JPH03201216A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPH03201216A
JPH03201216A JP5044090A JP5044090A JPH03201216A JP H03201216 A JPH03201216 A JP H03201216A JP 5044090 A JP5044090 A JP 5044090A JP 5044090 A JP5044090 A JP 5044090A JP H03201216 A JPH03201216 A JP H03201216A
Authority
JP
Japan
Prior art keywords
magnetic
film
magnetic recording
protective film
liquid paraffin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5044090A
Other languages
Japanese (ja)
Other versions
JPH0648536B2 (en
Inventor
Yusaku Sakai
雄作 酒井
Yoshisuki Kitamoto
北本 善透
Shinji Otaki
大滝 信治
Yasushi Tamaki
環 康
Hikari Nagai
永井 光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5044090A priority Critical patent/JPH0648536B2/en
Publication of JPH03201216A publication Critical patent/JPH03201216A/en
Publication of JPH0648536B2 publication Critical patent/JPH0648536B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To maintain the effect of a lubricant and to improve wear resistance by coating a magnetic recording layer with a mixture liquid of a solvent containing silicon and a material which can be easily thermally decomposed, baking the coating film as in such a state that the solvent has projected parts from its film surface along the material which can be easily thermally decom posed. CONSTITUTION:A mixture liquid containing silicon and liquid paraffin is applied on a magnetic film 1 by spin coating, and the coating film thus formed has projections 7 projecting from the middle level L and recesses 8 lower than the level L. Namely, by applying the mixture liquid, the liquid paraffin forms into spheres as shown by (a) in the figure since the liquid paraffin easily volatilizes by heat, and lots of particles of the liquid paraffin appear on the mixture liquid (b) since these particles repel one another. By baking the film in this state to cure the mixture liquid (b), the particles of liquid paraffin easily decompose and evaporate to leave the residual film with concave recesses 8 and projections 7 like volcanos. Thereby, a lubricant can be held for a longer time on the medium and the wear resistance against sliding can be improved.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、磁気ディスク装置等に使用される磁気記録媒
体の製造方法に関し、特にC3Sタイプの浮上磁気ヘッ
ドを使用する磁気記録再生装置用磁気記録媒体の改良に
適する製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for manufacturing a magnetic recording medium used in a magnetic disk device, etc., and particularly to a method for manufacturing a magnetic recording medium for use in a magnetic recording and reproducing device using a C3S type floating magnetic head. This invention relates to a manufacturing method suitable for improving media.

〔技術の背景〕[Technology background]

データ処理装置などに使用される磁気ディスク装置は、
近年急激なデータ記録密度の向上、大容量化が進み、ま
た高速性、経済性の点から装置は小型化の傾向にある。
Magnetic disk devices used in data processing equipment, etc.
In recent years, there has been a rapid increase in data recording density and capacity, and there is a trend toward smaller devices in terms of speed and economy.

このような高記録密度の要求に伴い、記録媒体が、従来
の塗布膜から連続磁性膜に変わりつつある。
With the demand for such high recording density, recording media are changing from conventional coated films to continuous magnetic films.

即ち従来は磁性粉を合成樹脂などのバインダに混入し、
これをアルミニウム基板にスピンコードして塗布膜を形
威し、磁気記録媒体の磁性膜を構成している。これに対
し、連続磁性膜は、鉄や鉄−コバルト系合金などの磁性
材料を、スパッタや蒸着、メツキなどの手法で基板上に
形成するもので、バインダ(結合剤)を含まないので連
続的な磁性膜(連続磁性媒体)と呼ばれている。この連
続磁性膜は、従来の塗布膜のように合成樹脂などのバイ
ンダを含む非連続磁性膜に比して磁気特性が良く、製造
工程も簡単になる。また記録密度も格段と向上し、高記
録密度媒体として優れた特性を有するものが得られてお
り、特にフェライト酸化膜は、材質的にも硬く、更に耐
蝕性がよく、磁気記録媒体としては非常に良好なものと
して評価されている。
In other words, conventionally magnetic powder was mixed into a binder such as synthetic resin,
This is spin-coded onto an aluminum substrate to form a coating film, which constitutes the magnetic film of the magnetic recording medium. Continuous magnetic films, on the other hand, are made by forming magnetic materials such as iron or iron-cobalt alloys on a substrate using methods such as sputtering, vapor deposition, or plating, and since they do not contain a binder, they are continuous. It is called a continuous magnetic film (continuous magnetic medium). This continuous magnetic film has better magnetic properties than a discontinuous magnetic film containing a binder such as a synthetic resin, such as a conventional coated film, and the manufacturing process is simpler. In addition, recording density has improved significantly, and media with excellent characteristics as high-density recording media have been obtained. In particular, ferrite oxide films are hard materials and have good corrosion resistance, making them extremely suitable for magnetic recording media. It has been rated as good.

ところで従来の磁気ディスク装置と同様にこの連続磁性
膜を使用した磁気ディスク装置にも、C3S (Con
tact 5tart 5top)方式が採用される。
By the way, similar to conventional magnetic disk devices, magnetic disk devices that use this continuous magnetic film also have C3S (Con
tact 5tart 5top) method is adopted.

