JP2959802B2 - Method of manufacturing continuous magnetic film type magnetic recording medium - Google Patents

Method of manufacturing continuous magnetic film type magnetic recording medium

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Publication number
JP2959802B2
JP2959802B2 JP2109370A JP10937090A JP2959802B2 JP 2959802 B2 JP2959802 B2 JP 2959802B2 JP 2109370 A JP2109370 A JP 2109370A JP 10937090 A JP10937090 A JP 10937090A JP 2959802 B2 JP2959802 B2 JP 2959802B2
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JP
Japan
Prior art keywords
magnetic
recording medium
film
protective film
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2109370A
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Japanese (ja)
Other versions
JPH046625A (en
Inventor
孝 高見沢
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Fujitsu Ltd
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Fujitsu Ltd
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Publication of JPH046625A publication Critical patent/JPH046625A/en
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Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 〔概要〕 磁気ディスク装置等に使用される連続磁性膜型磁気記
録媒体の製造方法、特にCSSタイプの浮上磁気ヘッドで
情報の記録/再生が行なわれる連続磁性膜型磁気記録媒
体の製造方法に関し、 潤滑剤の持ちが良く、かつ耐摩耗性および磁気特性に
も優れた連続磁性膜型磁気記録媒体において、コアスラ
イダとの摺動面積を減少させるための突起が欠落しにく
い磁気記録媒体を実現することを目的とし、 非磁性の基板上に連続磁性膜からなる磁気記録層を形
成し、 珪素を含む溶剤と、易熱分解性ないし易熱蒸発性の物
質とを混合した後、前記連続磁性膜を有する基板上に塗
布し、前記溶剤が前記物質の表面に沿って当該溶剤の膜
表面よりも隆起した状態とし、 しかる後、焼付けることによって、前記溶剤の硬化と
前記易熱分解性ないし易熱蒸発性の物質の分解、蒸発を
同時に行なわせることで保護膜を形成した後、 前記保護膜面を研磨して突起の尖端を除去した後、洗
浄し、潤滑剤を塗布すること、 を特徴とするように構成する。
DETAILED DESCRIPTION OF THE INVENTION [Summary] A method of manufacturing a continuous magnetic film type magnetic recording medium used for a magnetic disk device or the like, particularly, a continuous magnetic film type magnetic recording / reproducing information with a CSS type flying magnetic head. Regarding the method of manufacturing a recording medium, in a continuous magnetic film type magnetic recording medium having a good lubricant holding property and excellent abrasion resistance and magnetic properties, a protrusion for reducing a sliding area with a core slider is missing. A magnetic recording layer consisting of a continuous magnetic film is formed on a non-magnetic substrate with the aim of realizing a magnetic recording medium that is difficult to mix. A solvent containing silicon is mixed with a substance that is easily decomposed or evaporated. After that, it is applied on a substrate having the continuous magnetic film, the solvent is raised along the surface of the substance from the film surface of the solvent, and then, by baking, the solvent is cured and cured. Previous After a protective film is formed by simultaneously decomposing and evaporating a substance that is easily decomposed or thermally evaporated, a surface of the protective film is polished to remove the tips of the projections, and then the lubricant is washed. Coating.

〔産業上の利用分野〕[Industrial applications]

本発明は、磁気ディスク装置等に使用される連続磁性
膜型磁気記録媒体の製造方法、特にCSSタイプの浮上磁
気ヘッドで情報の記録/再生が行なわれる連続磁性膜型
磁気記録媒体の製造方法に関する。
The present invention relates to a method of manufacturing a continuous magnetic film type magnetic recording medium used for a magnetic disk device and the like, and more particularly to a method of manufacturing a continuous magnetic film type magnetic recording medium in which information is recorded / reproduced by a CSS type flying magnetic head. .

〔技術の背景〕[Technological background]

データ処理装置などに使用される磁気ディスク装置
は、近年急激なデータ記録密度の向上、大容量化が進
み、また高速性、経済性の点から装置は小型化の傾向に
ある。このような高記録密度の要求に伴い、記録媒体
が、従来の塗布膜から連続磁性膜に変わりつつある。
2. Description of the Related Art In recent years, magnetic disk devices used in data processing devices and the like have rapidly increased in data recording density and increased in capacity. In addition, from the viewpoint of high speed and economical efficiency, the size of the devices has been decreasing. With the demand for such a high recording density, a recording medium is changing from a conventional coating film to a continuous magnetic film.

即ち従来は磁性粉を合成樹脂などのバインダに混入
し、これをアルミニウム基板にスピンコートして塗布膜
を形成し、磁気記録媒体の磁性膜を構成している。これ
に対し、連続磁性膜は、鉄や鉄−コバルト系合金などの
磁性材料を、スパッタや蒸着、メッキなどの手法で基板
上に形成するもので、バインダ(結合剤)を含まないの
で連続的な磁性膜(連続磁性媒体)と呼ばれている。こ
の連続磁性膜は、従来の塗布膜のように合成樹脂などの
バインダを含む非連続磁性膜に比して磁気特性が良く、
製造工程も簡単になる。また記録密度も格段と向上し、
高記録密度媒体として優れた特性を有するものが得られ
ており、特にフェライト酸化膜は、材質的にも硬く、更
に耐蝕性がよく、磁気記録媒体としては非常に良好なも
のとして評価されている。
That is, conventionally, a magnetic powder is mixed in a binder such as a synthetic resin and the like is spin-coated on an aluminum substrate to form a coating film, thereby constituting a magnetic film of a magnetic recording medium. On the other hand, a continuous magnetic film is formed by forming a magnetic material such as iron or an iron-cobalt alloy on a substrate by a method such as sputtering, vapor deposition, or plating, and does not include a binder (binder). It is called a simple magnetic film (continuous magnetic medium). This continuous magnetic film has better magnetic properties than a non-continuous magnetic film containing a binder such as a synthetic resin like a conventional coating film,
The manufacturing process is also simplified. Also, the recording density has improved dramatically,
As a high recording density medium, one having excellent properties has been obtained. In particular, a ferrite oxide film is also hard as a material, has good corrosion resistance, and is evaluated as a very good magnetic recording medium. .

