JPH0319415A - Multi-electrode type surface acoustic wave device - Google Patents
Multi-electrode type surface acoustic wave deviceInfo
- Publication number
- JPH0319415A JPH0319415A JP15231989A JP15231989A JPH0319415A JP H0319415 A JPH0319415 A JP H0319415A JP 15231989 A JP15231989 A JP 15231989A JP 15231989 A JP15231989 A JP 15231989A JP H0319415 A JPH0319415 A JP H0319415A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- input
- output
- electrodes
- surface acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000001629 suppression Effects 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 8
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- 230000006698 induction Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、人，出力電極間で、弾性表面波に変換されず
に、両ｉｔ極間の電磁気的結合（直接波）に起因して発
生する電気的雑音を抑圧するようにした多電極型弾性表
面波装置に関する．［従来の技術］
弾性表面波装置で入力電力の一部が，入出力電極間を弾
性表面波にならないで、両電極間の電磁的結合により、
いわゆる直接波として伝搬し，維音として表われて特性
を劣化させる現象に対して、従来から、種々の対策が提
案されていた．この直接波の影響による帯域外抑圧度の
劣化対策として、特公昭５４−３５４７８号公報には，
３電極構成弾性表面波装置において、中央の入力電極に
対称な位置に設けた２個の出力電極に流れるループ電流
の向きを互いに逆にし、このループ電流によって発生す
る磁界を中央の入力電極上で互いに逆方向にすることに
より磁界を相殺する方法が記載されており、また，特開
昭５７−１６２８１６号公報には磁界発生源であるルー
プ電流を小さくするため，ワイヤリング．立体交差の電
極パターンにより，電流ループを複数個に細分化し、磁
界を打ち消す方法が開示されている。また他の３電極型
構成による対策技術について， Ｎａｔｉｏｎａｌ Ｔ
ｅｃｂｒ＋ｉ−ｃａｌ Ｒｓｐｏｒｔ ＶｏＬ．３０
Ｎｏ．Ｉ Ｆｓｂ．１９８４に記載されている．
［発明が解決しようとするＩＭ ］
上記従来の技術は、磁界発生、入出力電極間容鳳芦合に
よる帯域外抑圧度の劣化対策であるが，入出力電極の接
地方法およびワイヤの長さについては特別な配慮はされ
ておらず，高周波で用いる多電極型弾性表面波装置にお
いては、３電極型弾性表面波装置に比べ，入力電極およ
び出力電極の個数の増加や入出力電極間での磁界による
相互作用が強まる傾向にあるため、帯域外抑圧度の劣化
が問題になっていた。[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to the electromagnetic coupling (direct wave) between a person and an output electrode without being converted into a surface acoustic wave. This paper relates to a multi-electrode surface acoustic wave device that suppresses generated electrical noise. [Prior art] In a surface acoustic wave device, a part of the input power is transmitted between the input and output electrodes without becoming a surface acoustic wave, but due to electromagnetic coupling between the two electrodes.
Various countermeasures have been proposed in the past for the phenomenon that propagates as so-called direct waves, appears as fiber sounds, and deteriorates characteristics. As a countermeasure against the deterioration of the out-of-band suppression degree due to the influence of this direct wave, Japanese Patent Publication No. 54-35478 states:
In a three-electrode surface acoustic wave device, the directions of the loop currents flowing through the two output electrodes located symmetrically to the central input electrode are reversed, and the magnetic field generated by this loop current is applied to the central input electrode. A method of canceling the magnetic fields by making the directions opposite to each other is described, and Japanese Patent Application Laid-Open No. 162816/1983 describes a method of wiring in order to reduce the loop current that is the source of the magnetic field. A method is disclosed in which a current loop is subdivided into a plurality of parts using a three-dimensionally intersecting electrode pattern to cancel the magnetic field. In addition, regarding countermeasure technology using other three-electrode configuration, National T
ecbr+i-cal Rsports VoL. 30
No. I Fsb. Described in 1984. [IM to be solved by the invention] The above-mentioned conventional technology is a countermeasure against deterioration of out-of-band suppression due to magnetic field generation and coupling between input and output electrodes. No special consideration is given to multi-electrode surface acoustic wave devices used at high frequencies. Since the interaction between
本発明は上記従来の技術の問題点を解決し、帯域外抑圧
度の優れた良好な特性を有する高周波用多電極型弾性表
面波Ｓａを提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the conventional technology and to provide a multi-electrode surface acoustic wave Sa for high frequencies having excellent characteristics with excellent out-of-band suppression.
