JPH03180754A - Oxygen sensor - Google Patents
Oxygen sensorInfo
- Publication number
- JPH03180754A JPH03180754A JP89319489A JP31948989A JPH03180754A JP H03180754 A JPH03180754 A JP H03180754A JP 89319489 A JP89319489 A JP 89319489A JP 31948989 A JP31948989 A JP 31948989A JP H03180754 A JPH03180754 A JP H03180754A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- oxygen sensor
- sensor
- loss
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 45
- 239000001301 oxygen Substances 0.000 title claims abstract description 45
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 40
- 239000010416 ion conductor Substances 0.000 claims abstract description 16
- 239000003989 dielectric material Substances 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 4
- 239000007784 solid electrolyte Substances 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 20
- 239000003566 sealing material Substances 0.000 abstract description 16
- 239000011521 glass Substances 0.000 abstract description 12
- 229910052697 platinum Inorganic materials 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 7
- -1 oxygen ions Chemical class 0.000 abstract description 6
- 230000003247 decreasing effect Effects 0.000 abstract description 5
- 238000012856 packing Methods 0.000 abstract 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 14
- 239000000945 filler Substances 0.000 description 11
- 229910052839 forsterite Inorganic materials 0.000 description 6
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 2
- 206010021143 Hypoxia Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 210000000080 chela (arthropods) Anatomy 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は、地下室の酸欠事故防止、ボイラなどの燃焼
管理等に使用される限界電流式の酸素センサに関する。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a limiting current type oxygen sensor used for preventing oxygen deficiency accidents in basements, controlling combustion in boilers, etc.
「従来の技術ｊ
近年、安定化ジルコニアからなる固体電解質を用いた限
界電流式の酸素センサが実用化されている。``Conventional Technologyj'' In recent years, limiting current type oxygen sensors using solid electrolytes made of stabilized zirconia have been put into practical use.
この酸素センサは、第４図に示すように安定化ジルコニ
ア（例えば、ｚ ｒｏ ｔ−８ｙ ｔｏ ３）等のイオ
ン導電性を有する固体電解質により形成され、かつ中央
に上下に貫通する気体拡散孔ＩＡが形成された薄厚なイ
オン導電体１と、このイオン導電体１の両面に設けられ
て、一定のセンサ監視電圧が印加される多孔質の白金電
極２Ａ・２Ｂと、前記イオン導電体１の一方側に位置す
る白金電極２Ａ上にガラス３Ａ・３Ａにより接合された
キャップ３と、前記イオン導電体ｌを加熱するヒータ４
とから構成されている。As shown in Fig. 4, this oxygen sensor is made of a solid electrolyte having ionic conductivity such as stabilized zirconia (for example, ZRO t-8Y to 3), and has a gas diffusion hole IA that penetrates vertically in the center. a thin ionic conductor 1 formed with a thin ionic conductor 1; porous platinum electrodes 2A and 2B provided on both sides of the ionic conductor 1 to which a constant sensor monitoring voltage is applied; and one of the ionic conductors 1. A cap 3 bonded to a platinum electrode 2A located on the side by glass 3A, and a heater 4 for heating the ion conductor l.
It is composed of.
なお、上記キャップ３の構成材料としては、例えばジル
コニアなどが使用される。Note that, as a constituent material of the cap 3, for example, zirconia or the like is used.
そして、このように構成された酸素センサては、イオン
】導電体１内において、酸素ポンピング作用により、気
体拡散孔ＩＡから取り込まれた酸素がイオンとなって流
れ、このイオン電流の電流値から周囲の酸素濃度が測定
されるようになっている。In the oxygen sensor configured as described above, oxygen taken in from the gas diffusion hole IA flows in the form of ions in the conductor 1 due to the oxygen pumping action, and the current value of this ionic current is used to determine the surrounding environment. The oxygen concentration is now measured.
「発明が解決しようとする課題」
ところで、上記のような酸素センサては、レスポンスの
改善がいくつかなされている。"Problem to be Solved by the Invention" By the way, several improvements have been made in the response of the oxygen sensor described above.
例えば、使用温度を高めてイオンＪり電性を向上させた
り、イオン導電体ｌの各面に位置する電極２Ａ・２Ｂの
多孔質構造、厚み、成分等の改善がなされている。For example, the use temperature has been raised to improve the ion conductivity, and the porous structure, thickness, composition, etc. of the electrodes 2A and 2B located on each surface of the ion conductor 1 have been improved.
