JPH03162610A - Height measuring instrument - Google Patents

Abstract

PURPOSE:To reduce the cost of the instrument, to prolong the life, and to make an efficient optical scan corresponding to an object to be measured by making the scan electrically by a pattern generating means with a light spot which is formed by turning on a spot light emitting element. CONSTITUTION:The light source 1 is constituted by arranging many spot light emitting elements and the pattern generating means 2 turns on and off those light emitting elements to scan the light emission part. A 1st image forming optical means 3 images the light emitted by the spot light emitting means on a measurement surface 4 to form the light spot P. An optical position detector 5 is composed of a PSD or has the same function with it to detect the light spot position on the light receiving surface of the optical position detector 5. A 2nd image forming optical means 6 images the light spot P, which is formed on the measurement surface 4, on the light receiving surface of the optical position detector 5. Then the light spot position on the light receiving surface of the optical position detector 5 corresponds to the height of the position of the light spot P on the measurement surface 4. Further, the optical position detector 5 detects the brightness of the light spot P and is used as a height and brightness measuring instrument.

Description

[Detailed description of the invention] 【table of contents】

overview Industrial applications Conventional technology (Figures 17 to 19) Problems that the invention aims to solve Means for solving problems (Article IA, 1 Figure B) action Example First embodiment (Figures 2A to 5) Second embodiment (Figures 6 and 7) Third embodiment (Figure 8) Fourth embodiment (Figure 9) Fifth embodiment (Figure 10) Sixth embodiment (Figures 11 to 16) Effect of the invention

【overview】

Regarding a height measuring device used in appearance inspection equipment, etc., which forms a light spot on a measuring surface and measures the height of the position of this light spot, it enables lower cost and longer life of the device, and The aim is to enable efficient light scanning according to the measurement target, and it uses a light source in which a large number of point-like light emitting elements are arranged, and a pattern generator that scans the light emitting part by turning on and off the light emitting elements. means, a first imaging optical means for forming a light spot by imaging the light emitted from the point light emitting element on a measurement surface, and a first imaging optical means for forming a light spot by imaging the light emitted from the point light emitting element, and a first imaging optical means for detecting the light spot position on the light receiving surface of the optical position detector. M4 includes an optical position detector and a second imaging optical means for imaging the light spot formed on the measurement surface onto the light receiving surface of the optical position detector.

[Industrial application field]

TECHNICAL FIELD The present invention relates to a height measuring device which is used in visual inspection equipment, uneven pattern reading equipment, etc., and which forms a light spot on a measurement surface and measures the height of this light spot.

[Conventional technology]

In recent years, printed wiring boards have become more densely packed due to the miniaturization and higher density of printed wiring, and smaller and thinner chip components, and the printed wiring boards are wider, for example, 600 mm square. There is. Therefore, there is a need to automate and speed up visual inspections such as the presence or absence of parts, misalignment of parts, and quality of soldering. For example, if the component to be inspected is a surface-mounted LSI, the 17th
As shown in the figure, 25mm x 25mm package 1
From the four sides of 0a, the width W = 0. 35 mm lead lOb with spacing S = 0. A large number of leads 10b protrude at intervals of 15 mm, and each lead 10b is shown in FIG.
), it is necessary to detect defects such as insufficient solder as shown in (C), no solder as shown in (C), and floating leads as shown in (D). Figure (A) shows a normal case. FIG. 19 shows the structure of a conventional height/brightness measuring device. The printed wiring board 10 to be inspected is
- It is placed on the Y stage 12. The parallel light beam l4 is reflected by the polygon mirror 16, passes through the fθ lens 18, is bent downward by the mirror 20, and is convergently irradiated onto the printed wiring board 10, forming a light spot P. polygon mirror 1
6 is rotated by a motor 22, a light spot P linearly scans the printed wiring board 10, and an optical scanning line 24 is formed. This light spot P is imaged by the imaging lens 26 on the light receiving surface of the PSD (optical position detector) 28, and the height of the position of the light spot P and the brightness of the light spot P are determined using the output signal of the PSD 28. Such height/brightness measuring devices are also used in reading devices for stamped characters on checks, bills, etc., which have uneven patterns and shading patterns.

