JPH06341429A - Dynamic pressure gas bearing - Google Patents

Dynamic pressure gas bearing

Info

Publication number
JPH06341429A
JPH06341429A JP6704194A JP6704194A JPH06341429A JP H06341429 A JPH06341429 A JP H06341429A JP 6704194 A JP6704194 A JP 6704194A JP 6704194 A JP6704194 A JP 6704194A JP H06341429 A JPH06341429 A JP H06341429A
Authority
JP
Japan
Prior art keywords
rotary shaft
gas bearing
dynamic pressure
pressure gas
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6704194A
Other languages
Japanese (ja)
Other versions
JP3197145B2 (en
Inventor
Akitami Kaneko
昭民 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP06704194A priority Critical patent/JP3197145B2/en
Publication of JPH06341429A publication Critical patent/JPH06341429A/en
Application granted granted Critical
Publication of JP3197145B2 publication Critical patent/JP3197145B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To reduce frictional resistance between a rotary shaft and pads for a long term, in a dynamic pressure gas bearing. CONSTITUTION:In a gas bearing journaling a rotary shaft 4 by fitting pads of over three pieces to a bearing housing 1 in the circumferential direction through pivots 2, carbon sliding material 3 is fitted onto the surface on the rotationary shaft side of the pad 3, high strength super hard ceramic sliding material 4A such as tungusten carbide is fitted onto the surface on the pad side of the rotary shaft 4, and hence the frictional resistance is reduced and the sliding property between both is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ターボ機械等に適用さ
れる動圧気体軸受に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dynamic pressure gas bearing applied to a turbomachine or the like.

【0002】[0002]

【従来の技術】図2に、従来の動圧気体軸受を示す。回
転軸04が起動、停止を繰り返す際の回転軸04とパッ
ド03との接触摩耗対策として、それらの表面にTiN ,
TiC ,Al2O3 等の表面処理04B,03Bが施工されて
いる。
2. Description of the Related Art FIG. 2 shows a conventional dynamic pressure gas bearing. As a countermeasure against contact wear between the rotary shaft 04 and the pad 03 when the rotary shaft 04 repeatedly starts and stops, TiN,
Surface treatments 04B and 03B such as TiC and Al 2 O 3 are applied.

【0003】[0003]

【発明が解決しようとする課題】前記従来の動圧気体軸
受では、気体膜が十分形成されるまで回転軸04はパッ
ド03と接触しながら回転する。そのため、起動及び停
止時に回転軸04及びパッド03の表面が摩耗するた
め、TiN ,TiC ,Al2O3 等の表面処理04B,03Bが
それらの双方に施工されていた。
In the conventional dynamic pressure gas bearing, the rotary shaft 04 rotates while contacting the pad 03 until the gas film is sufficiently formed. Therefore, since the surfaces of the rotary shaft 04 and the pad 03 are worn at the time of starting and stopping, surface treatments 04B and 03B such as TiN, TiC, and Al 2 O 3 have been applied to both of them.

【0004】しかしながら、これらの表面処理は摩耗対
策には有効であるが、起動時の摩擦抵抗が大きく、大き
な駆動トルクが必要であった。特に、重くて大きい横置
きのロータを動圧気体軸受で支承する場合、駆動トルク
が過大になるという欠点があった。
However, although these surface treatments are effective as a measure against wear, they have a large frictional resistance at the time of starting and require a large driving torque. Particularly, when a heavy and large horizontal rotor is supported by a dynamic pressure gas bearing, there is a drawback that the driving torque becomes excessive.

【0005】起動時の摩擦抵抗を減らすために、パッド
03の表面処理03Bの表面に固体潤滑剤を被覆又は塗
付することが特開平3−121306号公報において提
案されているが、起動及び停止を繰り返す間に劣化した
り、高速回転中に短時間の接触で機能を失ってしまうと
いう問題点があった。
Japanese Patent Laid-Open No. 3-121306 proposes coating or applying a solid lubricant on the surface of the surface treatment 03B of the pad 03 in order to reduce frictional resistance at the time of starting. There was a problem that it deteriorates during repeated operation and loses its function due to short-time contact during high-speed rotation.

【0006】本発明は、以上の問題点を解決することが
できる動圧気体軸受を提供しようとするものである。
The present invention is intended to provide a dynamic pressure gas bearing which can solve the above problems.

