JPH03206639A - Semiconductor inspection handling apparatus - Google Patents

Abstract

PURPOSE:To remove a trouble, to exchange a type and to open a thermostatic bath at an inspection operation for a short time and to increase the rate of operation of an apparatus by a method wherein the thermostatic bath is divided according to a requirement and a temperature can be adjusted at individual baths. CONSTITUTION:When a test board 11 and a contact head 13 are replaced in order to exchange a type while the inside of a thermostatic bath 14 is kept in a low-temperature state, partitioning sheets 15a, 15b are raised by using partitioning-sheet drive parts 16a, 16b, and the bath 14 is divided into a test-part front chamber 17, a test-part chamber 17b and test-part rear chamber 17c. While the chambers 17a and 17c are kept in the low-temperature state, their temperature is raised to a room-temperature state which does not generate frost and dew even when only the chamber 17b is opened. Then, the chamber 17b reaches the room-temperature state, an IC test head 3, the test board 11 and the contact head 13 are replaced by those for another type, they are mounted again on the bath 14 and the chamber 17b is returned to the low- temperature state.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a handling device for inspecting semiconductor devices.

[Conventional technology]

FIG. 2 is a partially sectional front view showing a conventional semiconductor inspection handling device. In the figure, (1) ζ is the loader section, (2
) is the main body, (3) is an IC tester head that can be attached to and detached from the main body (1), (4) is an unloader part, (5) is a semiconductor device to be tested, and (6) is a plurality of semiconductor devices (5). The pallet to be loaded, (71 is Briheat Elevation, (
8a). (8bl, (8c) are the pallet rails on which the pallet (6) moves, (9a) and (9b) are the pallet 1/drive claws, and the push-up arm is the push-up arm. 01) is a test that can be attached to and detached from the IC test head (3) Board, (self) is a contactor, a3) is a contactor head equipped with a plurality of contactors (self), and 0@ is a constant temperature bath that covers the main body part {2}.

Next, the operation will be explained. The pallet (6) supplied from the loader section (1) is transferred to the briheat elevator (7).
and rises to the pallet rail (8a) while increasing or decreasing the temperature in the constant temperature oven qO.

Next, the pallet (6) is attached to the pallet/drive claw (9a)
+C When it yaws and moves on the pallet 1 rail (8a) and reaches the pallet rail (8b), the push-up arm 001 rises and presses the semiconductor device (5) on the pallet (6) against the contactor O, electrically connecting it. Make contact and use the contactor (
IC) through the test board 01) with wiring continuity
Electrical testing is performed with the tester head (3).

When the inspection is completed, the push-up arm 00) is lowered and the semiconductor device (5) is returned to the pallet (6).
The pallet rail (8) is moved by the pallet drive claw (9b).
C) moved above and stored in the unloader section (4).

[Problem to be solved by the invention]

Conventional semiconductor testing and handling equipment was configured as described above. When the overall thirst level changes, it takes time for the temperature to stabilize to a certain degree before starting the test again. Especially in the case of low-temperature tests, dew and frost occur before the thermostatic chamber is opened. In order to prevent this, the temperature of the thermostatic chamber had to be raised to ?W degrees indoors, which caused the problem of lowering the operating rate of the device.

This invention was made to solve the above-mentioned problems, and its purpose is to provide a semiconductor inspection and handling device that can easily perform troubleshooting, inspection, and product replacement in a short time, and can improve the device operating rate. shall be.

[Means to solve the problem]

The semiconductor inspection and handling device according to the present invention divides the inside of the constant temperature chamber when necessary, and is capable of raising or lowering the temperature only in the divided constant temperature chamber.

[Effect]

The semiconductor inspection handling device according to the present invention uses a divisible thermostatic chamber to open only the minimum necessary portion of the thermostatic chamber.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (15a) and (15b) are constant temperature chamber partition plates, (16aL (16b) is this constant temperature chamber partition plate (15a)
), the partition plate drive unit attached to (15b), (1
7a) is the test 1/department front room, (17b) is the test department room, (
17c) is the rear chamber of the test section.

Note that the other symbols are the same as those of the prior art, so the explanation will be omitted.

Next, the operation will be explained. The inside of the thermostatic chamber (+4) is kept in a low drought state, and test board 01 is used for product replacement.
) and contactor head 03) will be explained.

The thermostatic chamber partition plates (15a) and (15b) are raised by the partition plate drive parts (16a) and (16b), and the thermostatic chamber q@
The interior is divided into a test section front chamber (17a), a test section room (+7b3) and a test section rear chamber (17c), and the test section front chamber (17a) and test section rear chamber (17e) are kept at a low temperature. Even if only the test room (17b) is left open, the temperature will rise to a room temperature where no frost or dew will occur.
7b) is at room temperature, the IC test head (3
), tesl board 01), and contact head 03
) and contact 1.
The head 03) is replaced with one for another type, and the head 03 is again attached to the constant temperature oven 0, and the test chamber (17b) is returned to a low temperature state.

In addition, in the above embodiment, the memorial tank partition plate (15a) (15
Although the case where b) has two sheets has been described, it goes without saying that the inside of the thermostatic chamber may be further subdivided as necessary.

〔Effect of the invention〕

As described above, according to the present invention, the constant temperature drying tank is divided as necessary and the temperature can be adjusted for each divided constant drying tank. The effect is that the tank can be opened in a short time and that the operating rate of the device can be improved.

[Brief explanation of drawings]

FIG. 1 is a partially sectional front view showing a semiconductor testing and handling device according to an embodiment of the present invention, and FIG. 2 is a partially sectional front view showing a conventional semiconductor testing and handling device. In the figure, (15a) and (15b) are thermostatic chamber partition plates, and (16a) and (16b) are partition plate drive units. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

[Claims] 1. A semiconductor testing and handling device for inspecting semiconductor devices, characterized in that a constant temperature chamber is divided and the temperature can be adjusted for each divided constant temperature chamber.