JPH03178792A - Holding device for plate-like body - Google Patents
Holding device for plate-like bodyInfo
- Publication number
- JPH03178792A JPH03178792A JP1314091A JP31409189A JPH03178792A JP H03178792 A JPH03178792 A JP H03178792A JP 1314091 A JP1314091 A JP 1314091A JP 31409189 A JP31409189 A JP 31409189A JP H03178792 A JPH03178792 A JP H03178792A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- piece
- holding member
- reticle
- abutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003825 pressing Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Manipulator (AREA)
- Load-Engaging Elements For Cranes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、半導体のウェハやガラス基板などにパターン
を焼付けるために用いられるホトマスクが形成された、
いわゆるレチクルと称される板状体を把持するために好
適に用いられる板状体の把持装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a photomask used for printing patterns on semiconductor wafers, glass substrates, etc.
The present invention relates to a plate-like object gripping device that is suitably used for holding a plate-like object called a so-called reticle.
従来の技術
第７図は、典型的な従来技術の把持装置１の斜視図であ
る。この把持装置１（よ、操作者によって保持される把
持部２に対して、ビン３によってアーム４が揺動変位自
在に取ｆ寸けられており、そのアーム４の脚部５に取付
けられたクランプヘッド１５と、把持部２に取付けられ
た支持脚６のクランプヘッド１６とによってレチクル７
を保持するように構成されている。Prior Art FIG. 7 is a perspective view of a typical prior art gripping device 1. This gripping device 1 (see FIG. The reticle 7 is clamped by the clamp head 15 and the clamp head 16 of the support leg 6 attached to the grip part 2.
is configured to hold.
クランプヘッド１．５．１６には、レチクル７に形成さ
れた鍔８が嵌り込むＶｊ１９．１０がそれぞれ形成され
ている。把持部２に一体的に形成される支持脚６と、ア
ーム４との間には、引張ばね１１が取付けられており、
この引張ばね１１のばね力によって、支持脚６とアーム
４とは相互に近接する方向にばね付勢されている。The clamp heads 1.5.16 are each formed with Vj19.10 into which the collar 8 formed on the reticle 7 fits. A tension spring 11 is attached between the arm 4 and the support leg 6 that is integrally formed on the grip portion 2.
Due to the spring force of the tension spring 11, the support leg 6 and the arm 4 are biased toward each other.
またアーム４の基端部には、押釦１２が取付けられてい
る。この押！］１２を矢符Ａ方向に押圧変位することに
よって、アーム４がばね１１のばね力に抗して、矢符Ｂ
方向に揺動変位する。これによってクランプヘッド１５
．１６が相互に離反する方向に変位し、この状態でＶ溝
９，１ｏにレチクル７の鍔８が嵌り込むように、該把持
装置１が配置される。Further, a push button 12 is attached to the base end of the arm 4. This push! ] 12 in the direction of the arrow A, the arm 4 resists the spring force of the spring 11 and moves in the direction of the arrow B.
oscillating displacement in the direction. As a result, the clamp head 15
．． The gripping device 1 is arranged so that the reticle 16 is displaced in a direction away from each other, and in this state, the collar 8 of the reticle 7 fits into the V-grooves 9, 1o.
前記押釦１２への押圧力が解除されると、ばね１１のば
ね力によって、アーム４が前記矢符Ｂ方向とは反対方向
に揺動変位し、クランプヘッド１５．１６によってレチ
クル７が把持される。When the pressing force on the push button 12 is released, the spring force of the spring 11 swings the arm 4 in the direction opposite to the direction of the arrow B, and the reticle 7 is gripped by the clamp head 15, 16. .
このようにしてレチクル７が保持されると、把持部２の
押釦１２近清の外周面に取付けられている締ｆ寸リング
１３が締付けられ、アーム４が固定される。これによっ
てクランプヘッド１５．１６間の間隔がさちに小さくな
り、こうしてレチクル７が把持される。When the reticle 7 is held in this manner, the tightening ring 13 attached to the outer peripheral surface of the push button 12 of the gripping section 2 is tightened, and the arm 4 is fixed. As a result, the distance between the clamp heads 15, 16 becomes smaller and the reticle 7 is thus gripped.
