JPH03165992A - Beam emitting apparatus for laser beam machining - Google Patents

Beam emitting apparatus for laser beam machining

Info

Publication number
JPH03165992A
JPH03165992A JP1304306A JP30430689A JPH03165992A JP H03165992 A JPH03165992 A JP H03165992A JP 1304306 A JP1304306 A JP 1304306A JP 30430689 A JP30430689 A JP 30430689A JP H03165992 A JPH03165992 A JP H03165992A
Authority
JP
Japan
Prior art keywords
laser beam
laser
specific
transparent body
shaped transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1304306A
Other languages
Japanese (ja)
Inventor
Makoto Tani
誠 谷
Takahiro Odajima
孝広 小田嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON DENKI LASER KIKI ENG KK
NEC Corp
Original Assignee
NIPPON DENKI LASER KIKI ENG KK
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON DENKI LASER KIKI ENG KK, NEC Corp filed Critical NIPPON DENKI LASER KIKI ENG KK
Priority to JP1304306A priority Critical patent/JPH03165992A/en
Publication of JPH03165992A publication Critical patent/JPH03165992A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To condense one laser beam to two points at interval of the specific distance at the same time and to finely control the ratio of laser beam powers at the two points by arranging a collimator lens, wedge shaped transparent body, filter and condenser lens to a beam emitting apparatus for laser beam machining. CONSTITUTION:The laser beam from a laser beam generator is transmitted to a beam emitting unit body 1 for laser beam machining with optical fiber 2. The laser beam transmitted from the optical fiber 2 is divided into the specific two directions with the wedge shaped transparent body 4 whose a beam incident face is perpendicular to the laser beam and the emitting face has the specific inclined angle, after converted to the parallel laser beam with the collimator lens 3. By varying the inclined angle of emitting face in the wedge shaped transparent body 4, the parallel laser beam is divided into two laser beams having the specific angle based on the inclined angle of wedge shaped transparent body 4. The filter 5 where a part of the laser beam at one direction of the laser beams divided into the specific two directions is attenuated, is put behind of the transparent body 4. The laser beams divided into the specific two directions are condensed into two points with the condenser lens 6.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はレーザ加工用出射装置に関し、特にレーザ発振
器から光ファイバに伝送されたレーザ光線を2点に集光
させ、パワー比率も微調できる装置に関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an output device for laser processing, and in particular to a device that can focus a laser beam transmitted from a laser oscillator to an optical fiber onto two points and finely adjust the power ratio. Regarding.

〔従来の技術〕[Conventional technology]

従来、この種のレーザ加工用出射装置は、第2図に示す
ようにレーザ発振器から光ファイバ2に伝送されたレー
ザ光線を受け、平行光線のレーザ光線に変えるコリメー
タレンズ3と、コリメータレンズ3からのレーザ光線を
受け、球面レンズの光軸を含むように一部を切断した集
光レンズを複数個組合せ一体としたレンズ7とを有して
いる(例えば、特公昭54−39334号公報)。レン
ズ7はそれぞれ独立な焦点を持っているので、複数個の
焦点を持つことになる。即ち、レーザ発振器から発せら
れた1本のレーザ光線を、同時に部分レンズの組合せに
よって、2つ以上の照射点に集光できる。
Conventionally, this type of laser processing output device has a collimator lens 3 that receives a laser beam transmitted from a laser oscillator to an optical fiber 2 and converts it into a parallel laser beam, as shown in FIG. The lens 7 has a plurality of condensing lenses that receive a laser beam and are integrally assembled with a plurality of condensing lenses whose parts are cut to include the optical axis of the spherical lens (for example, Japanese Patent Publication No. 54-39334). Since each lens 7 has an independent focal point, it has a plurality of focal points. That is, one laser beam emitted from a laser oscillator can be focused on two or more irradiation points at the same time by combining partial lenses.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来のレーザ加工用出射装置は、レーザ光線を
平行光線に変えるコリメータレンズと、1本のレーザ光
線を同時に2つ以上の照射点に集光させるため、球面レ
ンズの光軸を含むように一部を切断した集光レンズを複
数個組合せ一体とし難であった。
The conventional laser processing output device described above includes a collimator lens that converts the laser beam into parallel light beams, and a collimator lens that includes the optical axis of the spherical lens in order to simultaneously focus one laser beam on two or more irradiation points. It was difficult to assemble a plurality of partially cut condensing lenses into one.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のレーザ加工用出射装置は、レーザ発振器から光
ファイバに伝送されたレーザ光線を平行光線に変えるコ
リメータレンズと、平行光線を特定の2方向に分けるく
さび形透明体と、2方向に分かれたレーザ光線の1方向
のレーザ光線を一部減衰させるフィルタと、2方向に分
かれたレーザ光線を2点に集光させる集光レンズとを備
えている。
The output device for laser processing of the present invention has a collimator lens that converts a laser beam transmitted from a laser oscillator to an optical fiber into a parallel beam, and a wedge-shaped transparent body that divides the parallel beam into two specific directions. It includes a filter that partially attenuates the laser beam in one direction, and a condenser lens that focuses the laser beam split into two directions at two points.