［課題が解決するための手段］
上記目的を達成するために本発明においては、互いに弾
性表面波を送受する２個以辷の入力ｆｆｉ極と３！１以
上の出力電極を，同一伝ｍ路上に配設した高周波多電極
型弾性表面波装置において、入力電極の接地電極からの
ワイヤによる配線または電極パターンの延長による配線
を、入力電極の入力ステムリードピン便で金属ステムに
接続して接地し，出力電極の接地電極からのワイヤによ
る配線または電極パターンの延長による配線を出力電極
の出力ステムリードピン側で金属ステムに接続して接地
する構造にした．また，弾性表面波装置を構成する人力
，出力電極パターンの周囲を接ｌｌ！！電極パターンで
囲むと，上記のような接地を行い易い確実な構造となる
。さらに，弾性表面波装置の入、出力電極と電気信号を
取り出すために設けた入、出力ステムリードピンとの間
を接続するワイヤの長さを同じ長さに揃えた．
［作用］
上記のような構造を単独または組合せて用いることにす
れば，入出力電極間で、特に高周波で問題になる、漏れ
磁界による相互誘導作用および容量結合による直接波の
影響を低減できる。即ち、人，出力電極の接地１極の接
続配線を、それぞれのスデムリードピン側に、ワイヤ又
はＷ１極パターンで戻すことによって，信号源電極側で
発生する磁界と，接地ｆｆｉ極側で発生する磁界とを相
殺する構造にして，相互誘導作用を小さ＜シ，また、入
、出力電極、それぞれの接地電極を分離することによっ
て、入出力間の容量結合を小さくした．［実施例］
第ｌ図は本発明第１実施例の斜視図である．本実施例は
，本発明を多電極型の低損失弾性表面波装置に適用した
実施例で、圧電性基板１は３６度回転Ｙ軸切断、Ｘ軸伝
搬のタンタル酸リチウム単結晶基板（Ｌ ｉ Ｔ ａ
Ｏ，）である。電極構成は，入力電極２、出力電極３が
交互に配置されており、入出力電極の個数は、入力電極
７個，出力電極６個である．入力電極２及び出力電極３
は、それぞれ，入力（母線）電極パッド８及び出力（母
線）ｆ８極パクド９に接続され、本装置のパッケージス
テムｌ１の入カステムリードピン１２及び出力ステムリ
ードピン１３に、それぞれ、面径２５μｍのＡｆｌワイ
ヤ４又はＡｕワイヤにより接続されている．また，持に
高周波においては、直接波による帯域外抑圧度劣化が問
題となるため，入出力電極間にシール．ド電極７を設け
ると共に、本発明により入力電極の接地用パッド５の接
地を、入力ステムリードピン１２の側に，出力電極の接
地用パッド６の接地を出力ステムリードピン１３の側に
，それぞれワイヤ４を介して金属ステム面に接地を施し
た構造としている。なお，この多電極型弾性表面波装置
の中心周波数は８８０ＭＨｚで、入出力電極の１極指線
幅は１．２μｍである．電極材料にはＡ怠−Ｔｉ合金を
用い、ｔｕｉの膜厚は１００ｎｍとし、ＤＣマグネトロ
ンスパソタ法により成膜し．ホトリソグラフィ工程を経
て、電極を形成した．
この第１実施例の周波数特性を第２図に示す．この図か
らも判るように、特に高城側の帯域外抑圧度の向上が顕
著であって従来に比べて約８ ｄ． Ｂ向上し、従来の
装置の周波数特性に見られた直接波の影響と思われるト
ラップの埋まりも改善され，良好な特性が得られた．
第３Ｆ！Ｉは第２実施例を示す．この実施例の電極パタ
ーンの特徴は，第１実施例では．入、出力電極の接地１
！極を、それぞれ、人．出力ステムリードピン側に接地
する際、ワイヤにより行っていたが，ワイヤ長が長くな
り、ワイヤボンディングでのワイヤ長の違いによる周波
数特性の変動、空中配線部分が多くワイヤ同士のショー
ト等による歩留低下があるのを防止するため、本実施例
では，入出力電極の接地用パッドを、夫々の共通電極（
母線）の近くまで伸びる金属パターンの端部に設けてワ
イヤ長を短くシた．歩留が向上し，周波数特性は第１実
施例同様であった．
第３実施例を第４図に示す．この実施例では入力電極と
出力電極の接地を、より確実なものとする為、入出力電
極の周囲を接地ｆｆｔ極パターン１０で囲んだ構造とし
てある．この構造の弾性表面波装匿の周波数特性は、第
１，第２実施例に比べて＊Ｉ４ｔ．外抑圧度が更に２ｄ
Ｂ程度改善された．第５図は第４実施例を示す．この実
施例では、入力電極用共通接地電極パターンと出力電極
用共通接地電極パターンを分離して設け、これらにより
、入力電極の接地電極同士、出力電極の接地電極同士を
，それぞれ、圧電体基板上で接続し、かつ，上記入力電
極用および出力ｆ１極用共通接地電極パターンを圧電体
基板上で互いに＋ｇ接して平行に形成させてある．入、
出力電極用共通接地電極パターンと金属ステム面との接
続接地方法は第ｌ、第２実施例の場合と同様である．従
来に比べ、約１５ｄＢ帯域外抑圧度が向上し、良好な周
波数特性が得られた．
第６図は第５実施例を示す．この実施例でも共通接地電
極パターンを設けているが、それらの接地を一層確実に
するために，入出力電極の周囲を接地電極パターンで囲
んでいる．これにより，帯域外抑圧度が第４実施例に比
べて更に約２ｄＢ向．Ｌした．
！１７ｖ！ｊは第６実施例を示す，入力（母線）電極パ
ッドと入力ステムリードピンとを接続するワイヤの長さ
と，出力（母線）Ｗ１極パッドと出力ステムリードピン
とを接続するワイヤの長さを等しく同一所定長にした．
これにより、ワイヤに寄生するインダクタンス値の違い
に伴うマッチング条件の変動が防止できるため、歩留向
上に役立つ．なお，図中、１４は接地ステムリードピン
である．［発明の効果］
以上説明したように本発明によれば、特に高周波用の場
合において，入出力電極間の漏れ磁界による相互誘導作
用，容量結合による誘導作用が軽減できるため、いわゆ
る直接波の影響が低下し、周波数特性の帯域外抑圧度が
向上する効果が得られる．[Means for Solving the Problems] In order to achieve the above object, in the present invention, two or more input ffi poles and 3!1 or more output electrodes that transmit and receive surface acoustic waves from each other are connected on the same transmission line. In a high-frequency multi-electrode type surface acoustic wave device installed in The structure is such that the wiring from the ground electrode of the output electrode or the wiring from the extension of the electrode pattern is connected to the metal stem on the output stem lead pin side of the output electrode and grounded. In addition, the human power that makes up the surface acoustic wave