1 moving in the lower part between the multi-groove rollers 4 is used to cut the wire.

上記ワイヤソーにおける多溝ローラ4と4の外側でワイ
ヤ1の下部走行部分の接近位置に、砥液供給用のノズル
6と6がワーク2を挾む両側に配置されている。
In the wire saw, nozzles 6 and 6 for supplying abrasive liquid are arranged on both sides of the workpiece 2 at a position close to the lower running portion of the wire 1 outside the multi-groove rollers 4 and 4.

ノズル6、6はワイヤ1の並列方向に長く、その上部長
さ方向に長孔状のスリット7が設けられ、後述する砥液
供給ポンプから供給された砥液をスリット7からライン
状に溢出させ、走行するワイヤ1の下面に対して掛け幅
内全域に均一に砥液を供給するようになっている。
The nozzles 6, 6 are long in the parallel direction of the wires 1, and are provided with long hole-shaped slits 7 in the longitudinal direction of their upper portions, so that abrasive liquid supplied from an abrasive liquid supply pump, which will be described later, overflows in a line from the slits 7. The abrasive liquid is uniformly supplied to the entire lower surface of the running wire 1 within the width of the wire.

このように、下部走行ワイヤlの下面にノズル6、6を
極接近させ、スリット7から砥液を溢出させると、ライ
ン状の砥液に対してワイヤ1は浸潰された状態で通過し
、ワイヤ1の下面に供給することができ、第2図で示し
たように、ワイヤ1の下面とワーク2間へ、砥液の粘性
とワイヤ1の高速走行により十二分に砥粒を引き込ませ
ることが可能となり、ラッピング効率を高めることがで
きる。
In this way, when the nozzles 6, 6 are brought very close to the lower surface of the lower running wire 1 and the abrasive liquid overflows from the slit 7, the wire 1 passes through the line-shaped abrasive liquid in a submerged state, The abrasive particles can be supplied to the lower surface of the wire 1, and as shown in FIG. 2, the abrasive particles are sufficiently drawn into the space between the lower surface of the wire 1 and the workpiece 2 due to the viscosity of the abrasive liquid and the high-speed running of the wire 1. This makes it possible to improve wrapping efficiency.

また、スライス加工厚さが薄くなってワイヤ1のピッチ
が細かくなっても砥液の供給は何ら支障がなく、却って
砥液の粘性と表面張力等で供給効率が良くなる。
Further, even if the slicing thickness becomes thinner and the pitch of the wire 1 becomes finer, there is no problem in supplying the abrasive liquid, and on the contrary, the supply efficiency improves due to the viscosity and surface tension of the abrasive liquid.

前記ノズル6、6に供給する砥液を収納する砥液タンク
11は、内側タンクl2と外側タンクl3の二重壁構造
になっており、内側タンクl2は砥液収納用であり、内
部に砥液供給ポンプl4を収納し、上蓋l5上にこのポ
ンプ14を駆動するモータl6が設置され、外側タンク
13は砥液温度調整用であり、冷却水又は温水の循環タ
ンクである。
The abrasive liquid tank 11 that stores the abrasive liquid to be supplied to the nozzles 6, 6 has a double wall structure consisting of an inner tank l2 and an outer tank l3.The inner tank l2 is for storing the abrasive liquid, and the abrasive liquid is stored inside. A liquid supply pump 14 is housed, and a motor 16 for driving the pump 14 is installed on the upper lid 15. The outer tank 13 is for adjusting the temperature of the abrasive liquid and is a circulation tank for cooling water or hot water.

内側タンクl2は、ポンプ14のインペラケーシング部
を中心に、上部が円筒で下部が円錐のすり鉢状となり、
沈澱の死角を除去し、比重の重い砥粒の外周隅底部に対
する沈澱を防止する構造になっている。
The inner tank 12 is shaped like a mortar with a cylindrical upper part and a conical lower part, centered around the impeller casing part of the pump 14.
It has a structure that eliminates dead spots for sedimentation and prevents abrasive grains with heavy specific gravity from settling at the bottom of the outer periphery.

