JPH031964U - - Google Patents

Info

Publication number

JPH031964U

JPH031964U JP6349689U JP6349689U JPH031964U JP H031964 U JPH031964 U JP H031964U JP 6349689 U JP6349689 U JP 6349689U JP 6349689 U JP6349689 U JP 6349689U JP H031964 U JPH031964 U JP H031964U

Authority

JP

Japan

Prior art keywords

substrate

film forming

forming apparatus

chamber

transport mechanism

Prior art date

1989-05-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 10
• 230000007246 mechanism Effects 0.000 claims description 5
• 230000007723 transport mechanism Effects 0.000 claims 2
• 230000032258 transport Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1

Cited By (1)