device and the area around the output electrode pattern should be touched! ! Surrounding it with an electrode pattern provides a reliable structure that facilitates grounding as described above. Furthermore, the lengths of the wires connecting the input and output electrodes of the surface acoustic wave device and the input and output stem lead pins provided for extracting electrical signals were made to be the same length. [Function] By using the above-described structures alone or in combination, it is possible to reduce the effects of mutual induction due to leakage magnetic fields and direct waves due to capacitive coupling between the input and output electrodes, which are problematic especially at high frequencies. That is, by returning the connection wiring of the ground 1 pole of the human and output electrodes to the respective sudem lead pins using wires or W 1 pole pattern, the magnetic field generated on the signal source electrode side and the ground ffi pole side are generated. By creating a structure that cancels out the magnetic field, the mutual induction effect is reduced, and by separating the input and output electrodes, as well as their respective ground electrodes, the capacitive coupling between input and output is reduced. [Embodiment] Figure 1 is a perspective view of the first embodiment of the present invention. This embodiment is an embodiment in which the present invention is applied to a multi-electrode type low-loss surface acoustic wave device, and the piezoelectric substrate 1 is a lithium tantalate single crystal substrate (Li Ta
O, ). In the electrode configuration, input electrodes 2 and output electrodes 3 are arranged alternately, and the number of input and output electrodes is 7 input electrodes and 6 output electrodes. Input electrode 2 and output electrode 3
are connected to the input (busbar) electrode pad 8 and the output (busbar) f8 electrode pad 9, respectively, and are connected to the input stem lead pin 12 and output stem lead pin 13 of the package stem l1 of this device, respectively, with an Afl having a surface diameter of 25 μm. Connected by wire 4 or Au wire. Also, especially at high frequencies, deterioration of out-of-band suppression due to direct waves becomes a problem, so a seal is required between the input and output electrodes. In addition, according to the present invention, the grounding pad 5 of the input electrode is connected to the input stem lead pin 12 side, and the grounding pad 6 of the output electrode is connected to the output stem lead pin 13 side by wire 4. The structure is such that the metal stem surface is grounded through the ground. The center frequency of this multi-electrode surface acoustic wave device is 880 MHz, and the width of one pole of the input and output electrodes is 1.2 μm. A-Ti alloy was used as the electrode material, the thickness of the tui film was 100 nm, and the film was formed by the DC magnetron supersota method. Electrodes were formed through a photolithography process. The frequency characteristics of this first embodiment are shown in Figure 2. As can be seen from this figure, the improvement in out-of-band suppression on the Takagi side is particularly remarkable, with an improvement of approximately 8 d. In addition, the filling of traps, which was thought to be caused by direct waves, which was seen in the frequency characteristics of the conventional device, was also improved, and good characteristics were obtained. 