[Problem to be solved by the invention]

However, it is necessary to use an expensive polygon mirror 16 and fθ lens 18. Further, since the polygon mirror 16 operates mechanically, its lifespan is relatively short, and it is necessary to use one that maintains high accuracy over a long period of use. Furthermore, since only constant linear scanning is possible, efficient measurements depending on the object to be measured cannot be performed. SUMMARY OF THE INVENTION In view of these problems, an object of the present invention is to provide a height measuring device that can reduce the cost and extend the life of the device, and can perform efficient optical scanning depending on the object to be measured. There is a particular thing.

[Means to solve the problem]

FIG. IA shows the basic structure of the present invention. In the figure, 1 is a light source, and a large number of point-like light emitting elements are arranged. Reference numeral 2 denotes a pattern monitoring means, which turns on and off the light emitting element to scan the light emitting section. Reference numeral 3 denotes a first imaging optical means, which images the light emitted from the point-like light emitting element onto the measurement surface 4 to form a light spot P. Reference numeral 5 denotes an optical position detector, which is a PSD or has the same function as the PSD, and detects the position of a light spot on the light receiving surface of the optical position detector 5. Reference numeral 6 denotes a second imaging optical means, which images the light spot P formed on the measurement surface 4 onto the light receiving surface of the optical position detector 5. FIG. IB shows one form of the pattern generating means 2. As shown in FIG. Reference numeral 2a denotes a first setting means, which sets the scanning range of the light emitting part of the light source 1. Reference numeral 2b denotes a second setting means, which sets the magnitude of the light emission of the light source 1 and the scanning period of the light emitting section (the period corresponding to the scanning period and 1:1 is also referred to as the scanning period). Reference numeral 2c denotes a scanning means, which generates an on/off pattern of the light emitting element based on the settings of the second setting stage 2b, and scans the pattern. A switch circuit 2d turns on and off the light emitting element 1a in the light emitting section scanning range set by the first setting means 2a in accordance with the on/off pattern.

[Effect]

The light spot position on the light receiving surface of the optical position detector 5 corresponds to the height of the light spot P on the measurement surface 4. Furthermore, since the optical position detector 5 also detects the brightness of the light spot P, it is generally used as a height/brightness measuring device. The light source l has a large number of point light emitting elements, and when the point light emitting elements are turned on, a light point P is formed on the measurement surface by the first imaging optical means 3, and this light point P is electrically generated by the pattern generation means 2. is scanned. Therefore, there is no need to use expensive polygon mirrors, fθ lenses, etc., and the cost of the device can be reduced. Also,
Since electrical scanning is performed rather than mechanical scanning, it is possible to extend the life of the device. Moreover, by using an appropriate light emission pattern, efficient light scanning can be performed depending on the object to be measured. Furthermore, if the pattern generating means 2 is arranged as shown in FIG. 1B, the size and moving speed (sub-scanning speed) of the object to be measured can be
The scanning range and scanning period can be easily changed depending on the situation.

