JPH03172683A - Slide member made of ceramic - Google Patents
Slide member made of ceramicInfo
- Publication number
- JPH03172683A JPH03172683A JP31182889A JP31182889A JPH03172683A JP H03172683 A JPH03172683 A JP H03172683A JP 31182889 A JP31182889 A JP 31182889A JP 31182889 A JP31182889 A JP 31182889A JP H03172683 A JPH03172683 A JP H03172683A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- carbon film
- diamondform
- diamond
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 17
- 229910052575 non-oxide ceramic Inorganic materials 0.000 claims abstract description 6
- 239000011225 non-oxide ceramic Substances 0.000 claims abstract description 6
- 239000002344 surface layer Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 15
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 230000013011 mating Effects 0.000 abstract description 5
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Sliding Valves (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はセラミックをコーティング母材とした摺動部材
に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a sliding member using ceramic as a coating base material.
（従来の技術）
セラミックは高硬度で腐食せず、更に耐薬品性、耐燃性
及び耐摩耗性に優れるため、各種部品の材料として使用
されており、最近ではバルブやバルブシート等のような
摺動部材としても利用されつつある。(Prior technology) Ceramics are used as materials for various parts because they are hard, do not corrode, and have excellent chemical resistance, flame resistance, and wear resistance. It is also being used as a moving member.
（発明が解決しようとする課題）
セラミックは上述したような利点がある反面摩擦係数が
高く１．摺動部材として用いた場合には、摺動部材同士
が凝着・剥離を生じ、使用中に摩擦係数が変動して摺動
がスムーズになされず、不規則な抵抗を伴ったスティッ
クスリップが発生する。(Problems to be Solved by the Invention) Ceramics have the above-mentioned advantages, but on the other hand, they have a high coefficient of friction.1. When used as a sliding member, the sliding members may adhere to each other and peel off, and the coefficient of friction will fluctuate during use, preventing smooth sliding, resulting in stick-slip with irregular resistance. do.
そこで本出願人は先に特願平１−１１７２９８号として
、表面にダイヤモンド状炭素膜（ｉ−Ｃ）を形成したセ
ラミック製バルブを提案している。Therefore, the present applicant has previously proposed a ceramic bulb having a diamond-like carbon film (i-C) formed on its surface in Japanese Patent Application No. 1-117298.
このようにダイヤモンド状炭素膜を表面に形成すること
で、摩擦係数を大巾に低減することができたが、ダイヤ
モンド状炭素膜は剥離による寿命のバラツキが大きいと
いう新たな問題が生じた。By forming a diamond-like carbon film on the surface in this way, it was possible to significantly reduce the coefficient of friction, but a new problem arose: the life of the diamond-like carbon film varied widely due to peeling.
（課題を解決するための手段）
上記課題を解決すべく本発明は、ダイヤモンド状炭素膜
を形成するコーティング母材を、ＳｉＣあるいはＳｉ、
Ｎ４などのＳｉを主成分とする非酸化物セラミックとし
た。(Means for Solving the Problems) In order to solve the above problems, the present invention provides a coating base material for forming a diamond-like carbon film using SiC or Si.
A non-oxide ceramic mainly composed of Si such as N4 was used.
（作用）
摺動部材の表面にダイヤモンド状炭素膜を蒸着等によっ
て形成することで、例えば相手材がセラミックの場合に
は摩擦係数を０．０５〜０．１０ （セラミック同士の
場合は０，２〜６，６）程度まで低くすることができ、
ダイヤモンド状炭素膜をコーティングする母材をＳＩを
主成分とする非酸化物セラミックとすることで上記ダイ
ヤモンド炭素膜が剥れにくくなる。(Function) By forming a diamond-like carbon film on the surface of the sliding member by vapor deposition, for example, when the mating material is ceramic, the coefficient of friction is 0.05 to 0.10 (0.2 when the mating material is ceramic). ~6,6) can be lowered,
By using a non-oxide ceramic whose main component is SI as the base material for coating the diamond-like carbon film, the diamond-like carbon film becomes difficult to peel off.
（実施例） 以下に本発明の実施例を添付図面に基いて説明する。(Example) Embodiments of the present invention will be described below with reference to the accompanying drawings.