ところで従来の磁気ディスク装置と同様にこの連続磁
性膜を使用した磁気ディスク装置にも、CSS(Contact S
tart Stop)方式が採用される。したがって通常は、磁
気ヘッドがディスク面から浮上して読書きを行なうが、
磁気記録媒体の回転開始時および停止時のように浮上力
が発生しない状態では、磁気記録媒体表面と磁気ヘッド
のコアスライダが接触し摺動する。そのため、磁気ヘッ
ドが摺動接触するCSSゾーンの磁気記録媒体表面が摩耗
して、摩耗粉が磁気記録媒体の全面に拡散し、ヘッドク
ラッシュを引き起す原因となる。したがって磁気記録媒
体表面の摩耗を極力防止して、磨耗粉が発生しないよう
にすることが必要となる。
By the way, as with the conventional magnetic disk drive, the magnetic disk drive using the continuous magnetic film also has a CSS (Contact S
tart Stop) method is adopted. Therefore, usually, the magnetic head floats above the disk surface to read and write.
In a state where no levitation force is generated, such as when the magnetic recording medium starts and stops rotating, the surface of the magnetic recording medium and the core slider of the magnetic head come into contact and slide. As a result, the surface of the magnetic recording medium in the CSS zone where the magnetic head is in sliding contact wears out, and the abrasion powder diffuses over the entire surface of the magnetic recording medium, causing a head crash. Therefore, it is necessary to minimize wear of the surface of the magnetic recording medium so as not to generate abrasion powder.

〔媒体面の耐摩耗性向上の各種方法〕(Various methods for improving the wear resistance of the media surface)

この磁気記録層の磨耗を防止するために従来から、次
のような方法が採用されている。
Conventionally, the following method has been employed to prevent the wear of the magnetic recording layer.

磁気記録層表面に、磁気ヘッドと磁気記録層との距離
があまり大きくならない程度の厚さで、酸化シリコン
(SiO2)や樹脂などの保護膜を設ける。
A protective film such as silicon oxide (SiO 2 ) or resin is provided on the surface of the magnetic recording layer with a thickness such that the distance between the magnetic head and the magnetic recording layer does not become too large.

磁気ヘッドの接触摺動の際の摩耗を軽減するために、
磁気記録層上もしくは保護膜上に潤滑剤を塗布して、磁
気ヘッドスライダーの滑りをよくする。
In order to reduce the wear at the time of magnetic head contact sliding,
A lubricant is applied on the magnetic recording layer or the protective film to improve the sliding of the magnetic head slider.

潤滑剤を塗布すると、潤滑剤で磁気ヘッドスライダー
が磁気記録媒体面に粘着し、磁気記録媒体が回転開始す
る際に、磁気ヘッドの支持機構を破損したりヘッドクラ
ッシュを招く恐れがある。そのため、この粘着を防止す
る目的で、特開昭56−22221号公報などに記載の手法に
より、第4図(イ)に示すように、磁気記録層1上に設
けられた保護膜2の表面に無数の突起3…を設ける。突
起3…間の隙間に潤滑剤が含浸され、スライダーと磁気
記録媒体間の潤滑剤膜が薄くなるので、粘着が解消さ
れ、また平滑な面に比べ摩擦係数も小さくなる。なお4
はアルミニウム基板、5はその表面に形成されたアルマ
イト層である。
When the lubricant is applied, the magnetic head slider sticks to the surface of the magnetic recording medium with the lubricant, and when the magnetic recording medium starts rotating, there is a possibility that the support mechanism of the magnetic head is damaged or a head crash occurs. Therefore, for the purpose of preventing this sticking, as shown in FIG. 4A, the surface of the protective film 2 provided on the magnetic recording layer 1 is formed by a method described in JP-A-56-22221. Are provided with countless projections 3. Since the lubricant is impregnated in the gap between the projections 3 and the lubricant film between the slider and the magnetic recording medium is thinned, the adhesion is eliminated and the friction coefficient is smaller than that of the smooth surface. 4
Is an aluminum substrate, and 5 is an alumite layer formed on its surface.

磁気記録層1の保護膜2として、多孔膜を使用する
か、フォトエッチングなどの手法で保護膜表面に、第4
図(ロ)に示すように微小な孔6…を設けて、潤滑剤を
含浸する。
A porous film is used as the protective film 2 of the magnetic recording layer 1 or the fourth
As shown in FIG. 2B, fine holes 6 are provided and impregnated with a lubricant.

なお、特開昭56−22219号公報に記載されているよう
に、塗膜型の磁気記録媒体において、磁性塗料にパラフ
ィン粒子を混練して塗布し、焼き付けることで、潤滑剤
保持用の微細な凹凸を直接磁性塗膜面に形成する方法が
提案されているが、本発明のような連続磁性膜型の磁気
記録媒体には適用できない。
As described in JP-A-56-22219, in a coating-type magnetic recording medium, paraffin particles are kneaded and applied to a magnetic paint, and baked, so that fine particles for retaining lubricant can be obtained. Although a method of forming irregularities directly on the surface of a magnetic coating film has been proposed, it cannot be applied to a continuous magnetic film type magnetic recording medium as in the present invention.

〔各種方法の問題点〕[Problems of various methods]

ところがこれらの手法はいずれも、次のような問題を
有している。即ちのように単純に保護膜を設けるだけ
では、摩耗を防止できない。基板のアルマイト面は鏡面
に仕上げられ、その上に磁性膜を設けるため、磁性膜表
面も鏡面状態の極めて平滑な面になる。したがって磁性
膜上の保護膜も平滑で、磁気ヘッドが浮上しないで保護
膜と摺動接触している状態では、保護膜が摩耗すること
により塵埃が発生し、致命的な障害であるヘッドクラッ
シュを誘発する恐れがある。
However, all of these methods have the following problems. That is, wear cannot be prevented by simply providing a protective film as described above. Since the alumite surface of the substrate is finished to a mirror surface and a magnetic film is provided thereon, the surface of the magnetic film also becomes an extremely smooth surface in a mirror state. Therefore, the protective film on the magnetic film is also smooth, and when the magnetic head does not float and is in sliding contact with the protective film, dust is generated due to the wear of the protective film, causing a head crash which is a fatal obstacle. May trigger.