レチクル７は、上述のように把持装置１によって保持さ
れた状態で第８図に示される容器２１に着脱される。容
器２１は、収納空間２２を有する容器本体２３と、開閉
自在の蓋２４とから構成されている。容器本体２３には
、レチクル７の前記鍔８が乗載される一対の架台２５．
２６と、レチクル７を、該レチクル７の着脱時には案内
し、収納時には、がたつきなく保持するための案内壁２
７．２８と、位置決め用の突起２９〜３２とが形成され
ている。The reticle 7 is attached to and detached from the container 21 shown in FIG. 8 while being held by the gripping device 1 as described above. The container 21 includes a container body 23 having a storage space 22 and a lid 24 that can be opened and closed. The container body 23 has a pair of mounts 25 on which the collar 8 of the reticle 7 is mounted.
26, and a guide wall 2 for guiding the reticle 7 when attaching and detaching the reticle 7 and holding it without wobbling when storing it.
7.28 and positioning protrusions 29 to 32 are formed.
操作者は、前記容器２１内に収納されているレチクル７
を、前述のようにして把持装置１で把持して取出し、ま
た洗浄や焼１寸けなどの工程が給了した降には、レチク
ル７を把持装置１で把持して容器２１内に収納する。The operator selects the reticle 7 stored in the container 21.
The reticle 7 is gripped and taken out by the gripping device 1 as described above, and after the processes such as cleaning and baking are completed, the reticle 7 is gripped by the gripping device 1 and stored in the container 21. .
発明が解決しようとする課題
上述のような従来技術の把持装置１では、レチクル７は
クランプヘッド１５．１６によって２点で支持されるた
め、安定して把持することができない。また、前記洗浄
工程などのレチクル７の取扱い中に、レチクル７が滑り
落ちるおそれがある。Problems to be Solved by the Invention In the prior art gripping device 1 as described above, the reticle 7 is supported at two points by the clamp heads 15 and 16, and therefore cannot be stably gripped. Furthermore, there is a risk that the reticle 7 may slip during handling such as in the cleaning process.
さらにまた、アーム４がレチクル７の中央部付近を覆う
ため、アーム４に付着している埃などが落下して付着す
るおそれがある。Furthermore, since the arm 4 covers the vicinity of the center of the reticle 7, there is a risk that dust and the like adhering to the arm 4 may fall and adhere thereto.
また、レチクル７を確実に把持するためには、！ｔ１
ｆ′−ｔリング１３を回転する必要があり、作業性が悪
い。さらにまた、この締付はリング１３の締付は具合が
緩いときにはレチクル７が落下しやすく、一方、過度に
締付は過ぎると、レチクル７に歪みが生じたり、破損す
るおそれがある。したがって、談把持装置１の取扱いに
は熟練を要する。Also, in order to securely grasp the reticle 7,! t1
It is necessary to rotate the f'-t ring 13, resulting in poor workability. Furthermore, if the ring 13 is not tightly tightened, the reticle 7 is likely to fall, while if the ring 13 is too tightened, the reticle 7 may be distorted or damaged. Therefore, handling of the gripping device 1 requires skill.
本発明の目的は、簡単な操作で板状体を確実に保持する
ことができる板状体の把持装置を提供することである。An object of the present invention is to provide a gripping device for a plate-like object that can reliably hold a plate-like object with simple operation.
課題を解決するための手段
本発明は、操作者の手先に配置され、板状体の一方の端
部が嵌り込む講が形成された保持部材と、操作者の手元
に配置され、板状体の他方の端部の一方表面に当接する
当接片と、
前記当接片と対を成し、当接片に対して近接・離反可能
に揺動支持され、前記板状体の他方の端部を他方表面側
から挟み、その挟んだ状態で前記当接片に平行となる当
接面を有する可動片と、前記保持部材および当接片が固
定されるとともに、可動片を揺動支持する枠体とを含み
、前記当接片と保持部材とは、少なくとも合計３詩所設
けたことを特徴とする板状体の把持装置である。Means for Solving the Problems The present invention provides a holding member that is placed at the operator's hand and has a hole into which one end of a plate-like body is fitted; an abutting piece that abuts one surface of the other end of the plate-shaped body, forming a pair with the abutting piece and swingingly supported so as to be able to approach and move away from the abutting piece; a movable piece having a contact surface that is parallel to the abutment piece in the sandwiched state, and the holding member and the abutment piece are fixed, and the movable piece is swingably supported. The gripping device for a plate-shaped object is characterized in that the gripping device includes a frame body, and the contact piece and the holding member are provided in at least three positions in total.
