JPH0319292U - - Google Patents
Info
- Publication number
- JPH0319292U JPH0319292U JP8035889U JP8035889U JPH0319292U JP H0319292 U JPH0319292 U JP H0319292U JP 8035889 U JP8035889 U JP 8035889U JP 8035889 U JP8035889 U JP 8035889U JP H0319292 U JPH0319292 U JP H0319292U
- Authority
- JP
- Japan
- Prior art keywords
- induction plasma
- substrate
- cut
- tip
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims 2
- 239000003708 ampul Substances 0.000 description 2
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
Landscapes
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8035889U JPH0319292U (zh) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8035889U JPH0319292U (zh) | 1989-07-07 | 1989-07-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0319292U true JPH0319292U (zh) | 1991-02-26 |
Family
ID=31625344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8035889U Pending JPH0319292U (zh) | 1989-07-07 | 1989-07-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0319292U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001030115A1 (fr) * | 1999-10-22 | 2001-04-26 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
WO2001031978A1 (fr) * | 1999-10-22 | 2001-05-03 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
JP2016171066A (ja) * | 2015-03-09 | 2016-09-23 | 株式会社ニューフレアテクノロジー | ヒータおよびこれを用いた半導体製造装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833665U (ja) * | 1981-08-29 | 1983-03-04 | 株式会社明電舎 | 高層ビル用ゴンドラ |
-
1989
- 1989-07-07 JP JP8035889U patent/JPH0319292U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833665U (ja) * | 1981-08-29 | 1983-03-04 | 株式会社明電舎 | 高層ビル用ゴンドラ |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001030115A1 (fr) * | 1999-10-22 | 2001-04-26 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
WO2001031978A1 (fr) * | 1999-10-22 | 2001-05-03 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
JP2016171066A (ja) * | 2015-03-09 | 2016-09-23 | 株式会社ニューフレアテクノロジー | ヒータおよびこれを用いた半導体製造装置 |