3rd F! I indicates the second embodiment. The characteristics of the electrode pattern of this embodiment are the same as those of the first embodiment. Grounding of input and output electrodes 1
! Each pole is a person. When grounding the output stem lead pin side, it was done with a wire, but the wire length became longer, and the frequency characteristics fluctuated due to the difference in wire length in wire bonding, and the yield decreased due to short-circuits between wires due to many aerial wiring parts, etc. In order to prevent this, in this example, the grounding pads of the input and output electrodes are
The wire length was shortened by installing it at the end of the metal pattern that extends close to the busbar. The yield was improved and the frequency characteristics were the same as in the first example. The third embodiment is shown in Figure 4. In this embodiment, in order to ensure the grounding of the input and output electrodes, the input and output electrodes are surrounded by a ground fft electrode pattern 10. The frequency characteristics of the surface acoustic wave shielding of this structure are *I4t. compared to the first and second embodiments. Outer suppression degree is further 2d
Improved by B level. Figure 5 shows the fourth embodiment. In this embodiment, a common ground electrode pattern for input electrodes and a common ground electrode pattern for output electrodes are provided separately, and these allow the ground electrodes of the input electrodes to be connected to each other and the ground electrodes of the output electrodes to be connected to each other on the piezoelectric substrate. The common ground electrode patterns for the input electrode and the output f1 electrode are formed parallel to each other on the piezoelectric substrate so as to be in +g contact with each other. Enter,
The method of connecting and grounding the common ground electrode pattern for output electrodes and the metal stem surface is the same as in the first and second embodiments. Compared to the conventional model, the degree of out-of-band suppression has been improved by approximately 15 dB, and good frequency characteristics have been obtained. Figure 6 shows the fifth embodiment. A common ground electrode pattern is also provided in this embodiment, but in order to further ensure their grounding, the input and output electrodes are surrounded by a ground electrode pattern. As a result, the degree of out-of-band suppression increases by approximately 2 dB compared to the fourth embodiment. I did L. ! 17v! j indicates the sixth embodiment, where the length of the wire connecting the input (bus bar) electrode pad and the input stem lead pin is equal to the length of the wire connecting the output (bus bar) W1 pole pad and the output stem lead pin. I made it to the specified length.