作 用
本発明に従えば、枠体の手先側には保持部材を固定し、
手元側には、当接片を固定するとともに、その当接片と
対を成す可動片を、当接片に対して近接・離反可能に揺
動支持する。保持部材には板状体の一方の端部が嵌り込
む溝が形成されており、また可動片には、当接片との間
で板状体を挟んだ状態で、当接片に平行となる当接面が
形成されている。Function According to the present invention, a holding member is fixed to the hand side of the frame body,
On the hand side, a contact piece is fixed, and a movable piece that forms a pair with the contact piece is swingably supported so as to be able to approach and move away from the contact piece. The holding member is formed with a groove into which one end of the plate-shaped body is fitted, and the movable piece has a groove parallel to the abutting piece with the plate-shaped body sandwiched between it and the abutting piece. A contact surface is formed.
板状体は、一方の端部が前記保持部材の溝に嵌り込み、
他方の端部は、当接片と可動片の当接面とによって挟持
される。これら当接片と保持部材とは、少なくともき計
３箇所設けられている。One end of the plate-like body fits into the groove of the holding member,
The other end is held between the abutting piece and the abutting surface of the movable piece. These contact pieces and holding members are provided at at least three locations in total.
このようにして、板状体は少なくとも３点で安定して把
持される。In this way, the plate-like object is stably gripped at at least three points.
実施例
第１図は本発明の一実施例の把持装置４１の斜視図であ
り、第２図はその側面図であり、第３図はその平面図で
ある。この把持装置４１は、大略的に、操作者によって
把持される把持部４２と、把持部４２に一体的に形成さ
れる枠体４３と、この枠体４３から垂下して形成され、
操作者の手先制に配置される一対の脚部４３ａ、４３ｂ
と、枠体４３から垂下して形成され、操作者の手元側に
配置される当接片４６，４７と、当接片４６，４７と対
を成し、当接片４６，４７に近接・離反変位可能となる
ように枠体４３に取付けられている可動片４８．４９と
を含んで構成されている。Embodiment FIG. 1 is a perspective view of a gripping device 41 according to an embodiment of the present invention, FIG. 2 is a side view thereof, and FIG. 3 is a plan view thereof. This gripping device 41 is roughly formed of a gripping part 42 that is gripped by an operator, a frame 43 that is integrally formed with the gripping part 42, and a frame 43 that hangs down from the frame 43.
A pair of legs 43a, 43b arranged at the operator's fingertips
The contact pieces 46 and 47 are formed to hang down from the frame body 43 and are arranged near the operator's hand. It is configured to include movable pieces 48 and 49 attached to the frame body 43 so as to be able to be moved apart.
前記把持部４２、枠体４３、脚部４３ａ、４３ｂ、当接
片４６，４７および可動片４８．４９は、ステンレスや
アルミ合金などの材料から成り、このため脚部４３ａ、
４３ｂ、当接片４６，４７、可動片４８．４９のレチク
ル７の鍔８に当接する部分には、テフロンなどの樹脂材
料から成るクランプヘッド５１〜５６がそれぞれ取付け
られている。クランプヘッド５１と脚部４３ａとは保持
部材４４を構成し、クランアヘッド５２と脚部４３ｂと
は保持部材４５を構成する。The grip portion 42, the frame body 43, the legs 43a, 43b, the contact pieces 46, 47, and the movable pieces 48, 49 are made of materials such as stainless steel or aluminum alloy.
43b, contact pieces 46, 47, and movable pieces 48, 49, clamp heads 51-56 made of a resin material such as Teflon are attached to the portions that contact the collar 8 of the reticle 7, respectively. The clamp head 51 and the leg portion 43a constitute a holding member 44, and the clamp head 52 and the leg portion 43b constitute a holding member 45.
