JPH03179300A - X-ray microscope - Google Patents

Abstract

PURPOSE:To shorten an observation time and to improve resolving power by making X-rays from an SOR source monochromatic by an X-ray condensing part and condensing monochromatic X-rays to the sample provided in a microscope main body. CONSTITUTION:X-rays 2 incident on a rotary parabolic mirror 8 are converted to monochromatic X-rays 2a having a specific wavelength and the monochromatic X-rays 2a are emitted to the rotary parabolic mirror 8. Next, the X-rays 2a incident on the rotary parabolic mirror 8 are condensed to the sample 5 positioned at the focus 8a of the mirror 8 as X-rays 3. The X-rays 3 condensed to the sample 5 transmit through the sample 5 and the transmitted X-rays 3 are emitted to a Walter reflecting mirror 10. The X-rays 3a incident on a rotary oval mirror 16 are reflected from the false object point being one focus 19 of the rotary oval mirror 6 and the reflected X-rays 3b are formed into an image on the image forming means 1 positioned at the other focus 20 of the rotary oval mirror 16. In this case, X-ray efficiency is enhanced and, as a result, an observation time is shortened and resolving power can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to an X-ray microscope used, for example, for observing biological samples.

(Prior Art) X-rays are characterized by having shorter wavelengths than visible light and greater penetrating power than electron beams. X using this feature
Line microscopes have become an important means of obtaining information about objects at the atomic level. By the way, this X-ray microscope is mainly a transmission type that observes the absorption difference of substances through transmission. Further, as the optical system, there are cases in which an X-ray imaging element is used and cases in which it is not used. When using an X-ray imaging element, the zone plate method uses a concentric Fresnel zone plate that is transparent and opaque to X-rays, the oblique-incidence mirror method uses an oblique-incidence mirror in which the X-rays are barely incident on the mirror surface, There is a multilayer film mirror method that utilizes the effect of increasing the X-ray reflectance of a multilayer film, and a scanning method that focuses a small amount of X-rays, irradiates the sample, and measures the amount of transmitted light two-dimensionally.

(Problem to be solved by the invention) However, since the above-mentioned XL microscope extracts a portion of the X-rays through a pinhole or the like and irradiates the sample, the irradiation intensity is weak when used as an X-ray microscope. Not only does it take a long time to do this, and work efficiency is significantly reduced, but
It has the drawback of being uneconomical due to its low X-ray efficiency.

The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide an X-ray microscope that allows observation in a short time and has high X-ray efficiency.

[Structure of the Invention] (Means and Effects for Solving the Problems) The X-ray microscope of the present invention monochromates the X-rays from the SOR source using the X-ray condenser, and directs the monochromatic X-rays into the microscope main body. The X-ray beam is designed to focus light on a sample placed on the surface of the sample, and can obtain powerful X-rays, which improves X-ray efficiency, shortens observation time, and improves resolution.

(Example) Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows the X@microscope of this embodiment. This X-ray microscope uses SOR (Synchron-otron) technology.
An X-ray condenser that converts parallel X-rays (2) from a synchrotron orbital radiation source (1) into parallel monochromatic X-rays (3) with a specific wavelength of 44A, for example, and focuses the light. (4) and this X-ray condensing section (4)
) and a microscope main body (6) that forms an enlarged image of the sample (5) placed at the focusing position of the X-rays (3).

The X-ray condensing unit (4) receives the X-rays (2) from the SOR source (1) and generates monochromatic X-rays (2a) of a specific wavelength.
A monochromator (7) consisting of, for example, a plane diffraction grating, which converts and emits the It consists of a plane mirror (8). and,
The paraboloid of revolution mirror (8) has a reflecting surface in the form of a paraboloid of revolution, and is provided so that its front axis (4a) is parallel to the optical path of the X-ray (2a). In addition, a parabolic mirror of revolution (
The focal point (8a) of 8> is on the optical axis (4a>), and the sample (5) is positioned at this focal point (8a).

On the other hand, the microscope main body (6) is of the so-called oblique incidence mirror method, and the optical axis (6) coincides with the optical axis of the X-ray (3).
9〉. Then, the optical axis (4a) and the optical axis (9>
intersect, and the sample (5>) is positioned at this intersecting position.The microscope main body (6>) includes a sample support means (not shown) that supports this sample (5), and a sample support means (not shown) that supports this sample (5). X transmitted through the sample (5) supported by the support means
a cylindrical Wolter-type reflecting mirror (lO) that receives the beam (3a) and obtains an enlarged image of the sample (5);
X-rays (
3b) and converts the imaging result into an electrical signal; and a storage body (12) that stores the sample support means, the Walter-type reflecting mirror (lO), and the imaging means (11).
), and a drive means (14) that minutely moves this storage body (12) in the direction along the optical axis (9>) using, for example, a piezoelectric element.
). However, the Walter type reflector (
10) is a rotating hyperboloid mirror (15) as shown in Figure 2.
and a rotating ellipsoidal mirror (16) coaxially connected to the rotating hyperboloidal mirror (15). As mentioned above, the X-ray (3) and the Walter type reflector (1O) share the optical axis (9), and the sample (5) has the same optical axis (9).
9) Located above. Furthermore, a rotating hyperboloid mirror (15)
has two focal points (17) and (18) on the optical axis (9).
The sample (5) is positioned on one focal point (17). In other words, a parabolic mirror of revolution (
8> focal point (8a) and one focal point (17) of the rotating hyperboloid mirror (15) are the same object point. On the other hand, the spheroidal mirror (1B) has two focal points (19) and (20
), and one focal point (
19) and a hyperboloid of rotation! The other focus (18) of 1 (15〉)
are in agreement. An imaging means (11) is positioned on the other focal point (20) of the spheroidal mirror (16).

