JPH03194434A - Vacuum gauge - Google Patents
Vacuum gaugeInfo
- Publication number
- JPH03194434A JPH03194434A JP33427989A JP33427989A JPH03194434A JP H03194434 A JPH03194434 A JP H03194434A JP 33427989 A JP33427989 A JP 33427989A JP 33427989 A JP33427989 A JP 33427989A JP H03194434 A JPH03194434 A JP H03194434A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- electrode
- voltage
- vacuum
- vacuum gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 230000003321 amplification Effects 0.000 claims abstract description 8
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 8
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 239000010408 film Substances 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 2
- 230000002463 transducing effect Effects 0.000 abstract 2
- 238000005259 measurement Methods 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
技術分野
本発明は絶縁薄膜を仕事関数が互いに異なる１対の電極
部材によって挟んだ構造の圧力電圧変換素子（いわゆる
ＭＩＭ素子）を含む真空計に関する。TECHNICAL FIELD The present invention relates to a vacuum gauge including a pressure-voltage conversion element (so-called MIM element) having a structure in which an insulating thin film is sandwiched between a pair of electrode members having different work functions.
背景技術
従来の真空計としては、大気圧に近い圧力を測定するも
のとして、Ｕ字管マノメータ、マクラウド真空計、隔膜
真空計、熱伝導を利用する真空計などがある。BACKGROUND ART Conventional vacuum gauges that measure pressure close to atmospheric pressure include U-tube manometers, MacLeod vacuum gauges, diaphragm vacuum gauges, and vacuum gauges that utilize thermal conduction.
Ｕ字管マノメータは、一端が開管又は閉管したＵ字形の
管に水銀を入れ、大気圧から数Ｔｏｒｒまでの圧力を測
定するものである。これは水銀柱の高さを読み取る方式
であるから、一般に±Ｉ Ｔｏｒｒ位の誤差は有るもの
としなければならないし、高真空の測定はできない。ま
た、水銀のような液体を使うので、取り付けなどに制限
があり使い辛いという欠点もある。A U-tube manometer measures pressures ranging from atmospheric pressure to several Torr by placing mercury in a U-shaped tube with one end open or closed. Since this is a method of reading the height of the mercury column, it must generally be assumed that there is an error of about ±I Torr, and high vacuum measurements cannot be made. Additionally, since it uses a liquid such as mercury, it has the disadvantage of being difficult to use due to restrictions on installation.
マクラウド真空計は、被測定気体を一定体積において圧
縮して圧力を増大させ、その圧力をＵ字管真空計で読み
、その時の圧力比で元の圧力を求めるものである。故に
、ある瞬間の圧力を知るだけで、圧力変化を連続的に測
定できない重大な欠点があるほか、１０−３ Ｔｏｒｒ
位の比較的高い圧力までしか測定することができない。The MacLeod vacuum gauge compresses the gas to be measured in a constant volume to increase the pressure, reads the pressure with a U-tube vacuum gauge, and determines the original pressure using the pressure ratio at that time. Therefore, there is a serious drawback that only the pressure at a certain moment is known, and pressure changes cannot be measured continuously.
It is only possible to measure pressures up to relatively high pressures.
隔膜真空計には、ブルドン管を使用したもの、ベローズ
又は同心円にひだが入った平面状の隔膜を使用したもの
等があり、大気圧を基準として圧力差を求めることによ
り、真空度を知るものである。測定範囲は大気圧から２
０Ｔｏｒｒ程度で、精度も良くないので、圧力の目安と
して使われることが多い。他の隔膜真空計としては、隔
膜の変位をキャパシタンスの変化で読むことにより、１
０’Ｔｏｒｒまで測定可能なものも有る。しかしながら
、かなり高価であるという欠点がある。Diaphragm vacuum gauges include those that use a Bourdon tube, bellows, or a flat diaphragm with concentric pleats, and gauge the degree of vacuum by determining the pressure difference based on atmospheric pressure. It is. Measurement range is from atmospheric pressure to 2
Since it is around 0 Torr and its accuracy is not good, it is often used as a standard for pressure. Other diaphragm vacuum gauges measure the displacement of the diaphragm by reading the change in capacitance.
There are some that can measure up to 0'Torr. However, it has the disadvantage of being quite expensive.