〔実施例〕〔Example〕

次に本発明の実施例について図面を参照して説明する。 Next, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例のレーザ加工用出射装置を示
す断面図である。
FIG. 1 is a sectional view showing an output device for laser processing according to an embodiment of the present invention.

図において、レーザ発振器から出たレーザ光線(1.0
6,umのNd:YAGレーザ光)は、レーザ加工用出
射ユニット本体1まで光ファイバ2により伝送される。
In the figure, the laser beam (1.0
The Nd:YAG laser beam of 6.0 um is transmitted through an optical fiber 2 to the main body 1 of the laser processing output unit.

光ファイバ2から伝送されたレーザ光線はコリメータレ
ンズ3により平行なレーザ光線に変換されたあと、光入
射面がレーザ光線に垂直で出射面が特定の傾斜角を持つ
くさび形透明体4により特定の2方向に分かれる。くさ
び形透明体4の出射面の傾斜角を変えることにより、平
行なレーザ光線はくさび形透明体4の傾斜角に基づいた
特定の角度を持つ2本のレーザ光線に分かれる。特定の
2方向に分かれたレーザ光線の1方向のレーザ光線を一
部減衰させるフィルタ5がくさび形透明体の後に置かれ
るが、このフィルタの種類は材質B K − 7に両面
1.06μm用無反射コーティングしたもの、片面l.
06μm用無反射コーティングしたもの、無反射コーテ
ィングしていないものの3種類を準備する。3種類のフ
ィルタの1.06/JmNd :YAGレーザ光に対す
る反射率は、各々、両面1.06μm用無反射コーティ
ングしたもので約1%,片面1.06μm用無反射コー
ティングしたもので約4%,無反射コーティングしてい
ないもので約8%である。各フィルタの配置順序は任意
でよい。特定の2方向に分かれたレーザ光線は集光レン
ズ6により2点に集光する。
The laser beam transmitted from the optical fiber 2 is converted into a parallel laser beam by a collimator lens 3, and then is converted into a parallel laser beam by a wedge-shaped transparent body 4 whose light incident surface is perpendicular to the laser beam and whose output surface has a specific inclination angle. It splits into two directions. By changing the inclination angle of the output surface of the wedge-shaped transparent body 4, the parallel laser beam is split into two laser beams having a specific angle based on the inclination angle of the wedge-shaped transparent body 4. A filter 5 that partially attenuates the laser beam in one direction of the laser beam split into two specific directions is placed after the wedge-shaped transparent body. Reflective coated, one side l.
Prepare three types: one with anti-reflection coating for 06μm and one without anti-reflection coating. The reflectance of the three types of filters for 1.06/JmNd:YAG laser light is approximately 1% for the one with anti-reflection coating for 1.06 μm on both sides, and approximately 4% for the one with anti-reflection coating for 1.06 μm on one side. , about 8% without anti-reflection coating. The arrangement order of each filter may be arbitrary. The laser beam split into two specific directions is focused on two points by a condenser lens 6.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、レーザ加工用出射装置に
コリメータレンズ,くさび形透明体,フィルタ,集光レ
ンズを設けることにより、光ファイバから伝送される1
本のレーザ光線を同時に特定の距離間隔だけ離れた2点
に集光し、2点のレーザパワー比率を約1%きざみで可
変できるという効果を有する。
As explained above, the present invention provides an output device for laser processing with a collimator lens, a wedge-shaped transparent body, a filter, and a condensing lens.
It has the effect that the laser beam of a book is simultaneously focused on two points separated by a specific distance, and the laser power ratio of the two points can be varied in steps of about 1%.

