JPH0250841A - Ink jet head - Google Patents

Ink jet head

Info

Publication number
JPH0250841A
JPH0250841A JP20225288A JP20225288A JPH0250841A JP H0250841 A JPH0250841 A JP H0250841A JP 20225288 A JP20225288 A JP 20225288A JP 20225288 A JP20225288 A JP 20225288A JP H0250841 A JPH0250841 A JP H0250841A
Authority
JP
Japan
Prior art keywords
vibrator
nozzle
ink
free end
piezoelectric transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20225288A
Other languages
Japanese (ja)
Inventor
Shuji Yonekubo
米窪　周二
Masanao Matsuzawa
松澤　正尚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP20225288A priority Critical patent/JPH0250841A/en
Publication of JPH0250841A publication Critical patent/JPH0250841A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14282—Structure of print heads with piezoelectric elements of cantilever type

Abstract

PURPOSE:To uniformize the emitting speed, emitting amount and emitting stability of an ink droplet between nozzles by constituting the vicinity of the free end of a piezoelectric transducer of a soft structural member. CONSTITUTION:Voltage is preliminarily applied to the signal electrode 18 of a piezoelectric transducer 11 at a stand-by time and, when voltage is released at the time of selection, the free end of a vibrator 14 is deformed and displaced in the direction of a nozzle plate and the ink interposed between the nozzle plate 12 and the vibrator 14 is pressed to emit the ink in the vicinity of a nozzle 13 from the nozzle 13. Elastic rubber 15 being a soft structural member is bonded to the free end of the vibrator 14 and, even when there is irregularity in the warpage of the vibrator, the elastic rubber 15 is pressed to the nozzle plate 12 to be brought into contact therewith at the relase time of voltage to make it possible to hold the interval between the vibrator and the nozzle to high accuracy. The impact received by the vibrator at the time of contact is absorbed by the deformation of the elastic rubber 15 and the free end of the vibrator is further displaced while the contact state with the nozzle plate is continued. By this method, the pressure generated in the ink in the vicinity of the nozzle and the flow of the ink become almost constant.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はインク滴を飛翔させ記録紙等の媒体上にインク
像を形成するプリンタ等インクジェット記録装置に関し
、さらに詳細にはインクジェットプ１ノンタヘッドに関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an inkjet recording apparatus such as a printer that forms an ink image on a medium such as a recording paper by flying ink droplets, and more particularly to an inkjet printer head.

〔従来の技術〕[Conventional technology]

複数のノズル開口を有するノズル形成部材と、ノズル開
口の各々に対向して配置された振動子からなる圧電変換
器と、この圧電変換器とノズル形成部材との間隙及び圧
電変換器の周辺を充たすインクとを備え、印加電圧によ
り圧電変換器を変位させてインクをノズルから吐出させ
るオンデマンド型インクジェットヘッドは、例えば特公
昭６０８９５３号公報に開示されており、安定性が高く
インク中に気泡・ゴミ等の異物が混入した場合でもこの
影響を受けずに正常動作が可能であるという利点を有し
ている。圧電変換器としては、片持ち梁状振動子または
両持ち梁状振動子が用いられ、このうち片持ち梁状振動
子は、曲げ剛性が小さく電気機械変換効率が高く、小さ
い応力で必要な振動子可動部分が得られる等の利点を有
する。A piezoelectric transducer consisting of a nozzle forming member having a plurality of nozzle openings, a vibrator disposed opposite to each nozzle opening, and filling the gap between the piezoelectric transducer and the nozzle forming member and the periphery of the piezoelectric transducer. An on-demand inkjet head that displaces a piezoelectric transducer using an applied voltage to eject ink from a nozzle is disclosed in Japanese Patent Publication No. 608953, for example, and is highly stable and does not contain air bubbles or dirt in the ink. It has the advantage of being able to operate normally even if foreign matter such as this gets mixed in, without being affected by this. A cantilever beam vibrator or a double beam vibrator is used as a piezoelectric transducer.Among these, the cantilever beam vibrator has low bending rigidity and high electromechanical conversion efficiency, and can generate the necessary vibration with small stress. This has advantages such as the ability to obtain a child movable part.

