JPH0319292U - - Google Patents

Info

Publication number
JPH0319292U
JPH0319292U JP8035889U JP8035889U JPH0319292U JP H0319292 U JPH0319292 U JP H0319292U JP 8035889 U JP8035889 U JP 8035889U JP 8035889 U JP8035889 U JP 8035889U JP H0319292 U JPH0319292 U JP H0319292U
Authority
JP
Japan
Prior art keywords
induction plasma
substrate
cut
tip
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8035889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8035889U priority Critical patent/JPH0319292U/ja
Publication of JPH0319292U publication Critical patent/JPH0319292U/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003Heaters using a particular layout for the resistive material or resistive elements using serpentine layout

Landscapes

  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
JP8035889U 1989-07-07 1989-07-07 Pending JPH0319292U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8035889U JPH0319292U (zh) 1989-07-07 1989-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8035889U JPH0319292U (zh) 1989-07-07 1989-07-07

Publications (1)

Publication Number Publication Date
JPH0319292U true JPH0319292U (zh) 1991-02-26

Family

ID=31625344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8035889U Pending JPH0319292U (zh) 1989-07-07 1989-07-07

Country Status (1)

Country Link
JP (1) JPH0319292U (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001030115A1 (fr) * 1999-10-22 2001-04-26 Ibiden Co., Ltd. Plaque chauffante en ceramique
WO2001031978A1 (fr) * 1999-10-22 2001-05-03 Ibiden Co., Ltd. Plaque chauffante en ceramique
JP2016171066A (ja) * 2015-03-09 2016-09-23 株式会社ニューフレアテクノロジー ヒータおよびこれを用いた半導体製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833665U (ja) * 1981-08-29 1983-03-04 株式会社明電舎 高層ビル用ゴンドラ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833665U (ja) * 1981-08-29 1983-03-04 株式会社明電舎 高層ビル用ゴンドラ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001030115A1 (fr) * 1999-10-22 2001-04-26 Ibiden Co., Ltd. Plaque chauffante en ceramique
WO2001031978A1 (fr) * 1999-10-22 2001-05-03 Ibiden Co., Ltd. Plaque chauffante en ceramique
JP2016171066A (ja) * 2015-03-09 2016-09-23 株式会社ニューフレアテクノロジー ヒータおよびこれを用いた半導体製造装置

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