JPH031779B2 - - Google Patents

Info

Publication number
JPH031779B2
JPH031779B2 JP59118088A JP11808884A JPH031779B2 JP H031779 B2 JPH031779 B2 JP H031779B2 JP 59118088 A JP59118088 A JP 59118088A JP 11808884 A JP11808884 A JP 11808884A JP H031779 B2 JPH031779 B2 JP H031779B2
Authority
JP
Japan
Prior art keywords
microwave
lamp
light source
source device
electrodeless
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59118088A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60264042A (ja
Inventor
Peterin Andorei
Eichi Utsudo Chaaruzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fusion Systems Corp
Original Assignee
Fusion Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fusion Systems Corp filed Critical Fusion Systems Corp
Priority to JP11808884A priority Critical patent/JPS60264042A/ja
Publication of JPS60264042A publication Critical patent/JPS60264042A/ja
Publication of JPH031779B2 publication Critical patent/JPH031779B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
JP11808884A 1984-06-11 1984-06-11 マイクロ波無電極光源装置 Granted JPS60264042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11808884A JPS60264042A (ja) 1984-06-11 1984-06-11 マイクロ波無電極光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11808884A JPS60264042A (ja) 1984-06-11 1984-06-11 マイクロ波無電極光源装置

Publications (2)

Publication Number Publication Date
JPS60264042A JPS60264042A (ja) 1985-12-27
JPH031779B2 true JPH031779B2 (pt) 1991-01-11

Family

ID=14727695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11808884A Granted JPS60264042A (ja) 1984-06-11 1984-06-11 マイクロ波無電極光源装置

Country Status (1)

Country Link
JP (1) JPS60264042A (pt)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967476A (pt) * 1972-10-31 1974-06-29
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967476A (pt) * 1972-10-31 1974-06-29
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置

Also Published As

Publication number Publication date
JPS60264042A (ja) 1985-12-27

Similar Documents

Publication Publication Date Title
US4427921A (en) Electrodeless ultraviolet light source
US5757130A (en) Lamp with electrodes for increased longevity
US4480213A (en) Compact mercury-free fluorescent lamp
US5606220A (en) Visible lamp including selenium or sulfur
US4783615A (en) Electrodeless high pressure sodium iodide arc lamp
US4427923A (en) Electrodeless fluorescent light source
JPH027353A (ja) 高出力放射器
NL7906090A (nl) Inrichting met elektrodeloze lamp.
US4647821A (en) Compact mercury-free fluorescent lamp
US5173638A (en) High-power radiator
US4427922A (en) Electrodeless light source
US4636692A (en) Mercury-free discharge lamp
US5481159A (en) Metal vapor discharge lamp
JPS5837663B2 (ja) テイアツガスホウデントウ
JP2934511B2 (ja) コロナ放電光源セル及びコロナ放電光源装置
JPH0794150A (ja) 希ガス放電灯およびこれを用いた表示装置
JP2875860B2 (ja) 放電管装置
JPS61185857A (ja) 無電極放電灯
US4745335A (en) Magnesium vapor discharge lamp
US3897594A (en) High pressure mercury discharge lamp
JPH031779B2 (pt)
JPH0750151A (ja) エキシマ放電ランプ
EP0444590B1 (en) Metal vapor discharge lamp
JPH0231458B2 (pt)
JP3267153B2 (ja) 金属蒸気放電ランプ