This prevents variations in the matching conditions due to differences in the parasitic inductance values of the wires, which helps improve yield. In addition, in the figure, 14 is a grounding stem lead pin. [Effects of the Invention] As explained above, according to the present invention, the mutual induction effect due to leakage magnetic fields between input and output electrodes and the induction effect due to capacitive coupling can be reduced, especially in the case of high frequency applications, so that the effects of so-called direct waves can be reduced. This has the effect of improving the degree of out-of-band suppression of frequency characteristics.
第１図は本発明第１実施例の斜視図，第２図は第１実施
例の周波数特性図、第３図は本発明第２実施例の平面図
、第４図は本発明第３実施例の平面図，第５図は本発明
第４実施例の平面図、第６図は本発明第５実施例の平面
図，第７図は本発明第６実施例の平面図である．
１・・・圧電性基板、２・・・入力電極、３・・・出力
電極，４・・・ワイヤ， ５・・・入力電極の接地
用パッド、６・・・出力電極の接地用パッド、
７・・・シールド電極，
８・・・入力（母線）Ｎ極パッド、
９・・・出力（母線）１！極パッド、
１０・・・接地ｆ！！極パターン、１１・・・ステム，
１２・・・入力ステムリードピン，
１３・・・出力ステムリードピン、
１４・・・接地ステムリードピン．
第 １［２］
ブ た電・トエ甚１辰 ２・・一人力電ネ喰 ３ ｔ
ｈ電ノ珈 ４一 つ１ヤ５ Ａ力ｔ４和／）ノ手Ｊ芒ノ
月ハ゜ｌト゜ ６ ホカ肯一和トりｊ参歩色用ハ゜・
ｌト゛７−シールト會ツｂ ８ 八カ（４４４）電極
八０ソト゛９−・＄力（４＠雷メ＆）ｔｐＪ八・ット゛
１１ スプム１２ 人カステム′７−ト゛Ｃ冫 １
３−，ｉカ入テム゛ノー１“ごン１４ ４事込ステムリ
−１゛と゜冫
７１大テムFig. 1 is a perspective view of the first embodiment of the present invention, Fig. 2 is a frequency characteristic diagram of the first embodiment, Fig. 3 is a plan view of the second embodiment of the invention, and Fig. 4 is a third embodiment of the invention. FIG. 5 is a plan view of the fourth embodiment of the invention, FIG. 6 is a plan view of the fifth embodiment of the invention, and FIG. 7 is a plan view of the sixth embodiment of the invention. DESCRIPTION OF SYMBOLS 1... Piezoelectric substrate, 2... Input electrode, 3... Output electrode, 4... Wire, 5... Grounding pad for input electrode, 6... Grounding pad for output electrode, 7... Shield electrode, 8... Input (bus bar) N-pole pad, 9... Output (bus bar) 1! Pole pad, 10...ground f! ! Polar pattern, 11... stem,
12... Input stem lead pin, 13... Output stem lead pin, 14... Ground stem lead pin. Part 1 [2] Bu Taden・Toe Jin 1 Tatsu 2...One person power electricity net eating 3 t
h electric power 4 1 1 ya 5 A force t 4 sum/) no hand J Agon no Tsuki ha ゜ to 6
l TO゛7-shield kaitsu b 8 8 (444) electrode 80 soto ゛9-・$force (4@Raime &) tpJ 8・t゛ 11 spum 12 person custom'7-to゛C 冫 1
3-, i-included item ``no 1'' number 14 4-item included stem 1'' and ゜冫71 large item
Claims (4)
以上の入力電極と３個以上の出力電極を、同一伝搬路上
に配設した多電極型弾性表面波装置において、入力電極
の接地電極の配線を、入力電極の入力ステムリードピン
側で金属ステムに接続して接地し、出力電極の接地電極
の配線を出力電極の出力ステムリードピン側で金属ステ
ムに接続して接地したことを特徴とする多電極型弾性表
面波装置。1. In a multi-electrode surface acoustic wave device in which two or more input electrodes and three or more output electrodes that transmit and receive surface acoustic waves from each other are arranged on the same propagation path on a piezoelectric substrate, the ground electrode of the input electrode The wiring is connected to the metal stem on the input stem lead pin side of the input electrode and grounded, and the wiring of the ground electrode of the output electrode is connected to the metal stem on the output stem lead pin side of the output electrode and grounded. Electrode type surface acoustic wave device.