したがって通常は、磁気ヘッドがディスク面から浮上し
て読書きを行なうが、磁気記録媒体の回転開始時および
停止時のように浮上刃が発生しない状態では、磁気記録
媒体表面と磁気ヘッドのスライダーが接触し摺動する。
Therefore, normally the magnetic head levitates above the disk surface to read and write, but when a floating edge is not generated, such as when the magnetic recording medium starts or stops rotating, the surface of the magnetic recording medium and the slider of the magnetic head are Contact and slide.

そのため磁気ヘッドが摺動接触するヘッドランディング
ゾーンの磁気記録媒体表面が摩耗して、摩耗粉が磁気記
録媒体の全面に拡散し、ヘッドクラッシュを引き起す原
因となる。したがって磁気記録媒体表面の摩耗を極力防
止することが必要となる。
As a result, the surface of the magnetic recording medium in the head landing zone where the magnetic head makes sliding contact is worn, and abrasion particles are spread over the entire surface of the magnetic recording medium, causing a head crash. Therefore, it is necessary to prevent wear on the surface of the magnetic recording medium as much as possible.

〔従来の技術〕[Conventional technology]

この磁気記録層の摩耗を防止するために従来から、次の
ような方法が採用されている。
Conventionally, the following methods have been employed to prevent wear of the magnetic recording layer.

■磁気記録層表面に、磁気ヘッドと磁気記録層との距離
があまり大きくならない程度の厚さで、酸化シリコン(
SiO□)や樹脂などの保護膜を設ける。
■On the surface of the magnetic recording layer, apply silicon oxide (
A protective film such as SiO□) or resin is provided.

■磁気ヘッドの接触摺動の際の摩耗を軽減するために、
磁気記録層上もしくは保護膜上に潤滑剤を塗布して、磁
気ヘッドスライダ−の滑りをよくする。
■To reduce wear when the magnetic head contacts and slides,
A lubricant is applied on the magnetic recording layer or protective film to improve the sliding of the magnetic head slider.

■潤滑剤を塗布すると、潤滑剤で磁気ヘッドスライダ−
が磁気記録媒体面に粘着し、磁気記録媒体が回転開始す
る際に、磁気ヘッドの支持機構を破損したりヘッドクラ
ッシュを招く恐れがある。
■When the lubricant is applied, the magnetic head slider is exposed to the lubricant.
sticks to the surface of the magnetic recording medium, and when the magnetic recording medium starts rotating, there is a risk of damaging the support mechanism of the magnetic head or causing a head crash.

そのため、この粘着を防止する目的で、特開昭56−2
2221号公報などに記載の手法により、第1図(イ)
に示すように、磁気記録層l上に設けられた保護膜2の
表面に無数の突起3・・・を設ける。突起3・・・間の
隙間に潤滑剤が含浸され、スライダーと磁気記録媒体間
の潤滑剤膜が薄くなるので、粘着が解消され、また平滑
な面に比べ摩擦係数も小さくなる。なお4はアルミニウ
ム基板、5はその表面に形成されたアルマイト層である
Therefore, in order to prevent this adhesion, JP-A-56-2
Figure 1 (a) was created using the method described in Publication No. 2221, etc.
As shown in FIG. 2, numerous protrusions 3 are provided on the surface of the protective film 2 provided on the magnetic recording layer l. The gaps between the protrusions 3 are impregnated with lubricant, and the lubricant film between the slider and the magnetic recording medium becomes thinner, eliminating adhesion and reducing the coefficient of friction compared to a smooth surface. Note that 4 is an aluminum substrate, and 5 is an alumite layer formed on the surface thereof.

■磁気記録層上の保護膜2として、多孔膜を使用するか
、フォトエツチングなどの手法で保護膜表面に、第1図
(ロ)に示すように微小な孔6・・・を設けて、潤滑剤
を含浸する。また、特開昭5622219号公報に記載
されているように、塗膜型の磁気記録媒体において、磁
性塗料にパラフィン粒子を混練して塗布し、焼き付ける
ことで、潤滑剤保持用の微細な凹凸を直接磁性塗膜面に
形成する方法が提案されている。
■As the protective film 2 on the magnetic recording layer, a porous film is used, or minute holes 6 are formed on the surface of the protective film by a method such as photo-etching, as shown in FIG. 1 (b). Impregnate with lubricant. Furthermore, as described in JP-A No. 5,622,219, fine irregularities for retaining lubricant are created in coating-type magnetic recording media by kneading and applying paraffin particles to magnetic paint and baking the mixture. A method of directly forming the magnetic coating on the surface has been proposed.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところがこれらの手法はいずれも、次のような問題を有
している。即ち■のように単純に保護膜を設けるだけで
は、摩耗を防止できない。基板のアルマイト面は鏡面に
仕上げられ、その上に磁性膜を設けるため、磁性膜表面
も鏡面状態の極めて平滑な面になる。したがって磁性股
上の保護膜も平滑で、磁気ヘッドが浮上しないで保護膜
と摺動接触している状態では、保護膜が摩耗することに
より塵埃が発生し、致命的な障害であるヘッドクラッシ
ュを誘発する恐れがある。
However, all of these methods have the following problems. That is, simply providing a protective film as shown in (2) cannot prevent wear. Since the alumite surface of the substrate is finished to a mirror finish and the magnetic film is provided on it, the surface of the magnetic film also becomes a mirror-like and extremely smooth surface. Therefore, the protective film on the magnetic crotch is smooth, and if the magnetic head is not floating and is in sliding contact with the protective film, the protective film will wear out and generate dust, causing a fatal head crash. There is a risk that