熱伝導を利用した真空計の代表例としては、ビラニー真
空計とサーミスタ真空計がある。低圧では気体の熱伝導
率が圧力に比例して変化するので、ビラニー真空計では
線状の発熱体及び抵抗変化素子を用い、サーミスタ真空
計ではサーミスタを用いて、圧力変化を電気信号に変換
して読み取っている。しかしながら、発熱体の酸化の問
題などがあり、大気近くの圧力ａｐｌ定ができず、測定
範囲は１０ Ｔｏｒｒ〜１０−３ Ｔｏｒｒ位である。Typical examples of vacuum gauges that utilize heat conduction are Villaney vacuum gauges and thermistor vacuum gauges. At low pressures, the thermal conductivity of gas changes in proportion to the pressure, so Villany vacuum gauges use a linear heating element and variable resistance element, and thermistor vacuum gauges use a thermistor to convert pressure changes into electrical signals. is being read. However, due to problems such as oxidation of the heating element, it is not possible to determine the pressure apl near the atmosphere, and the measurement range is about 10 Torr to 10 -3 Torr.
一方、高真空を計るものとしては、電離真空計がある。On the other hand, there is an ionization vacuum gauge that measures high vacuum.
これは空間にある気体分子をイオン化し、それを電気的
に集めてイオン電流として取り出すことにより、真空度
を測定するものである。測定子は一種の真空管であるか
ら、１０−３ Ｔｏｒｒより圧力の高いところではヒー
ターが酸化して使えない。This measures the degree of vacuum by ionizing gas molecules in space, collecting them electrically, and extracting them as an ion current. Since the probe is a type of vacuum tube, the heater will oxidize and cannot be used at pressures higher than 10-3 Torr.
高真空側の測定は１０’Ｔｏｒｒ以上まで可能ではある
が、測定子の信頼性が高いとは言えないので、よく問題
を起こす他、操作の誤りによる圧力上昇により測定子を
壊してしまうこともしばしば発生している。Although measurements on the high vacuum side are possible up to 10'Torr or more, the reliability of the probe is not high, which often causes problems, and the probe may be damaged due to pressure increase due to incorrect operation. It happens often.
このように、従来から使用されてきた真空計においては
、大気から高真空まで単一のものでは測定できないので
、２つ以上の形式の異なる真空計を組み合わせて使う必
要があった。更に、精度が悪い、取り付けが制限される
、高価である、不安定で誤操作に弱いなど、多くの問題
を抱えていた。As described above, the conventionally used vacuum gauges cannot measure from atmospheric air to high vacuum with a single vacuum gauge, so it has been necessary to use a combination of two or more different types of vacuum gauges. Furthermore, they had many problems, such as poor accuracy, limited installation, high price, instability, and susceptibility to incorrect operation.
発明の概要
［発明の目的］
本発明の目的は、大気圧から高真空まで比較的安価で高
精度で測定でき、また大気にさらしても破壊の心配がな
い真空計を提供することである。Summary of the Invention [Object of the Invention] An object of the present invention is to provide a vacuum gauge that can measure from atmospheric pressure to high vacuum at a relatively low cost and with high accuracy, and that is free from damage even when exposed to the atmosphere.
［発明の構成］
本発明による真空計は、絶縁薄膜を仕事関数が互いに異
なる１対の金属電極部材によって挟んだ構造の圧力電圧
変換素子と、該圧力電圧変換素子の出力電圧を所定の増
幅特性にて増幅する増幅手段と、該増幅手段の出力電圧
に応じて駆動される表示手段とからなることを特徴とし
ている。[Structure of the Invention] The vacuum gauge according to the present invention includes a pressure-voltage conversion element having a structure in which an insulating thin film is sandwiched between a pair of metal electrode members having different work functions, and an output voltage of the pressure-voltage conversion element with predetermined amplification characteristics. The present invention is characterized in that it comprises an amplifying means for amplifying the amplification, and a display means driven in accordance with the output voltage of the amplifying means.
実施例
以下、本発明の実施例を図面を参照しつつ詳細に説明す
る。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第１図に示した本発明の一実施例たる真空計においては
、圧力電圧変換素子としてＭＩＭ素子１１が設けられて
いる。このＭＩＭ素子１１は電池素子としても知られて
いる。ＭＩＭ素子１１においてはスライドガラス基板１
上に一方の金属電極２が蒸着形成されている。金属電極
２は例えば、金（Ａｕ）であり、負電極として作動する
。金属電極２には絶縁層として累積されたＬ Ｂ （Ｌ
ａｎｇａ＋ｕ１ｒ−Ｂｌｏｄｇｅｔｔ）膜３が形成され
ている。ＬＢ膜３は例えば、ポリイミド（ＰＩ）からな
り、トンネル電流が生ずる数十人程度の厚さを有する。In the vacuum gauge which is an embodiment of the present invention shown in FIG. 1, an MIM element 11 is provided as a pressure-voltage conversion element. This MIM element 11 is also known as a battery element. In the MIM element 11, the slide glass substrate 1
One metal electrode 2 is formed on top by vapor deposition. The metal electrode 2 is, for example, gold (Au) and operates as a negative electrode. The metal electrode 2 has L B (L
anga+u1r-Blodgett) film 3 is formed. The LB film 3 is made of polyimide (PI), for example, and has a thickness of about several tens of nanometers so that a tunnel current occurs.