【0007】[0007]

【課題を解決するための手段】[Means for Solving the Problems]

(1)本発明は、軸受ハウジングにピボットを介して周
方向に3個以上のパッドを取り付けて回転軸を支承する
動圧気体軸受において、パッドの回転軸側表面にカーボ
ン摺動材を取り付け、かつ、回転軸のパッド側表面にセ
ラミック摺動材を取り付けたことを特徴とする。
(1) According to the present invention, in a dynamic pressure gas bearing in which three or more pads are circumferentially mounted on a bearing housing via a pivot to support a rotary shaft, a carbon sliding member is mounted on the rotary shaft side surface of the pad. Moreover, a ceramic sliding member is attached to the pad side surface of the rotary shaft.

【0008】(2)また、本発明は、前記(1)の動圧
気体軸受において、セラミック摺動材がタングステンカ
ーバイト(WC)、クロムカーバイト(Cr3 2 )、
シリコンカーバイト(SiC)、酸化クロム(Cr2
3 )等の高強度・超硬質セラミックであることを特徴と
する。
(2) Further, in the present invention, in the dynamic pressure gas bearing of the above (1), the ceramic sliding material is tungsten carbide (WC), chromium carbide (Cr 3 C 2 ),
Silicon Carbide (SiC), Chromium Oxide (Cr 2 O)
It is characterized by high strength and super hard ceramics such as 3 ).

【0009】[0009]

【作用】本発明では、回転軸のパッド側表面のセラミッ
ク摺動材とパッドの回転軸側表面のカーボン摺動材とを
組み合せ、また前記セラミック摺動材をタングステンカ
ーバイト、クロムカーバイト、シリコンカーバイト、酸
化クロム等の高強度・超硬質セラミックとすることによ
り、硬質のセラミック摺動材と、これとの摺動特性に優
れているカーボン摺動材とが表面接触することゝなり、
摩擦係数が大幅に軽減される。したがって、起動時の摩
擦抵抗が小さくなると共に高速回転時に回転軸とパッド
が接触した際も摺動が可能となる。
According to the present invention, the ceramic sliding material on the pad side surface of the rotary shaft is combined with the carbon sliding material on the rotary shaft side surface of the pad, and the ceramic sliding material is made of tungsten carbide, chrome carbide or silicon. By using high-strength, ultra-hard ceramic such as carbide and chromium oxide, the hard ceramic sliding material and the carbon sliding material that has excellent sliding characteristics with it will come into surface contact.
The coefficient of friction is greatly reduced. Therefore, the frictional resistance at the time of start-up becomes small, and even when the rotation shaft and the pad come into contact with each other at the time of high-speed rotation, sliding is possible.

【0010】[0010]

【実施例】本発明の一実施例に係る動圧気体軸受を、図
1によって説明する。ターボ機械のロータ(図示せず)
の両端部にある回転軸4を取り囲むように軸受ハウジン
グ1が設けられ、周方向3ヶ所にピボット2が装着され
ている。各ピボット2には、パッド3が傾斜自由に保持
されていて、3個のパッド3が軸受ハウジング1内の周
方向に回転軸4を取り囲むように配置されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A dynamic pressure gas bearing according to an embodiment of the present invention will be described with reference to FIG. Turbomachine rotor (not shown)
The bearing housing 1 is provided so as to surround the rotary shaft 4 at both ends of the, and the pivots 2 are mounted at three locations in the circumferential direction. A pad 3 is held in each pivot 2 so as to be tilted freely, and three pads 3 are arranged so as to surround a rotary shaft 4 in the bearing housing 1 in the circumferential direction.

【0011】パッド3の回転軸4側表面にはカーボン摺
動材3Aを接着剤で取りつけ、回転軸4のパッド側表面
には、タングステンカーバイト、クロムカーバイト、シ
リコンカーバイト、酸化クロム等の高強度・超硬質セラ
ミック摺動材4Aを全周にばね板4Bをはさんでかん合
する。また、セラミック摺動材4Aは、回転軸4に溶射
で直接に形成してもよい。
A carbon sliding material 3A is attached to the surface of the pad 3 on the rotary shaft 4 side with an adhesive, and tungsten, chromium carbide, silicon carbide, chromium oxide or the like is attached to the pad side surface of the rotary shaft 4. The high-strength, super-hard ceramic sliding material 4A is fitted around the entire circumference by the spring plate 4B. Further, the ceramic sliding member 4A may be directly formed on the rotary shaft 4 by thermal spraying.

【0012】なお、前記カーボン摺動材3A及びセラミ
ック摺動材4Aは、パッド3及び回転軸4に物理蒸着法
(PVD)や化学蒸着法(CVD)等で直接に表面処理
して形成してもよい。
The carbon sliding material 3A and the ceramic sliding material 4A are formed by directly surface-treating the pad 3 and the rotary shaft 4 by physical vapor deposition (PVD) or chemical vapor deposition (CVD). Good.

