JPH03163403A - Coating method with liquid containing dispersed photosensitive pigment - Google Patents
Coating method with liquid containing dispersed photosensitive pigmentInfo
- Publication number
- JPH03163403A JPH03163403A JP1302861A JP30286189A JPH03163403A JP H03163403 A JPH03163403 A JP H03163403A JP 1302861 A JP1302861 A JP 1302861A JP 30286189 A JP30286189 A JP 30286189A JP H03163403 A JPH03163403 A JP H03163403A
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- photosensitive pigment
- liq
- pigment dispersion
- coater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000049 pigment Substances 0.000 title claims abstract description 38
- 238000000576 coating method Methods 0.000 title claims abstract description 19
- 239000007788 liquid Substances 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 239000006185 dispersion Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 abstract description 5
- 238000000206 photolithography Methods 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 238000012790 confirmation Methods 0.000 abstract 1
- 101100537937 Caenorhabditis elegans arc-1 gene Proteins 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野］
本発明は，液晶パネルや固体撮像管素子等のカラーフィ
ルター製造において用いられる感光性顔料分数液の所定
パターンを有する基板上への塗布方法に関するものであ
る．
【従来の技術Ｊ
従来の感光性顔料分散液の所定パターンを有する基板上
への塗布は，スピンコーター，ロールコーター、バーコ
ーター等のコーターを用いて前記基板の全面に感光性顔
料分散液を塗布していた．〔発明が解決しようとする課
題Ｊ
しかし，所定パターン上全面に感光性顔料分散液を塗布
した場合，その露光時のアライメントにおいて，塗布し
た感光性顔料分散液が顔料を含むために光の透過性が低
く、前記所定パターンのアライメントアークを確認しに
くい．それによってアライメント精度の低下、アライメ
ント時間の増加、及びパターンと非パターン部のコント
ラストが得られずオートアライメントが出来ないといっ
た事態が発生しカラーフィルター製造におけるパターン
ずれによる歩留りの低下やサイクルタイムの増大による
生産性の低下をもたらすとともに，才一トアライメント
による合理化の妨げになり最終的にはカラーフィルター
のコストアップの原因になるという問題点を有す．
本発明は、このような問題点を解決するためのもので、
露光時のアライメントにおいてアライメントアークを確
認しやすい感光性顔料分散液の塗布方法を提供すること
を目的とする．
［課題を解決するための手段１
本発明の感光性顔料分数液の塗布方法は、所定パターン
を有する基板上に感光性顔料分散液を塗布する際におい
て，ロールコータ一らしくはワイヤーコーター等の非塗
布領域を有するコーターを用いて、前記所定パターンの
アライメントアーク部には感光性ｆｌ＄４分敗液を塗布
しないことを特徴とする．
［実 廁 例１
第１図は本発明による塗布方法によりアライメントアー
ク１及びカラーフィルター２を含む所定パターンが形成
されたガラス基板４上にロールコーターやワイヤーコー
ター等の非塗布領域を有するコーターを用いて感光性顔
料分散液３を塗布した図である．この場合，フォトリソ
グラフィーによってパターン形成を行なうカラーフィル
ター２の領域には感光性顔料分散液３がほぼ均一な膜厚
で塗布されている一方、アライメントアークｌの領域は
、塗布時における非塗布領域となっているためアライメ
ントアークｌ上には感光性顔料分散液の塗膜がない．そ
のために、本カラーフィルター製造工程の露光時におけ
るアライメントの際には、感光性顔料分散液３の透過光
の吸収によりアライメントアークが確認しにくくなると
いった事態をさけることが可能となる．
本発明によるアライメントアークｌ及びカラーフィルタ
ー２を含む所定パターンは，クロム，クロムと酸化クロ
ムの積層膜、酸化インジウム、タンクル等の金属膜ない
しカラーモザイク（商標、フジハントマイクロエレクト
ロニクス■）等の感光性顔料分散液より形成されている
．
また、本発明に用いることのできる感光性顔料分散液と
しては，カラーモザイク（商標、フジハントマイクロエ
レクトロニクス■）に代表されるアクリル、ポリイミド
、ポリビニルアルコール等の樹脂に赤、青、緑、黒とい
った顔料を分散させた朗脂があげられる．本発明は、塗
布した樹脂の膜厚によらず実施することができるが、カ
ラーモザイクの場合には０．１〜１ ０ｕｍの範囲で実
施するのが一般的である．
また、本発明に用いるロールコーターやワイヤーコータ
ー等の非塗布領域を有するコーターにおける感光性顔料
分散液３の塗布領域と非塗布領域の範囲の設定は、ロー
ルないしワイヤーロールの巾を変えることにより可能と
なる．
また、本発明に用いられる基板として本実施例としてガ
ラス基板をあげたが、シリコン等の基板においてら実施
は可能である．
第２図は従来の塗布方法によりアライメントアーク１及
びカラーフィルター２を含む所定パターンが形成された
ガラス基板４上全面にスピンコーターやロールコーター
によって感光性顔料分散液３を塗布した図である．この
場合フォトリソグラフィーによってパターン形成を行な
うカラーフィルクー２の領域同様，アライメントアーク
ｌ上にも感光性顔料分散液３のほぼ均一な膜厚の塗膜が
存在する．この場合，感光性顔料分散液の塗膜は顔料が
可視光の領域に吸収を持つために光の透過率が悪くアラ
イメントアークの確認を困難にする．
〔発明の効果Ｊ
上記のように本発明の感光性顔料分散液の塗布方法によ
れば、所定パターンを有する基板上に感光性顔料分散液
を塗布する工程において、ロールコーターもしくはワイ
ヤーコーター等の非塗布領域を有するコーターを用いて
．前記所定パターンのアライメントアーク部には感光性
顔料分散液を塗布しないため、アライメントアーク部に
も感光性顔料分散液を塗布した際にアライメントアーク
が確認しにくいために生ずるアライメント精度の低下、
アライメント時間の増加、オートアライメントが不可能
となるといった現象をさけることができる．これにより
．本発明の感光性顔料分散液の塗布方法を用いてカラー
フィルターを製造することにより、アライメント精度向
上による歩留向上及び品質向上、サイクルタイムの短縮
による生産性向上、オートアライメントによる合理化が
計られカラーフィルターの製造コストダウンを実現でき
る．[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for coating a photosensitive pigment fraction liquid onto a substrate having a predetermined pattern, which is used in the production of color filters for liquid crystal panels, solid-state image pickup tube elements, etc. It is something. [Prior art J] Conventionally, a photosensitive pigment dispersion is applied onto a substrate having a predetermined pattern by using a coater such as a spin coater, roll coater, or bar coater to coat the entire surface of the substrate with the photosensitive pigment dispersion. Was. [Problem to be Solved by the Invention J] However, when a photosensitive pigment dispersion is coated on the entire surface of a predetermined pattern, the light transmittance may change due to the applied photosensitive pigment dispersion containing pigment during alignment during exposure. is low, making it difficult to confirm the alignment arc of the predetermined pattern. This results in a decrease in alignment accuracy, an increase in alignment time, and a situation where auto-alignment is not possible due to the inability to obtain contrast between the pattern and non-pattern areas, resulting in a decrease in yield and an increase in cycle time due to pattern misalignment in color filter manufacturing. This has the problem of reducing productivity, impeding rationalization through efficient alignment, and ultimately causing an increase in the cost of color filters. The present invention is intended to solve these problems,