また、外側タンクl3には砥液の自動温度調整装W17
が接続されている。
In addition, an automatic temperature adjustment device W17 for the abrasive liquid is installed in the outer tank l3.
is connected.

砥液供給ポンプ14を駆動するモータ16は、インバー
タ等により回転数の可変速が可能となり、砥液の粘性変
化に対応してポンプ吐出量の調整及び機械休止時の砥液
撹拌のみの場合には、必要最小限の吐出量に調整が可能
である。
The motor 16 that drives the abrasive liquid supply pump 14 can have variable rotation speed using an inverter or the like, and can adjust the pump discharge amount in response to changes in the viscosity of the abrasive liquid and only stir the abrasive liquid when the machine is stopped. can be adjusted to the minimum necessary discharge amount.

前記砥液供給ポンプ14の吐出口とノズル6、6が砥液
供給路18で接続されていると共に、この砥液供給路1
8に砥液の一部を内側タンクl2の内壁円周方向に噴射
し、内側タンク12内の砥液に渦巻運動を起こさせ、自
己撹拌させることにより砥粒の沈澱発生を防ぐ砥液撹拌
ノズル19が絞り弁20を介して分岐状に設けられてい
る。
The discharge port of the abrasive liquid supply pump 14 and the nozzles 6, 6 are connected by an abrasive liquid supply path 18, and this abrasive liquid supply path 1
8 is an abrasive liquid agitation nozzle that sprays a portion of the abrasive liquid in the circumferential direction of the inner wall of the inner tank 12 to cause the abrasive liquid in the inner tank 12 to swirl and self-stir to prevent precipitation of abrasive grains. 19 are provided in a branched manner via a throttle valve 20.

また、内側タンク12の底部中央には、砥液撹拌用のエ
アノズル2lが設けられ、このエアノズル21と空圧源
22をつなぐエア供給路23にエアフィルタ24と可変
絞り弁25とが組込まれ、砥液撹拌ノズル19による砥
液自己撹拌方式とエア噴出撹拌方式の併用により、ポン
プ14のインペラケーシング下面及び周辺部への砥粒の
沈澱防止を図り、一層砥液撹拌効果を高めることができ
る。
Further, an air nozzle 2l for stirring the abrasive liquid is provided at the center of the bottom of the inner tank 12, and an air filter 24 and a variable throttle valve 25 are installed in the air supply path 23 that connects the air nozzle 21 and the air pressure source 22. By using both the abrasive liquid self-stirring method using the abrasive liquid stirring nozzle 19 and the air jet agitation method, it is possible to prevent abrasive grains from settling on the lower surface and surrounding area of the impeller casing of the pump 14, and further enhance the abrasive liquid stirring effect.

尚、ワイヤソーの下部に設けた砥液戻り口26と内側タ
ンクl2は途中にフィルタ27を備えた砥液回収路28
で接続され、上蓋15には内側タンクl2内の砥液温度
を測定する測温体29が取り付けられていると共に、砥
液タンク11に対する砥液及びエアの配管は全てワンタ
ッチ管継手30を採用して接続し、予備タンクとの交換
やタンク洗浄作業等が容易に行なえるようになっている
Note that the abrasive liquid return port 26 and the inner tank l2 provided at the bottom of the wire saw are connected to an abrasive liquid recovery path 28 with a filter 27 in the middle.
A temperature measuring element 29 for measuring the temperature of the abrasive liquid in the inner tank l2 is attached to the upper lid 15, and one-touch fittings 30 are used for all piping for the abrasive liquid and air to the abrasive liquid tank 11. This makes it easy to replace the tank with a spare tank or to clean the tank.

この発明の砥液循環供給装置は上記のような構成であり
、ワイヤソ一〇ワイヤlを走行させ、ワークテーブル5
上のワーク2をスライス切断するとき、砥液供給路18
の開閉弁31を開き、砥液をノズル6、6に供給する。
The abrasive liquid circulation supply device of the present invention has the above-mentioned configuration, in which the wire saw 10 wire 1 is run and the work table 5 is connected to the work table 5.
When cutting the upper workpiece 2 into slices, the abrasive liquid supply path 18
The on-off valve 31 is opened and the abrasive liquid is supplied to the nozzles 6, 6.