4

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例によるレーザ加工用出射装揄
の構造を示す断面図、第2図は従来のレーザ加工用出射
装置の構造を示す断面図である。 5 l・・・・・・レーザ加工用出射装置本体、2・・・・
・・光ファイバ 3・・・・・・コリメーションレンズ
、4・・・・・・ウエッジ基板、5・・・・・・フィル
タ、6・・・・・・集光レンズ、7・・・・・・組合せ
ルンズ。
FIG. 1 is a sectional view showing the structure of an output device for laser processing according to an embodiment of the present invention, and FIG. 2 is a sectional view showing the structure of a conventional output device for laser processing. 5 l...Emission device main body for laser processing, 2...
...Optical fiber 3...Collimation lens, 4...Wedge board, 5...Filter, 6...Condensing lens, 7...・Combination Runs.

Claims (1)

【特許請求の範囲】[Claims] レーザ発振器から光ファイバに伝送されたレーザ光線を
平行光線に変えるコリメータレンズと、前記コリメータ
レンズからのレーザ光線を受け平行光線の光束を特定の
2方向に分けるくさび形透明体と、2方向に分かれたレ
ーザ光線の1方向のレーザ光線を減衰させるフィルタと
、前記2方向に分かれたレーザ光線のうち前記フィルタ
を通過したものとしないものとを2点に集光させる集光
レンズとを具備することを特徴とするレーザ加工用出射
装置。
A collimator lens that converts the laser beam transmitted from the laser oscillator to the optical fiber into a parallel beam, and a wedge-shaped transparent body that receives the laser beam from the collimator lens and divides the parallel beam into two specific directions. a filter that attenuates a laser beam in one direction of the laser beam, and a condensing lens that focuses the laser beam that has passed through the filter and the one that has not passed through the filter among the two directions of the laser beam. An output device for laser processing characterized by:
JP1304306A 1989-11-22 1989-11-22 Beam emitting apparatus for laser beam machining Pending JPH03165992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1304306A JPH03165992A (en) 1989-11-22 1989-11-22 Beam emitting apparatus for laser beam machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1304306A JPH03165992A (en) 1989-11-22 1989-11-22 Beam emitting apparatus for laser beam machining

Publications (1)

Publication Number Publication Date
JPH03165992A true JPH03165992A (en) 1991-07-17

Family

ID=17931443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1304306A Pending JPH03165992A (en) 1989-11-22 1989-11-22 Beam emitting apparatus for laser beam machining

Country Status (1)

Country Link
JP (1) JPH03165992A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1695786A1 (en) * 2005-02-25 2006-08-30 Trumpf Werkzeugmaschinen GmbH + Co. KG Device for laser machining, in particular laser welding of 3D workpieces, with a first optical element for dividing a laser beam and a second optical element for focusing the divided laser beams

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1695786A1 (en) * 2005-02-25 2006-08-30 Trumpf Werkzeugmaschinen GmbH + Co. KG Device for laser machining, in particular laser welding of 3D workpieces, with a first optical element for dividing a laser beam and a second optical element for focusing the divided laser beams

Similar Documents

Publication Publication Date Title
US5715270A (en) High efficiency, high power direct diode laser systems and methods therefor
JPH0412039B2 (en)
EP1719218A2 (en) Laser multiplexing
DE69132049D1 (en) HIGH PERFORMANCE LIGHT SOURCE
JPS6448692A (en) Multifocusing laser beam condensing device
EP0159023A3 (en) Light beam scanning apparatus
JPS5455184A (en) Semiconductor laser light source unit
JPH03165992A (en) Beam emitting apparatus for laser beam machining
JP3317290B2 (en) Emission optics for laser processing
JPS5857385U (en) Laser irradiation device
JPS60172023A (en) Laser condensing device
JPS62186219A (en) Semiconductor laser device
JPH0259192A (en) Laser beam equipment with large power
JPS6265012A (en) Light emitting element
JPH08307006A (en) Semiconductor laser
JP2001255491A (en) Laser converging optical system
JPH0569172A (en) Irradiation device for mask with laser beam
JPH0241607Y2 (en)
JP2000275570A (en) Beam mode converting optical system
JPS63269130A (en) Parallel light forming device
JPH0780673A (en) Laser beam machine
JPS5927991Y2 (en) Aiming device for invisible laser processing machine
JPH055854A (en) Laser beam scanning optical system
JPS592243A (en) Optical device
JPH021811A (en) Light beam homogenizer and formation thereof