しかしながら、このような改善では木た十分なレスポン
ス向上がなされたとはいえず、例えば第４図に示す酸素
センサの場合に、酸素ｌ農度を０％から２１％に上昇さ
せたときにレスポンスは１０〜１５ｓｅｃの範囲、酸素
濃度を２１％から０％に低下させたときにレスポンスは
１２〜１７ｓｅｃの範囲であり、レスポンスの向上とい
った点で改良の余地が残されていた。However, it cannot be said that these improvements have sufficiently improved the response. For example, in the case of the oxygen sensor shown in Figure 4, when the oxygen level is increased from 0% to 21%, the response is The response was in the range of 10 to 15 seconds, and when the oxygen concentration was lowered from 21% to 0%, the response was in the range of 12 to 17 seconds, leaving room for improvement in terms of improved response.
この発明は、上記の事情に鑑みてなされたものであって
、材料の面から改良してレスポンスの向上を図った酸素
センサの提供を目的とする。The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide an oxygen sensor whose response is improved by improving the material.
「課題を解決するための手段」
上記の目的を達成するために、本発明では、イオン導電
体の各面に所定の電圧が印加される電極を積層し、気体
拡散孔を通じて取り込んだ試料ガス中の酸素が、酸素ポ
ンピング作用により固体電解質中をイオンとなって流れ
、このイオン電流の電流値から周囲の酸素、農度が測定
される酸素センサにおいて、前記イオン導電体に積層さ
れた電極の上部位置に、低誘電性材料を含有したセンサ
構成部材を設けるようにしている。"Means for Solving the Problems" In order to achieve the above object, in the present invention, electrodes to which a predetermined voltage is applied are stacked on each surface of an ionic conductor, and a sample gas taken in through a gas diffusion hole is Oxygen flows in the form of ions in a solid electrolyte due to the oxygen pumping action, and the surrounding oxygen and agricultural level are measured from the current value of this ionic current. A sensor component containing a low dielectric material is provided at the location.
「作用」
この発明によれば、イオン導電体に積層された電極の上
部位置に低誘電性材ｆ−１を含有したセンサ構成部材、
例えばジルコニアより比誘電率の低いアルミナ、ステア
タイト、フォルステライトなどの低誘電性材料を含有し
た充填材、封＋ｈ材を設けることにより、前記センサ構
成部材の静電容量を小さくすることができ、これにより
、電極内を移動する酸素イオンの損失遣を小さくするこ
とかできる。"Function" According to the present invention, a sensor component containing a low dielectric material f-1 at an upper position of an electrode laminated on an ionic conductor;
For example, by providing a filler or sealing material containing a low dielectric material such as alumina, steatite, or forsterite, which has a dielectric constant lower than that of zirconia, the capacitance of the sensor component can be reduced, This makes it possible to reduce the loss of oxygen ions moving within the electrode.
「実施例」
本発明の第１実施例を第１図を参照して説明する。なお
、本実施例に示す酸素センサは、「従来の技術」に示す
酸素センサと基本構成が同一であるので、構成を共通と
する箇所に同一符号を付し説明を簡略化する。"Embodiment" A first embodiment of the present invention will be described with reference to FIG. The oxygen sensor shown in this embodiment has the same basic configuration as the oxygen sensor shown in "Prior Art", so the same reference numerals are given to parts having the same structure to simplify the explanation.
まず、本実施例に示す酸素センサか「従来の技術」に示
す酸素センサと構成を異にするのは、イオン導電体Ｉに
積層された白金電極２Ａ上に低１誘電性材料を含有した
センサ構成部材１０が設けられている点である。First, the difference in configuration between the oxygen sensor shown in this example and the oxygen sensor shown in "prior art" is that the sensor contains a low dielectric material on the platinum electrode 2A laminated on the ion conductor I. This is because the component 10 is provided.
このセンサ構成部材１０は、白金電極２Ａ上に設けられ
た充填材１１と、結晶化ガラスにより形成され、前記充
填材ｉｔを全体的に覆う封止材Ｉ２とから構成されてい
る。This sensor component 10 is composed of a filler 11 provided on a platinum electrode 2A, and a sealing material I2 made of crystallized glass and covering the filler it entirely.
前記充填材１１は、比誘電率εが６．０ 、誘電損失の
損失角（ｔａｎδ）か４ＸＩＯ−’であるステアタイト
（ＭｇＯ−３ｉＯ，に近い組成のセラミックス）と、結
晶化ガラスとを５：ｌの重量比で混Ｂしたちのである。The filler 11 is made of steatite (ceramic with a composition close to MgO-3iO) with a dielectric constant ε of 6.0 and a dielectric loss angle (tan δ) of 4XIO-', and crystallized glass. It is mixed with B at a weight ratio of :l.