砥液はノズル6、6のスリット7でライン状に溢出状と
なり、この砥液に浸漬したワイヤ1はその下面に砥液が
供給され、ワイヤ1の下面とワ−ク2間へ十二分に砥粒
3を引き込ませることが可能になり、ラッピング効率を
高めて加工精度と生産性の向上を図ることができる。
The abrasive liquid overflows in a line shape from the slits 7 of the nozzles 6 and 6, and the abrasive liquid is supplied to the lower surface of the wire 1 immersed in this abrasive liquid, and the abrasive liquid flows between the lower surface of the wire 1 and the workpiece 2 for more than 10 minutes. This makes it possible to draw in the abrasive grains 3, thereby increasing lapping efficiency and improving processing accuracy and productivity.

また、砥液タンク11においては、砥液供給ポンプl4
から吐出された砥液の一部が砥液撹拌ノズル19で内側
タンクl2内に噴射され、砥液に渦流運動を起こさせ、
自己撹拌すると同時に、エアノズル21からのエア供給
による撹拌とによって砥粒の沈澱防止が効果的に行なわ
れることになる。
In addition, in the abrasive liquid tank 11, an abrasive liquid supply pump l4
A part of the abrasive liquid discharged from the abrasive liquid is injected into the inner tank l2 by the abrasive liquid stirring nozzle 19, causing the abrasive liquid to swirl,
In addition to self-stirring, the abrasive grains are effectively prevented from settling by stirring by air supplied from the air nozzle 21.

〈効果〉 以上のように、この発明によると上記のような構成であ
るので、以下に列挙する効果がある。
<Effects> As described above, since the present invention has the above configuration, it has the following effects.

(I)  多溝ローラ群の外側でワイヤの下部走行部分
に極接近させてノズルを配置し、ノズルの上部スリット
からライン状に溢出させた砥液にワイヤを部分的に浸漬
させた状態でワイヤに砥液を供給するようにしたので、
ワイヤの下面に対して砥液を供給できると共に、ワイヤ
掛け幅内全域に対して均一に砥液を供給することができ
、ワイヤ下面とワーク間へ砥粒を確実に引き込ませるこ
とが可能となり、ラッピング効率を高めて加工精度と生
産性の向上を図ることができる。
(I) A nozzle is placed extremely close to the lower running part of the wire outside the multi-groove roller group, and the wire is partially immersed in the abrasive liquid that overflows in a line from the upper slit of the nozzle. Since the abrasive liquid was supplied to the
It is possible to supply abrasive liquid to the lower surface of the wire, and also to uniformly supply the abrasive liquid to the entire area within the width of the wire, making it possible to reliably draw abrasive grains between the lower surface of the wire and the workpiece. It is possible to improve processing accuracy and productivity by increasing lapping efficiency.

砥液内に粗大異物や加工物破損片等が混入した状態でノ
ズルに供給されても、多溝ローラ群の外側から砥液の供
給を行なうようにしたので、多溝ローラのV溝部への異
物侵入喰込みは防止でき、逆に多溝ローラの回転による
遠心力により多溝ローラ群の外側に異物を飛散させ、ワ
イヤ脱線事故を自然に防止することができる。
Even if the abrasive liquid is supplied to the nozzle with coarse foreign matter or broken pieces of the workpiece mixed in, the abrasive liquid is supplied from the outside of the multi-groove roller group, so there is no problem with the V-groove portion of the multi-groove roller. Intrusion and biting of foreign matter can be prevented, and conversely, the centrifugal force caused by the rotation of the multi-groove rollers can scatter foreign matter to the outside of the multi-groove roller group, naturally preventing wire derailment accidents.

ノズルのスリットからライン状に溢出させた砥液にワイ
ヤを部分的に浸漬させるようにしたので、簡単な構造で
砥液の中にワイヤとワークを浸漬させた状態と同じ効果
が得られ、シンプルで作業性が良くなる。
Since the wire is partially immersed in the abrasive liquid that spills out in a line from the slit of the nozzle, the same effect as the wire and workpiece immersed in the abrasive liquid can be obtained with a simple structure, making it simple. Improves workability.