入力電極用共通接地電極と出力電極用共通接地電極を分
離して設け、これらにより、入力電極の接地電極同士、
出力電極の接地電極同士を、それぞれ、圧電体基板上で
接続し、かつ、上記入力電極用および出力電極用共通節
値電極を圧電体基板上で互いに隣接して平行に形成した
ことを特徴とする多電極型弾性表面波装置。2. The multi-electrode surface acoustic wave device according to claim 1,
A common ground electrode for input electrodes and a common ground electrode for output electrodes are provided separately, so that the ground electrodes of the input electrodes are connected to each other,
The ground electrodes of the output electrodes are connected to each other on the piezoelectric substrate, and the common node electrodes for the input electrodes and the output electrodes are formed adjacent to each other and parallel to each other on the piezoelectric substrate. Multi-electrode surface acoustic wave device.
電極パターンの周囲を、接地電極パターンで囲んだこと
を特徴とする請求項１又は２記載の多電極型弾性表面波
装置。3. 3. The multi-electrode surface acoustic wave device according to claim 1, wherein the input and output electrode patterns constituting the multi-electrode surface acoustic wave device are surrounded by a ground electrode pattern.
テムに設けた入、出力リードピンとの間を接続するワイ
ヤの長さを、それぞれ同じ所定長としたことを特徴とす
る請求項１又は２又は３記載の多電極型弾性表面波装置
。4. Claim 1 or 2, characterized in that the lengths of the wires connecting the input and output electrodes and the input and output lead pins provided on the stem for passing electrical signals in and out are the same predetermined length. 3. The multi-electrode surface acoustic wave device according to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15231989A JPH0319415A (en) | 1989-06-16 | 1989-06-16 | Multi-electrode type surface acoustic wave device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15231989A JPH0319415A (en) | 1989-06-16 | 1989-06-16 | Multi-electrode type surface acoustic wave device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0319415A true JPH0319415A (en) | 1991-01-28 |
Family
ID=15537928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15231989A Pending JPH0319415A (en) | 1989-06-16 | 1989-06-16 | Multi-electrode type surface acoustic wave device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0319415A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100265895B1 (en) * | 1996-07-11 | 2000-09-15 | 가와모토 노부히코 | Exhaust muffler |
| JP2013520898A (en) * | 2010-02-22 | 2013-06-06 | エプコス アクチエンゲゼルシャフト | Microacoustic filter with compensated crosstalk and method for compensation |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210652A (en) * | 1975-07-16 | 1977-01-27 | Toshiba Corp | Elastic surface wave device |
| JPH02104013A (en) * | 1988-10-13 | 1990-04-17 | Toshiba Corp | Surface acoustic wave device |
-
1989
- 1989-06-16 JP JP15231989A patent/JPH0319415A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210652A (en) * | 1975-07-16 | 1977-01-27 | Toshiba Corp | Elastic surface wave device |
| JPH02104013A (en) * | 1988-10-13 | 1990-04-17 | Toshiba Corp | Surface acoustic wave device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100265895B1 (en) * | 1996-07-11 | 2000-09-15 | 가와모토 노부히코 | Exhaust muffler |
| JP2013520898A (en) * | 2010-02-22 | 2013-06-06 | エプコス アクチエンゲゼルシャフト | Microacoustic filter with compensated crosstalk and method for compensation |
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