のように潤滑剤を塗布して滑りをよくすれば、初期
の間は摩擦係数が小さく有効であるが、経時的に潤滑剤
が消耗すると、潤滑作用が低下し、摩耗粉が発生する。
かといって多量の潤滑剤を塗布すると、磁気記録媒体が
停止しスライダーと接触している際に、潤滑剤でスライ
ダーが磁気記録媒体面に粘着するので、次に磁気記録媒
体が回転開始するときに、磁気ヘッドが急激に磁気記録
媒体面から引き剥がされる際の衝撃でヘッドクラッシュ
を招いたり、磁気ヘッドを支持しているジンバルを破損
したりする恐れがある。
If the lubricant is applied to improve the slip as described above, the coefficient of friction is small and effective during the initial period, but if the lubricant is consumed over time, the lubricating action is reduced and abrasion powder is generated.
However, if a large amount of lubricant is applied, the slider sticks to the surface of the magnetic recording medium with the lubricant when the magnetic recording medium stops and is in contact with the slider, so the next time the magnetic recording medium starts rotating In addition, there is a possibility that a head crash may be caused by an impact when the magnetic head is suddenly peeled off from the surface of the magnetic recording medium, or a gimbal supporting the magnetic head may be damaged.

のように磁気記録媒体面に無数の突起3…を設けれ
ば、突起の隙間に潤滑剤が含浸されるので、の手法に
おける問題はある程度軽減されるが、遠心力で外側に流
動して消失する。そのため、含浸剤を全面に安定してか
つ均一に保持することができない。従って潤滑剤の寿命
が短かく、長期使用に耐えることができない。
If the innumerable projections 3 are provided on the surface of the magnetic recording medium as described above, the lubricant is impregnated into the gaps between the projections, so that the problem in the method can be reduced to some extent, but it flows outward due to centrifugal force and disappears. I do. Therefore, the impregnating agent cannot be stably and uniformly maintained on the entire surface. Therefore, the life of the lubricant is short, and it cannot withstand long-term use.

のように保護膜を多孔質にすれば、潤滑剤は移動し
難く潤滑剤の持ちは良くなるが、保護膜表面が平滑なた
め、摺動時の耐摩耗性が低下する。
If the protective film is made porous as described above, the lubricant is less likely to move and the lubricant has better durability. However, since the surface of the protective film is smooth, the abrasion resistance during sliding decreases.

また、前記の特開昭56−22219号公報に記載のように
磁性塗料中にパラフィン粒子を混練して焼き付ける方法
では、磁性膜中に非磁性の樹脂が存在することに加え
て、パラフィン粒子の痕跡による空洞が発生するため、
磁性膜としての特性を低下させることになり、記録密度
の高い媒体には適用不可能である。しかも、磁性塗料は
粘度は高いため、パラフィン粒子を均一に分散させるこ
とが困難であり、空洞が集中したりして、ビットエラー
やS/N比の低下などの問題がある。磁性塗料は粘度が高
いため、表面張力を利用して、パラフィン粒子の隆起に
沿った突起を形成することも困難である。特に、本発明
のようにスパッタや蒸着などの手法で連続磁性膜を形成
する媒体の場合は、磁性塗料にパラフィン粒子を混練す
る方法は適用できない。
Further, in the method of kneading and baking paraffin particles in a magnetic paint as described in the above-mentioned JP-A-56-22219, in addition to the presence of non-magnetic resin in the magnetic film, Since a cavity due to traces occurs,
This degrades the properties as a magnetic film, and is not applicable to a medium having a high recording density. Moreover, since the magnetic paint has a high viscosity, it is difficult to uniformly disperse the paraffin particles, and there are problems such as concentration of cavities, bit errors, and a decrease in S / N ratio. Since the magnetic paint has a high viscosity, it is also difficult to form projections along the ridges of the paraffin particles using surface tension. In particular, in the case of a medium in which a continuous magnetic film is formed by a method such as sputtering or vapor deposition as in the present invention, a method of kneading paraffin particles in a magnetic paint cannot be applied.

〔従来の技術〕[Conventional technology]

そこで、特願昭58−113517において、第5図、第6図
に示すような方法が提案されている。
Therefore, Japanese Patent Application No. 58-113517 proposes a method as shown in FIGS.

すなわち、アルマイト基板などのような非磁性の基板
上に、γ−Fe2O3等から成る連続磁性膜を成膜し、該連
続磁性膜上に必要に応じて密着性向上のためのSiO2を成
膜する。次いで、珪素を含む溶剤と、易熱分解性ないし
易熱蒸発性の物質とを混合した後、この混合液を前記Si
O2膜上に塗布し、前記溶剤が前記物質の表面に沿って当
該溶剤の膜表面よりも隆起した状態とする。しかる後、
焼付けることによって、前記溶剤の硬化と前記易熱分解
性ないし易熱蒸発性の物質の分解、蒸発を同時に行なわ
せることで、平面状の保護膜面に対する突起と孤立した
凹部を形成し、最後に潤滑剤を塗布する。
That is, a continuous magnetic film made of γ-Fe 2 O 3 or the like is formed on a non-magnetic substrate such as an alumite substrate, and SiO 2 for improving adhesion is formed on the continuous magnetic film as necessary. Is formed. Then, after mixing a solvent containing silicon and a substance that is easily decomposed or thermally evaporated, this mixed solution is mixed with the Si.
It is applied on an O 2 film so that the solvent rises along the surface of the substance from the film surface of the solvent. After a while
By baking, the curing of the solvent and the decomposition and evaporation of the thermally decomposable or thermally evaporable substance are performed at the same time, thereby forming projections and isolated recesses on the planar protective film surface. Apply lubricant to.