また、ノズル形成部材と振動子の間隔は、インク吐出特
性に大きな影響を与えるため微小な間隙を保つように構
成されている。Further, the distance between the nozzle forming member and the vibrator is configured to maintain a small gap because it has a large effect on the ink ejection characteristics.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術の片持ち梁状振動子を用いたインクジェッ
トヘッドの構造では、振動子とノズル形成部材との間隙
を微小に保つことによって、この間隙に存在するインク
の圧力を高めて必要とするインク滴の吐出スピードと吐
出量を得ているため、振動子とノズル形成部材との間隙
の寸法がインク滴の吐出特性に大きな影響を与えてしま
い、各ノズル間の特性を揃えるためには、この間隙の寸
法をミクロン単位で管理する必要がある。しかしながら
現実問題として、片持ち梁状振動子の自由端の反りのば
らつきの押え込みには限界があり、このような高精度の
寸法管理は製造における歩留まり低下の大きな原因とな
っていた。In the above conventional inkjet head structure using a cantilever vibrator, by keeping the gap between the vibrator and the nozzle forming member small, the pressure of the ink existing in this gap is increased and the required ink is Since the droplet ejection speed and ejection volume are obtained, the size of the gap between the vibrator and the nozzle forming member has a large effect on the ink droplet ejection characteristics. It is necessary to control the gap dimensions in microns. However, as a practical matter, there is a limit to suppressing variations in the warpage of the free end of a cantilever vibrator, and such highly accurate dimensional control has been a major cause of reduced yield in manufacturing.

そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは製造上の歩留まりが良く、インク
滴の吐出スピード、吐出量、吐出安定性といった緒特性
が各ノズル間で揃った性能の優れたインクジェットヘッ
ドを提供することにある。The present invention is intended to solve these problems, and its purpose is to improve manufacturing yields and ensure that all nozzles have uniform characteristics such as ink droplet ejection speed, ejection amount, and ejection stability. Our goal is to provide inkjet heads with excellent performance.

〔課題を解決するための手段〕[Means to solve the problem]

本発明におけるインクジェットヘッドは、複数のノズル
開口を有するノズル形成部材と、ノズル開口の各々に対
向して配置され一端を自由端とし他端を固定端とする片
持ち梁状振動子からなる圧電変換器と、この圧電変換器
とノズル形成部材との間隙及び圧電変換器の周辺を充す
インクとを備え、印加電圧により圧電変換器を変位させ
てインクをノズル開口から吐出させるインクジェットヘ
ッドであって、圧電変換器の自由端近傍は軟構造部材で
構成されることを特徴とする。The inkjet head in the present invention includes a nozzle forming member having a plurality of nozzle openings, and a piezoelectric transducer comprising a cantilever-like vibrator arranged opposite to each of the nozzle openings and having one end as a free end and the other end as a fixed end. An inkjet head comprising a container, and ink filling a gap between the piezoelectric transducer and a nozzle forming member and a periphery of the piezoelectric transducer, and displacing the piezoelectric transducer by an applied voltage to eject ink from a nozzle opening. , the vicinity of the free end of the piezoelectric transducer is characterized by being composed of a soft structural member.