The purpose of this paper is to provide a method for applying a photosensitive pigment dispersion that makes it easy to confirm alignment arcs during alignment during exposure. [Means for Solving the Problems 1] The method for applying a photosensitive pigment fraction liquid of the present invention uses a non-contact device such as a wire coater instead of a roll coater when applying a photosensitive pigment dispersion onto a substrate having a predetermined pattern. The present invention is characterized in that, using a coater having a coating area, the photosensitive fl$4 solution is not applied to the alignment arc portion of the predetermined pattern. [Actual Example 1] Figure 1 shows a coater having a non-coating area such as a roll coater or a wire coater used on a glass substrate 4 on which a predetermined pattern including an alignment arc 1 and a color filter 2 is formed by the coating method according to the present invention. This is a diagram in which photosensitive pigment dispersion 3 was applied using In this case, the photosensitive pigment dispersion 3 is applied to the area of the color filter 2 where the pattern is formed by photolithography with a substantially uniform film thickness, while the area of the alignment arc 1 is the non-applied area during application. Therefore, there is no coating film of photosensitive pigment dispersion on the alignment arc l. Therefore, during alignment during exposure in the present color filter manufacturing process, it is possible to avoid a situation where the alignment arc becomes difficult to confirm due to absorption of transmitted light by the photosensitive pigment dispersion 3. The predetermined pattern including the alignment arc 1 and the color filter 2 according to the present invention is a photosensitive material such as chromium, a laminated film of chromium and chromium oxide, a metal film such as indium oxide, tankle, or a color mosaic (trademark, Fuji Hunt Microelectronics ■). It is formed from a pigment dispersion. In addition, photosensitive pigment dispersions that can be used in the present invention include resins such as acrylic, polyimide, and polyvinyl alcohol represented by Color Mosaic (trademark, Fuji Hunt Microelectronics ■), as well as red, blue, green, and black pigments. One example is rojiang, which has pigments dispersed in it. The present invention can be carried out regardless of the thickness of the applied resin, but in the case of color mosaics, it is generally carried out within the range of 0.1 to 10 um. Further, in a coater having a non-coating area such as a roll coater or a wire coater used in the present invention, the range of the coating area and non-coating area of the photosensitive pigment dispersion 3 can be set by changing the width of the roll or wire roll. becomes. Further, although a glass substrate is used in this embodiment as a substrate used in the present invention, it is also possible to use a substrate made of silicon or the like. FIG. 2 shows a photosensitive pigment dispersion 3 applied by a spin coater or a roll coater to the entire surface of a glass substrate 4 on which a predetermined pattern including an alignment arc 1 and a color filter 2 has been formed by a conventional coating method. In this case, a coating film of the photosensitive pigment dispersion liquid 3 with a substantially uniform thickness is present on the alignment arc 1 as well as on the area of the color film 2 where a pattern is formed by photolithography. In this case, the paint film of the photosensitive pigment dispersion has poor light transmittance because the pigment absorbs in the visible light region, making it difficult to confirm the alignment arc. [Effect of the invention J As described above, according to the method for applying a photosensitive pigment dispersion of the present invention, in the step of applying a photosensitive pigment dispersion onto a substrate having a predetermined pattern, a non-contact device such as a roll coater or a wire coater is used. Using a coater with a coating area. Since the photosensitive pigment dispersion is not applied to the alignment arc portion of the predetermined pattern, the alignment accuracy is reduced because it is difficult to confirm the alignment arc when the photosensitive pigment dispersion is also applied to the alignment arc portion.