易熱分解性ないし易熱蒸発性の物質としては、流動パ
ラフィンが適している。
Liquid paraffin is suitable as a substance that is easily decomposed or evaporated.

第6図はこの方法で製造された連続磁性膜型磁気記録
媒体を示す断面図である。アルミニウム基板4の表面を
酸化してアルマイト層5を形成し、その表面に磁性膜1
として、γ−FeO3などをスパッタなどの手法で設けてあ
る。この磁性膜1の上に、前記の手法で保護膜2を形成
する際に、無数の突起7…と凹部8…が形成されてい
る。Lは磁性膜1から所定の膜厚を隔てた位置に形成さ
れた平面状の保護膜面10の位置であり、以下この保護膜
面10の位置を中間レベルと呼ぶ。この中間レベルLに対
し、前記易熱分解性ないし易熱蒸発性の物質の分解/蒸
発の痕跡である突起7…が火口状に隆起しており、その
中央に球面状の凹部8…が中間レベルLより窪んだ状態
で形成されている。
FIG. 6 is a sectional view showing a continuous magnetic film type magnetic recording medium manufactured by this method. The surface of the aluminum substrate 4 is oxidized to form an alumite layer 5, and the magnetic film 1
Γ-FeO 3 or the like is provided by a method such as sputtering. When the protective film 2 is formed on the magnetic film 1 by the above-described method, countless protrusions 7 and concave portions 8 are formed. L is a position of the planar protective film surface 10 formed at a position separated by a predetermined film thickness from the magnetic film 1, and the position of the protective film surface 10 is hereinafter referred to as an intermediate level. With respect to the intermediate level L, protrusions 7 which are traces of decomposition / evaporation of the easily decomposable or heat-evaporable substance are raised in a crater shape, and a spherical concave portion 8 is formed at the center thereof. It is formed in a state recessed from the level L.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

このように、この方法によれば、流動パラフィンの蒸
発した痕跡が凹部や突起となる。すなわち、珪素を含む
溶剤は粘度が低く、表面張力で流動パラフィン等の球に
沿って隆起し易いため、流動パラフィン等が分解蒸発し
た後に、平面状の保護膜面10より突出した突起7と、該
保護膜面10より窪んだ独立した凹部8が無数に形成され
る。粘度の低い珪素を含む溶剤に、流動パラフィン等の
易熱分解性ないし易熱蒸発性の物質を混合するため、溶
剤中に容易にかつ均一に分散でき、保護膜面の全面に均
一に凹凸を形成できる。
Thus, according to this method, traces of the evaporated liquid paraffin become concave portions and protrusions. That is, since the solvent containing silicon has a low viscosity and is likely to protrude along a sphere of liquid paraffin or the like due to surface tension, after the liquid paraffin or the like is decomposed and evaporated, a projection 7 projecting from the planar protective film surface 10; An infinite number of independent concave portions 8 depressed from the protective film surface 10 are formed. A low-viscosity silicon-containing solvent is mixed with easily decomposable or heat-evaporable substances such as liquid paraffin, so that it can be easily and uniformly dispersed in the solvent, and the entire surface of the protective film can have uniform irregularities. Can be formed.

また流動パラフィンの添加量や成分などを適当に選択
することにより、流動パラフィンの蒸発痕跡の深さや突
起の高さが種々な凹凸を形成することで、保護膜面より
高い無数の突起と保護膜面より低い無数の凹部を得るこ
とができる。
In addition, by appropriately selecting the amount and components of the liquid paraffin to be added, the depth of the trace of evaporation of the liquid paraffin and the height of the protrusions are variously uneven, so that a number of protrusions and a protective film higher than the protective film surface are formed. Innumerable concave portions lower than the surface can be obtained.

パラフィン粒子を磁性塗料中に混練して焼き付ける方
法と違って、磁性膜の上の保護膜を形成する工程で、該
保護膜面に凹凸を形成するため、連続磁性膜の媒体にも
適用できる。また、塗膜型媒体のような非連続磁性膜の
媒体に適用した場合でも、磁性塗膜には空洞が形成され
ないので、従来の方法のように磁性塗膜中の非磁性領域
が増大して磁気特性を低下させるようなこともなく、高
記録密度の媒体に適している。
Unlike a method in which paraffin particles are kneaded in a magnetic paint and baked, in the step of forming a protective film on the magnetic film, irregularities are formed on the surface of the protective film, so that the present invention can be applied to a medium of a continuous magnetic film. Also, even when applied to a medium of a discontinuous magnetic film such as a coating type medium, no void is formed in the magnetic coating, so that the nonmagnetic region in the magnetic coating increases as in the conventional method. It is suitable for a medium with a high recording density without deteriorating the magnetic characteristics.

しかしながら、CSSゾーンにおいて、鎖線で示すよう
に磁気ヘッドのコアスライダHが摺動する際に、火口状
に隆起した突起7…の尖端が欠け易い。そのために、尖
端部の欠落物がデータゾーンに拡散し、ヘッドクラッシ
ュによってデータゾーンの情報を破壊する恐れがある。
特にこの欠落物は、通常の磨耗粉より大きいため、ヘッ
ドクラッシュの影響も大きい。
However, in the CSS zone, when the core slider H of the magnetic head slides as shown by a chain line, the tips of the protrusions 7,... For this reason, there is a possibility that a missing object at the pointed end diffuses into the data zone, and information in the data zone is destroyed due to a head crash.
In particular, since the missing object is larger than ordinary wear powder, the influence of head crash is large.

