JPH022004A - Ink jet head - Google Patents
Ink jet headInfo
- Publication number
- JPH022004A JPH022004A JP14405188A JP14405188A JPH022004A JP H022004 A JPH022004 A JP H022004A JP 14405188 A JP14405188 A JP 14405188A JP 14405188 A JP14405188 A JP 14405188A JP H022004 A JPH022004 A JP H022004A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- ink
- cross
- section
- inlet opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract 3
- 230000005499 meniscus Effects 0.000 abstract description 12
- 230000004044 response Effects 0.000 abstract description 6
- 125000006850 spacer group Chemical group 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 230000004043 responsiveness Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14282—Structure of print heads with piezoelectric elements of cantilever type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はインク滴を飛翔させ記録紙等の媒体上にインク
像を形成するプリンタ等インクジェット記録装置に関し
、さらに詳細にはインクジェットプリンタヘッドに関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an inkjet recording apparatus such as a printer that forms an ink image on a medium such as a recording paper by flying ink droplets, and more particularly to an inkjet printer head.
複数のノズルを有するノズル形成部材と、ノズルの各々
に対向して配置された振動子からなる圧電変換器と、こ
の圧電変換器とノズル形成部材との間隙及び圧電変換器
の周辺を充たすインクとを備え、印加電圧により圧電変
換器を変位させてインクをノズルから吐出させるオンデ
マンド型インクジェットヘッドは、例えば特開昭５７−
１７８７６８等に提案されており、安定性が高くインク
中に気泡・ゴミ等の異物が混入した場合でもこの影響を
受けずに正常動作が可能であるという特徴を有する。A nozzle forming member having a plurality of nozzles, a piezoelectric transducer including a vibrator disposed opposite to each nozzle, and ink filling a gap between the piezoelectric transducer and the nozzle forming member and a periphery of the piezoelectric transducer. An on-demand inkjet head, which is equipped with a piezoelectric transducer and discharges ink from a nozzle by displacing a piezoelectric transducer by an applied voltage, is disclosed in, for example, Japanese Patent Laid-Open No.
178768, etc., and is characterized by its high stability and ability to operate normally even if foreign matter such as air bubbles or dust gets mixed into the ink without being affected by this.
また、ノズル側面形状がインク吐出特性に大きな影響を
与えることが判明しており、充分なインク滴速度・吐出
量を得るにはノズル側面形状を、ノズルのインク入口開
口部の面積が出口開口部の面積よりも広い、いわゆるホ
ーン形状にすれば良いことが知られている。It has also been found that the shape of the nozzle side surface has a large effect on the ink ejection characteristics, and in order to obtain sufficient ink droplet speed and ejection amount, the nozzle side shape must be adjusted so that the area of the ink inlet opening of the nozzle is the same as that of the exit opening. It is known that a so-called horn shape, which is wider than the area of , can be used.
しかし、前述の従来技術ではインク滴を吐出した後にノ
ズル内に引き込まれるインクメニスカスの曲率半径が大
きくなるため毛細管力が小さくなってインクメニスカス
の戻り時間が長くかがるようになり、応答性の低下やそ
れに伴う応答周波数によるインク吐出量の変動という問
題点を有していた。However, in the above-mentioned conventional technology, the radius of curvature of the ink meniscus that is drawn into the nozzle after ejecting an ink droplet becomes large, which reduces the capillary force and increases the return time of the ink meniscus, resulting in poor responsiveness. There was a problem in that the amount of ink ejected varied due to the drop in response frequency and the accompanying response frequency.
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは充分なインク滴の吐出速度・吐出
量を保つことを断念することなく、応答性・吐出安定性
の優れたインクジェットヘッドを提供することにある。The present invention is intended to solve these problems, and its purpose is to create an inkjet with excellent responsiveness and ejection stability without giving up on maintaining a sufficient ink droplet ejection speed and amount. The purpose is to provide the head.