〔作用〕[Effect]

本発明の上記構成によれば、片持ち梁状振動子の自由端
がノズル形成部材側に変位した際、片持ち梁状振動子の
自由端の反りのばらつきのためにノズル形成部材に接触
するような振動子があっても、振動子の自由端近傍が軟
構造部材で構成されているため、接触の際に振動子の受
ける衝撃は軟構造部材によって吸収され、振動子の自由
端はさらにノズル形成部材側へ当接状態を続けながら変
位する。According to the above configuration of the present invention, when the free end of the cantilevered vibrator is displaced toward the nozzle forming member, it comes into contact with the nozzle forming member due to variations in the warpage of the free end of the cantilevered vibrator. Even with such a vibrator, since the vicinity of the free end of the vibrator is made up of a soft structural member, the impact received by the vibrator upon contact is absorbed by the soft structural member, and the free end of the vibrator is further It is displaced toward the nozzle forming member while continuing to be in contact with it.

〔実施例〕〔Example〕

以下本発明の詳細を具体例により図面を参照して説明す
る。The details of the present invention will be explained below using specific examples with reference to the drawings.

第１図は本発明におけるインクジェットヘッドを搭載し
たプリンタの斜視図であって、記録螺体１は送りローラ
ー２・３の押圧によりプラテン４に捲き回され、記録の
進行に従い矢印５の方向に搬送される。ガイド軸６・７
に案内されプラテン４の軸に平行な方向に移動可能なキ
ャリッジ８上には、複数のノズルを有するインクジェッ
トヘッド９が搭載されており、矢印１０の方向に移動し
つつ各々のノズルからインク滴を吐出して記録媒体上に
インク像を形成する。FIG. 1 is a perspective view of a printer equipped with an inkjet head according to the present invention, in which a recording screw 1 is wound around a platen 4 by pressure from feed rollers 2 and 3, and is conveyed in the direction of an arrow 5 as recording progresses. be done. Guide shaft 6/7
An inkjet head 9 having a plurality of nozzles is mounted on a carriage 8 that is guided by a carriage 8 and movable in a direction parallel to the axis of the platen 4, and as it moves in the direction of an arrow 10, ink droplets are ejected from each nozzle. The ink is ejected to form an ink image on a recording medium.

第２図は本発明によるインクジェットヘッドの断面を示
したものであって、複数のノズル１３を列設したノズル
形成部材であるノズル板１２とこれらのノズル１３に１
対１に対向する複数の振動子１４を有する圧電変換器１
１は、スペーサ１９を介してフレーム２０とサブフレー
ム２１の間に一体的に取付けられている。またフレーム
２ｏとノズル板１２およびサブフレーム２１によって形
成されるインク室２３にはインク（図示せず）がサブフ
レーム２１の背後に配置されているインクリザーバ（図
示を省略）から供給され、ノズル近傍を充たしている。FIG. 2 shows a cross section of an inkjet head according to the present invention, in which a nozzle plate 12, which is a nozzle forming member in which a plurality of nozzles 13 are arranged in a row, and a
Piezoelectric transducer 1 having a plurality of vibrators 14 facing each other
1 is integrally attached between a frame 20 and a subframe 21 via a spacer 19. Ink (not shown) is supplied to the ink chamber 23 formed by the frame 2o, the nozzle plate 12, and the subframe 21 from an ink reservoir (not shown) arranged behind the subframe 21, and is fulfilled.

２２は圧電変換器１１への駆動信号を供給するための配
線である。22 is a wiring for supplying a drive signal to the piezoelectric transducer 11.

第３図は圧電変換器１１の構成を説明するための斜視図
であり、この圧電変換器１１はＰＺＴよりなる圧電素子
１７の一面にＮｉ層よりなる共通電極１８を接着し、他
面にＡｕ層よりなるパターン電極１６を蒸着したものと
して構成され、しかも切り込み３０によって支持基体３
１の一側に複数の振動子１４が櫛歯状に突出したものと
して構成されている。さらに、振動子１４の先端部分に
は軟構造部材である弾性ゴム１５が接合されている。FIG. 3 is a perspective view for explaining the configuration of the piezoelectric transducer 11, in which a common electrode 18 made of a Ni layer is adhered to one surface of a piezoelectric element 17 made of PZT, and a common electrode 18 made of a Ni layer is bonded to the other surface. It is constructed by depositing a patterned electrode 16 consisting of a layer, and furthermore, the notch 30 allows the support substrate 3 to be
A plurality of vibrators 14 are configured to protrude in a comb-like shape on one side of the vibrator 1 . Further, an elastic rubber 15, which is a soft structural member, is bonded to the tip of the vibrator 14.