本発明の技術的課題は、このような問題に着目し、潤
滑剤の持ちが良く、かつ耐摩耗性および磁気特性にも優
れた連続磁性膜型磁気記録媒体において、コアスライダ
との摺動面積を減少させるための突起が欠落しにくい磁
気記録媒体を実現することにある。
The technical problem of the present invention is to focus on such a problem, and in a continuous magnetic film type magnetic recording medium having a good lubricant holding property and excellent abrasion resistance and magnetic properties, a sliding area with a core slider. An object of the present invention is to realize a magnetic recording medium in which protrusions for reducing the density are less likely to drop out.

〔課題を解決するための手段〕[Means for solving the problem]

第1図は本発明による連続磁性膜型磁気記録媒体の製
造方法の基本原理を説明する工程図である。まず非磁性
基板上に連続磁性膜を形成した後、珪素を含む溶剤と、
易熱分解性ないし易熱蒸発性の物質とを混合してなる混
合液を塗布し、前記溶剤が前記物質の表面に沿って当該
溶剤の膜表面よりも隆起した状態とする。次いで焼付け
を行なうことによって、前記溶剤の硬化と前記易熱分解
性ないし易熱蒸発性の物質の分解、蒸発を同時に行なわ
せることで保護膜を形成する。これによって保護膜面か
ら突出した突起と保護膜面より窪んだ凹部が形成される
が、次にバーニッシュ等の研磨を行なうことによって、
突起の尖端を除去した後、洗浄し、潤滑剤を塗布する。
FIG. 1 is a process chart for explaining the basic principle of a method for manufacturing a continuous magnetic film type magnetic recording medium according to the present invention. First, after forming a continuous magnetic film on a non-magnetic substrate, a solvent containing silicon,
A mixed solution obtained by mixing a substance that is easily decomposable or thermally evaporated is applied so that the solvent rises along the surface of the substance from the film surface of the solvent. Then, baking is performed to simultaneously cure the solvent and decompose and evaporate the thermally decomposable or thermally evaporable substance to form a protective film. As a result, projections protruding from the protective film surface and concave portions depressed from the protective film surface are formed. Next, by performing polishing such as burnishing,
After removing the tips of the projections, wash and apply a lubricant.

〔作用〕[Action]

混合液塗布後の焼付けによって、火口状に隆起した突
起が形成されるが、この突起の尖端は研磨によって除去
される。そして研磨後に洗浄してから、潤滑剤が塗布さ
れるため、潤滑剤は保護膜面より窪んだ凹部に保持され
る。
By baking after the application of the mixed solution, protrusions protruding in a crater shape are formed, and the tips of the protrusions are removed by polishing. Since the lubricant is applied after cleaning after polishing, the lubricant is held in the concave portion which is depressed from the protective film surface.

このように突起尖端の欠け易い部分は予め研磨によっ
て除去されるため、装置完成後に稼働している最中に、
CSS動作時に磁気ヘッドのコアスライダがCSSゾーンに摺
動しても、突起が欠けたりする恐れがない。したがっ
て、ヘッドクラッシュの原因となる欠落物が発生しにく
く、安定して情報の記録/再生を行なうことができる。
Since the prone portion of the projection tip is easily removed by polishing in advance, during operation after the device is completed,
Even if the core slider of the magnetic head slides into the CSS zone during CSS operation, there is no possibility that the protrusion will be missing. Therefore, a missing object that causes a head crash hardly occurs, and information can be recorded / reproduced stably.

また、突起の尖端部を除去することで、磁性膜と磁気
ヘッドとの間隔が縮小されるため、情報の記録/再生の
効率が向上し、高記録密度が要求される磁気記録媒体に
適している。
Further, by removing the tip of the protrusion, the distance between the magnetic film and the magnetic head is reduced, so that the efficiency of information recording / reproduction is improved, and the magnetic head is suitable for a magnetic recording medium requiring a high recording density. I have.

〔実施例〕〔Example〕

次に本発明による連続磁性膜型磁気記録媒体の製造方
法が実際上どのように具体化されるかを実施例で説明す
る。
Next, how the method for manufacturing a continuous magnetic film type magnetic recording medium according to the present invention is actually embodied will be described with reference to examples.

第2図は製造過程における磁気記録媒体の表面状態を
示す拡大断面図、第3図は工程図である。
FIG. 2 is an enlarged sectional view showing a surface state of the magnetic recording medium in a manufacturing process, and FIG. 3 is a process chart.

第5図で説明したように、アルマイト層5上に磁性膜
1として、γ−Fe2O3などをスパッタ法で成膜した後、
次の順に処理を行なう。
As described in FIG. 5, after forming γ-Fe 2 O 3 or the like as a magnetic film 1 on the alumite layer 5 by a sputtering method,
The processing is performed in the following order.

(1)混合液の塗布:この磁性膜1の上に次のように珪
素(Si)と流動パラフィンを含む混合液を1000RPMでス
ピンコートする。
(1) Application of mixed liquid: A mixed liquid containing silicon (Si) and liquid paraffin is spin-coated on this magnetic film 1 at 1000 RPM as follows.

ポリシルセスキオキサン(ラダー部分が比較的少ないも
の)に属するシリコン樹脂で、ガラスレジン(オーエン
スイリノイス社の商標)と呼ばれるもの: 2% 酢酸エチレングリコールモノエチルエーテル: 50% キシレン: 17% 酢酸エチル: 31% 流動パラフィン: 全量の0.3% (2)焼付け:混合液塗布後、200℃〜350℃で1〜5時
間焼付けを行なう。
A silicone resin belonging to polysilsesquioxane (the one having a relatively small ladder portion) and called a glass resin (trademark of Owens Illinois): 2% acetic acid ethylene glycol monoethyl ether: 50% xylene: 17% acetic acid Ethyl: 31% Liquid paraffin: 0.3% of total amount (2) Baking: After applying the mixed solution, baking is performed at 200 ° C to 350 ° C for 1 to 5 hours.