本発明におけるインクジェットヘッドは、複数のノズル
を有するノズル形成部材と、ノズルの各々に対向して配
置された振動子からなる圧電変換器と、この圧電変換器
とノズル形成部材との間隙及び圧電変換器の周辺を充た
すインクとを備え、印加電圧により圧電変換器を変位さ
せてインクをノズルから吐出させるインクジェットヘッ
ドであって、ノズルのインク入口開口部から出口開口部
にかけての断面形状の周長さは、同一断面積を持ち断面
′形状が円形であるノズルの周長さの１．２５倍以上の
長さであることを特徴とする。The inkjet head according to the present invention includes a nozzle forming member having a plurality of nozzles, a piezoelectric transducer including a vibrator arranged opposite to each nozzle, a gap between the piezoelectric transducer and the nozzle forming member, and a piezoelectric transducer. An inkjet head comprising ink that fills the periphery of a container and displacing a piezoelectric transducer by applied voltage to eject ink from a nozzle, the circumferential length of the cross-sectional shape from the ink inlet opening to the outlet opening of the nozzle. is characterized in that the length is 1.25 times or more the circumferential length of a nozzle having the same cross-sectional area and circular cross-sectional shape.
また、ノズルのインク入口開口部の断面形状は楕円形で
あり、インク出口開口部はさらに長く延びた断面形状で
あってもよい。Further, the ink inlet opening of the nozzle may have an elliptical cross-sectional shape, and the ink outlet opening may have an even longer cross-sectional shape.
本発明の上記構成によれば、ノズルのインク入口開口部
の面積が出口開口部の面積より広く充分なインク滴速度
並びに吐出量が確保されるインクジェットヘッドにおい
ても、インク入口開口部から出口開口部にかけての断面
形状の周長さが、同一断面積を持ち断面形状が円形であ
るノズルの周長さの１．２５倍以上の長さであるために
インクメニスカスに作用する毛細管力が強くなる。According to the above configuration of the present invention, even in an inkjet head in which the area of the ink inlet opening of the nozzle is wider than the area of the outlet opening and sufficient ink droplet velocity and ejection amount are ensured, the distance from the ink inlet opening to the outlet opening is Since the circumferential length of the cross-sectional shape is 1.25 times or more the circumferential length of a nozzle having the same cross-sectional area and circular cross-sectional shape, the capillary force acting on the ink meniscus is strong.
以下本発明の詳細を具体例により図面を参照して説明す
る。The details of the present invention will be explained below using specific examples with reference to the drawings.
第１図は本発明におけるインクジェットヘッドを搭載し
たプリンタの斜視図であって、記録媒体１は送りローラ
ー２・３の抑圧によりプラテン４に捲き回され、記録の
進行に従い矢印５の方向に搬送される。ガイド軸６・７
に案内されプラテン４の軸に平行な方向に移動可能なキ
ャリッジ８上には、複数のノズルを有するインクジェッ
トヘッド９が搭載されており、矢印１０の方向に移動し
つつ各々のノズルからインク滴を吐出して記録媒体上に
インク像を形成する。FIG. 1 is a perspective view of a printer equipped with an inkjet head according to the present invention, in which a recording medium 1 is wound around a platen 4 by the pressure of feed rollers 2 and 3, and is conveyed in the direction of an arrow 5 as recording progresses. Ru. Guide shaft 6/7
An inkjet head 9 having a plurality of nozzles is mounted on a carriage 8 that is guided by a carriage 8 and movable in a direction parallel to the axis of the platen 4, and as it moves in the direction of an arrow 10, ink droplets are ejected from each nozzle. The ink is ejected to form an ink image on a recording medium.
第２図は本発明によるノズルの入口開口部の正面図であ
って、ノズル形成部材であるノズルプレート１１に列設
された複数のノズル２０の入口開口部１２は楕円形状を
有し出口開口部１３はさらに長く延びた断面形状を有す
る。さらに、ノズル２０の入口開口部１２から出口開口
部１３にかけての断面形状の周長さは、同一断面積を持
ち断面形状が円形であるノズルの周長さの１．２５倍以
上の長さを有する。ところで、ノズル形状はインク吐出
特性に大きな影響を与えるものであり、ノズル間のイン
ク吐出特性のばらつきを抑えるためには、ノズルの寸法
は極めて良い精度を要求される。本実施例ではノズル２
０は、楕円状薄板のコアを用いたニッケル電鋳により極
めてよい寸法精度で形成されている。FIG. 2 is a front view of the inlet opening of the nozzle according to the present invention, in which the inlet openings 12 of the plurality of nozzles 20 arranged in a row on the nozzle plate 11, which is a nozzle forming member, have an elliptical shape, and the outlet openings 13 has a further elongated cross-sectional shape. Furthermore, the circumferential length of the cross-sectional shape from the inlet opening 12 to the outlet opening 13 of the nozzle 20 is at least 1.25 times the circumferential length of a nozzle having the same cross-sectional area and circular cross-sectional shape. have Incidentally, the nozzle shape has a great influence on the ink ejection characteristics, and in order to suppress variations in the ink ejection characteristics between nozzles, the nozzle dimensions require extremely high precision. In this embodiment, nozzle 2
0 is formed with extremely high dimensional accuracy by nickel electroforming using an elliptical thin plate core.