Next, the operation of the X-ray microscope having the above configuration will be described.

First, the sample (5) is supported by the sample support means.

Next, the X-ray (2) is projected from the SOR source (() to the monochromator (7). Then, the monochromator (7)
The incident X-rays (2> are monochromatic X-rays (2a) of a specific wavelength)
and is emitted toward the parabolic mirror (8).

Next, the X-rays (2a) incident on the parabolic mirror of revolution (8) are focused as X-rays (3) on the sample (5) positioned at its focal point (8a). The X-rays (3) focused on (5) are transmitted through the sample (5), and the transmitted X-rays (3a) are emitted toward the Walter type reflector (10). When the X-ray (3a) enters the rotation hyperboloid mirror (15) of the Walter-type reflector (10), this X-ray (3a) appears as if it were emitted from the other focal point (18) of the rotation hyperboloid m (15). In other words, the other focal point (1B) of the hyperboloid of revolution! (15) is reflected as an imaginary object point and enters the spheroidal mirror (16>).

Then, the X-rays (3
a〉, one focal point (19) of the spheroidal mirror (16) is reflected as an imaginary object point, and the reflected X-ray (3b) is reflected at the other focal point (20〉 position) of the spheroidal mirror (16). The image is formed on the imaging means (1st piece) positioned at the sample (
5) If you want to expand the observation area sequentially, use the driving means (1
4>, move the container (12> along the optical axis (9) with the arrow (
25) It is sufficient to advance or retreat in the direction.

As described above, the X-ray microscope of this embodiment is capable of emitting one monochromatic X-ray (3) using the X-ray condensing section (4) and one monochromatic X-ray (3) using the
Since the light is focused on the sample (5) provided within the X-ray tube, powerful X-rays can be obtained. Therefore, by improving X-ray efficiency, observation time is shortened,
Resolution can be improved.

In the above embodiments, the microscope main body (6) may be constructed using a zone plate method, a multilayer mirror method, or a scanning method. Furthermore, a multilayer film (31) may be formed on the reflective surface of the parabolic mirror of revolution (8>, as shown in FIG. 3). A film pair (34) consisting of vanadium, gold) (32) and a light element (e.g. carbon) (33) is formed by Bragg (B
ragg) conditions are laminated to form an artificial lattice. With this multilayer film (31),
Since the critical incidence angle of l (3) can be increased, the sample (
5) to the imaging means (11) can be shortened. Furthermore, X-rays (2
) The monochromator (7) can be omitted by forming a parabolic diffraction grating that can be monochromatic. In addition, the driving means (14
> moves the container (12) to the arrow (4) perpendicular to the optical axis (9).
It may be made to advance and retreat in the 0> direction.

[Effects of the Invention] The X-ray microscope of the present invention monochromates the X-rays from the SOR source using the X-ray focusing section, and focuses the monochromatic X-rays onto a sample provided within the microscope main body. Because there is a powerful
You will be able to get the line. Therefore, by improving X-ray efficiency, observation time can be shortened and resolution can be improved.

[Brief explanation of drawings]

Figure 1 is a configuration diagram of an X-ray microscope according to an embodiment of the present invention;
The figure is also an enlarged view of the main part, and FIG. 3 is an explanatory diagram of another embodiment of the present invention. (1); SOR source, (4); X-ray condensing unit, (
5) ; Sample, (6) ; Microscope main body, (7
); Monochromator; (8); Parabolic mirror of revolution; <14); Driving means.

Claims (5)

[Claims] (1) An X-ray condensing unit that inputs and monochromates the X-rays emitted from the SOR source and then condenses the monochromatic X-rays at a certain position, and monochromaticization by this X-ray condensing unit. 1. An X-ray microscope, comprising: a microscope main body that supports a sample at a position where X-rays are focused and forms an enlarged image of the sample from the X-rays transmitted through the sample. (2) The X-ray microscope according to claim (1), wherein the optical axis of the monochromatic X-rays focused by the X-ray focusing section and the optical axis of the microscope main body are aligned. (3) The X-ray condensing unit consists of a monochromator that inputs the X-rays emitted from the SOR source to make it monochromatic, and a rotating unit that inputs the monochromatic X-rays emitted from the monochromator and focuses them at a fixed position. Claim (2) characterized in that it consists of a parabolic mirror.
) described X-ray microscope. (4) The X-ray microscope according to claim (3), wherein the optical axis of the parabolic mirror of revolution is provided parallel to the optical path of monochromatic X-rays emitted from the monochromator. (5) The main body of the microscope has a driving means for moving forward and backward in the optical axis direction at the position where the monochromatic X-rays are focused by the X-ray focusing section.
line microscope.