なお、前記充填材１１に添加されている結晶化ガラスは
単なる充填材として使用しても良く、また、焼成してス
テアタイトの粉末粒子を互いに結きさせるパインタとし
て使用してち良い。Incidentally, the crystallized glass added to the filler 11 may be used simply as a filler, or may be used as a pincer that binds the steatite powder particles together by firing.
そして、このような組成の充填材１１を用いた酸素セン
サでは、酸素濃度を０％から２１％に上界させたときに
レスポンスは３〜５ｓｅｃ、／ｉＱ素濃度を２１％から
０％に低下させたときにレスポンスは２〜４ ｓｅｃと
なり、レスポンスが大幅に向上したことか実験により確
認され−Ｃいる（ヒータ１１の加熱温度は４５０ ’Ｃ
に設定）。In an oxygen sensor using the filler 11 with such a composition, when the oxygen concentration is increased from 0% to 21%, the response is 3 to 5 seconds, and the /iQ elementary concentration is decreased from 21% to 0%. The response time was 2 to 4 seconds, and it was confirmed through experiments that the response was significantly improved (the heating temperature of the heater 11 was 450'C).
).
なお、前記充填材１１の成分に、従来使用されていたジ
ルコニア（比誘電率εか３０、誘電損失の損失角（ｔａ
ｎδ）が４０Ｘ］Ｏ−’）と比較して比誘電率ε、誘電
損失の損失角（ｔａｎδ）の低いステアタイトを使用し
たが、これは、前記充填（イ１１の静電容量及び誘電損
失を全体的に小さくすることにより、白金電極２Ａ内を
移動する酸素イオンの充填材１１に対する損失を小さく
することかでき、これにより白金型ｆＭ ２ Ａ〜２Ｂ
間の電流（２達速度の（氏子を防止し、レスポンスの向
上が図られろからである。In addition, the components of the filler 11 include zirconia (relative dielectric constant ε or 30, loss angle of dielectric loss (ta), which has been conventionally used).
We used steatite, which has a lower dielectric constant ε and a lower loss angle (tan δ) of dielectric loss than that of 40 By making the entire platinum mold fM 2 A to 2B smaller, the loss of oxygen ions moving within the platinum electrode 2A to the filler 11 can be reduced.
This is because it is possible to prevent the current between the two (double speed) parishioners and improve the response.
本発明の第２実施例を第２図を参照して説明する。この
実施例に示す酸素センサか、第１実施例に示す酸素セン
サと構成を兄にする点は、イオン導電体１の上部に設け
られたセンサ構成部材に３である。A second embodiment of the present invention will be described with reference to FIG. The oxygen sensor shown in this embodiment has a structure similar to that of the oxygen sensor shown in the first embodiment in that the sensor component provided on the upper part of the ion conductor 1 is 3.
このセンサ構成部材１３は、内側に空間部１４を有する
二層の封止材Ｉ５・１６により構成されるものであって
、内側に１立置する封止材１５は／ルコニアに結晶化ガ
ラスを例えば１０６〜２０１の割合でｌ見合して焼成し
たものであり、また、外側に位置する封止材１６は結晶
化カラスにステアタイトを例えば１００３ の割合で
解合したものである。This sensor component 13 is composed of two layers of sealing material I5 and 16 having a space 14 inside, and the sealing material 15 placed vertically inside is made of crystallized glass on luconia For example, it is fired at a ratio of 106 to 201 parts, and the sealing material 16 located on the outside is made by dissolving steatite into crystallized glass at a ratio of 1003 parts, for example.
なお、前記外側の封止材１６に添加したステアタイトは
、第１実施例で示したステアタイトと同様に、ジルコニ
アと比較して比誘電率ε、誘雷損失の損失Ｉｆｆ（ｔａ
ｎδ）か低いものである。Note that, similar to the steatite shown in the first embodiment, the steatite added to the outer sealing material 16 has a relative permittivity ε and dielectric loss loss Iff (ta) compared to zirconia.
nδ) is low.
そして、このように構成された酸素センサては、酸素、
！Ｅ度を０％から２１％に」二層させたときにレスポン
スは７〜８ｓｅｃ、酸素濃度を２１％から０％に低下さ
せたときにレスポンスは６〜８ ｓｅｃとなり、従来の
酸素センサと比較してレスポンスが改善されたことが確
認された〈ヒータ４の加熱温度は４５０℃に設定）。The oxygen sensor configured in this way has oxygen,
! The response is 7 to 8 seconds when the E degree is increased from 0% to 21% in two layers, and the response is 6 to 8 seconds when the oxygen concentration is decreased from 21% to 0%, compared to conventional oxygen sensors. It was confirmed that the response was improved (heating temperature of heater 4 was set at 450°C).