第３図には第２図に示されたノズルプレート１１を搭載
したインクジェットヘッドの構造並びにインク滴の吐出
原理を説明するためのヘッド断面図を示す。ノズルプレ
ート１１に列設された複数のノズル２０と対応する位置
に複数の振動子１９の各先端が配置されるように、圧電
変換器１８はスペーサ１５を介してノズルプレート１１
にＭｌ 付けられている。圧電変換器１８は圧電素子１
７と金属板１６の積層材からなり、選択的に電圧を印加
すると該当する振動子１９がノズルプレート１１の面に
直角な向きに振動し、ノズルプレート１１と振動子１９
の間に介在するインク１４を押圧してこれをノズル２０
から吐出させる。この時、本実施例によるノズルのイン
ク入口開口部から出口開口部にかけての断面積あたりの
周長さは、円形断面形状のノズルの同一断面積あたりの
周長さよりも大きいため、インクメニスカスには強い毛
細管力が作用し、インクメニスカスの戻り時間が短くな
る。このインクメニスカスの戻り時間の短縮に関しては
、ノズルのインク入口開口部１２から出口開口部１３に
かけての断面形状の周長さを、同一断面積を持ち断面形
状が円形であるノズルの周長さの１．２５倍以上の長さ
にした時に、効果が現われ始めることが実験により確認
されている。FIG. 3 is a cross-sectional view of the inkjet head equipped with the nozzle plate 11 shown in FIG. 2 for explaining the structure and principle of ejecting ink droplets. The piezoelectric transducer 18 is connected to the nozzle plate 11 via the spacer 15 so that the tips of the plurality of vibrators 19 are arranged at positions corresponding to the plurality of nozzles 20 arranged in a row on the nozzle plate 11.
Ml is attached to. Piezoelectric transducer 18 is piezoelectric element 1
7 and a metal plate 16, and when a voltage is selectively applied, the corresponding vibrator 19 vibrates in a direction perpendicular to the surface of the nozzle plate 11, and the nozzle plate 11 and the vibrator 19
Press the ink 14 interposed between the nozzles 20 and 20.
Discharge from. At this time, since the circumferential length per cross-sectional area from the ink inlet opening to the ink outlet opening of the nozzle according to this embodiment is larger than the circumferential length per the same cross-sectional area of the nozzle with a circular cross-sectional shape, the ink meniscus A strong capillary force acts, shortening the return time of the ink meniscus. In order to reduce the return time of the ink meniscus, the circumferential length of the cross-sectional shape from the ink inlet opening 12 to the outlet opening 13 of the nozzle is equal to the circumferential length of a nozzle with the same cross-sectional area and circular cross-sectional shape. It has been confirmed through experiments that the effect begins to appear when the length is 1.25 times or more.
第４図は、本発明におけるインクジェットヘッドに用い
られるノズル形状の他の実施例を説明するためのノズル
入口開口部の正面図である。本実施例におけるノズル２
０の入口開口部１２がら出口開口部１３にかけては、第
２図に示されるノズルよりさらに断面積あたりの周長さ
が大きくなり、しかも出口開口部１３の内側近傍におい
ても断面積あたりの周長さが極めて大きい形状となって
いる。従って、インクがノズルの出口開口部１３から大
きく引き込まれてもインクメニスカスには強い毛細管力
が作用し、インクメニスカスの戻り時間の短かいインク
ジェットヘッドが実現できる。FIG. 4 is a front view of a nozzle inlet opening for explaining another embodiment of the nozzle shape used in the inkjet head of the present invention. Nozzle 2 in this example
From the inlet opening 12 to the outlet opening 13, the circumferential length per cross-sectional area is even larger than that of the nozzle shown in FIG. It has an extremely large shape. Therefore, even if the ink is drawn in from the exit opening 13 of the nozzle, a strong capillary force acts on the ink meniscus, making it possible to realize an inkjet head in which the return time of the ink meniscus is short.
