JPH03180350A - Ink jet head - Google Patents
Ink jet headInfo
- Publication number
- JPH03180350A JPH03180350A JP31925889A JP31925889A JPH03180350A JP H03180350 A JPH03180350 A JP H03180350A JP 31925889 A JP31925889 A JP 31925889A JP 31925889 A JP31925889 A JP 31925889A JP H03180350 A JPH03180350 A JP H03180350A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- metal layer
- fixed part
- nozzle
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000000694 effects Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 239000000919 ceramic Substances 0.000 description 7
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
PURPOSE:To enhance printing quality without generating mutual effect between adjacent piezoelectric converters by dividing a metal layer at the fixed part of a piezoelectric converter, i.e., at a cantilevered beam structure, and suppressing the amplitude of vibration. CONSTITUTION:The piezoelectric converter 15 fixed to a support substrate 12 is divided in a rod shape by dicing and the metal layers 14, 14' of the piezoelectric converter 15 are polished to perform the surface finishing of respective rod-shaped piezoelectric converters and the metal layer 14' of the fixed part is bonded to a nozzle plate 17. Since the metal layer 14' of the fixed part is formed in a stripe shape in the direction vertical to the rod-shaped piezoelectric converter 15, a bonding material flows to the gap of the metal layers and the nozle plate 17 is closely bonded to the metal layer 14' of the fixed part through a gap material 19 and the gap between the piezoelectric converter 15 in a nozzle part and the nozzle plate is controlled constant.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はインクジェット記録に係わるもので、特にイン
ク中において圧力発生器を駆動させ、ノズル開口よりイ
ンクを吐出させて印字を行うインクジェットヘッドに関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to inkjet recording, and particularly to an inkjet head that drives a pressure generator in ink to eject ink from nozzle openings to perform printing.
この種の印字機構は特公昭６０−８９５３等により公知
である。この構造では、圧電運動を発生させる圧電変換
器が棒状に形成されて櫛の歯のように平行に配置された
両持ち梁状振動子または片持ち梁状振動子であり、振動
子の片面には金属薄層が形成された積ｍ構造であり、複
数の相並列した棒、が櫛の背部を介して結合されていた
。This type of printing mechanism is known from Japanese Patent Publication No. 60-8953. In this structure, the piezoelectric transducer that generates piezoelectric motion is a double-sided beam vibrator or cantilever beam vibrator that is formed into a rod shape and arranged in parallel like the teeth of a comb. The comb has a laminated structure made of thin metal layers, and a plurality of parallel rods are connected via the back of the comb.
しかし前述の従来技術における片持ち梁構造では、圧電
変換器の固定部分においても金属薄層が均一の厚さで形
成されていたため、固定部分においても振動する力が働
き、隣接圧電変換器に影響を与え、良好な印字品質が得
られないという欠点があった、さらに、固定部分におけ
る接合部に過大な応力が加わり、接合部の変形あるいは
圧電変換器の剥離、ノズル基板の変形等が発生するとい
う問題もあった。However, in the conventional cantilever structure described above, a thin metal layer is formed with a uniform thickness even in the fixed part of the piezoelectric transducer, so vibrating force also acts on the fixed part, affecting the adjacent piezoelectric transducer. In addition, excessive stress is applied to the joints in the fixed parts, resulting in deformation of the joints, peeling of the piezoelectric transducer, deformation of the nozzle substrate, etc. There was also the problem.
本発明によれば、複数個のノズル開口部にある間隔をも
って対向してインク中に該ノズル開口部と１対１に配置
された圧電変換器を備え、該圧電変換器をインク中で動
作させ前記ノズル開口近傍のインクの圧力を高めて前記
ノズル開口部よりインク滴を吐出させるオンディマンド
型インクジェットヘッドにおいて、■配圧電変換器は圧
電効果により振動運動を行う、圧電素子と少なくとも１
層以上からなる金属薄層との積Ｍ構造であり、該圧電変
換器は互いに平行に配置された支持基板に固着された棒
状の片持ち梁構造であり、枠の固定部分においては前記
金属薄層は梁と垂直方向に縞状に分割形成されているこ
とを特徴とする。According to the present invention, a plurality of nozzle openings are provided with piezoelectric transducers that are arranged one-to-one with the nozzle openings in the ink, facing each other at a certain interval, and the piezoelectric transducers are operated in the ink. In an on-demand inkjet head that increases the pressure of the ink near the nozzle opening to eject ink droplets from the nozzle opening, (1) the pressure distribution electric transducer includes at least one piezoelectric element that performs vibrational motion due to the piezoelectric effect;
The piezoelectric transducer has a bar-shaped cantilever structure fixed to a supporting substrate arranged parallel to each other, and the thin metal layer is formed in the fixed part of the frame. The layer is characterized by being divided into stripes in the direction perpendicular to the beam.