■のように潤滑剤を塗布して滑りをよくすれば、初期の
間は摩擦係数が小さく有効であるが、経時的に潤滑剤が
消耗すると、潤滑作用が低下し、摩耗粉が発生する。か
といって多量の潤滑剤を塗布すると、磁気記録媒体が停
止しスライダーと接触している際に、潤滑剤でスライダ
ーが磁気記録媒体面に粘着するので、次に磁気記録媒体
が回転開始するときに、磁気ヘッドが急激に磁気記録媒
体面から引き剥がされる際の衝撃でヘッドクラッシュを
招いたり、磁気ヘッドを支持しているジンバルを破損し
たりする恐れがある。
Applying a lubricant to improve slippage as in (2) is effective in the initial stage because the coefficient of friction is small, but as the lubricant wears out over time, the lubricating effect decreases and wear particles are generated. However, if a large amount of lubricant is applied, the lubricant will cause the slider to stick to the surface of the magnetic recording medium when the magnetic recording medium is stopped and in contact with the slider, causing problems when the magnetic recording medium starts rotating next time. Furthermore, there is a risk that the impact when the magnetic head is suddenly peeled off from the surface of the magnetic recording medium may cause a head crash or damage the gimbal that supports the magnetic head.

■のように磁気記録媒体面に無数の突起3・・・を設け
れば、突起の隙間に潤滑剤が含浸されるので、■の手法
における問題はある程度軽減されるが、遠心力で外側に
流動して消失する。そのため、含浸剤を全面に安定して
かつ均一に保持することができない。従って潤滑剤の寿
命が短かく、長期使用に耐えることができない。
If countless protrusions 3 are provided on the surface of the magnetic recording medium as shown in (2), the lubricant will be impregnated into the gaps between the protrusions, so the problem with the method (2) will be alleviated to some extent, but centrifugal force will cause It flows and disappears. Therefore, the impregnating agent cannot be held stably and uniformly over the entire surface. Therefore, the life of the lubricant is short and cannot withstand long-term use.

■のように保護膜を多孔質にすれば、潤滑剤は移動し難
く潤滑剤の持ちは良くなるが、保護膜表面が平滑なため
、摺動時の耐摩耗性が低下する。
If the protective film is made porous as in (2), the lubricant will be difficult to move and the lubricant will last longer, but since the surface of the protective film is smooth, the wear resistance during sliding will decrease.

またマスクを使用してパターニングする手法では、目標
の1μm程度の孔を形成することは不可能で、10μm
程度の大きなものしか得られない。
Furthermore, with the method of patterning using a mask, it is impossible to form holes with a target diameter of about 1 μm;
You can only get something of a high degree.

また、前記の特開昭56−22219号公報に記載のよ
うに磁性塗料中にパラフィン粒子を混練して焼き付ける
方法では、磁性膜中に非磁性の樹脂が存在することに加
えて、パラフィン粒子の痕跡による空洞が発生するため
、磁性膜としての特性を低下させることになり、記録密
度の高い媒体には適用不可能である。しかも、磁性塗料
は粘度が高いため、パラフィン粒子を均一に分散させる
ことが困難であり、空洞が集中したりして、ビットエラ
ーやS/N比の低下などの問題がある。磁性塗料は粘度
が高いため、表面張力を利用して、パラフィン粒子の隆
起に沿った突起を形成することも困難である。特に、本
発明のようにスパッタや蒸着などの手法で連続磁性膜を
形成する媒体の場合は、磁性塗料にパラフィン粒子を混
練する方法は適用できない。
In addition, in the method of kneading and baking paraffin particles in a magnetic paint as described in JP-A-56-22219, in addition to the presence of non-magnetic resin in the magnetic film, paraffin particles Since cavities are generated due to the traces, the characteristics of the magnetic film are deteriorated, and this method is not applicable to media with high recording density. Moreover, since the magnetic paint has a high viscosity, it is difficult to uniformly disperse paraffin particles, and cavities may be concentrated, resulting in problems such as bit errors and a decrease in the S/N ratio. Since magnetic paint has a high viscosity, it is difficult to use surface tension to form protrusions along the ridges of paraffin particles. In particular, in the case of a medium in which a continuous magnetic film is formed by a method such as sputtering or vapor deposition as in the present invention, the method of kneading paraffin particles into a magnetic paint cannot be applied.