【Example】

Embodiments of the present invention will be described below based on the drawings. (1) First Embodiment FIG. 2A shows the configuration of a height/brightness measuring device. The LED array 30 has a large number of LEDs arranged in a straight line, and light emitted from any of the LEDs passes through an imaging lens 32 and is imaged on the measurement surface to form a light point P. Ru. There is a one-to-one correspondence between the leading point P and the LED light emitting elements, and when all the LEDs are turned on, a light line L is formed on the measurement surface. The reflected light from the light point P passes through the imaging lens 26 and enters the PSD 2.
The image is formed on the light receiving surface of 8. Currents I1 and I2 output from a pair of terminals of PSD28 are supplied to I/V converters 34 and 36, respectively, where they are amplified and have a voltage value Vl'
Converted to V2. Voltage value V, ,V. is supplied to the height/brightness calculation circuit 38, and the height (V.-V2)/(
V+ +Vz) and brightness (V++V2
) is calculated. This height signal is supplied to a correction calculation circuit 40, and the brightness signal is supplied to a binarization circuit 42. Here, the position of the light point P is the height (V, -V2)/(Vl
+Vz ), but its proportionality constant depends on the reflection angle θ of the reflected light. On the other hand, it changes slightly depending on the position of the lit LED. Therefore, the correction calculation circuit 40 performs correction calculation based on this reflection angle θ, and outputs a corrected height signal. Also, 2
The value converting circuit 42 compares (V r + V 2 ) with a reference value and outputs a bright and dark binary signal. With this light/dark signal,
For example, it is possible to determine whether a light spot P is on the lead 10b with a high reflectance as shown in FIG. From this height distribution, defects as shown in FIGS. 18(B) to 18(D) can be detected. The pattern generation circuit 44 converts the parallel pattern data into serial data in synchronization with the clock signal supplied from the controller 48 according to the scan mode set by the scan mode setter 46, and supplies the serial data to the shift register 50. This pattern data is sequentially taken into the shift register 50 in synchronization with shift pulses from the controller 48, and a predetermined pattern is formed in the shift register 50. This pattern is held in the latch circuit 52 based on the latch pulse from the controller 48, and each switch element of the switch circuit 54 is turned on and off according to each bit data of the latch circuit 52, and the corresponding LED of the LED array 30 is
is turned on and off. The shift register 50 can be shifted in either the left or right direction based on a control signal from the controller 48. Various scanning modes set by the scanning mode setter 46 are shown in FIGS. 3(Δ) to (H). Each of the scanning modes will be explained based on the timing charts shown in FIGS. 4 and 5. Note that the LED array 30 is assumed to be composed of LED I-n, and FIG. 4 shows a part of it as a representative. (A) Single-point forward constant speed scanning mode The timing chart for this mode is shown in Figures 4 (A) to (F).
). A pattern pulse as shown in FIG. 5(C) is supplied to the shift register 50, which is taken into the shift register 50 and shifted based on the shift pulse shown in FIG. It is held in the latch circuit 52 by the latch pulse shown in (B), and the LED array 30 is turned on and off by the switch circuit 54.
DI~n lights up sequentially. Since the light spot P is electrically scanned and there is no mechanical movement, a long life of the device is achieved. Furthermore, there is no need to use an expensive polygon mirror 16 or f.theta. lens 18 as shown in FIG. Moreover, by reading the data of the latch circuit 52, it is easy to determine which point on the scanning line L is being scanned. (B) Single point backward constant speed scanning mode This mode can be realized by shifting the contents of the shift register 50 in the opposite direction of the above mode. Conventionally, only linear scanning in a fixed direction was possible, but according to the apparatus of this embodiment, the scanning direction can be easily changed. In visual inspection equipment, teaching is generally performed on standard products before inspection, so it is known in advance in what position and in what direction components of what size are placed on the printed wiring board. Therefore, if the scanning range and direction are selected depending on the part to be scanned, for example, if the part is only on the left edge of the scanning line L, it will be scanned halfway from the left side, and only the necessary parts can be efficiently scanned. becomes. (C) Single-point variable speed scanning mode This mode can be easily realized by changing the frequency of the shift pulse in the constant speed scanning mode. For example, when scanning the leads 10b shown in FIG. 17 along the direction in which they are arranged, the scanning time can be shortened by scanning at a low speed on the leads 10b and scanning at high speed between the leads 10b. In this case, the selection between the high speed mode and the low speed mode can be made based on the brightness signal output from the binarization circuit 42. (D) Single-point intermittent scanning mode This mode is a mode in which light spots P are formed at intervals as shown in FIG. 3(D), and its flow chart is shown in FIGS. 4(G) to (K). The shift pulse is shown in the same figure (A).