第４図（ａ）、　　（ｂ）はともにインク滴の吐出原理
を説明するためのヘッド断面図である。振動子１４が形
成されている圧電変換器の共通電極１８とパターン電極
１６の間に電圧を印加すると圧電効果により圧電素子１
７は収縮し、一方で共通電極１８のＮｉ層は高い弾性率
を有するため寸法変化が規制され、結果として振動子１
４はパターン電極１６の側に曲がるごとく曲げモーメン
トが発生し変形変位する。従って、第４図（ａ）のよう
に時期時には信号電極１８に電圧を印加しておき、選択
的に電圧を解除すれば、第４図（ｂ）のように振動子１
４の自由端はノズル板１２の方向に変形変位し、ノズル
板１２と振動子１４の間に介在するインクを押圧してノ
ズル近傍のインクをノズル１３から吐出させる。FIGS. 4(a) and 4(b) are both cross-sectional views of the head for explaining the principle of ejecting ink droplets. When a voltage is applied between the common electrode 18 and the pattern electrode 16 of the piezoelectric transducer in which the vibrator 14 is formed, the piezoelectric element 1
7 contracts, while the Ni layer of the common electrode 18 has a high elastic modulus, so dimensional changes are regulated, and as a result, the oscillator 1
4 is bent toward the pattern electrode 16, causing a bending moment and deformation. Therefore, if a voltage is applied to the signal electrode 18 at certain times as shown in FIG. 4(a), and the voltage is selectively released, the vibrator 18 will appear as shown in FIG. 4(b).
The free end of 4 is deformed and displaced in the direction of the nozzle plate 12, presses the ink interposed between the nozzle plate 12 and the vibrator 14, and causes the ink near the nozzle to be ejected from the nozzle 13.

ところで、振動子１４の自由端には軟構造部材である弾
性ゴム１５が接合されており、振動子の反りのばらつき
があっても、電圧解除時には第４図（ｂ）の如く弾性ゴ
ム１５がノズル板１２に押圧・当接することにより、振
動子とノズルとの間隔を高精度に保つことが可能になる
。また、接触の際に振動子の受ける衝撃は軟構造部材で
ある弾性ゴム１５の変形によって吸収され、振動子の自
由端は、さらにノズル板側へ当接状態を続けながら変位
する。これらにより、振動子の反りのばらつきに対して
ノズル近傍のインクに発生する圧力及びインクの流れは
ほぼ一定となる。Incidentally, an elastic rubber 15, which is a soft structural member, is bonded to the free end of the vibrator 14, and even if there is variation in the warpage of the vibrator, the elastic rubber 15 will be fixed as shown in FIG. 4(b) when the voltage is released. By pressing and contacting the nozzle plate 12, it is possible to maintain the interval between the vibrator and the nozzle with high precision. Furthermore, the impact received by the vibrator upon contact is absorbed by the deformation of the elastic rubber 15, which is a soft structural member, and the free end of the vibrator is further displaced toward the nozzle plate while continuing to be in contact with it. As a result, the pressure generated in the ink near the nozzle and the ink flow remain almost constant despite variations in the warpage of the vibrator.

