JPH031779B2 - - Google Patents
Info
- Publication number
- JPH031779B2 JPH031779B2 JP59118088A JP11808884A JPH031779B2 JP H031779 B2 JPH031779 B2 JP H031779B2 JP 59118088 A JP59118088 A JP 59118088A JP 11808884 A JP11808884 A JP 11808884A JP H031779 B2 JPH031779 B2 JP H031779B2
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- lamp
- light source
- source device
- electrodeless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003595 spectral effect Effects 0.000 claims description 15
- 229910052770 Uranium Inorganic materials 0.000 claims description 12
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 10
- 229910052753 mercury Inorganic materials 0.000 claims description 10
- -1 uranium halide Chemical class 0.000 claims description 10
- 238000001228 spectrum Methods 0.000 claims description 3
- HPICRATUQFHULE-UHFFFAOYSA-J uranium(4+);tetrachloride Chemical group Cl[U](Cl)(Cl)Cl HPICRATUQFHULE-UHFFFAOYSA-J 0.000 claims description 3
- 230000005855 radiation Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 229910052756 noble gas Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11808884A JPS60264042A (ja) | 1984-06-11 | 1984-06-11 | マイクロ波無電極光源装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11808884A JPS60264042A (ja) | 1984-06-11 | 1984-06-11 | マイクロ波無電極光源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60264042A JPS60264042A (ja) | 1985-12-27 |
| JPH031779B2 true JPH031779B2 (fr) | 1991-01-11 |
Family
ID=14727695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11808884A Granted JPS60264042A (ja) | 1984-06-11 | 1984-06-11 | マイクロ波無電極光源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60264042A (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4967476A (fr) * | 1972-10-31 | 1974-06-29 | ||
| JPS58196023A (ja) * | 1982-03-29 | 1983-11-15 | フユ−ジヨン・システムズ・コ−ポレ−シヨン | 深紫外線フオトリトグラフイ−を達成する方法及び装置 |
-
1984
- 1984-06-11 JP JP11808884A patent/JPS60264042A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4967476A (fr) * | 1972-10-31 | 1974-06-29 | ||
| JPS58196023A (ja) * | 1982-03-29 | 1983-11-15 | フユ−ジヨン・システムズ・コ−ポレ−シヨン | 深紫外線フオトリトグラフイ−を達成する方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60264042A (ja) | 1985-12-27 |
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