【0013】本実施例は以上のように構成されているの
で、回転軸4のパッド側表面の硬度の高いセラミック摺
動材4Aとパッド3の回転軸側表面のセラミック摺動材
4Aとの摺動特性に優れているカーボン摺動材3Aが表
面接触を行い摩擦係数が大幅に軽減される。
Since this embodiment is configured as described above, the sliding between the ceramic sliding member 4A having a high hardness on the pad side surface of the rotary shaft 4 and the ceramic sliding member 4A on the rotary shaft side surface of the pad 3 is performed. The carbon sliding material 3A, which has excellent dynamic characteristics, comes into contact with the surface, and the coefficient of friction is greatly reduced.

【0014】発明者らが本実施例と同様な試験条件の下
で比較した摩擦係数の代表例を、図3に示す。図3にお
いては、本実施例に用いられるタングステンカーバイ
ト、クロムカーバイト、酸化クロムの摺動材とカーボン
摺動材を用いた場合、従来のTiN摺動材を組合せて用
いた場合に比して摩擦係数が大幅に軽減されたことを示
している。図3において、摺動速度比とは横軸値1が実
験での摺動速度約3m/sに相当するものであり、一方
縦軸の摩擦係数比とは従来(TiN/TiN:*印)の
摩擦係数を図示した値とした際の本実施例に用いられる
タングステンカーバイト、クロムカーバイト、酸化クロ
ムの摺動材とカーボン摺動材を用いた場合の摩擦係数で
ある。なお、シリコンカーバイトについては、これまで
の経験からタングステンカーバイトと同様な特性と言え
る。
FIG. 3 shows a representative example of the coefficient of friction compared by the inventors under the same test conditions as in this embodiment. In FIG. 3, the case where the tungsten carbide, chrome carbide, and chromium oxide sliding materials and the carbon sliding material used in this example are used is compared with the case where the conventional TiN sliding material is used in combination. It shows that the coefficient of friction was greatly reduced. In FIG. 3, the sliding speed ratio means that the value 1 on the horizontal axis corresponds to the sliding speed of about 3 m / s in the experiment, while the friction coefficient ratio on the vertical axis means the conventional value (TiN / TiN: *). Is a friction coefficient when using the sliding material of tungsten carbide, chromium carbide, and chromium oxide and the carbon sliding material used in the present embodiment when the friction coefficient of the above is set to the illustrated value. From the experience so far, it can be said that the characteristics of silicon carbide are similar to those of tungsten carbide.

【0015】したがって、起動時の摩擦抵抗を小さくす
ることができると共に、高速回転時に回転軸4とパッド
3が接触した際にも円滑な摺動を行うことができ、か
つ、この状態を長期間にわたって保持することができ
る。
Therefore, the frictional resistance at the time of start-up can be reduced, and smooth sliding can be performed even when the rotary shaft 4 and the pad 3 come into contact with each other during high-speed rotation, and this state is maintained for a long period of time. Can be held over.

【0016】[0016]

【発明の効果】本発明は、軸受ハウジングにピボットを
介して周方向に3個以上のパッドを取り付けて回転軸を
支承する動圧気体軸受の回転軸のパッド側表面にタング
ステンカーバイトその他のセラミック摺動材を取り付
け、パッド表面の回転軸側表面にカーボン摺動材を取り
付けたことにより、これらの組み合せによる摺動特性が
優れていることから、摩擦係数を従来よりも大幅に軽減
することができる。そのため、起動時の摩擦抵抗が小さ
くなり、従来のように起動トルクの大きな駆動機を使用
したり、定常運転時に必要な駆動力よりもはるかに大き
な容量の駆動機を使用する必要がない。さらに、摺動特
性が優れているため、起動及び停止の繰り返しによる劣
化がなく、また、万一高速回転中に接触しても軸受の機
能を失うことがない。
According to the present invention, a tungsten carbide or other ceramic is provided on the pad side surface of the rotary shaft of the dynamic pressure gas bearing in which three or more pads are mounted in the bearing housing in the circumferential direction via the pivot to support the rotary shaft. Since the sliding material is attached and the carbon sliding material is attached to the surface of the pad on the rotating shaft side, the sliding characteristics are excellent due to the combination of these, so the friction coefficient can be greatly reduced compared to the conventional one. it can. Therefore, the frictional resistance at the time of start-up becomes small, and it is not necessary to use a drive machine having a large start-up torque as in the past or a drive machine having a capacity much larger than the drive force required at the time of steady operation. Further, since the sliding property is excellent, there is no deterioration due to repeated start and stop, and the function of the bearing is not lost even if it comes into contact during high speed rotation.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係る動圧気体軸受の断面図
である。
FIG. 1 is a cross-sectional view of a dynamic pressure gas bearing according to an embodiment of the present invention.