第５図は、本発明におけるインクジェットヘッドに用い
られる圧電変換器の他の実施例であって、振動子１４の
先端部は軟構造部材である弾性ゴム１５のみで構成され
る構造も可能である。この場合、振動子がノズル板に当
接・接触した際、軟構造部材である弾性ゴム１５の変位
量は前実施例に比べてさらに大きくとれるため、振動子
はさらに滑らかにノズル側に変位できる。このほか、弾
性ゴムの加工度の大きさを利用してノズルに対向する部
分を円板形状にして振動子の振動エネルギーを効率よく
インクに伝える構造にすることも本実施例の場合には可
能である。FIG. 5 shows another embodiment of the piezoelectric transducer used in the inkjet head of the present invention, in which the tip of the vibrator 14 may be constructed only of elastic rubber 15, which is a soft structural member. . In this case, when the vibrator comes into contact with the nozzle plate, the amount of displacement of the elastic rubber 15, which is a soft structural member, can be larger than in the previous embodiment, so the vibrator can be displaced even more smoothly toward the nozzle. . In addition, in the case of this example, it is also possible to utilize the degree of processing of the elastic rubber to create a structure in which the part facing the nozzle is shaped into a disk to efficiently transmit the vibration energy of the vibrator to the ink. It is.

なお上記実施例では、軟構造部材として弾性ゴムが使わ
れているが、軟構造部材が弾性変形する材料でありさえ
すれば、どんな材質であってもよいことは発明の主旨上
明白である。In the above embodiments, elastic rubber is used as the soft structural member, but it is clear from the spirit of the invention that the soft structural member may be made of any material as long as it is elastically deformable.

また上記実施例では待機時に信号電極に電圧を印加して
いるが、待機時には非電圧印加状態にしておいて、選択
的に電圧を印加し解除することでノズル近傍のインクを
押圧しノズルから吐出させることも可能である。Furthermore, in the above embodiment, a voltage is applied to the signal electrode during standby, but the voltage is left in a non-applied state during standby, and by selectively applying and releasing the voltage, the ink near the nozzle is pressed and ejected from the nozzle. It is also possible to do so.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明の上記構成によれば、片持ち梁
状振動子の自由端がノズル板側に変位した際、片持ち梁
状振動子の自由端の反りのばらつきのためにノズル板に
接触するような振動子があっても、振動子の自由端近傍
が弾性変形する軟構造部材で構成されているために、振
動子の自由端は軟構造部材の弾性変形に従ってノズル板
側に当接状態を続けながら滑らかに変位する。このため
振動子自由端の反りのばらつきがあっても、吐出特性に
大きな変化を与えないまま、振動子自由端とノズル板と
の押圧・当接によってこのばらつきを矯正できるため、
振動子とノズル板とのギャップマージンが大きくなりヘ
ッド製造における歩留まりが向上するとともに、インク
滴の吐出スピード・吐出量・吐出安定性といった諸特性
が各ノズル間で揃った性能の優れたインクジェットヘッ
ドが実現できる。As described above, according to the above configuration of the present invention, when the free end of the cantilevered vibrator is displaced toward the nozzle plate, the nozzle plate Even if there is a vibrator that comes into contact with the oscillator, the free end of the vibrator is made of a soft structural member that elastically deforms near its free end, so the free end of the vibrator will move toward the nozzle plate side according to the elastic deformation of the soft structural member. Displaces smoothly while maintaining contact. Therefore, even if there is variation in the warpage of the free end of the vibrator, this variation can be corrected by pressing and contacting the free end of the vibrator with the nozzle plate without causing any major changes in the discharge characteristics.
The gap margin between the vibrator and the nozzle plate is increased, which improves the yield in head manufacturing, and the inkjet head has excellent performance with uniform characteristics such as ink droplet ejection speed, ejection amount, and ejection stability between each nozzle. realizable.