本発明の技術的課題は、従来の磁気記録媒体・における
このような問題を解消し、連続磁性膜型のあるいは高記
録密度の媒体においても、潤滑剤の持ちが良く、かつ耐
摩耗性および磁気特性にも優れた磁気記録媒体を実現可
能とすることにある。
The technical problem of the present invention is to solve these problems with conventional magnetic recording media, and to achieve long lubricant retention, wear resistance, and magnetic properties even in continuous magnetic film type or high recording density media. The object is to make it possible to realize a magnetic recording medium with excellent characteristics.

〔課題を解決するための手段〕[Means to solve the problem]

この技術的課題を解決するために講じた本発明による技
術的手段は、 基板上に磁気記録層を形成する工程と、前記磁気記録層
上に保護膜を形成する工程と、前記保護股上に潤滑剤を
塗布する工程と、を含む磁気記録媒体の製造方法であっ
て、前記保護膜形成工程は、 珪素を含む溶剤と、易熱分解性ないし易熱蒸発性の物質
とを混合した後、 前記混合液を前記磁気記録層上に塗布し、前記溶剤が前
記物質の表面に沿って当該溶剤の膜表面よりも隆起した
状態とし、 しかる後、焼付けることによって、前記溶剤の硬化と前
記易熱分解性ないし易熱蒸発性の物質の分解、蒸発を同
時に行なわせること、 を特徴とする方法を採っている。
The technical means of the present invention taken to solve this technical problem includes a step of forming a magnetic recording layer on a substrate, a step of forming a protective film on the magnetic recording layer, and a step of lubricating the protective crotch. A method for manufacturing a magnetic recording medium, which includes a step of coating a solvent, and the step of forming a protective film includes: mixing a silicon-containing solvent with a thermally decomposable or thermally evaporable substance; The mixed solution is applied onto the magnetic recording layer so that the solvent is raised along the surface of the substance above the surface of the solvent film, and then baked to harden the solvent and cure the heat-resistant layer. The method is characterized by the simultaneous decomposition and evaporation of decomposable or thermally evaporative substances.

易熱分解性ないし易熱蒸発性の物質としては、流動パラ
フィンが適している。
Liquid paraffin is suitable as the easily thermally decomposable or thermally evaporable substance.

[作用] この方法によれば、流動パラフィンの蒸発した痕跡が凹
部や突起となる。すなわち、珪素を含む溶剤は粘度が低
く、表面張力で流動パラフィン等の球に沿って隆起し易
いため、流動パラフィン等が分解蒸発した後に、平面状
の保護膜面より突出した突起と、該保護膜面より窪んだ
独立した凹部とが形成される。粘度の低い珪素を含む溶
剤に、流動パラフィン等の易熱分解性ないし易熱蒸発性
の物質を混合するため、溶剤中に容易にかつ均一に分散
でき、保護膜面の全面に均一に凹凸を形成できる。
[Operation] According to this method, traces of evaporated liquid paraffin become recesses and protrusions. In other words, a solvent containing silicon has a low viscosity and tends to bulge along the spheres of liquid paraffin etc. due to surface tension. An independent concave portion recessed from the film surface is formed. Because easily heat-decomposable or heat-evaporable substances such as liquid paraffin are mixed with a low-viscosity silicon-containing solvent, they can be easily and uniformly dispersed in the solvent, creating uniform unevenness over the entire surface of the protective film. Can be formed.

また流動パラフィンの添加量や成分などを適当に選択す
ることにより、流動パラフィンの蒸発痕跡の深さや突起
の高さが種々な凹凸を形成することで、保護膜面より高
い無数の突起と保護膜面より低い無数の凹部を得ること
ができる。
In addition, by appropriately selecting the amount of liquid paraffin added and its ingredients, the depth of the liquid paraffin's evaporation traces and the height of the protrusions form various irregularities, resulting in countless protrusions higher than the surface of the protective film and the protective film. Numerous recesses lower than the surface can be obtained.

従来のように、パラフィン粒子を磁性塗料中に混練して
焼き付ける方法と違って、磁性膜の上の保護膜を形成す
る工程で、該保護膜面に凹凸を形成するため、連続磁性
膜の媒体にも適用できる。
Unlike the conventional method of kneading paraffin particles into magnetic paint and baking them, the continuous magnetic film medium is It can also be applied to

また、本発明の方法を塗膜型媒体のような非連続磁性膜
の媒体に適用した場合でも、磁性塗膜には空洞が形成さ
れないので、従来の方法のように磁性塗膜中の非磁性領
域が増大して磁気特性を低下させるようなこともなく、
高記録密度の媒体に適している。
Furthermore, even when the method of the present invention is applied to a medium with a discontinuous magnetic film such as a coated film type media, no cavities are formed in the magnetic film. There is no increase in area and deterioration of magnetic properties.
Suitable for high recording density media.