前記クランプヘッド５１．５２には、レチクル７の一方
の端部の鍔８ａが嵌め込まれるＶ 溝５７ 。The clamp head 51, 52 has a V groove 57 into which the collar 8a at one end of the reticle 7 is fitted.
５８が形成されている。また、当接片４６，４７の枠体
４３からの長さＷｌは、前記保持部材４４４５の前記Ｖ
１５７，５８までの長さＷ２とほぼ等しくなるように選
ばれ、クランプヘッド５３５４は、その底面５３ａ、５
４ａがレチクル７に対して平行となるように取ｆ寸けら
れている。58 is formed. Further, the length Wl of the contact pieces 46 and 47 from the frame 43 is determined by the V of the holding member 4445.
157, 58, and the clamp head 5354 has its bottom surfaces 53a, 5
It is dimensioned so that 4a is parallel to the reticle 7.
第４図は、可動片４８．４９付近を拡大して示す斜視図
である。第１図〜第４図を参照して、可動片４８．４９
は、枠体４３の操作者側において、軸６０によって揺動
変位自在に支持され、この可動片４８．４９は、引張ば
ね６１，６２によって、矢符Ｃ方向にばね付勢されてい
る。このばね力によって可動片４８．４９が変位した状
態では、クランプヘッド５５．５６の当接面５５ ａ
、５６ ＥＬと、前記クランプヘッド５３．５４の前記
底面５３ａ、５４ａとは、相互に平行となってレチクル
７の他方の端部の鍔８ｂを挟持する。FIG. 4 is an enlarged perspective view showing the vicinity of the movable piece 48.49. With reference to Figures 1 to 4, the movable piece 48.49
is swingably supported by a shaft 60 on the operator side of the frame 43, and the movable pieces 48, 49 are biased in the direction of arrow C by tension springs 61, 62. When the movable piece 48.49 is displaced by this spring force, the contact surface 55a of the clamp head 55.56
, 56 EL and the bottom surfaces 53a, 54a of the clamp head 53, 54 are parallel to each other and clamp the flange 8b at the other end of the reticle 7.
前記２つの可動片４８．４９は、軸６０によって揺動自
在に支持されるとともに、連結軸６３によって連結され
ており、連動して変位する。この連結軸６３は、Ｌ字状
に形成されたレバー６４の一方の端部に形成された挿通
孔６５内を挿通している。レバー６４の中央部分は、前
記軸６０によって揺動自在に支持されている。また、こ
のレバー６４の他方の端部には係合片６６が形成されて
おり、この係合片６６は、レバー６４の揺動変位によっ
て、把持部４２に形成された遊通孔６７内を出入りする
。The two movable pieces 48, 49 are swingably supported by a shaft 60, are connected by a connecting shaft 63, and are displaced in conjunction with each other. This connecting shaft 63 is inserted through an insertion hole 65 formed at one end of a lever 64 formed in an L shape. A central portion of the lever 64 is swingably supported by the shaft 60. Further, an engagement piece 66 is formed at the other end of the lever 64, and this engagement piece 66 moves inside the free passage hole 67 formed in the grip part 42 by the swinging displacement of the lever 64. coming and going.
第５図は、把持部４２の遊通孔６７の断面図である。把
持部４２内には、前記遊通孔６７に連通して釦孔７１が
形成されており、この釦孔７１には、前記係合片６６を
ロックする押釦７２が嵌め込まれている。押釦７２は、
操作者の手指によって操作され、一方の開ロア１ａに臨
む押圧操作部７３と、この押圧操作部７３よりも小径の
連結部７４と、帽状のばね受は部７５とから構成されて
いる。ばね受は部７５には圧縮ばね７６の一端が当接し
、この圧縮ばわ７６の他端は釦孔７１の１也方の開ロア
１ｂを塞ぐカバー７７に当接している。FIG. 5 is a cross-sectional view of the through hole 67 of the grip portion 42. As shown in FIG. A button hole 71 is formed in the grip portion 42 and communicates with the through hole 67, and a push button 72 for locking the engagement piece 66 is fitted into the button hole 71. The push button 72 is
It is comprised of a pressing operation part 73 that is operated by the operator's fingers and faces one open lower lower 1a, a connecting part 74 having a smaller diameter than this pressing operation part 73, and a cap-shaped spring receiver part 75. One end of a compression spring 76 is in contact with the spring receiver portion 75, and the other end of this compression spring 76 is in contact with a cover 77 that closes the opening lower portion 1b on one side of the button hole 71.