【図2】従来の動圧気体軸受の断面図である。FIG. 2 is a cross-sectional view of a conventional dynamic pressure gas bearing.

【図3】本発明の前記実施例に用いられるセラミック摺
動材とカーボン摺動材を用いた場合と従来のTiN摺動
材を組合せて用いた場合の摩擦係数の比較代表例を示す
グラフである。
FIG. 3 is a graph showing a representative example of comparison of friction coefficients when using a ceramic sliding material and a carbon sliding material used in the above-mentioned embodiment of the present invention and when using a conventional TiN sliding material in combination. is there.

【符号の説明】[Explanation of symbols]

1 軸受ハウジング 2 ピボット 3 パッド 3A カーボン摺動材 4 回転軸 4A セラミック摺動材 1 Bearing Housing 2 Pivot 3 Pad 3A Carbon Sliding Material 4 Rotating Shaft 4A Ceramic Sliding Material

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 軸受ハウジングにピボットを介して周方
向に3個以上のパッドを取り付けて回転軸を支承する動
圧気体軸受において、パッドの回転軸側表面にカーボン
摺動材を取り付け、かつ、回転軸のパッド側表面にセラ
ミック摺動材を取り付けたことを特徴とする動圧気体軸
受。
1. A dynamic pressure gas bearing in which three or more pads are mounted in a bearing housing in the circumferential direction via pivots to support a rotary shaft, and a carbon sliding member is mounted on the rotary shaft side surface of the pad, and A dynamic pressure gas bearing characterized in that a ceramic sliding material is attached to the pad side surface of the rotating shaft.
【請求項2】 セラミック摺動材がタングステンカーバ
イト、クロムカーバイト、シリコンカーバイト、酸化ク
ロム等の高強度・超硬質セラミックであることを特徴と
する請求項1に記載の動圧気体軸受。
2. The dynamic pressure gas bearing according to claim 1, wherein the ceramic sliding material is a high-strength / super-hard ceramic such as tungsten carbide, chromium carbide, silicon carbide, or chromium oxide.
JP06704194A 1993-04-08 1994-04-05 Dynamic gas bearing Expired - Fee Related JP3197145B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP06704194A JP3197145B2 (en) 1993-04-08 1994-04-05 Dynamic gas bearing

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8193793 1993-04-08
JP5-81937 1993-04-08
JP06704194A JP3197145B2 (en) 1993-04-08 1994-04-05 Dynamic gas bearing

Publications (2)

Publication Number Publication Date
JPH06341429A true JPH06341429A (en) 1994-12-13
JP3197145B2 JP3197145B2 (en) 2001-08-13

Family

ID=26408246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06704194A Expired - Fee Related JP3197145B2 (en) 1993-04-08 1994-04-05 Dynamic gas bearing

Country Status (1)

Country Link
JP (1) JP3197145B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003194046A (en) * 2001-12-28 2003-07-09 Ishikawajima Harima Heavy Ind Co Ltd Bearing device and vertical shaft pump
KR100428301B1 (en) * 2002-05-15 2004-04-28 현대자동차주식회사 Press mold
US20120301060A1 (en) * 2010-01-22 2012-11-29 Shoji Uchimura Static-pressure bearing apparatus and stage comprising static-pressure bearing apparatus
JP2017137960A (en) * 2016-02-04 2017-08-10 三菱重工業株式会社 Tilting pad gas bearing

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003194046A (en) * 2001-12-28 2003-07-09 Ishikawajima Harima Heavy Ind Co Ltd Bearing device and vertical shaft pump
KR100428301B1 (en) * 2002-05-15 2004-04-28 현대자동차주식회사 Press mold
US20120301060A1 (en) * 2010-01-22 2012-11-29 Shoji Uchimura Static-pressure bearing apparatus and stage comprising static-pressure bearing apparatus
US8608382B2 (en) * 2010-01-22 2013-12-17 Sintokogio Ltd. Static-pressure bearing apparatus and stage comprising static-pressure bearing apparatus
JP2017137960A (en) * 2016-02-04 2017-08-10 三菱重工業株式会社 Tilting pad gas bearing

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