〔発明の実施例〕[Embodiments of the invention]

次に本発明による磁気記録媒体の製造方法が実際上どの
ように具体化されるかを実施例で説明する。第2図は本
発明の方法で作製される磁気記録媒体の第1実施例を示
すもので、(イ)は断面図、(ロ)は拡大断面図である
。アルミニウム基板4の表面を酸化してアルマイト層5
を形成し、その表面に磁性膜1として、y−FeO,な
どをスパッタなどの手法で設けである。この磁性膜1の
上に、無数の突起7・・・と凹部8・・・が形成されて
いる。Lは磁性膜1から所定の膜厚を隔てた位置に形成
された平面状の保護膜面の位置であり、以下この保護膜
面の位置を中間レベルと呼ぶ。この中間レベルLに対し
、突起7・・・が火口状に隆起しており、球面状の凹部
8・・・は中間レベルLに対し窪んだ形状になっている
Next, examples will be used to explain how the method for manufacturing a magnetic recording medium according to the present invention is actually implemented. FIG. 2 shows a first embodiment of a magnetic recording medium manufactured by the method of the present invention, in which (a) is a cross-sectional view and (b) is an enlarged cross-sectional view. Oxidize the surface of the aluminum substrate 4 to form an alumite layer 5
is formed, and y-FeO or the like is provided on the surface thereof as a magnetic film 1 by a method such as sputtering. On this magnetic film 1, numerous protrusions 7 and recesses 8 are formed. L is the position of a planar protective film surface formed at a position separated from the magnetic film 1 by a predetermined film thickness, and hereinafter the position of this protective film surface will be referred to as an intermediate level. The protrusions 7 . . . are raised like craters with respect to the intermediate level L, and the spherical recesses 8 .

第3図、第4図は磁気記録媒体の他の実施例を説明する
ために、磁気記録媒体の表面状態を模式的に示したもの
で、(イ)は断面図、(ロ)は部分断面斜視図である。
3 and 4 schematically show the surface state of a magnetic recording medium in order to explain other embodiments of the magnetic recording medium, (a) is a cross-sectional view, and (b) is a partial cross-section. FIG.

磁性膜l上に設けた保護膜2には、無数の突起7・・・
と無数の凹部8・・・が形成されている。第3図では、
突起7・・・の総てが一定の形状および高さになってお
り、凹部8・・・も総で一定形状および一定深さになっ
ている。これに対し第4図の場合は、突起7aで示され
るように、突起が段付き形状になっている。同様に、途
中から深さを変えて凹部8・・・も段付き形状としても
よい。
The protective film 2 provided on the magnetic film 1 has countless protrusions 7...
and countless recesses 8... are formed. In Figure 3,
All of the protrusions 7... have a constant shape and height, and the recesses 8... also have a constant shape and a constant depth. On the other hand, in the case of FIG. 4, the protrusion has a stepped shape, as shown by the protrusion 7a. Similarly, the depth of the recesses 8 may be changed from the middle to have a stepped shape.

突起7bは、他の突起7.7aより低くなっており、こ
のように突起の高さはまちまちであっても差支えない。
The protrusion 7b is lower than the other protrusions 7.7a, and the heights of the protrusions may vary in this way.

また各凹部8・・・の深さも一定である必要はない。Furthermore, the depth of each recess 8 does not need to be constant.

このように、平面状をしたある中間レベルLから突出し
た無数の突起と該中間レベルLより窪んだ無数の凹部を
備えた構成になっている。そのため、独立した無数の凹
部8・・・中に潤滑剤が含浸されるので、潤滑剤の移動
はなく、安定して保持される。その結果長期にわたって
潤滑作用が維持され、保護膜の摩耗による摩耗粉の発生
が防止される。また少々の摩耗粉が発生しても、突起7
・・・間の中間レベルLの保護膜面に溜まるので、ヘッ
ドクラッシュの要因とはならない。
In this way, it has a configuration including innumerable protrusions protruding from a certain planar intermediate level L and innumerable recesses recessed from the intermediate level L. Therefore, since the lubricant is impregnated into the numerous independent recesses 8, the lubricant does not move and is stably held. As a result, the lubricating effect is maintained over a long period of time, and the generation of abrasion powder due to wear of the protective film is prevented. Also, even if a small amount of wear powder is generated, the protrusion 7
. . . Since it accumulates on the protective film surface at the intermediate level L between them, it does not become a cause of head crash.

情報の記録/再生に際しては、各突起7・・・、7a・
・・の頂端に磁気ヘッドスライダ−が摺動接触するので
、第1図(ロ)のように保護膜2が平滑なためにスライ
ダーが保護膜面にぴったり密着するものに比べて、摩擦
係数が小さく、摩耗が軽減される。
When recording/reproducing information, each protrusion 7..., 7a...
Because the magnetic head slider comes into sliding contact with the top end of Small and reduces wear.

次に第2図のように火口状に隆起した突起と保護膜面よ
り窪んだ独立した球面状凹部を無数に有する保護膜を得
るための本発明方法の実施例を説明する。第2図で説明
したように、アルマイト層5上に磁性膜1として、γ−
FeOzなどを蒸着などの手法で設けた後、次の順に処
理を行なう。
Next, an embodiment of the method of the present invention for obtaining a protective film having numerous crater-like protrusions and independent spherical recesses recessed from the surface of the protective film as shown in FIG. 2 will be described. As explained in FIG. 2, γ-
After FeOz or the like is provided by a method such as vapor deposition, the following steps are performed.

