JPH0316297U - - Google Patents
Info
- Publication number
- JPH0316297U JPH0316297U JP7443389U JP7443389U JPH0316297U JP H0316297 U JPH0316297 U JP H0316297U JP 7443389 U JP7443389 U JP 7443389U JP 7443389 U JP7443389 U JP 7443389U JP H0316297 U JPH0316297 U JP H0316297U
- Authority
- JP
- Japan
- Prior art keywords
- drawing board
- electrodes
- adsorption
- electrostatic
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims 4
- 230000005611 electricity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7443389U JPH0316297U (tr) | 1989-06-27 | 1989-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7443389U JPH0316297U (tr) | 1989-06-27 | 1989-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316297U true JPH0316297U (tr) | 1991-02-19 |
Family
ID=31614120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7443389U Pending JPH0316297U (tr) | 1989-06-27 | 1989-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316297U (tr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010032703A1 (ja) * | 2008-09-17 | 2010-03-25 | 株式会社クリエイティブ テクノロジー | 静電チャック |
| KR101358578B1 (ko) * | 2006-03-09 | 2014-02-04 | 쓰쿠바 세이코 가부시키가이샤 | 정전 유지 장치와 이를 이용한 진공 환경 장치 및 접합 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211697A (ja) * | 1985-07-10 | 1987-01-20 | 赤羽 武平 | 画板 |
-
1989
- 1989-06-27 JP JP7443389U patent/JPH0316297U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211697A (ja) * | 1985-07-10 | 1987-01-20 | 赤羽 武平 | 画板 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101358578B1 (ko) * | 2006-03-09 | 2014-02-04 | 쓰쿠바 세이코 가부시키가이샤 | 정전 유지 장치와 이를 이용한 진공 환경 장치 및 접합 장치 |
| WO2010032703A1 (ja) * | 2008-09-17 | 2010-03-25 | 株式会社クリエイティブ テクノロジー | 静電チャック |
| US8411408B2 (en) | 2008-09-17 | 2013-04-02 | Creative Technology Corporation | Electrostatic chuck |
| JP5283704B2 (ja) * | 2008-09-17 | 2013-09-04 | 株式会社クリエイティブ テクノロジー | 静電チャック |