It is possible to avoid phenomena such as an increase in alignment time and the inability of auto-alignment. Due to this. By manufacturing color filters using the photosensitive pigment dispersion coating method of the present invention, it is possible to improve yield and quality by improving alignment accuracy, improve productivity by shortening cycle time, and streamline color by auto-alignment. It is possible to reduce the manufacturing cost of filters.
第１図は、本発明により所定パターンを有する基板上に
感光性顔料分数液を塗布した状態を示す平面図．
第２図は，従来の塗布方法により所定パターンを有する
基板上に感光性顔料分散液を塗布した状態を示す平面図
．
１・・・アライメントアーク
２・・・カラーフィルター
３・・・感光性顔料分散液
４・・・ガラス基板
以
上
第１図
第Ｚ図FIG. 1 is a plan view showing a state in which a photosensitive pigment fraction liquid is applied onto a substrate having a predetermined pattern according to the present invention. FIG. 2 is a plan view showing a state in which a photosensitive pigment dispersion is applied onto a substrate having a predetermined pattern using a conventional coating method. 1... Alignment arc 2... Color filter 3... Photosensitive pigment dispersion liquid 4... Glass substrate and above Figure 1 Figure Z
Claims (2)
を塗布する工程において、前記所定パターンのアライメ
ントアーク部には感光性顔料分散液を塗布しないことを
特徴とする感光性顔料分散液の塗布方法。(1) Application of a photosensitive pigment dispersion characterized in that in the step of applying the photosensitive pigment dispersion onto a substrate having a predetermined pattern, the photosensitive pigment dispersion is not applied to the alignment arc portion of the predetermined pattern. Method.
ワイヤーコーター等の非塗布領域を有するコーターを用
いて塗布することを特徴とする請求項１記載の感光性顔
料分散液の塗布方法。(2) The method for coating a photosensitive pigment dispersion according to claim 1, characterized in that the photosensitive pigment dispersion is coated using a coater having a non-coating area, such as a roll coater or a wire coater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1302861A JPH03163403A (en) | 1989-11-21 | 1989-11-21 | Coating method with liquid containing dispersed photosensitive pigment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1302861A JPH03163403A (en) | 1989-11-21 | 1989-11-21 | Coating method with liquid containing dispersed photosensitive pigment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03163403A true JPH03163403A (en) | 1991-07-15 |
Family
ID=17913978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1302861A Pending JPH03163403A (en) | 1989-11-21 | 1989-11-21 | Coating method with liquid containing dispersed photosensitive pigment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03163403A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6136481A (en) * | 1998-01-26 | 2000-10-24 | Sharp Kabushiki Kaisha | Color filter manufacturing method capable of assuring a high alignment accuracy of color filter and alignment mark therefor |
| JP2007004082A (en) * | 2005-06-27 | 2007-01-11 | Sharp Corp | Method for forming color layer, method for manufacturing imaging device, method for manufacturing display device, and imaging device and display device |
-
1989
- 1989-11-21 JP JP1302861A patent/JPH03163403A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6136481A (en) * | 1998-01-26 | 2000-10-24 | Sharp Kabushiki Kaisha | Color filter manufacturing method capable of assuring a high alignment accuracy of color filter and alignment mark therefor |
| JP2007004082A (en) * | 2005-06-27 | 2007-01-11 | Sharp Corp | Method for forming color layer, method for manufacturing imaging device, method for manufacturing display device, and imaging device and display device |
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