また、本実施例におけるノズル２０はその長手方向の広
がりがノズル列の配列方向と４５度の角度で列設されて
いることにより、ノズル近傍のインクはノズルの長手方
向に沿うような流れになり隣合ったノズルとの間に流体
結合が生じにくくなる。In addition, the nozzles 20 in this embodiment are arranged in such a way that their longitudinal extent is at an angle of 45 degrees with the arrangement direction of the nozzle rows, so that the ink near the nozzles flows along the longitudinal direction of the nozzles. Fluid coupling between adjacent nozzles is less likely to occur.
以上述べたように本発明の上記構成によれば、ノズルの
インク入口開口部から出口開口部にかけての断面形状の
周長さが、同−断面積を持ち断面形状が円形であるノズ
ルの周長さの１．２５倍以上の長さであるノズルを用い
るため、インクメニスカスに作用する毛細管力が大きく
インクメニスカスの戻り時間が速くなる。従って、応答
周波数を高めてもノズルへのインクの供給が間に合うた
め、充分なインク滴の吐出速度・吐出量を損なうことな
く応答性を高めることが可能となる。こうして、インク
滴の吐出速度・吐出量・応答性・吐出安定性などの緒特
性が同時に向上したインクジェットヘッドが実現できる
。As described above, according to the above structure of the present invention, the circumferential length of the cross-sectional shape from the ink inlet opening to the ink outlet opening of the nozzle is equal to the circumferential length of a nozzle having a circular cross-sectional area and a circular cross-sectional area. Since a nozzle having a length of 1.25 times or more is used, the capillary force acting on the ink meniscus is large and the return time of the ink meniscus becomes faster. Therefore, even if the response frequency is increased, ink can still be supplied to the nozzles in time, making it possible to improve the responsiveness without sacrificing sufficient ink droplet ejection speed and ejection amount. In this way, it is possible to realize an inkjet head in which characteristics such as ink droplet ejection speed, ejection amount, response, and ejection stability are simultaneously improved.
１１・・・ノズルプレート １３・・・出口開口部 １８・・・圧電変換器 １２・・・人口開口部 １４・・・インク ２０・・・ノズル 以上 出願人 セイコーエプソン株式会社 代理人弁理士 鈴木喜三部 他１名11... Nozzle plate 13...Exit opening 18...Piezoelectric transducer 12... Population opening 14...Ink 20... nozzle that's all Applicant: Seiko Epson Corporation Representative Patent Attorney Kizobe Suzuki and 1 other person
第１図は本発明による一実施例を示すインクジェットヘ
ッドを搭載したプリンタの斜視図。
第２図は本発明によるノズルの入口開口部の正面図。
第３図は第２図に示されたノズルプレートを搭載したイ
ンクジェットヘッドの構造並びにインク滴の吐出原理を
説明するためのヘッド断面図。
第４図は本発明におけるインクジェットヘッドに用いら
れるノズル形状の他の実施例を説明するためのノズル入
口開口部の正面図。
１・・・記録媒体
９・・・インクジェットヘッド
第１
７．・語録ｇ久
９、° インフシ；外へッに゛
１７ ノス′ルプレートFIG. 1 is a perspective view of a printer equipped with an inkjet head showing one embodiment of the present invention. FIG. 2 is a front view of the inlet opening of a nozzle according to the invention. FIG. 3 is a sectional view of the inkjet head equipped with the nozzle plate shown in FIG. 2 for explaining the structure and principle of ejecting ink droplets. FIG. 4 is a front view of a nozzle inlet opening for explaining another embodiment of the nozzle shape used in the inkjet head of the present invention. 1... Recording medium 9... Inkjet head first 7.・Word record gku 9, ° infushi; to the outside ゛17 no'sle plate
Claims (2)
ズルの各々に対向して配置された振動子からなる圧電変
換器と、該圧電変換器と前記ノズル形成部材との間隙及
び前記圧電変換器の周辺を充たすインクとを備え、印加
電圧により前記圧電変換器を変位させてインクを前記ノ
ズルから吐出させるインクジェットヘッドにおいて、前
記ノズルのインク入口開口部から出口開口部にかけての
断面形状の周長さは、同一断面積を持ち断面形状が円形
であるノズルの周長さの１．２５倍以上の長さであるこ
とを特徴とするインクジェットヘッド。(1) A piezoelectric transducer comprising a nozzle forming member having a plurality of nozzles, a vibrator arranged to face each of the nozzles, a gap between the piezoelectric transducer and the nozzle forming member, and the piezoelectric transducer an inkjet head that discharges ink from the nozzle by displacing the piezoelectric transducer by applied voltage, the peripheral length of the cross-sectional shape from the ink inlet opening to the outlet opening of the nozzle; An inkjet head characterized in that the length is 1.25 times or more the circumferential length of a nozzle having the same cross-sectional area and circular cross-sectional shape.
