JPH031779B2 - - Google Patents

Info

Publication number
JPH031779B2
JPH031779B2 JP59118088A JP11808884A JPH031779B2 JP H031779 B2 JPH031779 B2 JP H031779B2 JP 59118088 A JP59118088 A JP 59118088A JP 11808884 A JP11808884 A JP 11808884A JP H031779 B2 JPH031779 B2 JP H031779B2
Authority
JP
Japan
Prior art keywords
microwave
lamp
light source
source device
electrodeless
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59118088A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60264042A (ja
Inventor
Peterin Andorei
Eichi Utsudo Chaaruzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fusion Systems Corp
Original Assignee
Fusion Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fusion Systems Corp filed Critical Fusion Systems Corp
Priority to JP11808884A priority Critical patent/JPS60264042A/ja
Publication of JPS60264042A publication Critical patent/JPS60264042A/ja
Publication of JPH031779B2 publication Critical patent/JPH031779B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
JP11808884A 1984-06-11 1984-06-11 マイクロ波無電極光源装置 Granted JPS60264042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11808884A JPS60264042A (ja) 1984-06-11 1984-06-11 マイクロ波無電極光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11808884A JPS60264042A (ja) 1984-06-11 1984-06-11 マイクロ波無電極光源装置

Publications (2)

Publication Number Publication Date
JPS60264042A JPS60264042A (ja) 1985-12-27
JPH031779B2 true JPH031779B2 (fr) 1991-01-11

Family

ID=14727695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11808884A Granted JPS60264042A (ja) 1984-06-11 1984-06-11 マイクロ波無電極光源装置

Country Status (1)

Country Link
JP (1) JPS60264042A (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967476A (fr) * 1972-10-31 1974-06-29
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967476A (fr) * 1972-10-31 1974-06-29
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置

Also Published As

Publication number Publication date
JPS60264042A (ja) 1985-12-27

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