(1)混合液の塗布:この磁性膜1の上に次のように珪
素(Si)と流動パラフィンを含む混合液を11000
rpでスピンコードする。
(1) Application of mixed liquid: On this magnetic film 1, apply a mixed liquid containing silicon (Si) and liquid paraffin at 11,000 ml as follows.
Spin code with rp.

ポリシルセスキオキサン(ラダ一部分が比較的少ないも
の)に属するシリコン樹脂で、ガラスレジン(オーエン
スイリノイス社の商標)と呼ばれるもの:      
          2%酢酸エチレングリコールモノ
エチルエーテル:5ozキシレン:17% 酢酸エチル:31% 流動パラフィン:        全量の0.3%(2
)焼付け:混合液塗布後、200″C〜350℃で1〜
5時間焼付けを行なう。
Silicone resins belonging to the polysilsesquioxanes (those with a relatively small amount of ladder fraction) called glass resins (trademark of Owens-Illinois Company):
2% acetic acid ethylene glycol monoethyl ether: 5oz xylene: 17% ethyl acetate: 31% Liquid paraffin: 0.3% of the total amount (2
) Baking: After applying the mixture, 1 to 200"C to 350℃
Bake for 5 hours.

その結果中間レベルLから突出した突起7・・・と中間
レベルLより窪んだ凹部8・・・が形成される。
As a result, protrusions 7 protruding from the intermediate level L and recesses 8 concave from the intermediate level L are formed.

即ち上記組成の混合液を塗布すると、第5図(イ)のよ
うに、易熱蒸発性物質である流動パラフィンがaで示す
ように球状になり、かつ各流動パラフィンの球a・・・
同士がはじき合うため、無数の流動パラフィンの球a・
・・が混合液す上に発生する。混合液すは、シリコン樹
脂は2%程度と少なく、粘度が低いため、磁性塗料と違
って流動性に富んでいる。したがって、流動パラフィン
の球aに表面張力で容易に吸着されて、流動パラフィン
の球aとの接触部に球状の窪みができ、かっ該窪みの外
周は火口状に隆起する。従って焼付けを行なって、混合
液すを硬化させると、混合液す中の酢酸エチレングリコ
ールモノエチルエーテルやキシレン、酢酸エチルなどの
溶剤は分解蒸発し、かつガラスレジン中のSi (OH
)4が変化してSiO□のみが残り、SiO□保護膜2
が形成される。また焼付は時に、射熱蒸発性物質である
球状の流動パラフィンaは容易に分解蒸発するので、そ
の痕跡が火口庇状の球面凹部8と火口縁状の隆起部7と
して残る。球面凹部8は、平面状の中間レベルLより窪
んでおり、また隆起部からなる突起7は、平面状の中間
レベルLより突出している。
That is, when a liquid mixture having the above composition is applied, as shown in FIG. 5(a), liquid paraffin, which is a heat-labile evaporable substance, becomes spherical as shown by a, and each liquid paraffin sphere a...
Because they repel each other, countless liquid paraffin balls a.
... occurs on top of the mixed liquid. The mixed liquid contains only about 2% silicone resin and has a low viscosity, so it has high fluidity unlike magnetic paint. Therefore, it is easily adsorbed by the liquid paraffin spheres a due to surface tension, and a spherical depression is formed at the contact area with the liquid paraffin sphere a, and the outer periphery of the depression is raised in the shape of a crater. Therefore, when the mixed liquid is cured by baking, the solvents such as acetic acid ethylene glycol monoethyl ether, xylene, and ethyl acetate in the mixed liquid are decomposed and evaporated, and the Si (OH
)4 changes and only SiO□ remains, forming SiO□ protective film 2.
is formed. In addition, during baking, the spherical liquid paraffin a, which is a substance that undergoes thermal evaporation, easily decomposes and evaporates, leaving traces of it as a spherical concave portion 8 shaped like a crater eave and a raised portion 7 shaped like a crater rim. The spherical recess 8 is recessed from the planar intermediate level L, and the protrusion 7 consisting of a raised portion protrudes from the planar intermediate level L.

実際に行なった実施例では、アルミニウム基板上の2μ
mの研削されたアルマイト膜上に、磁性材料α−Fe、
0.を0.2μmスパッタし、還元酸化処理して磁性膜
を作成した。その保護膜として、SiO□(50人)を
スパッタした膜の上に、上記組成の混合液を、膜厚が約
800人となるように塗布し、300°Cで1時間焼付
けた後、弗素化オイルをフロリナートで0.03%に希
釈した液を潤滑剤として塗布し、磁気ディスクを得た。
In the actual example, 2μ on an aluminum substrate was used.
The magnetic material α-Fe,
0. was sputtered to a thickness of 0.2 μm and subjected to reduction-oxidation treatment to create a magnetic film. As a protective film, a mixed solution of the above composition was applied to a sputtered film of SiO□ (50 nitrides) so that the film thickness was about 800 nickels, and after baking at 300°C for 1 hour, fluorine A magnetic disk was obtained by applying a liquid obtained by diluting chemical oil to 0.03% with Fluorinert as a lubricant.