第１図は本発明に係るセラミック製摺動部材の摩擦係数
を測定する装置の概略図、第２図は同装置の要部拡大図
である。FIG. 1 is a schematic view of an apparatus for measuring the coefficient of friction of a ceramic sliding member according to the present invention, and FIG. 2 is an enlarged view of the main part of the apparatus.
測定装置はケース１内に一対のテストピース２．３をセ
ットしている。ここでケース１内には実際の使用状況を
再現するため水等を満たしておく、またテストピース２
．３はいずれも円環状をなし、一方のテストピース２の
端面には突条２ａを形成し、この突条２ａを他方のテス
トピース３の端面に当接するようにし、更に突条２ａ又
は他方のテストピース３端面にはダイヤモンド状炭素膜
４を形成している。The measuring device has a pair of test pieces 2.3 set in a case 1. Here, case 1 is filled with water etc. in order to reproduce the actual usage situation, and test piece 2 is filled with water etc.
．． 3 each have an annular shape, and a protrusion 2a is formed on the end face of one of the test pieces 2, and this protrusion 2a is brought into contact with the end face of the other test piece 3. A diamond-like carbon film 4 is formed on the end face of the test piece 3.
ここでダイヤモンド状炭素膜４はプラズマＣＶＤやスパ
ッタリングによって形成するものとし、その厚みは０，
６〜１．０μｍとする。Here, the diamond-like carbon film 4 is formed by plasma CVD or sputtering, and its thickness is 0,
It is set to 6 to 1.0 μm.
また、テストピース２，３の当接面と反対側の端面には
切欠５．６を穿設し、テストピース３の切欠き６には図
示しないモータによって回転せしめられる軸７の一端を
係合し、テストピース２の切欠き５にはトルクパー８の
一端を係合し、この一端を加圧力ロードセル９によフて
押圧し、テストピース２．３の接触圧を設定するように
し、更にトルクパー８の基端部を摩擦力検出器１０に連
結し、この検出器１０で読み取った値を記録計１１にて
プリントアウトするようにしている。In addition, notches 5 and 6 are formed in the end surfaces of the test pieces 2 and 3 opposite to the contact surfaces, and one end of a shaft 7 rotated by a motor (not shown) is engaged with the notch 6 of the test piece 3. One end of the torque par 8 is engaged with the notch 5 of the test piece 2, and this one end is pressed by the pressurizing force load cell 9 to set the contact pressure of the test piece 2.3. The base end of 8 is connected to a friction force detector 10, and the value read by this detector 10 is printed out by a recorder 11.
そして、試験条件を以下の如くして、ダイヤモンド状炭
素膜のコーティング母材と摺動相手材を異ならせた試験
結果を［表］に示す。Table 1 shows the test results for different diamond-like carbon film coating base materials and sliding mating materials under the following test conditions.
コーティング母材及び
相手材の表面粗さ（Ｒａ） ： ０．０５〜０．０８ｕ
ｍテストピースの周速度： １ ｃｍ／ｓｅｃテスト
ピースの接触圧：２０Ｋｇ／ｃ論； 囲 気
：水道水中（１０℃）また実験は各材料毎に３個づつの
テストピースを用い、１０時間毎に表面観察を行った。Surface roughness (Ra) of coating base material and mating material: 0.05-0.08u
Circumferential speed of test piece: 1 cm/sec Contact pressure of test piece: 20Kg/c theory;
: In tap water (10°C) In the experiment, three test pieces were used for each material, and the surface was observed every 10 hours.
・（以下、余白）
〔表〕
Ｘ剥離
Ｏｉｌ離無し
（発明の効果）
前記した［表］からも明らかなように本発明によれば、
ダイヤモンド状炭素膜を形成す・る母材を炭化珪素（Ｓ
ｉＣ）や窒化珪素（ＳｉｓＮ４）などの非酸化物系セラ
ミックとすることで、剥離強度を大巾に高めることがで
きる。このためダイヤモンド状炭素膜の厚みを０．６μ
ｍ以上に厚くすることができ、耐久性が向上する。・(Hereinafter, blank space) [Table] No separation of X-peeling oil (effects of the invention) As is clear from the above-mentioned [Table], according to the present invention,
The base material for forming the diamond-like carbon film is silicon carbide (S).
By using a non-oxide ceramic such as iC) or silicon nitride (SisN4), the peel strength can be greatly increased. For this reason, the thickness of the diamond-like carbon film was set to 0.6μ.