その結果、流動パラフィンの蒸発の痕跡として、第2
図(ロ)のように中間レベルLから突出した突起7…と
中間レベルLより窪んだ凹部8…が形成される。すなわ
ち、上記組成の混合液を塗布すると、第2図(イ)のよ
うに、易熱蒸発性物質である流動パラフィンがaで示す
ように球状になり、かつ各流動パラフィンの球a…同士
がはじき合うため、無数の流動パラフィンの球a…が混
合液b上に発生する。混合液bは、シリコン樹脂は2%
程度と少なく、粘度が低いため、磁性塗料と違って流動
性に富んでいる。したがって、流動パラフィンの球aに
表面張力で容易に吸着されて、流動パラフィンの球aと
の接触部に球状の窪みができ、かつ該窪みの外周は火口
状に隆起する。従って焼付けを行なって、混合液bを硬
化させると、混合液b中の酢酸エチレングリコールモノ
エチルエーテルやキシレン、酢酸エチルなどの溶剤は分
解蒸発し、かつガラスレジン中のSi(OH)が変化して
SiO2のみが残り、SiO2保護膜2が形成される。また焼付
け時に、易熱蒸発性物質である球状の流動パラフィンa
は容易に分解蒸発するので、(ロ)のように、その痕跡
が火口底状の球面凹部8と火口縁状の隆起部7として残
る。球面凹部8は、平面状の中間レベルLより窪んでお
り、また隆起部からなる突起7は、平面状の中間レベル
Lより突出している。
As a result, as a trace of evaporation of liquid paraffin,
As shown in FIG. 2B, protrusions 7 projecting from the intermediate level L and concave portions 8 recessed from the intermediate level L are formed. That is, when the mixed liquid having the above composition is applied, as shown in FIG. 2 (a), the liquid paraffin, which is a heat-evaporable substance, becomes spherical as shown by a, and the spheres a of each liquid paraffin are connected to each other. Because of the repulsion, countless liquid paraffin spheres a are generated on the mixed solution b. Mixture b is 2% silicone resin
Due to its low degree of viscosity and low viscosity, it is rich in fluidity unlike magnetic paints. Therefore, the sphere a of the liquid paraffin is easily adsorbed by the surface tension, and a spherical depression is formed at a contact portion with the sphere a of the liquid paraffin, and the outer periphery of the dent rises like a crater. Therefore, when the mixture b is cured by baking, solvents such as ethylene glycol monoethyl ether acetate, xylene and ethyl acetate in the mixture b decompose and evaporate, and the Si (OH) 4 in the glass resin changes. do it
Only SiO 2 remains, and the SiO 2 protective film 2 is formed. At the time of baking, spherical liquid paraffin a which is a heat-evaporable substance
Easily decomposes and evaporates, so that the traces remain as a crater bottom-shaped spherical concave portion 8 and a crater edge-shaped raised portion 7 as shown in (b). The spherical concave portion 8 is depressed from the plane intermediate level L, and the projection 7 composed of a raised portion protrudes from the plane intermediate level L.

(3)バーニッシュ:フッソ化オイルをフロリナートで
希釈した液を媒体面に700RPMでスピンコートし、次に同
媒体を1300RPMで回転させ、ラッピングテープ(アルミ
ナ粒径9μm)を荷重400gで押し当てバーニッシュし
た。(ハ)はバーニッシュ後の状態であり、バーニッシ
ュによって突起7の尖端が除去され、7aのように尖端の
無い突起となる。
(3) Burnish: A solution obtained by diluting the fluorinated oil with Fluorinert is spin-coated on the medium surface at 700 RPM, and then the medium is rotated at 1300 RPM, and a wrapping tape (alumina particle size 9 μm) is pressed with a load of 400 g against a bar. Nish. (C) shows a state after the burnishing, in which the tip of the projection 7 is removed by the burnishing, and the projection becomes a projection without a tip like 7a.

なお、潤滑剤を塗布したラッピングテープを用いてバ
ーニッシュすることもできる。
Burnishing can also be performed using a wrapping tape coated with a lubricant.

(4)潤滑剤の塗布:洗浄を行なうことで、尖端の欠け
などを除去し、乾燥した後に、フッソ化オイルをフロリ
ナートで0.03%に希釈した液を潤滑剤として塗布し、
(ニ)のような連続磁性膜型の磁性記録媒体を完成し
た。潤滑剤9を塗布した後、磁気記録媒体を高速回転さ
せると、中間レベルLの保護膜面10上の潤滑剤は遠心力
で排除され、孤立した凹部8中の潤滑剤9が長期間保持
される。
(4) Application of lubricant: After washing, the chipped portion of the tip is removed, and after drying, a solution obtained by diluting the fluorinated oil to 0.03% with Fluorinert is applied as a lubricant.
A continuous magnetic film type magnetic recording medium as shown in (d) was completed. When the magnetic recording medium is rotated at a high speed after the lubricant 9 is applied, the lubricant on the protective film surface 10 at the intermediate level L is removed by centrifugal force, and the lubricant 9 in the isolated recess 8 is held for a long time. You.

〔実施例の媒体の評価〕[Evaluation of Medium of Example]

前記のように本発明の方法でバーニッシュを行なった
媒体とバーニッシュを行なわない媒体につき、浮上性試
験を行なった。浮上性の評価は、磁気ヘッドにAE素子あ
るいはピエゾ素子を貼り付け、静止した媒体上に当該磁
気ヘッドをロードし、媒体を回転させたときに磁気ヘッ
ドが浮上する際の、磁気ヘッドのコアスライダが媒体に
接触する状態をモニターすることにより行なった。
The levitation test was performed on the medium burned by the method of the present invention and the medium not burnished as described above. The evaluation of flying performance is performed by attaching an AE element or a piezo element to the magnetic head, loading the magnetic head on a stationary medium, and rotating the medium. Was monitored by monitoring the state of contact with the medium.