圧縮ばね７６によって、押釦７２は矢符りで示される押
圧操作方向とは反対方向にばわ付勢されている。The compression spring 76 biases the push button 72 in a direction opposite to the pressing operation direction indicated by the arrow mark.
第６図は第５図の切断面線■−ＶＩから見た断面図であ
り、前記第５図とこの第６図とを参照して、前記レチク
ル７を把持した状態で、押ＫＪ７２が押圧操作されてい
ないときには、第５図（１）および第６図（１〉で示さ
れるように、遊通孔６７から釦孔７１内に進入した係合
片６６は、大径のばね受は部７５に当接し、これによっ
てレバー６４は第２図で示されるようにレチクル７を把
持した状態でロックされる。FIG. 6 is a sectional view taken from the section line ■-VI in FIG. 5. Referring to FIG. 5 and FIG. When the button is not operated, as shown in FIG. 5 (1) and FIG. 75, thereby locking the lever 64 in the state in which it grips the reticle 7, as shown in FIG.
これに対して押ｊ［］７２が矢符り方向に押込まれると
、第５図（２）および第６１′２！（２）で示されるよ
うに、係合片６６は前記ばね受は部７５に当接すること
はなく、したがってレバー６４が遊通孔６７に嵌入する
まで、係合片６６は鎖孔７１内に進入することができる
。On the other hand, when push j[] 72 is pushed in the direction of the arrow mark, Fig. 5 (2) and 61'2! As shown in (2), the engagement piece 66 does not come into contact with the spring receiver part 75, so the engagement piece 66 does not come into contact with the chain hole 71 until the lever 64 fits into the free passage hole 67. can enter.
またこの進入した状態で押釦７２の押圧操作を解除する
と、第６図（３）で示されるように、係合片６６はばね
受は部７５に当接し、こうしてレバー６４がロックされ
る。Further, when the push button 72 is released from the push button 72 in this advanced state, the engagement piece 66 comes into contact with the spring receiver part 75, as shown in FIG. 6(3), and the lever 64 is thus locked.
上述のように構成された把持装置４１は、以下のように
して使用される。操作者は、レバー６４を沢り、ばｂ６
１，６２のばね力に抗して、矢符Ｃ方向とは反対方向に
変位して、第６図（３〉で示されるように、係ぎ片６６
がばね受は部７５に当接した状態とする。この状態で、
前記第８図で示される容器２１内に収納されているレチ
クル７の一方の端部の鍔８ａを保持部材４４．４５のＶ
ｉ背５７，５８に嵌め込む。The gripping device 41 configured as described above is used in the following manner. The operator presses the lever 64 and presses the lever 64.
1 and 62, the locking piece 66 is displaced in the direction opposite to the direction of arrow C, as shown in FIG. 6 (3>).
The spring receiver is in contact with the portion 75. In this state,
The collar 8a at one end of the reticle 7 housed in the container 21 shown in FIG.
i Fit into the spines 57 and 58.
その後、当接片４６，４７をレチクル７の他方の端部の
鍔８ｂの一方側表面に当接し、この状態で押釦７１を押
込んで、レバー６４の係合状態を解除する。これによっ
てレバー６４は、ばね６１゜６２のばね力によって矢符
Ｃ方向に変位し、当接片４６．４７は前記鍔８ｂの他方
醐表面に当接し、こうしてレチクル７が固定・把持され
る。Thereafter, the contact pieces 46 and 47 are brought into contact with one side surface of the collar 8b at the other end of the reticle 7, and in this state, the push button 71 is pushed in to release the engaged state of the lever 64. As a result, the lever 64 is displaced in the direction of arrow C by the spring force of the springs 61 and 62, and the abutting pieces 46 and 47 abut against the other surface of the collar 8b, thus fixing and gripping the reticle 7.