It can be made thicker than m, and durability is improved.
第１図は摺動を構成するセラミック製部材の摩擦係数測
定装置の概略図、第２図は同装置の要部拡大図である。
尚、図面中２．３はテストピース、２ａは突条、４は非
晶質炭化珪素膜、７は軸、８はトルクパー １０は摩擦
力検出器である。
特 許 出 願人 東陶機器株式会社
手
糸充
補
正
書（自発）
平成
２年
１月１ｆ日
１、事件の表示
特願平１−３１１８２８号
２、発明の名称
セラミック製摺動部材
３、補正をする者
事件との関係 特許出願人
（ＡＯ８）東陶機器株式会社
４、代
理
人
東京都港区麻布台２丁目４番５号
〒１０６メソニツク３９森ビル２階
６、補正の対象
明細書の発明の詳細な説明の欄
７、補正の内容FIG. 1 is a schematic diagram of a device for measuring the coefficient of friction of a ceramic member that constitutes a sliding member, and FIG. 2 is an enlarged view of the main part of the device. In the drawings, 2.3 is a test piece, 2a is a protrusion, 4 is an amorphous silicon carbide film, 7 is a shaft, 8 is a torque sensor, and 10 is a friction force detector. Patent Applicant Totokiki Co., Ltd. Teito Mitsuru Amendment (voluntary) January 1f, 1990 1, Case indication Patent Application No. 1-311828 2, Title of invention Ceramic sliding member 3, Amendment Patent applicant (AO8) Toto Kiki Co., Ltd. 4, Agent 2-4-5 Azabudai, Minato-ku, Tokyo 2nd Floor 6, 39 Mori Building, 106 Masonic Invention of the specification subject to amendment Detailed explanation column 7, Contents of amendment
Claims (1)
、この摺動部材は少くともその表層部をＳｉを主成分と
する非酸化物セラミックとし、この非酸化物セラミック
の表面にダイヤモンド状炭素膜を形成したことを特徴と
するセラミック製摺動部材。In a ceramic sliding member used as a valve, etc., at least the surface layer of the sliding member is made of a non-oxide ceramic whose main component is Si, and a diamond-like carbon film is formed on the surface of the non-oxide ceramic. A ceramic sliding member characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31182889A JPH03172683A (en) | 1989-11-30 | 1989-11-30 | Slide member made of ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31182889A JPH03172683A (en) | 1989-11-30 | 1989-11-30 | Slide member made of ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03172683A true JPH03172683A (en) | 1991-07-26 |
Family
ID=18021891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31182889A Pending JPH03172683A (en) | 1989-11-30 | 1989-11-30 | Slide member made of ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03172683A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579069A (en) * | 1991-09-24 | 1993-03-30 | Tokyo Yogyo Co Ltd | Water faucet member and manufacture thereof |
| EP0718256A3 (en) * | 1994-12-23 | 1997-04-09 | Maruwa Ceramic Co Ltd | Ceramic sliding member and process of fabricating the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351970B2 (en) * | 1985-06-12 | 1988-10-17 | Nippon Steel Corp | |
| JPH01201820A (en) * | 1988-02-05 | 1989-08-14 | Idemitsu Petrochem Co Ltd | Magnetic recording medium |
-
1989
- 1989-11-30 JP JP31182889A patent/JPH03172683A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351970B2 (en) * | 1985-06-12 | 1988-10-17 | Nippon Steel Corp | |
| JPH01201820A (en) * | 1988-02-05 | 1989-08-14 | Idemitsu Petrochem Co Ltd | Magnetic recording medium |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579069A (en) * | 1991-09-24 | 1993-03-30 | Tokyo Yogyo Co Ltd | Water faucet member and manufacture thereof |
| JPH07907B2 (en) * | 1991-09-24 | 1995-01-11 | 東京窯業株式会社 | Faucet valve member and manufacturing method thereof |
| EP0718256A3 (en) * | 1994-12-23 | 1997-04-09 | Maruwa Ceramic Co Ltd | Ceramic sliding member and process of fabricating the same |
| US5763072A (en) * | 1994-12-23 | 1998-06-09 | Maruwa Ceramic Co., Ltd. | Ceramic sliding member having pyrolytic carbon film and process of fabricating the same |
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