ＬＢ膜膜上上は他方の金属電極４が蒸着形成されている
。The other metal electrode 4 is formed by vapor deposition on the LB film.
金属電極４は金属電極２とは仕事関数が異なる、例えば
、アルミニウム（ＡＩ）からなり、正電極として作動す
る。The metal electrode 4 has a different work function from the metal electrode 2, is made of aluminum (AI), for example, and operates as a positive electrode.
ＭＩＭ素子１１の負電極２はアースされており、正電極
４には直流アンプ１２が接続されている。The negative electrode 2 of the MIM element 11 is grounded, and the positive electrode 4 is connected to the DC amplifier 12.
直流アンプ１２はＭＩＭ素子１１の正電極４及び負電極
２間に発生する電圧を増幅する。直流アンプ１２の入出
力間には温度補償回路１３が接続され、温度補償回路１
３はＭＩＭ素子１１の温度による発生電圧変化を補償す
る帰還回路である。直流アンプ１２の出力には電圧計か
らなる真空度指示計１４が接続されている。The DC amplifier 12 amplifies the voltage generated between the positive electrode 4 and the negative electrode 2 of the MIM element 11. A temperature compensation circuit 13 is connected between the input and output of the DC amplifier 12.
Reference numeral 3 denotes a feedback circuit that compensates for voltage variations caused by the temperature of the MIM element 11. A vacuum degree indicator 14 consisting of a voltmeter is connected to the output of the DC amplifier 12.
かかる構成において、ＭＩＭ素子１１の正電極４と負電
極２との間に生ずる電圧は空気圧に対して例えば、第２
図に示すように変化する。この発生電圧は数百ｍＶであ
り、直流アンプ１２によって電圧増幅される。直流アン
プ１２の出力電圧は温度補償回路１３を介して直流アン
プ１２の人力に帰還される。ＭＩＭ素子１１の発生電圧
は空気圧だけでなく周囲温度による影響を受けて素子自
身の温度によっても変化するので温度補償回路１３によ
ってその発生電圧のうちの温度変化分が補償される。例
えば、一定の空気圧力下における素子温度とＭＩＭ素子
１１の発生電圧との関係を予め測定して置いてその空気
圧に応じた温度補償特性を温度補償回路１３に備えさせ
るのである。温度補償回路１３は素子温度をセンサ（図
示せず）により検出しその検出温度に応じて直流アンプ
１２の出力電圧の一部を直流アンプ１２の入力に帰還さ
せることにより温度補償を行なう。In such a configuration, the voltage generated between the positive electrode 4 and the negative electrode 2 of the MIM element 11 is, for example, the second
Changes as shown in the figure. This generated voltage is several hundred mV, and is amplified by the DC amplifier 12. The output voltage of the DC amplifier 12 is fed back to the human power of the DC amplifier 12 via the temperature compensation circuit 13. Since the voltage generated by the MIM element 11 is influenced not only by air pressure but also by the ambient temperature and changes depending on the temperature of the element itself, the temperature compensation circuit 13 compensates for the temperature change portion of the generated voltage. For example, the relationship between the element temperature and the voltage generated by the MIM element 11 under a constant air pressure is measured in advance, and the temperature compensation circuit 13 is provided with a temperature compensation characteristic corresponding to the air pressure. The temperature compensation circuit 13 detects the element temperature with a sensor (not shown) and performs temperature compensation by feeding back a part of the output voltage of the DC amplifier 12 to the input of the DC amplifier 12 according to the detected temperature.
よって、直流アンプ１２から真空度指示計１４に供給さ
れる電圧はほぼ空気圧に対して変化するものとなる。真
空度指示計１４はその供給電圧に応じた指示を行ない、
目盛りにより空気圧、すなわち真空度を読み取ることが
できるのである。Therefore, the voltage supplied from the DC amplifier 12 to the vacuum level indicator 14 changes approximately with respect to the air pressure. The vacuum degree indicator 14 gives instructions according to the supplied voltage,
The scale allows you to read the air pressure, that is, the degree of vacuum.
なお、上記した実施例においては、圧力電圧変換素子の
１対の金属電極部材に金及びアルミニウムを用い、絶縁
薄膜にはポリイミドを用いているが、これに限定される
ものではない。例えば、金属電極部材には銅や銀を用い
ても良いし、絶縁薄膜にはポリアミドや無機材料のアル
ミナ、ＳｉＯ２などを用いても良い。In the above embodiment, gold and aluminum are used for the pair of metal electrode members of the pressure-voltage conversion element, and polyimide is used for the insulating thin film, but the present invention is not limited thereto. For example, copper or silver may be used for the metal electrode member, and polyamide, inorganic materials such as alumina, SiO2, etc. may be used for the insulating thin film.