その結果、第6図に示すような従来のバーニッシュを
行なわない媒体は、8m/sで接触しなくなったのに対し、
本発明の方法でバーニッシュした媒体は、6.6m/sで接触
しなくなった。すなわち、バーニッシュしたものの方
が、低速でも接触しなくなり、浮上性が良いことを示
し、バーニッシュの効果が認められた。また、浮上性が
良いため、媒体面と早く接触しなくなるが、摺動してい
る間でも、前記のように尖端が予め除去されているため
に、欠落物が発生しにくい。
As a result, the medium without conventional burnishing as shown in FIG. 6 stopped contacting at 8 m / s,
The media burnished by the method of the invention lost contact at 6.6 m / s. In other words, the burnished product did not come into contact even at a low speed, indicating that the flying characteristics were good, and the effect of the burnished product was recognized. In addition, because of the good levitation property, the medium does not come into contact with the medium surface quickly, but even during sliding, since the point is removed in advance as described above, a missing object is hardly generated.

またこの磁気ディスク媒体を、従来の加速評価方法で
ある高速高荷重逆回転試験を行なうと、50回以上の強度
を示した。通常の磁気ディスク媒体が1度も耐えられな
かったことに比べると、保護膜の強度が格段と向上して
いる。特に欠落し易い尖端部が予め除去されているた
め、磁気ヘッドのCSS動作を頻繁に繰り返しても、従来
のように大きな欠落物でヘッドクラッシュを起こし、デ
ータゾーンに甚大な損傷を与えるようなことはない。ま
たクライトックス(デュポン社の商標)などの弗素化オ
イルは、従来の連続磁性膜には、強度や摩擦などの点か
ら、塗布不可能であったが、本発明の方法で凹凸処理さ
れた保護膜には塗布可能となった。しかも粘着を起さず
且つ耐震摩耗性にも富んでいる。
When the magnetic disk medium was subjected to a high-speed and high-load reverse rotation test, which is a conventional acceleration evaluation method, it showed a strength of 50 times or more. The strength of the protective film is remarkably improved as compared with the case where a normal magnetic disk medium cannot withstand even once. In particular, since the sharp points that are easily dropped are removed in advance, even if the CSS operation of the magnetic head is frequently repeated, a head crash may occur with a large missing object as in the past, causing serious damage to the data zone There is no. Fluorinated oils such as Krytox (trademark of DuPont) could not be applied to the conventional continuous magnetic film in terms of strength and friction, but were protected by the method of the present invention. The film can be applied. Moreover, it does not cause sticking and has excellent seismic wear resistance.

なお、上記の酢酸エチレングリコールモノエチルエー
テルやキシレン、酢酸エチルなどの溶剤を組み替えるこ
とにより、その使用溶剤の沸点の違いで、保護膜の表面
形状および膜厚が、多種多様となり、また添加する流動
パラフィンの重量の多少でも、変化可能である。溶剤と
しては、上記のほかに、メチルイソブチルケトン、ジア
セトンアルコール、ブタノール、エアミルアルコール、
シクロヘキサノール等が使用できる。ガラスレジンは、
エタノールと酢酸エチルの溶媒の中のミラノール構造を
もつSi(OH)を主成分とする珪素化合物であり、珪素
(Si)を含む溶剤である。
By changing the solvents such as ethylene glycol monoethyl ether acetate, xylene, and ethyl acetate, the surface shape and film thickness of the protective film become various due to the difference in the boiling point of the solvent used, Even the weight of paraffin can be varied. As the solvent, in addition to the above, methyl isobutyl ketone, diacetone alcohol, butanol, air mill alcohol,
Cyclohexanol and the like can be used. Glass resin is
It is a silicon compound mainly composed of Si (OH) 4 having a Milanol structure in a solvent of ethanol and ethyl acetate, and is a solvent containing silicon (Si).

この実施例の応用として、磁性膜1の上にスパッタで
SiO2を50〜300Å程度被着させてから、上記の処理を行
なうと、突起および凹部を有する保護膜と磁性膜との密
着が良くなる。
As an application of this embodiment, the magnetic film 1 is formed by sputtering.
When the above treatment is carried out after depositing SiO 2 at about 50 to 300 °, the adhesion between the protective film having projections and concave portions and the magnetic film is improved.

〔発明の効果〕〔The invention's effect〕

以上のように、本発明によれば、磁気記録層の上に、
珪素を含む保護膜材料と、流動パラフィンのような易熱
分解性ないし易熱蒸発性のほぼ球状の物質とを混合して
塗布した後、焼付けることによって、磁気記録層の表面
に、ある中間レベルより高い微小な隆起部と該中間レベ
ルより窪んだ微小な独立した凹部をそれぞれ無数に形成
した後、潤滑剤が塗布されたラッピングテープにより前
記隆起部の尖端を除去する方法を採っている。そのた
め、特にCSSゾーンにおいて突端の欠落物が発生し、か
つデータゾーンに飛散して、甚大なヘッドクラッシュを
引き起こすような問題が解消される。
As described above, according to the present invention, on the magnetic recording layer,
A protective film material containing silicon and a substantially spherical substance such as liquid paraffin that is easily decomposable or thermally evaporated are mixed and applied, and then baked to form an intermediate layer on the surface of the magnetic recording layer. After forming a myriad of microscopic protrusions higher than the level and microscopic independent depressions depressed from the intermediate level, a method of removing the tips of the protrusions with a wrapping tape coated with a lubricant is adopted. For this reason, the problem that a missing piece at the tip is generated particularly in the CSS zone and scatters in the data zone to cause a serious head crash is solved.

本発明の方法によると、粘度の低い保護膜材料が、流
動パラフィンなどの球体に沿って隆起し、確実かつ円滑
に保護膜面より突出した隆起部を形成できるが、反面隆
起部の尖端も発生し易い。ところが、前記のようにこの
突端は研磨されるため、耐摩耗性に優れた磁気記録媒体
が得られる。しかも、突端を除去することで、磁性膜と
磁気ヘッドとの間隔が縮小されるので、情報の記録/再
生の効率が向上し、高記録密度の磁気記録媒体が得られ
る。
According to the method of the present invention, a low-viscosity protective film material can be protruded along a sphere such as liquid paraffin to form a protruding portion reliably and smoothly from the surface of the protective film. Easy to do. However, since the protruding end is polished as described above, a magnetic recording medium having excellent wear resistance can be obtained. Moreover, by removing the protruding end, the distance between the magnetic film and the magnetic head is reduced, so that the efficiency of information recording / reproduction is improved, and a magnetic recording medium with a high recording density can be obtained.

