JPH0320063A - Electric fuse - Google Patents
Electric fuseInfo
- Publication number
- JPH0320063A JPH0320063A JP1155459A JP15545989A JPH0320063A JP H0320063 A JPH0320063 A JP H0320063A JP 1155459 A JP1155459 A JP 1155459A JP 15545989 A JP15545989 A JP 15545989A JP H0320063 A JPH0320063 A JP H0320063A
- Authority
- JP
- Japan
- Prior art keywords
- fuse
- heater
- heat generated
- cut
- blown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 abstract description 5
- 239000004020 conductor Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、電気ヒューズに関するものである。[Detailed description of the invention] Industrial applications The present invention relates to electrical fuses.
従来の技術
最近、半導体装置の発展には目覚渣しいものがあｂ１特
に製造後に電気的にプログラムすることが可能な半導体
装置への要望が高１っている。この電気的にプログラム
する方法のひとつとして電気ヒューズを用いこれを切断
するか切断しないかにようプログラムするというものが
ある。第３図は、従来の電気ヒューズの一例で、Ａは電
気ヒューズの平面図、ＢはＡのａ − ａにおける断面
図である。１はヒューズ、２は絶縁膜である。この例で
は、２の絶縁膜を形或した上部に１のヒューズを形威し
た構戒となっている。１のヒューズは、例えばア〃ミな
どの導電体で構威され、このヒューズ部に電流を流すこ
とによるヒューズ部自身が発する熱によりヒューズを溶
断するというものである。2. Description of the Related Art Recently, the development of semiconductor devices has been remarkable. In particular, there is a high demand for semiconductor devices that can be electrically programmed after manufacturing. One method of electrical programming is to use an electrical fuse and program it to be cut or not cut. FIG. 3 shows an example of a conventional electrical fuse, in which A is a plan view of the electrical fuse and B is a cross-sectional view of A along a line a-a. 1 is a fuse, and 2 is an insulating film. In this example, one fuse is formed on top of two insulating films. The fuse No. 1 is made of a conductive material such as aluminum, and the fuse is blown by the heat generated by the fuse section itself when a current is passed through the fuse section.
発明が解決しようとする課題
上記従来の電気ヒューズでは、ヒューズ部に電流を流す
ことによりヒューズ部自身が発する熱によりヒューズを
溶断するものであるため、ヒューズ溶断時に流す電流を
制御する回路部と通常使用時にヒューズが切断している
か切断しないかを判断する回路部が必要であυ、通常使
用時にはヒューズ部に流れる電流を少なくしヒューズが
溶断しないようにしなければならない。ヒューズ部に流
れる電流はヒューズの形状にも起因し、特にこれら２つ
の回路部による電流の制御が難しく、信頼性良く動作さ
せるために大きな課題となっている。Problems to be Solved by the Invention In the above-mentioned conventional electric fuses, the fuse is blown by the heat generated by the fuse part itself when current is passed through the fuse part. A circuit is required to determine whether the fuse is blown or not during use, and during normal use the current flowing through the fuse must be reduced to prevent the fuse from blowing. The current flowing through the fuse section also depends on the shape of the fuse, and it is particularly difficult to control the current by these two circuit sections, which poses a major problem for reliable operation.
課題を解決するための手段
本発明は、上記の課題を解決するために、ヒューズと、
該ヒューズと絶縁膜で絶縁されたヒューズ切断用ヒータ
ーを有し、前記ヒューズ切断用ヒーターに電流を流すこ
とにより発する熱によυ前記ヒューズを切断するもので
ある。Means for Solving the Problems In order to solve the above problems, the present invention provides a fuse;
A fuse cutting heater is insulated from the fuse by an insulating film, and the fuse is cut by heat generated by passing a current through the fuse cutting heater.
作 用
このように、本発明の電気ヒューズでは、ヒューズ部と
は別にヒューズ切断用ヒーターを設けこのヒューズ切断
用ヒーターに電流を流すことによう発する熱によりヒュ
ーズを溶断するものであるためヒューズ自身には大きな
電流を流す必要がなく、ヒューズに対しては、通常使用
時にヒューズが切断しているか切断しないかを判断する
回路部のみで、特に電流の制御が必要なく、信頼性良く
動作する。１た、ヒューズ部分を取り囲むようにヒュー
ズ切断用ヒーターを配置したものについては、ヒーター
の熱が効率よくヒューズ部に伝わυ、ヒューズ切断が効
率よくおこなえる。As described above, in the electric fuse of the present invention, a fuse cutting heater is provided separately from the fuse section, and the fuse is blown by the heat generated when current is passed through the fuse cutting heater, so that the fuse itself is not affected. There is no need for a large current to flow through the fuse, and the fuse operates with high reliability, with only the circuitry that determines whether the fuse is blown or not blown during normal use, and no particular current control is required. In addition, when the fuse cutting heater is arranged so as to surround the fuse part, the heat of the heater is efficiently transferred to the fuse part υ, and the fuse can be cut efficiently.
実施例
以下、本発明を実施例によって第１図及び第２図を用い
て説明する。第１図は、本発明の電気ヒューズの一実施
例で、第２図は、第１図の改良発明の電気ヒューズの一
実施例で、第１図及び第２図Ａは電気ヒューズの平面図
、ＢはＡのａ − ａにおける断面図である。１はヒュ
ーズ、２は絶縁膜、３はヒエーズ切断用ヒーターである
。この例では、２の絶縁膜を形戊した上部に例えばポリ
シリコンなどの導電体で構威され３のヒューズ切断用ヒ
ーターを形或し、さらに上部に２の絶縁膜を形成し、さ
らに上部に例えばアルミなどの導電体で構或された１の
ヒューズを形或した構或となっている。EXAMPLES Hereinafter, the present invention will be explained by way of examples with reference to FIGS. 1 and 2. FIG. 1 shows an embodiment of the electrical fuse of the present invention, FIG. 2 shows an embodiment of the electrical fuse of the improved invention shown in FIG. 1, and FIGS. 1 and 2 A are plan views of the electrical fuse. , B is a sectional view taken along a-a of A. 1 is a fuse, 2 is an insulating film, and 3 is a heater for cutting the fuse. In this example, a fuse cutting heater (3) made of a conductive material such as polysilicon is formed on the upper part of the insulating film (2), and the insulating film (2) is further formed on the upper part. For example, it has a structure in which one fuse is made of a conductive material such as aluminum.
１のヒューズの切断時には、３のヒューズ切断用ヒータ
ーに電流を流すことにより発する熱によう，１のヒュー
ズを溶断するというものである。通常使用時には３のヒ
ューズ切断用ヒーターに電流を流さず、１のヒューズに
小さな電流を流すことによりヒューズが切断しているか
切断しないかをプログラムされた内容として判断する。When cutting the fuse No. 1, the fuse No. 1 is blown by the heat generated by passing a current through the fuse cutting heater No. 3. During normal use, no current is passed through the fuse cutting heater 3, but a small current is passed through the fuse 1, thereby determining whether the fuse is blown or not as programmed.
第２図の場合は、１のヒューズを取ジ囲むように３のヒ
ューズ切断用ヒーターを形或することによシヒーターの
熱が効率よくヒューズ部に伝えヒューズ切断が効率よく
おこなえるようにしたものである。In the case of Fig. 2, the fuse cutting heater 3 is shaped to surround the fuse 1, so that the heat of the heater can be efficiently transferred to the fuse section and the fuse can be cut efficiently. be.
発明の勤果
以上のように、本発明の電気ヒューズでは、ヒューズ部
とは別にヒューズ切断用ヒーターを設けこのヒーターの
熱によりヒューズを溶断するものであるためヒューズ自
身には大きな電流を流す必要がなく信頼性良く動作しそ
の実用的効果は極めて大きい。As described above, in the electric fuse of the present invention, a heater for cutting the fuse is provided separately from the fuse part, and the fuse is blown by the heat of this heater, so it is necessary to apply a large current to the fuse itself. It operates reliably and has extremely great practical effects.
第１図及び第２図は、本発明による電気ヒューズの一実
施例を示す図で、第１図，第２図のＡは平面図、第１図
，第２図のＢは同Ａのａ − ａにおける断面図、第３
図は、従来の電気ヒューズ一例であシ同Ａは平面図、同
Ｂは同Ａのａ − ａにおける断面図である。
１・・・・・・ヒューズ、２・・・・・・絶縁膜、３・
・・・・・ヒュズ切断用ヒーター1 and 2 are diagrams showing one embodiment of the electrical fuse according to the present invention, where A in FIGS. 1 and 2 is a plan view, and B in FIGS. 1 and 2 is a of A in the same embodiment. - cross section at a, 3rd
The figures show an example of a conventional electric fuse, in which A is a plan view and B is a sectional view taken along line a-a of A. 1...Fuse, 2...Insulating film, 3.
・・・・・・Heater for fuse cutting
Claims (2)
ューズ切断用ヒーターを有し、前記ヒューズ切断用ヒー
ターに電流を流すことにより発する熱により前記ヒュー
ズを切断することを特徴とする電気ヒューズ。(1) An electric fuse comprising a fuse and a fuse-cutting heater insulated from the fuse by an insulating film, the fuse being cut by heat generated by passing a current through the fuse-cutting heater.
ーターが配置されたことを特徴とする特許請求の範囲記
載第１項の電気ヒューズ。(2) The electrical fuse according to claim 1, characterized in that a fuse cutting heater is arranged so as to surround the fuse portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1155459A JPH0320063A (en) | 1989-06-16 | 1989-06-16 | Electric fuse |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1155459A JPH0320063A (en) | 1989-06-16 | 1989-06-16 | Electric fuse |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320063A true JPH0320063A (en) | 1991-01-29 |
Family
ID=15606513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1155459A Pending JPH0320063A (en) | 1989-06-16 | 1989-06-16 | Electric fuse |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320063A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19604776A1 (en) * | 1996-02-09 | 1997-08-14 | Siemens Ag | Detachable connecting bridge (fuse) and connectable line interruption (anti-fuse), as well as methods for producing and activating a fuse and an anti-fuse |
| JP2015109305A (en) * | 2013-12-03 | 2015-06-11 | 富士電機株式会社 | Polysilicon fuse, semiconductor device having polysilicon fuse, and method for cutting off polysilicon fuse |
-
1989
- 1989-06-16 JP JP1155459A patent/JPH0320063A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19604776A1 (en) * | 1996-02-09 | 1997-08-14 | Siemens Ag | Detachable connecting bridge (fuse) and connectable line interruption (anti-fuse), as well as methods for producing and activating a fuse and an anti-fuse |
| JP2015109305A (en) * | 2013-12-03 | 2015-06-11 | 富士電機株式会社 | Polysilicon fuse, semiconductor device having polysilicon fuse, and method for cutting off polysilicon fuse |
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