発明の前記の構成によれば、片持ち梁構造である圧電変
換器の固定部分では、金属層が分割されているため振動
述動の振幅を非常に小さくすることができ、隣接圧電変
換器どうしが影響しあうことがなく、また固定部分に加
わる応力も非常に小さくなることから、ｌ〔電変換器や
ノズル基板、接合部等の変形あるいは剥離といった問題
も発生しない、高印字品質かつ高信頼性のインクジェッ
トヘッドを提供することが可能となる。According to the above structure of the invention, since the metal layer is divided in the fixed part of the piezoelectric transducer having a cantilever structure, the amplitude of the vibration predicate can be made very small, and adjacent piezoelectric transducers can be separated from each other. Since the two do not affect each other, and the stress applied to the fixed parts is extremely small, there are no problems such as deformation or peeling of the electrical converter, nozzle board, joints, etc., and high printing quality and high reliability. This makes it possible to provide a flexible inkjet head.
次に、本発明の実施例を図面に基づいて説明する。 Next, embodiments of the present invention will be described based on the drawings.
第１図は本発明の印字配録装置の構成を示す一実施例で
ある。ガイド＄１１１６．７によって案内されて記録媒
体１の幅方向（１０方向）に移動するキャリッジ８に搭
載されたインクジェットヘッド９と記録媒体１を移動さ
せる紙送りローラー２．３とプラテン４とによって構成
されている。FIG. 1 shows an embodiment of the configuration of a printing and arranging apparatus according to the present invention. Consists of an inkjet head 9 mounted on a carriage 8 that moves in the width direction (10 directions) of the recording medium 1 guided by a guide $1116.7, a paper feed roller 2.3 that moves the recording medium 1, and a platen 4. has been done.
第２図は本発明のインクジェットヘッドの圧電変換器お
よびノズルプレートの部分の１実施例を示す図であり、
ＨＩ数本の互いに平行に配置された棒状の圧電セラミッ
ク１１と、棒状の圧電セラミック１１を固定する支持基
板１２と、圧電セラミック１１の両面に形成された電極
１３と、電極１３上のノズルプレート側の面に形成され
た金属層１４及び固定部分においては棒と垂直に分割形
成された金属層１４′からなる圧電変換器１５と、圧電
変換′ｒ＃１５と対向して配置されたノズル開口１６を
有するノズルプレート１７と、圧電変換器に動作電気信
号を伝えるＦＰＣ１８とによって構成されている。この
圧電変換器１５は、電圧印加により変位してノズル開口
１６近傍のインクの圧力を高めてノズル開口１６よりイ
ンク滴を吐出させる。金属Ｊ１１４は、圧電セラミック
１１の圧電特性である横伸縮振動をたわみ振動に変換さ
せるｍｆｉヒを持っている。FIG. 2 is a diagram showing an embodiment of the piezoelectric transducer and nozzle plate portion of the inkjet head of the present invention,
Several HI rod-shaped piezoelectric ceramics 11 arranged parallel to each other, a support substrate 12 that fixes the rod-shaped piezoelectric ceramics 11, electrodes 13 formed on both sides of the piezoelectric ceramics 11, and a nozzle plate side on the electrodes 13. A piezoelectric transducer 15 consisting of a metal layer 14 formed on the surface and a metal layer 14' divided perpendicular to the rod in the fixed part, and a nozzle opening 16 disposed opposite the piezoelectric transducer 'r#15. The nozzle plate 17 includes a nozzle plate 17, and an FPC 18 that transmits an operating electrical signal to a piezoelectric transducer. This piezoelectric transducer 15 is displaced by voltage application to increase the pressure of the ink near the nozzle opening 16 and cause ink droplets to be ejected from the nozzle opening 16 . The metal J114 has an mfi characteristic that converts lateral stretching vibration, which is a piezoelectric characteristic of the piezoelectric ceramic 11, into flexural vibration.