あり、インク出口開口部はさらに長く延びた断面形状で
あることを特徴とする請求項１のインクジェットヘッド
。(2) The inkjet head according to claim 1, wherein the ink inlet opening of the nozzle has an elliptical cross-sectional shape, and the ink outlet opening has an elongated cross-sectional shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14405188A JPH022004A (en) | 1988-06-10 | 1988-06-10 | Ink jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14405188A JPH022004A (en) | 1988-06-10 | 1988-06-10 | Ink jet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH022004A true JPH022004A (en) | 1990-01-08 |
Family
ID=15353175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14405188A Pending JPH022004A (en) | 1988-06-10 | 1988-06-10 | Ink jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH022004A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0627450U (en) * | 1992-09-09 | 1994-04-12 | 日産ディーゼル工業株式会社 | Mounting structure for tire fender rubber |
| JPH06206504A (en) * | 1993-01-07 | 1994-07-26 | Howa Seni Kogyo Kk | Bracket fixing formation method for automobile trimming material |
| JP2000280479A (en) * | 1999-01-29 | 2000-10-10 | Canon Inc | Liquid-discharging head, for preventing abrupt discharge failure using the discharging head, and manufacture of the discharging head |
| WO2007064021A1 (en) * | 2005-11-29 | 2007-06-07 | Canon Kabushiki Kaisha | Method of liquid discharge, liquid discharge head and liquid discharge apparatus |
| JP2008114498A (en) * | 2006-11-06 | 2008-05-22 | Canon Inc | Inkjet discharging method and inkjet ejection head |
| JP2017123391A (en) * | 2016-01-06 | 2017-07-13 | ローム株式会社 | Substrate with hole and manufacturing method thereof, and infrared sensor and manufacturing method thereof |
-
1988
- 1988-06-10 JP JP14405188A patent/JPH022004A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0627450U (en) * | 1992-09-09 | 1994-04-12 | 日産ディーゼル工業株式会社 | Mounting structure for tire fender rubber |
| JPH06206504A (en) * | 1993-01-07 | 1994-07-26 | Howa Seni Kogyo Kk | Bracket fixing formation method for automobile trimming material |
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| US7506962B2 (en) | 2005-11-29 | 2009-03-24 | Canon Kabushiki Kaisha | Liquid discharge method, liquid discharge head and liquid discharge apparatus |
| WO2007064021A1 (en) * | 2005-11-29 | 2007-06-07 | Canon Kabushiki Kaisha | Method of liquid discharge, liquid discharge head and liquid discharge apparatus |
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| JP4818276B2 (en) * | 2005-11-29 | 2011-11-16 | キヤノン株式会社 | Liquid ejection method, liquid ejection head, and liquid ejection apparatus |
| JP2011235650A (en) * | 2005-11-29 | 2011-11-24 | Canon Inc | Method of liquid discharge |
| US8167407B2 (en) | 2005-11-29 | 2012-05-01 | Canon Kabushiki Kaisha | Liquid discharge method, liquid discharge head and liquid discharge apparatus having projections within discharge port |
| US8382248B2 (en) | 2005-11-29 | 2013-02-26 | Canon Kabushiki Kaisha | Liquid discharge method, liquid discharge head and liquid discharge apparatus using discharge port having projections |
| JP2008114498A (en) * | 2006-11-06 | 2008-05-22 | Canon Inc | Inkjet discharging method and inkjet ejection head |
| JP2017123391A (en) * | 2016-01-06 | 2017-07-13 | ローム株式会社 | Substrate with hole and manufacturing method thereof, and infrared sensor and manufacturing method thereof |
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