(It)  多溝ローラの軸間距離を必要最小限に設定
することができ、ワイヤの剛性を高めてラッピング効率
を向上させることができ、しかも砥液を特別に密封する
必要がないため、多溝ローラとO (至) ワーク間を砥液が自由に介入飛散することにより、相互
の相対温度差も平均化され、加工精度の向上を図ること
ができる。
(It) The distance between the axes of the multi-groove roller can be set to the minimum necessary, increasing the rigidity of the wire and improving the lapping efficiency. Moreover, there is no need to specially seal the abrasive liquid, so the distance between the axes of the multi-groove roller can be set to the minimum necessary. By freely intervening and scattering the abrasive liquid between the grooved roller and the O (to) workpiece, the mutual relative temperature difference is also averaged, and it is possible to improve machining accuracy.

(V)  砥液タンク内の砥液を砥液供給ポンプから吐
出する砥液で自己撹拌させるようにしたので、砥液供給
ポンプと砥液撹拌装置を一体構造化することができ全体
の簡素化と砥液タンクのコンパクト化を図ることができ
ると共に、砥液温度調整用二重壁構造の外側タンクとの
熱交換効率を向上させることができる。
(V) Since the abrasive liquid in the abrasive liquid tank is self-stirred by the abrasive liquid discharged from the abrasive liquid supply pump, the abrasive liquid supply pump and abrasive liquid agitation device can be integrated into one structure, simplifying the overall structure. The abrasive liquid tank can be made more compact, and the heat exchange efficiency with the outer tank having a double wall structure for adjusting the abrasive liquid temperature can be improved.

(II)  砥液タンクの内側タンクを上部が円筒で下
部が円錐のすり鉢状としたので、砥粒沈澱の死角を除去
し、比重の重い砥粒の外周隅底部への沈澱発生を確実に
防止することができる。
(II) The inner tank of the abrasive liquid tank is shaped like a mortar with a cylindrical upper part and a conical lower part, which eliminates blind spots for abrasive grain precipitation and reliably prevents abrasive grains with heavy specific gravity from settling at the bottom of the outer periphery. can do.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明に係る砥液循環供給装置の構造を一部
縦断した斜視図、第2図はワイヤによるワーク切断の状
態を示す縦断面図、第3図はワイヤソーとノズルの関係
を示す正面図である。 1・・・ワイヤ       2・・・ワーク3・・・
砥粒 5・・・ワークテーブル 7・・・スリット 12・・・内側タンク 14・・・砥液供給ポンプ l8・・・砥液供給路 21・・・エアノズル 4・・・多溝ローラ 6・・・ノズル 11・・・砥液タンク 13・・・外側タンク 16・・・モータ 19・・・砥液撹拌ノズル
Fig. 1 is a partially longitudinal perspective view of the structure of the abrasive liquid circulation supply device according to the present invention, Fig. 2 is a longitudinal sectional view showing the state of cutting a workpiece with a wire, and Fig. 3 shows the relationship between the wire saw and the nozzle. It is a front view. 1...Wire 2...Work 3...
Abrasive grain 5...Work table 7...Slit 12...Inner tank 14...Abrasive liquid supply pump l8...Abrasive liquid supply path 21...Air nozzle 4...Multi-groove roller 6...・Nozzle 11... Abrasive liquid tank 13... Outer tank 16... Motor 19... Abrasive liquid stirring nozzle

Claims (3)