金属層１４及び１４′は熱膨張が圧電セラミック１１の
熱膨張と近似する材料であるインバー鋼を用いた。この
構成により、圧電変換器１５とノズルプレート１７との
間隙寸法は温度依存性を持たず、はぼ一定している０本
実施例においては、固定部分における縞状の金属層１４
′は幅０． ２ｍｍ、隙間０．２ｍｍの寸法とした。For the metal layers 14 and 14', Invar steel, which is a material whose thermal expansion approximates that of the piezoelectric ceramic 11, is used. With this configuration, the gap size between the piezoelectric transducer 15 and the nozzle plate 17 has no temperature dependence and remains approximately constant.
' is the width 0. The dimensions were 2 mm and a gap of 0.2 mm.
支持基板１２にはストライブ状に導体がパターニングさ
れており、ＦＰＣ１８とはんだ２０により接合されてい
る。圧電変換器１５と支持基板１２との結合部材には導
電性物質２１が分散されているため、圧電変換器１５に
はＦＰＣ１８からの動作電気信号が伝達される０本実施
例においては、結合部材は導電性の粒子が分散されたポ
リイミド樹脂を用いたが、これに限るものではなくはん
だ付けやろう付は等を用いても同様の効果があり、使用
するインクあるいは使用温度等を考慮して選択する。The support substrate 12 has conductors patterned in stripes, and is bonded to the FPC 18 with solder 20. Since the conductive substance 21 is dispersed in the coupling member between the piezoelectric transducer 15 and the support substrate 12, the operating electrical signal from the FPC 18 is transmitted to the piezoelectric transducer 15. In this embodiment, the coupling member used polyimide resin in which conductive particles were dispersed, but it is not limited to this, and the same effect can be obtained by using soldering, brazing, etc. select.
支、持基板１２に固着された圧電変換器１５はダイシン
グ等により棒状に分割されたのち、圧電変換器１５の金
属層１４及び１４′を研磨により各々の棒状圧電変換器
の平面出しを行い、固定部分の金属層１４′とノズルプ
レート１７とを接合する。固定部分の金属層１４′は棒
状圧電変換器１５と垂直方向に縞状に形成されているた
め、接合材は第２図に示す様に金属層の隙間に流れ、ノ
ズルプレート１７と固定部の金属層１４′はギャップ材
１９を介して密着し、ノズル部での圧電変換器１５とノ
ズルプレート１７との間隙を一定に制御することが可能
となる。The piezoelectric transducer 15 fixed to the supporting substrate 12 is divided into rod shapes by dicing or the like, and then the metal layers 14 and 14' of the piezoelectric transducer 15 are polished to planarize each rod-shaped piezoelectric transducer. The metal layer 14' of the fixed portion and the nozzle plate 17 are joined. Since the metal layer 14' of the fixed part is formed in stripes in the direction perpendicular to the rod-shaped piezoelectric transducer 15, the bonding material flows into the gap between the metal layers as shown in FIG. The metal layer 14' is brought into close contact with the gap material 19, making it possible to control the gap between the piezoelectric transducer 15 and the nozzle plate 17 at a constant level at the nozzle portion.
以上述べたように本発明によれば、圧電変換器の固定部
分での応力を非常に小さくすることができ、長期信頼性
に優れ、隣接圧電変換器の影響を受けず、かつ複数本平
行に配列された棒状の圧電変換器とノズルとの間隙を、
ノズル開口部において一定にさせることができ、インク
吐出速度、インク吐出様態、インク吐出Ｉの安定した印
字品質の優れたインクジェットヘッドを安価に供給する
ことができる。As described above, according to the present invention, the stress at the fixed part of the piezoelectric transducer can be extremely reduced, the long-term reliability is excellent, the piezoelectric transducer is not affected by adjacent piezoelectric transducers, and multiple piezoelectric transducers can be connected in parallel. The gap between the arrayed rod-shaped piezoelectric transducers and the nozzle is
This can be made constant at the nozzle opening, and an inkjet head with stable ink ejection speed, ink ejection mode, and ink ejection I and excellent print quality can be provided at a low cost.