また、上記した実施例においては、表示手段としては電
圧計を用いて測定圧力を示しているが、これに限らず、
入力端子を対応する測定圧力としてディジタル表示する
ＬＣＤ等の表示器を用いたディジタル表示装置でも良い
。Further, in the above-described embodiments, a voltmeter is used as the display means to indicate the measured pressure, but the display is not limited to this.
A digital display device using a display such as an LCD that digitally displays the input terminal as the corresponding measured pressure may also be used.
発明の効果
以上の如く、本発明による真空計は、絶縁薄膜を仕事関
数が互いに異なる１対の金属電極部材によって挟んだ構
造の圧力電圧変換素子を有し、その圧力電圧変換素子の
発生電圧を所定の増幅特性にて増幅して表示手段を駆動
するようになっている。圧力電圧変換素子の出力電圧特
性は気圧の変化による電圧変化率が大きいので、圧力電
圧変換素子を用いたことにより高精度で高感度の真空計
を得ることができる。しかもその電圧変化率は低圧はど
大きくなっているので高真空はど高精度で測定すること
ができる。また、圧力電圧変換素子は大気中にさらして
も全く動作上の問題がないので誤操作により破壊を生ず
る心配もない。更に、圧力電圧変換素子を用いたことに
より構成が簡単であるので低コストになるという利点も
ある。Effects of the Invention As described above, the vacuum gauge according to the present invention has a pressure-voltage conversion element having a structure in which an insulating thin film is sandwiched between a pair of metal electrode members having different work functions, and the voltage generated by the pressure-voltage conversion element is The signal is amplified with a predetermined amplification characteristic to drive the display means. Since the output voltage characteristic of the pressure-voltage conversion element has a large voltage change rate due to changes in atmospheric pressure, a vacuum gauge with high accuracy and sensitivity can be obtained by using the pressure-voltage conversion element. Furthermore, since the rate of voltage change is greater at low pressures, it can be measured with high precision at high vacuums. In addition, since the pressure-voltage conversion element has no operational problems even if exposed to the atmosphere, there is no fear that it will be destroyed due to erroneous operation. Furthermore, the use of the pressure-voltage converting element simplifies the configuration and has the advantage of reducing costs.
【図面の簡単な説明】
第１図は本発明の実施例を示すブロック図、第２図は圧
力電圧変換素子の空気圧−電圧特性を示す図である。
主要部分の符号の説明
２．４・・・金属電極
３・・・ＬＢ膜
１１・・・圧力電圧変換素子
１２・・・直流アンプ
１３・・・温度補償回路
１４・・・真空度指示計BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing air pressure-voltage characteristics of a pressure-voltage conversion element. Explanation of symbols of main parts 2.4... Metal electrode 3... LB membrane 11... Pressure voltage conversion element 12... DC amplifier 13... Temperature compensation circuit 14... Vacuum degree indicator
Claims (2)
極部材によって挟んだ構造の圧力電圧変換素子と、前記
圧力電圧変換素子の出力電圧を所定の増幅特性にて増幅
する増幅手段と、前記増幅手段の出力電圧に応じて駆動
される表示手段とからなることを特徴とする真空計。(1) a pressure-voltage conversion element having a structure in which an insulating thin film is sandwiched between a pair of metal electrode members having different work functions; an amplifying means for amplifying the output voltage of the pressure-voltage conversion element with a predetermined amplification characteristic; A vacuum gauge comprising: a display means driven in accordance with the output voltage of the amplification means.
の温度補償を行なう温度補償回路を備えていることを特
徴とする請求項１記載の真空計。(2) The vacuum gauge according to claim 1, wherein the amplification means includes a temperature compensation circuit that performs temperature compensation for the output voltage of the pressure-voltage conversion element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33427989A JPH079383B2 (en) | 1989-12-22 | 1989-12-22 | Vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33427989A JPH079383B2 (en) | 1989-12-22 | 1989-12-22 | Vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03194434A true JPH03194434A (en) | 1991-08-26 |
| JPH079383B2 JPH079383B2 (en) | 1995-02-01 |
Family
ID=18275565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33427989A Expired - Lifetime JPH079383B2 (en) | 1989-12-22 | 1989-12-22 | Vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079383B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115508001A (en) * | 2022-09-28 | 2022-12-23 | 山东大学 | High-sensitivity capacitance film vacuum gauge based on MEMS and manufacturing method thereof |
-
1989
- 1989-12-22 JP JP33427989A patent/JPH079383B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115508001A (en) * | 2022-09-28 | 2022-12-23 | 山东大学 | High-sensitivity capacitance film vacuum gauge based on MEMS and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079383B2 (en) | 1995-02-01 |
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