この磁気ディスク媒体を、従来の加速評価方法である高
速高荷重逆回転試験を行なうと、50回以上の強度を示
した。従来の磁気ディスク媒体が1度も耐えられなかっ
たことに比べると、保護膜の強度が格段と向上しており
、磁気ヘッドのC3S動作を頻繁に繰り返しても、保護
膜が損傷することはない。またクライトツクス(デュポ
ン社の商標)などの弗素化オイルは、従来の連続磁性膜
には、強度や摩擦などの点から、塗布不可能であったが
、本発明の方法で凹凸処理された保護膜には塗布可能と
なった。しかも粘着を起さず且つ耐震摩耗性にも冨んで
いる。
When this magnetic disk medium was subjected to a high-speed, high-load reverse rotation test, which is a conventional acceleration evaluation method, it showed a strength of 50 times or more. The strength of the protective film has been significantly improved compared to that of conventional magnetic disk media, which could withstand even a single time, and the protective film will not be damaged even if the C3S operation of the magnetic head is repeated frequently. . In addition, fluorinated oils such as Krytx (trademark of DuPont) cannot be applied to conventional continuous magnetic films due to strength and friction concerns, but the protective film textured using the method of the present invention can be applied to. Moreover, it does not cause adhesion and has excellent seismic abrasion resistance.

なお、上記の酢酸エチレングリコールモノエチルエーテ
ルやキシレン、酢酸エチルなどの溶剤を組み替えること
により、その使用溶剤の沸点の違いで、保護膜の表面形
状および膜厚が、多種多様となり、また添加する流動パ
ラフィンの重量の多少でも、変化可能である。溶剤とし
ては、上記のほかに、メチルイソブチルケトン、ジアセ
トンアルコール、ブタノール、エアミルアルコール、シ
クロヘキサノール等が使用できる。ガラスレジンは、エ
タノールと酢酸エチルの溶媒の中のごラノール構造をも
つSt (OH) aを主成分とする珪素化合物であり
、珪素(Si)を含む溶剤である。
Note that by changing the solvents mentioned above, such as ethylene glycol monoethyl ether acetate, xylene, and ethyl acetate, the surface shape and thickness of the protective film can vary depending on the boiling point of the solvent used, and the fluidity of the added fluid can vary. It is also possible to change the weight of paraffin. In addition to the above-mentioned solvents, methyl isobutyl ketone, diacetone alcohol, butanol, airyl alcohol, cyclohexanol, and the like can be used. Glass resin is a silicon compound whose main component is St (OH) a having a ranol structure in the solvents of ethanol and ethyl acetate, and is a solvent containing silicon (Si).

この実施例の応用として、磁性膜lの上にスパッタで5
in2を50〜300λ程度被着させてから、上記の処
理を行なうと、磁気ヘッドの粘着を更に改善することが
できる。
As an application of this example, 5
If the above-mentioned treatment is performed after approximately 50 to 300 λ of in2 is deposited, the adhesion of the magnetic head can be further improved.

〔発明の効果〕〔Effect of the invention〕

以上のように本発明によれば、磁気記録層の表面に、あ
る中間レベルより高い微小な突起と該中間レベルより窪
んだ微小な独立した凹部をそれぞれ無数に有する保護膜
を得るのに、磁気記録層の上に、珪素(Si)を含む溶
剤と流動パラフィンのような易熱分解性ないし易熱蒸発
性の物質を含む混合液を塗布した後、焼付けることによ
って、混合液の硬化と易熱分解性ないし易熱蒸発性の物
質の分解、蒸発を同時に行なわせる方法を採っている。
As described above, according to the present invention, in order to obtain a protective film having countless minute protrusions higher than a certain intermediate level and infinitesimal independent recesses recessed below the intermediate level on the surface of the magnetic recording layer, magnetic After coating a liquid mixture containing a solvent containing silicon (Si) and a substance that easily decomposes or evaporates easily by heat, such as liquid paraffin, on the recording layer, the mixture is hardened and easily evaporated by baking. A method is adopted in which the decomposition and evaporation of thermally decomposable or thermally evaporative substances occur simultaneously.

従って混合液の塗布と焼付けだけで、流動パラフィンの
蒸発した痕跡により、平面状をしたある中間レベルLか
ら突出した無数の突起と該中間レベルLより窪んだ無数
の独立した凹部が形成される。しかも、単一の工程で一
度に、保護膜面より突出した突起と保護膜面より窪んだ
独立した凹部の両方を形成でき、製造が容易である。
Therefore, by simply applying and baking the liquid mixture, countless protrusions protruding from a certain planar intermediate level L and countless independent recesses recessed from the intermediate level L are formed by traces of evaporated liquid paraffin. Moreover, both the protrusion protruding from the protective film surface and the independent recess recessed from the protective film surface can be formed at once in a single process, and manufacturing is easy.