なお、前記封止材１５・１６の内側には空間部１４か形
成されているか、この空間部１４は（−）まず白金電極
２Ａ上にカーホンその池の有機物を塗布し、（ニ）更に
その上に、商運したように封止材１５の原打料である、
／ルコニアに結晶化ガラスを例えば１０・６〜２０：１
の割合でｉ ＝したものを塗布し、（三）前記カーボン
その池の有機物を一定温度以上で加熱してカス化させる
ことにより得られるものである（このときのガスは、加
熱することでポーラス体に形成された封止材１５を通じ
て外部に放出される）。It should be noted that a space 14 is formed inside the sealing materials 15 and 16.This space 14 is formed by (-) first applying an organic matter of carbon dioxide on the platinum electrode 2A, and (d) further applying the organic matter to the platinum electrode 2A. As mentioned above, it is the raw material for the sealing material 15,
/ Luconia and crystallized glass, for example, 10.6 to 20:1
It is obtained by coating the carbon at a ratio of i = (3) heating the organic matter in the carbon pond above a certain temperature to form a scum. (is released to the outside through a sealant 15 formed on the body).
そして、このように封止材１５の内側に空間部１４が形
成されたならば、更に、該封止材１５の上面に、該封止
材１５の全体を覆うように前記封止材１６を塗布により
設けるようにしている。Once the space 14 is formed inside the sealing material 15 in this way, the sealing material 16 is further placed on the upper surface of the sealing material 15 so as to cover the entirety of the sealing material 15. It is installed by coating.
本発明の第３実施例を第３図を参ｐ、＜＜ して説明す
る。この実施例に示す酸素センサか、第２実施例に示す
酸素センサと構成を児にする点は、二層のｉ４ ＋１：
材１７・１８により形成されたセンサ構成部材１９の成
分である。A third embodiment of the present invention will be described with reference to FIG. The structure of the oxygen sensor shown in this embodiment is similar to that of the oxygen sensor shown in the second embodiment.
This is a component of the sensor component 19 formed of materials 17 and 18.
前記センサ構成部材１９の内、内側の封ｌＬ材１７は結
晶化ガラスとフォルステライト（２ＭｇＯ・５ｉｎ２）
とを１５のＣＱ 量比でｄＬ合したちのであり、また、
外側の封止材１８は全て結晶化カラスにより構成したも
のである。The inner sealing material 17 of the sensor component 19 is made of crystallized glass and forsterite (2MgO・5in2).
and are combined in dL at a CQ ratio of 15, and
The outer sealing material 18 is entirely made of crystallized glass.
なお、ここて使ｃｍ したフォルステライトは、比１透
電率εか６、誘電１ｉ失の損失角（ｔａｎδ）か５×１
０−４でありジルコニアと比較して比誘電率ε、誘電損
失の損失角（ｔａｎδ）が低いしのである。The forsterite used here has a specific conductivity of ε or 6, and a dielectric loss angle (tan δ) of 5×1.
0-4, which means that the dielectric constant ε and dielectric loss angle (tan δ) are lower than those of zirconia.
そして、このように構成された酸素センサでは、酸素濃
度を０％から２１％に上昇させたときにレスポンスは４
〜５ｓｅｃ、酸素ｌ１５度を２１％から０％に低下させ
たときにレスポンスは３〜５ ｓｅｃとなり、従来の酸
素センサと比較してレスポンスか改善されたことか確認
された（ヒータ４の加熱、１１Ａ度を４５０’Ｃに設定
）。In the oxygen sensor configured in this way, the response is 4 when the oxygen concentration is increased from 0% to 21%.
~5 seconds, and when the oxygen level was lowered from 21% to 0%, the response was 3 to 5 seconds, confirming that the response was improved compared to the conventional oxygen sensor (heating of heater 4, 11A degrees set to 450'C).