この状態で押釦７１の押圧操作を解除すると、レバー６
４の係合片６６は第６図（１）で示されるようにばね受
は部７５に当接し、レバー６４が矢符Ｃ方向とは反対方
向へ変位することが阻止される。こうしてレチクル７が
確実に把持されると、操作者は前記容器２１かち取り出
し、レチクル７に他の工程の作業を行う。When the push button 71 is released in this state, the lever 6
As shown in FIG. 6(1), the engagement piece 66 of No. 4 comes into contact with the spring receiver portion 75, and the lever 64 is prevented from being displaced in the direction opposite to the direction of arrow C. Once the reticle 7 is securely gripped in this way, the operator takes out the container 21 and performs other process operations on the reticle 7.
このように本発明に従う把持装置４１では、レチクル７
を４点で支持するようにしたので、安定して把持するこ
とができる。また、従来技術の項で述べたように枠体４
３がレチクル７上を覆うことはなく、したがってレチク
ル７に埃などが付着するおそれがなくなるとともに、洗
浄作業などの作業性を向上することができる。さらにま
た、レチクル７にはクランプヘッド５１〜５６が当接し
、このクランプヘッド５１〜５６は前述のようにテフロ
ンなどの樹脂材料から成り、したがってレチクル７を大
きい摩擦力で確実に保持することができ、取り扱い中の
脱落などを防止できる。In this way, in the gripping device 41 according to the present invention, the reticle 7
Since it is supported at four points, it can be held stably. In addition, as described in the prior art section, the frame 4
3 does not cover the top of the reticle 7, therefore, there is no possibility that dust or the like will adhere to the reticle 7, and workability such as cleaning work can be improved. Furthermore, the clamp heads 51 to 56 are in contact with the reticle 7, and as described above, the clamp heads 51 to 56 are made of a resin material such as Teflon, and therefore can reliably hold the reticle 7 with a large frictional force. This prevents it from falling off during handling.
また、レチクル７の固定は従来技術の項で述べたような
締付はリングではなく、押釦操作によって簡単に行うこ
とができ、作業性を格段に向上することができるととも
に、取り扱い作業が簡単であり、特に熟練を要しない。Furthermore, the reticle 7 can be easily tightened using a push button rather than a ring as described in the prior art section, which greatly improves work efficiency and simplifies handling. Yes, no special skill is required.
さらにまた、レチクル７に無理な力が加わることはなく
、したがって従来技術の項で述べたようなレチクル７の
損傷を防止することができる。Furthermore, no excessive force is applied to the reticle 7, and therefore, damage to the reticle 7 as described in the prior art section can be prevented.
発明の効果
以上のように本発明によれば、板状体の一方の端部を保
持部材の溝に嵌め込み、他方の端部を当接片と可動片と
によって挟持し、これら当接片と保持部材とを少なくと
も合計３箇所設けるようにしたので、板状体は少なくと
も３点で安定して把持され、取扱い時の作業性を向上す
ることができろとともに、脱落などの不所望な事態を防
止する二とができる。Effects of the Invention As described above, according to the present invention, one end of the plate-shaped body is fitted into the groove of the holding member, the other end is held between the abutting piece and the movable piece, and the abutting piece and the movable piece are held together. Since the holding members are provided at at least three locations in total, the plate-like object is stably held at at least three points, which improves workability during handling and prevents undesirable situations such as falling off. There are two things you can do to prevent it.
また、操作者は、先ず保持部材の溝に板状体の一方の端
部を嵌め込んだ後、板状体の他方の端部を当接片と可動
片とによって挟み込むだけであり、良好な作業性で板状
体を着脱することができる。In addition, the operator only needs to fit one end of the plate into the groove of the holding member and then sandwich the other end of the plate between the abutting piece and the movable piece. The plate-shaped body can be attached and detached with ease of operation.
さらにまた、板状体に無理な力が加わることはなく、板
状体の損傷を防止することができる。Furthermore, no excessive force is applied to the plate-like body, and damage to the plate-like body can be prevented.