また、保護膜を形成した後の研磨を、最終的に媒体に
塗布する潤滑剤と同じ材料の潤滑剤が塗布されたラッピ
ングテープにより行うので、研磨中の削り屑はラッピン
グテープに塗布されている潤滑剤により流され、かつ、
研磨時の潤滑剤は洗浄時に完全に洗い落とす必要がない
ので、洗浄時間を短縮することが可能となる。
In addition, since the polishing after forming the protective film is performed using a wrapping tape coated with a lubricant of the same material as the lubricant finally applied to the medium, shavings being polished are applied to the wrapping tape. Washed away by the lubricant, and
Since the lubricant at the time of polishing does not need to be completely washed off at the time of cleaning, the cleaning time can be shortened.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明による連続磁性膜型磁気記録媒体の製造
方法の基本原理を説明する工程図、 第2図、第3図は本発明による連続磁性膜型磁気記録媒
体の製造方法の実施例を示すもので、第2図は製造過程
における磁気記録媒体の表面状態を示す拡大断面図、第
3図は工程図、 第4図は一般の磁気記録媒体の表面状態を示す部分断面
斜視図、 第5図は従来の連続磁性膜型磁気記録媒体の製造方法を
示す工程図、 第6図は従来の方法で製造された連続磁性膜型磁気記録
媒体の断面図である。 図において、1は磁気記録層(連続磁性膜)、2は保護
膜、4はアルミニウム基板、5はアルマイト層、7は研
磨前の突起、7aは研磨後の突起、8は凹部、9は潤滑
剤、Lは中間レベル、10は保護膜面、aは流動パラフィ
ンの球、bは混合液をそれぞれ示す。
FIG. 1 is a process diagram illustrating the basic principle of a method for manufacturing a continuous magnetic film type magnetic recording medium according to the present invention. FIGS. 2 and 3 are embodiments of a method for manufacturing a continuous magnetic film type magnetic recording medium according to the present invention. FIG. 2 is an enlarged sectional view showing a surface state of a magnetic recording medium in a manufacturing process, FIG. 3 is a process diagram, FIG. 4 is a partial sectional perspective view showing a surface state of a general magnetic recording medium, FIG. 5 is a process chart showing a method of manufacturing a conventional continuous magnetic film type magnetic recording medium, and FIG. 6 is a sectional view of a continuous magnetic film type magnetic recording medium manufactured by a conventional method. In the figure, 1 is a magnetic recording layer (continuous magnetic film), 2 is a protective film, 4 is an aluminum substrate, 5 is an alumite layer, 7 is a protrusion before polishing, 7a is a protrusion after polishing, 8 is a concave portion, and 9 is lubrication. L, an intermediate level; 10, a protective film surface; a, a liquid paraffin sphere; and b, a mixed solution.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】非磁性の基板上に連続磁性膜からなる磁気
記録層を形成し、 珪素を含む保護膜材料と、易熱分解性ないし易熱蒸発性
のほぼ球状の物質とを混合した後、前記連続磁性膜を有
する基板上に塗布し、前記保護膜材料が前記ほぼ球状物
質の表面に付着して当該保護膜材料によって形成される
膜表面よりも隆起した状態とし、 しかる後、焼付けることによって、前記保護膜材料の硬
化と前記易熱分解性ないし易熱蒸発性のほぼ球状物質の
分解、蒸発を同時に行なわせることで保護膜を形成し、 当該保護膜を、潤滑剤が塗布されたラッピングテープに
より荷重をかけながら研磨して隆起部の尖端を除去し、
次いで洗浄し、潤滑剤を塗布すること、 を特徴とする連続磁性膜型磁気記録媒体の製造方法。
A magnetic recording layer comprising a continuous magnetic film is formed on a non-magnetic substrate, and a silicon-containing protective film material is mixed with a thermally decomposable or thermally evaporable substantially spherical substance. Is applied on a substrate having the continuous magnetic film, and the protective film material is attached to the surface of the substantially spherical substance so as to be higher than the surface of the film formed by the protective film material. Thereby, the protective film is formed by simultaneously performing the curing of the protective film material and the decomposition and evaporation of the thermally decomposable or thermally evaporable substantially spherical substance, and applying a lubricant to the protective film. Polishing while applying a load with wrapping tape to remove the tip of the ridge,
Then, washing and applying a lubricant are provided, and a method for producing a continuous magnetic film type magnetic recording medium is provided.
JP2109370A 1990-04-24 1990-04-24 Method of manufacturing continuous magnetic film type magnetic recording medium Expired - Fee Related JP2959802B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2109370A JP2959802B2 (en) 1990-04-24 1990-04-24 Method of manufacturing continuous magnetic film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2109370A JP2959802B2 (en) 1990-04-24 1990-04-24 Method of manufacturing continuous magnetic film type magnetic recording medium

Publications (2)

Publication Number Publication Date
JPH046625A JPH046625A (en) 1992-01-10
JP2959802B2 true JP2959802B2 (en) 1999-10-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2109370A Expired - Fee Related JP2959802B2 (en) 1990-04-24 1990-04-24 Method of manufacturing continuous magnetic film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JP2959802B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4848578B2 (en) * 2000-06-06 2011-12-28 井関農機株式会社 Root crop harvesting machine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298024A (en) * 1986-06-16 1987-12-25 Fujitsu Ltd Production of magnetic recording medium

Also Published As

Publication number Publication date
JPH046625A (en) 1992-01-10

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