【特許請求の範囲】[Claims] (1)複数の多溝ローラ群の外側にワイヤを多重並列状
に巻付け、多溝ローラ群を正逆転させることによりワイ
ヤを多溝ローラ間で往復動させ、多溝ローラ間を移動す
るワイヤでワークを切断するようにしたワイヤソーにお
い て、多溝ローラ群の外側で走行ワイヤの下部接近位置に
長孔状の上部スリットから砥液を溢出させてワイヤの下
面に供給するノズルを設け、このノズルに砥液タンクの
砥液供給ポンプで砥液を供給するようにしたことを特徴
とするワイヤソーの砥液循環供給装置。
(1) Wires are wound in parallel in multiple layers around the outside of multiple multi-groove roller groups, and the wire is moved back and forth between the multi-groove rollers by reciprocating the multi-groove roller groups, and the wire moves between the multi-groove rollers. In a wire saw that cuts a workpiece with An abrasive liquid circulation supply device for a wire saw, characterized in that an abrasive liquid is supplied by an abrasive liquid supply pump in an abrasive liquid tank.
(2)砥液タンクの内部に砥液供給ポンプを収納し、こ
の砥液供給ポンプの吐出口とノズルを接続する砥液供給
路に砥液の一部を砥液タンクの内壁円周方向に噴射する
砥液撹拌ノズルを分岐状に設けたことを特徴とする請求
項(1)に記載のワイヤソーの砥液循環供給装置。
(2) An abrasive liquid supply pump is housed inside the abrasive liquid tank, and a portion of the abrasive liquid is distributed in the circumferential direction of the inner wall of the abrasive liquid tank into the abrasive liquid supply path that connects the discharge port of the abrasive liquid supply pump and the nozzle. The abrasive liquid circulation supply device for a wire saw according to claim 1, characterized in that the abrasive liquid stirring nozzle for spraying the abrasive liquid is provided in a branched manner.
(3)砥液タンクが、上部円筒で下部が円錐のすり鉢状
に形成されている請求項(2)に記載のワイヤソーの砥
液循環供給装置。
(3) The abrasive liquid circulation supply device for a wire saw according to (2), wherein the abrasive liquid tank is formed in the shape of a mortar with a cylindrical upper part and a conical lower part.
JP483390A 1990-01-12 1990-01-12 Circulating feeding device of grinding liquid of wire saw Pending JPH03208555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP483390A JPH03208555A (en) 1990-01-12 1990-01-12 Circulating feeding device of grinding liquid of wire saw

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP483390A JPH03208555A (en) 1990-01-12 1990-01-12 Circulating feeding device of grinding liquid of wire saw

Publications (1)

Publication Number Publication Date
JPH03208555A true JPH03208555A (en) 1991-09-11

Family

ID=11594697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP483390A Pending JPH03208555A (en) 1990-01-12 1990-01-12 Circulating feeding device of grinding liquid of wire saw

Country Status (1)

Country Link
JP (1) JPH03208555A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6067976A (en) * 1994-01-10 2000-05-30 Tokyo Seimitsu Co., Ltd. Wafer cut method with wire saw apparatus and apparatus thereof
US6161533A (en) * 1996-10-01 2000-12-19 Nippei Toyoma Corp. Slurry managing system and slurry managing method
JP2006237508A (en) * 2005-02-28 2006-09-07 Mitsubishi Chemical Engineering Corp Method for supplying polishing liquid
US7249995B2 (en) 1998-11-24 2007-07-31 Matsushita Electric Industrial Co., Ltd. Apparatus and method for feeding slurry
CN110227294A (en) * 2019-06-17 2019-09-13 中国工程物理研究院激光聚变研究中心 Polishing fluid circulated filter system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6067976A (en) * 1994-01-10 2000-05-30 Tokyo Seimitsu Co., Ltd. Wafer cut method with wire saw apparatus and apparatus thereof
US6161533A (en) * 1996-10-01 2000-12-19 Nippei Toyoma Corp. Slurry managing system and slurry managing method
US7249995B2 (en) 1998-11-24 2007-07-31 Matsushita Electric Industrial Co., Ltd. Apparatus and method for feeding slurry
US7331844B2 (en) 1998-11-24 2008-02-19 Matsushita Electric Industrial Co., Ltd. Polishing method
JP2006237508A (en) * 2005-02-28 2006-09-07 Mitsubishi Chemical Engineering Corp Method for supplying polishing liquid
JP4524633B2 (en) * 2005-02-28 2010-08-18 三菱化学エンジニアリング株式会社 Polishing liquid supply method
CN110227294A (en) * 2019-06-17 2019-09-13 中国工程物理研究院激光聚变研究中心 Polishing fluid circulated filter system
CN110227294B (en) * 2019-06-17 2024-04-19 中国工程物理研究院激光聚变研究中心 Polishing solution circulating and filtering system

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