なお、上記第１実施例〜第３実施例では、センサ構成部
材１０・１３・１９内にステアタイト、フォルステライ
トを添加したが、ステアタイト、フォルステライトと同
様にジルコニアより比誘型中ε１．涛電損失の損失角（
ｔａｎδ）か低いアルミナを選択してち良い。また、上
記第１実施（ガロこ示す酸素センサでは、白金電極２Ａ
と封止材１２との間の充填材１１に少量の結晶化ガラス
を添加したが、焼成せず粉末の状態であるならば全てス
テアタイトであっても良い。In the first to third embodiments described above, steatite and forsterite were added to the sensor component members 10, 13, and 19, but similar to steatite and forsterite, zirconia had a dielectric constant of ε1. Loss angle of surge loss (
It is best to select alumina with a low tan δ). In addition, in the oxygen sensor shown in the first embodiment (Garo), the platinum electrode 2A
Although a small amount of crystallized glass is added to the filler 11 between the filler 11 and the sealant 12, it may be entirely steatite as long as it is in a powder state without being fired.
また、」１記第１実施例〜第３実施到では、センサ構成
部材１０・１３・１９の形状を四角に形成したが、これ
に限定されずドーム状に形成しても良い。Furthermore, in the first to third embodiments described in Section 1, the sensor component members 10, 13, and 19 are formed into a square shape, but are not limited to this and may be formed into a dome shape.
また、上記第１実施例〜第３実施例で示す比誘電率ε、
１秀電損失の損失角（ｔａｎδ）は室温（２５°Ｃ）に
より１制定したものである。In addition, the relative permittivity ε shown in the first to third examples above,
The loss angle (tan δ) of 1 Shuden loss is determined by 1 at room temperature (25° C.).
「発明の効果」
以」二層＊ｌＩＩに説明したように、この発明によれば
、イオン導電体に積層された電極の上部に低誘１且性材
料を含有したセンサ構成部材、例えばジルコニアより比
誘電率の低いアルミナ、ステアタイト、フォルステライ
トなどを含有した封止材を設けることにより、前記セン
サ構成部材の静電容量を小さくすることができ、これに
より、電極内を移動する酸素イオンの損失量を小さくす
ることができ、該電極の電流伝達速度の低下を防止しレ
スポンスの向上を図ることができるという効眼が？ｉｔ
られる。``Effects of the Invention'' As explained in ``2 Layer'' II, according to the present invention, a sensor component containing a low dielectric constant material, such as zirconia, is formed on the upper part of the electrode laminated on the ionic conductor. By providing a sealing material containing alumina, steatite, forsterite, etc. with a low dielectric constant, the capacitance of the sensor component can be reduced, thereby reducing the amount of oxygen ions moving within the electrode. The benefit is that it can reduce the amount of loss, prevent the current transmission speed of the electrode from decreasing, and improve the response. it
It will be done.
第１図〜第３図は本発明の第１実施例〜第３実施到をそ
れぞれ示す正断面図、第４図は従来の酸素センサを示す
正断面図である。
ｌ・・・・・・イオン導電体、ＩＡ・・・・拡散拡散孔
、２Ａ・２Ｂ・・・・電極、ｌＯ・１３・１９・・ セ
ンサ構成部材。1 to 3 are front sectional views showing first to third embodiments of the present invention, respectively, and FIG. 4 is a front sectional view showing a conventional oxygen sensor. l...Ion conductor, IA...diffusion hole, 2A/2B...electrode, lO/13/19...sensor component.
Claims (1)
層し、気体拡散孔を通じて取り込んだ試料ガス中の酸素
が、酸素ポンピング作用により固体電解質中をイオンと
なって流れ、このイオン電流の電流値から周囲の酸素濃
度が測定される酸素センサにおいて、 前記イオン導電体に積層された電極の上部位置に低誘電
性材料を含有したセンサ構成部材が設けられていること
を特徴とする酸素センサ。[Claims] Electrodes to which a predetermined voltage is applied are laminated on each surface of the ionic conductor, and oxygen in the sample gas taken in through the gas diffusion holes becomes ions in the solid electrolyte due to the oxygen pumping action. In the oxygen sensor in which the ambient oxygen concentration is measured from the current value of this ionic current, a sensor component containing a low dielectric material is provided above the electrode laminated on the ionic conductor. An oxygen sensor featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1319489A JP2925196B2 (en) | 1989-12-08 | 1989-12-08 | Oxygen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1319489A JP2925196B2 (en) | 1989-12-08 | 1989-12-08 | Oxygen sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03180754A true JPH03180754A (en) | 1991-08-06 |
| JP2925196B2 JP2925196B2 (en) | 1999-07-28 |
Family
ID=18110782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1319489A Expired - Fee Related JP2925196B2 (en) | 1989-12-08 | 1989-12-08 | Oxygen sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2925196B2 (en) |
-
1989
- 1989-12-08 JP JP1319489A patent/JP2925196B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2925196B2 (en) | 1999-07-28 |
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