第１図は本発明の印字記録１ｉｉ１ｆの１実施例を示す
図、第２図は本実施例のインクジェットヘッドのインク
ジェット部を示す断面図である。
２．３・・・紙送りローラー
４・・・プラテン
６．７・・・ガイド軸
８・・・キャリッジ
９・・・インクジェットヘッド
１１・・・圧電セラミック
１２・・・支持基板
１３・・・圧電セラミック上の電極
１４・・・金属層
１５・・・圧電変換器
１６・・・ノズル開口
１７・・・ノズルプレート
１８・・・ＦＰＣ
１９・・・ギャップ材FIG. 1 is a diagram showing an embodiment of print recording 1ii1f of the present invention, and FIG. 2 is a sectional view showing an inkjet section of an inkjet head of this embodiment. 2.3... Paper feed roller 4... Platen 6.7... Guide shaft 8... Carriage 9... Inkjet head 11... Piezoelectric ceramic 12... Support substrate 13... Piezoelectric Electrode on ceramic 14... Metal layer 15... Piezoelectric transducer 16... Nozzle opening 17... Nozzle plate 18... FPC 19... Gap material
Claims (1)
ク中に該ノズル開口部と１対１に配置された圧電変換器
を備え、該圧電変換器をインク中で動作させ前記ノズル
開口近傍のインクの圧力を高めて前記ノズル開口部より
インク滴を吐出させるオンディマンド型インクジェット
ヘッドにおいて、 前記圧電変換器は圧電効果により振動運動を行う、圧電
素子と少なくとも１層以上からなる金属薄層との積層構
造であり、該圧電変換器は互いに平行に配置された支持
基板に固着された棒状の片持ち梁構造であり、梁の固定
部分においては前記金属薄層は棒と垂直方向に縞状に分
割形成されていることを特徴とするインクジェットヘッ
ド。[Scope of Claims] A plurality of nozzle openings are provided with piezoelectric transducers arranged one-to-one with the nozzle openings in the ink, facing each other at a certain interval, and the piezoelectric transducers are operated in the ink. In an on-demand inkjet head that increases the pressure of ink near the nozzle opening to eject ink droplets from the nozzle opening, the piezoelectric transducer is a metal made of a piezoelectric element and at least one layer that performs vibrational motion due to the piezoelectric effect. The piezoelectric transducer has a bar-shaped cantilever structure fixed to a support substrate arranged parallel to each other, and in the fixed part of the beam, the thin metal layer is oriented perpendicularly to the bar. An inkjet head characterized by being divided into stripes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31925889A JPH03180350A (en) | 1989-12-08 | 1989-12-08 | Ink jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31925889A JPH03180350A (en) | 1989-12-08 | 1989-12-08 | Ink jet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03180350A true JPH03180350A (en) | 1991-08-06 |
Family
ID=18108188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31925889A Pending JPH03180350A (en) | 1989-12-08 | 1989-12-08 | Ink jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03180350A (en) |
Cited By (63)
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|---|---|---|---|---|
| EP0999934A1 (en) * | 1997-07-15 | 2000-05-17 | Silver Brook Research Pty, Ltd | A thermally actuated ink jet |
| US6168255B1 (en) | 1995-06-07 | 2001-01-02 | Citizen Watch Co., Ltd. | Ink jet head method of production thereof, and jig for producing ink jet head |
| US6746105B2 (en) | 1997-07-15 | 2004-06-08 | Silverbrook Research Pty. Ltd. | Thermally actuated ink jet printing mechanism having a series of thermal actuator units |
| US6776476B2 (en) | 1997-07-15 | 2004-08-17 | Silverbrook Research Pty Ltd. | Ink jet printhead chip with active and passive nozzle chamber structures |
| US6783217B2 (en) | 1997-07-15 | 2004-08-31 | Silverbrook Research Pty Ltd | Micro-electromechanical valve assembly |
| US6786570B2 (en) | 1997-07-15 | 2004-09-07 | Silverbrook Research Pty Ltd | Ink supply arrangement for a printing mechanism of a wide format pagewidth inkjet printer |
| US6824251B2 (en) | 1997-07-15 | 2004-11-30 | Silverbrook Research Pty Ltd | Micro-electromechanical assembly that incorporates a covering formation for a micro-electromechanical device |
| US6834939B2 (en) | 2002-11-23 | 2004-12-28 | Silverbrook Research Pty Ltd | Micro-electromechanical device that incorporates covering formations for actuators of the device |
| US6880918B2 (en) | 1997-07-15 | 2005-04-19 | Silverbrook Research Pty Ltd | Micro-electromechanical device that incorporates a motion-transmitting structure |
| US6880914B2 (en) | 1997-07-15 | 2005-04-19 | Silverbrook Research Pty Ltd | Inkjet pagewidth printer for high volume pagewidth printing |
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| US7175260B2 (en) | 2002-06-28 | 2007-02-13 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
| US7195339B2 (en) | 1997-07-15 | 2007-03-27 | Silverbrook Research Pty Ltd | Ink jet nozzle assembly with a thermal bend actuator |
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| US7334873B2 (en) | 2002-04-12 | 2008-02-26 | Silverbrook Research Pty Ltd | Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
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-
1989
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