さらに本発明の上記構成によれば、振動子の自由端がノ
ズル板側に変位した際、ノズル板に接触する振動子の受
ける衝撃は軟構造部材によって吸収されるため、振動子
に衝撃による応力集中が及ぶことなく耐久性に優れたイ
ンクジェットヘッドが実現できる。Furthermore, according to the above configuration of the present invention, when the free end of the vibrator is displaced toward the nozzle plate, the impact received by the vibrator in contact with the nozzle plate is absorbed by the soft structural member, so that the vibrator is subjected to stress due to the impact. An inkjet head with excellent durability can be realized without the need for concentration.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明による一実施例を示すインクジェットヘ
ッドを搭載したプリンタの斜視図。 第２図は本発明による一実施例におけるインクジェット
ヘッドの断面図。 第３図は第２図に示された圧電変換器の構成を説明する
ための斜視図。 一 第４図（ａＬ　　（ｂ）はインク滴の吐出原理を説明す
るための第２図に示されたヘッドの断面拡大図。 第５図は本発明におけるインクジェットヘッドに用いら
れる圧電変換器の他の実施例を説明するためのヘッド断
面拡大図。 １・・・記録媒体 ９・・・インクジェットヘッド １１・・・圧電変換器　　　　　１２・・・ノズル板１
３・・・ノズル　　　　　　　１４・・・振動子１５・
・・弾性ゴム 以上 出願人　セイコーエプソン株式会社 代理人弁理士　鈴木喜三部　他１名 第１ ７、計縁媒株 ９、°インフシ；７１−ヘッに゛ １１Ａ電変換告 ７５　ｍ＋）１　］”Ａ （ｂ）FIG. 1 is a perspective view of a printer equipped with an inkjet head showing one embodiment of the present invention. FIG. 2 is a sectional view of an inkjet head in an embodiment according to the present invention. FIG. 3 is a perspective view for explaining the configuration of the piezoelectric transducer shown in FIG. 2. 4 (aL) (b) is an enlarged cross-sectional view of the head shown in FIG. 2 for explaining the principle of ejecting ink droplets. FIG. An enlarged cross-sectional view of the head for explaining the embodiment. 1... Recording medium 9... Inkjet head 11... Piezoelectric transducer 12... Nozzle plate 1
3... Nozzle 14... Vibrator 15.
...Applicant for elastic rubber and above Seiko Epson Co., Ltd. Representative Patent Attorney Kizobe Suzuki and 1 other person No. 1 7, Planning Media Stock 9,° Infusi; A (b)

Claims (1)

【特許請求の範囲】[Claims] 　少なくとも１つ以上のノズル開口を有するノズル形成
部材と、前記ノズル開口の各々に対向して配置され一端
を自由端とし他端を固定端とする片持ち梁状振動子から
なる圧電変換器と、該圧電変換器と前記ノズル形成部材
との間隙及び前記圧電変換器の周辺を充すインクとを備
え、印加電圧により前記圧電変換器を変位させてインク
を前記ノズル開口から吐出させるインクジェットヘッド
において、前記圧電変換器の自由端近傍は軟構造部材で
構成されることを特徴とするインクジェットヘッド。a piezoelectric transducer consisting of a nozzle forming member having at least one or more nozzle openings, and a cantilever vibrator arranged opposite to each of the nozzle openings and having one end as a free end and the other end as a fixed end; An inkjet head comprising ink filling a gap between the piezoelectric transducer and the nozzle forming member and a periphery of the piezoelectric transducer, the piezoelectric transducer being displaced by an applied voltage to eject ink from the nozzle opening, An inkjet head characterized in that the vicinity of the free end of the piezoelectric transducer is constructed of a soft structural member.
JP20225288A 1988-08-12 1988-08-12 Ink jet head Pending JPH0250841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20225288A JPH0250841A (en) 1988-08-12 1988-08-12 Ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20225288A JPH0250841A (en) 1988-08-12 1988-08-12 Ink jet head

Publications (1)

Publication Number Publication Date
JPH0250841A true JPH0250841A (en) 1990-02-20

Family

ID=16454470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20225288A Pending JPH0250841A (en) 1988-08-12 1988-08-12 Ink jet head

Country Status (1)

Country Link
JP (1) JPH0250841A (en)

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