また、従来のように磁性塗料中にパラフィン粒子を混合
して焼き付ける方法に比べて、易熱分解性ないし易熱蒸
発性の物質を混合する溶剤の粘度が低く、しかも磁性塗
料中に混合する方法と違って、溶剤の組成や比率を自由
に調節しても、磁性塗膜の特性に影響しない。そのため
、粘度の低い溶剤が、流動パラフィンなどの隆起部に沿
って隆起し、確実かつ円滑に保護膜面より突出した突起
を形成できる。
In addition, compared to the conventional method of mixing paraffin particles in magnetic paint and baking it, the viscosity of the solvent used to mix easily thermally decomposable or thermally evaporable substances is lower, and the method of mixing paraffin particles into magnetic paint has a lower viscosity. Unlike conventional methods, freely adjusting the composition and ratio of the solvent does not affect the properties of the magnetic coating. Therefore, the low-viscosity solvent bulges along the ridges of liquid paraffin, etc., and can reliably and smoothly form protrusions that protrude from the surface of the protective film.

磁性塗料にパラフィン粒子を混合する方法と違って、磁
性膜の上の保護膜に凹部を形成するため、非磁性領域が
増大して、磁性膜の磁気特性が低下することがないので
、高記録密度の媒体に適しており、特に薄膜型磁気記録
媒体のような連続磁性膜の媒体に有効である。
Unlike the method of mixing paraffin particles with magnetic paint, since recesses are formed in the protective film on top of the magnetic film, the non-magnetic area does not increase and the magnetic properties of the magnetic film do not deteriorate, resulting in high recording performance. It is suitable for high-density media, and is particularly effective for continuous magnetic film media such as thin-film magnetic recording media.

(イ) 第1 (ロ)(stomach) 1st (B)

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の磁気記録媒体の表面状態を示す部分断面
斜視図、 第2図以下は本発明による磁気記録媒体の製造方法の実
施例を示すもので、第2図は磁気記録媒体の表面状態の
一例を示す断面図、 第3図、第4図は磁気記録媒体の他の表面状態を示す断
面図と部分断面斜視図、 第5図は本発明による磁気記録媒体の製造方法を示す断
面図である。 図において、1は磁性膜、2は保護膜、4はアルミニウ
ム基板、5はアルマイト層、7.7a、7bは突起、8
は凹部、Lは中間レベル(保護膜面)、aは流動パラフ
ィンの球、bは混合液をそれぞれ示す。
FIG. 1 is a partial cross-sectional perspective view showing the surface condition of a conventional magnetic recording medium. FIG. 3 and 4 are cross-sectional views and partial cross-sectional perspective views showing other surface conditions of the magnetic recording medium. FIG. 5 is a cross-sectional view showing a method of manufacturing a magnetic recording medium according to the present invention. It is a diagram. In the figure, 1 is a magnetic film, 2 is a protective film, 4 is an aluminum substrate, 5 is an alumite layer, 7.7a, 7b are protrusions, 8
denotes a concave portion, L denotes an intermediate level (protective film surface), a denotes a ball of liquid paraffin, and b denotes a mixed liquid.

Claims (1)

【特許請求の範囲】 基板上に磁気記録層を形成する工程と、 前記磁気記録層上に保護膜を形成する工程と、前記保護
膜上に潤滑剤を塗布する工程と、を含む磁気記録媒体の
製造方法であって、 前記保護膜形成工程は、 珪素を含む溶剤と、易熱分解性ないし易熱蒸発性の物質
とを混合した後、 前記混合液を前記磁気記録層上に塗布し、前記溶剤が前
記物質の表面に沿って当該溶剤の膜表面よりも隆起した
状態とし、 しかる後、焼付けることによって、前記溶剤の硬化と前
記易熱分解性ないし易熱蒸発性の物質の分解、蒸発を同
時に行なわせること、 を特徴とする磁気記録媒体の製造方法。
[Claims] A magnetic recording medium comprising: forming a magnetic recording layer on a substrate; forming a protective film on the magnetic recording layer; and applying a lubricant on the protective film. In the manufacturing method, the protective film forming step includes: mixing a silicon-containing solvent and a thermally decomposable or thermally evaporable substance, and then applying the mixed liquid onto the magnetic recording layer; The solvent is raised along the surface of the substance above the surface of the solvent film, and then baked to harden the solvent and decompose the thermally decomposable or thermally evaporable substance. A method for manufacturing a magnetic recording medium, characterized by performing evaporation at the same time.
JP5044090A 1990-03-01 1990-03-01 Method of manufacturing magnetic recording medium Expired - Lifetime JPH0648536B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5044090A JPH0648536B2 (en) 1990-03-01 1990-03-01 Method of manufacturing magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5044090A JPH0648536B2 (en) 1990-03-01 1990-03-01 Method of manufacturing magnetic recording medium

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58113517A Division JPS605423A (en) 1983-06-22 1983-06-22 Magnetic recording medium and its production

Publications (2)

Publication Number Publication Date
JPH03201216A true JPH03201216A (en) 1991-09-03
JPH0648536B2 JPH0648536B2 (en) 1994-06-22

Family

ID=12858920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5044090A Expired - Lifetime JPH0648536B2 (en) 1990-03-01 1990-03-01 Method of manufacturing magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0648536B2 (en)

Also Published As

Publication number Publication date
JPH0648536B2 (en) 1994-06-22

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