JPH0319488B2 - - Google Patents
Info
- Publication number
- JPH0319488B2 JPH0319488B2 JP2564383A JP2564383A JPH0319488B2 JP H0319488 B2 JPH0319488 B2 JP H0319488B2 JP 2564383 A JP2564383 A JP 2564383A JP 2564383 A JP2564383 A JP 2564383A JP H0319488 B2 JPH0319488 B2 JP H0319488B2
- Authority
- JP
- Japan
- Prior art keywords
- force detection
- center
- piezoelectric element
- drive
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 30
- 230000005484 gravity Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 description 13
- 239000002184 metal Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58025643A JPS59151015A (ja) | 1983-02-18 | 1983-02-18 | ジヤイロ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58025643A JPS59151015A (ja) | 1983-02-18 | 1983-02-18 | ジヤイロ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59151015A JPS59151015A (ja) | 1984-08-29 |
| JPH0319488B2 true JPH0319488B2 (enrdf_load_stackoverflow) | 1991-03-15 |
Family
ID=12171510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58025643A Granted JPS59151015A (ja) | 1983-02-18 | 1983-02-18 | ジヤイロ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59151015A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59137568U (ja) * | 1983-03-03 | 1984-09-13 | ジエコ−株式会社 | 角速度センサ |
| AU554302B2 (en) * | 1983-09-02 | 1986-08-14 | Sundstrand Data Control, Inc. | Angular rate sensor utilizing parallel vibrating accelerometers |
-
1983
- 1983-02-18 JP JP58025643A patent/JPS59151015A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59151015A (ja) | 1984-08-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9835641B2 (en) | Angular velocity detection device and angular velocity sensor including the same | |
| US7004024B1 (en) | Horizontal and tuning fork vibratory microgyroscope | |
| US7036373B2 (en) | MEMS gyroscope with horizontally oriented drive electrodes | |
| US8621927B2 (en) | Angular rate sensor with suppressed linear acceleration response | |
| JP2000329562A (ja) | 角速度センサ装置 | |
| CN1199171A (zh) | 单块振动梁式角速度传感器 | |
| JPH03291517A (ja) | 圧電振動速度センサー | |
| JPH0629733B2 (ja) | ジャイロスコ−プ | |
| US11105828B2 (en) | Microelectromechanical device for out-of-plane motion detection | |
| CN1318821C (zh) | 使用调谐加速计的微机械硅陀螺仪 | |
| JPS58221109A (ja) | ジヤイロ装置 | |
| US20020139187A1 (en) | Angular velocity sensor | |
| US6561028B1 (en) | Mechanical resonator for a rotation sensor | |
| JP4635345B2 (ja) | 角速度センサ | |
| JP3601822B2 (ja) | 双音さ型振動ジャイロセンサ | |
| JPH0319488B2 (enrdf_load_stackoverflow) | ||
| US4653325A (en) | Gyro apparatus | |
| JPH0455249B2 (enrdf_load_stackoverflow) | ||
| CN100561126C (zh) | 利用静电耦合的微加工振动陀螺仪 | |
| JPH0257247B2 (enrdf_load_stackoverflow) | ||
| JPH0334567B2 (enrdf_load_stackoverflow) | ||
| JPS60185111A (ja) | ジヤイロ装置 | |
| JP2583117B2 (ja) | ジャイロ装置 | |
| JPH10239067A (ja) | 角速度センサ | |
| JPS63172914A (ja) | ジヤイロ装置 |