第１図は本発明の一実施例の把持装置４１の斜視図、第
２図は把持装置４１の側面図、第３図は把持装置４１の
平面図、第４図は可動片４８，４つ付近を拡大して示す
斜視図、第５図は遊通孔６７の断面図、第６図は第５図
の切断面線■−■から見た断面図、第７図は従来技術の
把持装置１の斜視図、第８図はレチクル７とその容器２
１とを示す斜視図である。FIG. 1 is a perspective view of a gripping device 41 according to an embodiment of the present invention, FIG. 2 is a side view of the gripping device 41, FIG. 3 is a plan view of the gripping device 41, and FIG. 4 is a view of the four movable pieces 48. FIG. 5 is a sectional view of the through hole 67, FIG. 6 is a sectional view taken along the cutting plane line ■-■ in FIG. 5, and FIG. 7 is a conventional gripping device. 1, and FIG. 8 is a perspective view of reticle 7 and its container 2.
1. FIG.
Claims (1)
む溝が形成された保持部材と、 操作者の手元に配置され、板状体の他方の端部の一方表
面に当接する当接片と、 前記当接片と対を成し、当接片に対して近接・離反可能
に揺動支持され、前記板状体の他方の端部を他方表面側
から挟み、その挟んだ状態で前記当接片に平行となる当
接面を有する可動片と、前記保持部材および当接片が固
定されるとともに、可動片を揺動支持する枠体とを含み
、 前記当接片と保持部材とは、少なくとも合計３箇所設け
たことを特徴とする板状体の把持装置。[Scope of Claims] A holding member disposed at the operator's hand and having a groove into which one end of the plate-like body is fitted; and a holding member disposed at the operator's hand and having a groove formed therein into which one end of the plate-like body fits; and the other end of the plate-like body disposed at the operator's hand. a contact piece that comes into contact with one surface of the plate; and a contact piece that forms a pair with the contact piece and is swingably supported so as to be able to approach and move away from the contact piece, and the other end of the plate-shaped body is placed on the other surface side. a movable piece having a contact surface that is parallel to the contact piece in the sandwiched state; and a frame body to which the holding member and the contact piece are fixed and swingably supports the movable piece. . A gripping device for a plate-shaped object, characterized in that the contact piece and the holding member are provided at at least three locations in total.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1314091A JP2606934B2 (en) | 1989-12-01 | 1989-12-01 | Plate holding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1314091A JP2606934B2 (en) | 1989-12-01 | 1989-12-01 | Plate holding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03178792A true JPH03178792A (en) | 1991-08-02 |
| JP2606934B2 JP2606934B2 (en) | 1997-05-07 |
Family
ID=18049132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1314091A Expired - Fee Related JP2606934B2 (en) | 1989-12-01 | 1989-12-01 | Plate holding device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2606934B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7562923B2 (en) * | 2004-02-09 | 2009-07-21 | Mirae Corporation | Tray transferring apparatus with gripper mechanism |
| US7806449B2 (en) * | 2006-08-31 | 2010-10-05 | Micron Technology, Inc. | Substrate pick |
| DE102020126552A1 (en) | 2020-10-09 | 2022-04-14 | Syntegon Technology Gmbh | Nest lifter and sterile chamber |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105082167A (en) * | 2015-07-30 | 2015-11-25 | 重庆延锋江森汽车部件系统有限公司 | Gripper of car seat framework transfer assisting system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61144647U (en) * | 1985-02-27 | 1986-09-06 | ||
| JPS61209892A (en) * | 1985-03-13 | 1986-09-18 | 株式会社東芝 | Gripper |
-
1989
- 1989-12-01 JP JP1314091A patent/JP2606934B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61144647U (en) * | 1985-02-27 | 1986-09-06 | ||
| JPS61209892A (en) * | 1985-03-13 | 1986-09-18 | 株式会社東芝 | Gripper |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7562923B2 (en) * | 2004-02-09 | 2009-07-21 | Mirae Corporation | Tray transferring apparatus with gripper mechanism |
| US7806449B2 (en) * | 2006-08-31 | 2010-10-05 | Micron Technology, Inc. | Substrate pick |
| US8360491B2 (en) | 2006-08-31 | 2013-01-29 | Micron Technology, Inc. | Substrate pick |
| DE102020126552A1 (en) | 2020-10-09 | 2022-04-14 | Syntegon Technology Gmbh | Nest lifter and sterile chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2606934B2 (en) | 1997-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |