JPH031964U - - Google Patents
Info
- Publication number
- JPH031964U JPH031964U JP6349689U JP6349689U JPH031964U JP H031964 U JPH031964 U JP H031964U JP 6349689 U JP6349689 U JP 6349689U JP 6349689 U JP6349689 U JP 6349689U JP H031964 U JPH031964 U JP H031964U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- forming apparatus
- chamber
- transport mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000007723 transport mechanism Effects 0.000 claims 2
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6349689U JPH031964U (da) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6349689U JPH031964U (da) | 1989-05-31 | 1989-05-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH031964U true JPH031964U (da) | 1991-01-10 |
Family
ID=31593597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6349689U Pending JPH031964U (da) | 1989-05-31 | 1989-05-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH031964U (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4625768B2 (ja) * | 2003-09-05 | 2011-02-02 | 株式会社育良精機製作所 | 棒材供給機及び棒材加工システム |
-
1989
- 1989-05-31 JP JP6349689U patent/JPH031964U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4625768B2 (ja) * | 2003-09-05 | 2011-02-02 | 株式会社育良精機製作所 | 棒材供給機及び棒材加工システム |