Use the one shown below. This mode can be easily realized by making the period of the latch pulse longer than the period of the shift pulse in the one-point constant speed scanning mode. Note that the frequency of the shift pulse is set higher than in the case of the one-point constant speed scanning described above. For example, when measuring the width dimension of the package 10a shown in FIG. 17, a rough measurement is sufficient compared to when detecting defects such as insufficient solder on the leads 10b. By using this mode, high-speed measurement becomes possible. (E) Multiple-point parallel scanning mode In this mode, as shown in FIG. 3(E), a plurality of light points P, , P. , P, are simultaneously scanned in parallel, and the timing chart is shown in Figure 4 (L) to (P).
). The shift pulse shown in the same figure (A) is used. This mode can be easily realized by making the period of the pattern pulse shorter than that in the single point constant speed scanning mode. In the case of multiple light spot scanning, the height/brightness measuring device measures P corresponding to each of the multiple light spots, for example, 5 points, as shown in Figure 2B.
It is equipped with SD281-285, and images the light spots P1-P on the light receiving surface of PSD281-285, respectively. Furthermore, height/brightness measurement circuits 34 to 42 as shown in FIG. 2A are provided for each PSD 281 to 285 to measure the height and brightness of each light spot. The same applies to each mode below. If this mode is used, for example, when chip components of the same size are arranged in a row, high-speed processing can be achieved. (F) Line constant speed scanning mode In this mode, as shown in FIG. Shown in Figures (B) to (F). The shift pulse shown in the same figure (A) is used. This mode can be easily realized by increasing the pulse width of the pattern pulse in the single point constant speed scanning mode. (G) Line intermittent scanning mode In this mode, one point is converted into a plurality of consecutive points in the single point intermittent scanning mode, and timing charts are shown in FIGS. 5(G) to 5(K). The shift pulse is shown in the same figure (A).
Use the one shown below. This mode can be easily realized by changing the width of the pattern pulse in the one-point intermittent scanning mode. (H) Stationary pattern mode In this mode, a certain pattern is formed at once as shown in FIG. 3(H), and timing charts are shown in FIGS. 5(L) to (P). This mode can be easily realized by forming a desired pattern in the shift register 50 and then supplying a latch pulse to the latch circuit 52. (2) Second Embodiment FIG. 6 shows the patterned bottom of the height/brightness measuring device of the second embodiment. In this embodiment, the pattern signal output from the pattern generation circuit 44 is supplied from one side of the shift register 50A to be shifted, and at the same time, it is supplied from the other side of the shift register 50B to be shifted in the opposite direction to that of the shift register 50A. Shift register 50A and shift register 5
The OR circuit 56 calculates the logical sum of each corresponding bit of 0B, and the result is supplied as a light emission pattern to the latch circuit 52 shown in FIG. 2. The other structure is the first
Same as the example. Therefore, this light emission pattern is the seventh
As shown in the figure, the mode is such that the light points PI and P2 scan each other symmetrically. In this mode, for example, the package 10a shown in FIG.
When measuring the width dimension of the package 10 from both directions.
By detecting both edges of a, high-speed measurement is possible. (3> Third Embodiment FIG. 8 shows the optical system of the height/brightness measuring device of the third embodiment. In this embodiment, corresponding to the arrangement of the leads 10b of the chip component to be inspected, LED array 30A, 3
0B, 30C, and 30D are arranged along the sides of the square. Therefore, all LEs of LED arrays 30A to 30D
When D is turned on, a square light line is formed on the measurement surface. Other points are the same as the first embodiment. In this third embodiment, it is possible to scan along the leads 10b protruding from each side of the package 10a,
Can perform high-speed processing. (4) Fourth Embodiment FIG. 9 shows the optical system of the height/brightness measuring device of the fourth embodiment. In this embodiment, LED array 30A. 30B, 30C
are arranged parallel to each other. Therefore, when all the LEDs of the LED arrays 30A to 30C are turned on, three mutually parallel square light lines are formed on the measurement surface. Other points are the same as the first embodiment. (5) Fifth Embodiment FIG. 10 shows the optical system of the height/brightness measuring device of the fifth embodiment. In this embodiment, a plasma display panel (FDP) 60 that can form an arbitrary light emission pattern is used as a light source. The light emitting pattern can be generated using a well-known display circuit. On the measurement surface,
A pattern of light spots P corresponding to this light emission pattern is obtained. Other points are the same as the first embodiment. In this embodiment, an optimal scanning pattern can be formed depending on the object to be inspected and the region to be inspected, so that efficient inspection can be performed. (6) Sixth Embodiment FIG. 11 shows a height/brightness measuring device of the sixth embodiment, and FIG. 12 shows details of the main parts of the circuit. Note that the same structures or elements as in FIG. 2A are designated by the same reference numerals, and the explanation thereof will be omitted. The switch circuit 54A is an L
It includes switch elements 541 to 54n that turn on and off each of the ED301 to 30n, and NAND gates 551 to 55n whose output terminals are connected to the control terminals of these switch elements 541 to 54n. Nand Gate 551~
55n, one of the manual terminals is connected to the scanning range setting circuit 70.
The other manual terminal is connected to the output terminal of the light emitting pattern setting/scanning circuit 80. When scanning the light emitting section consisting of the LEDs 30iS i=a+1 to a+b, the scanning range setting circuit 70 sets one input terminal of the NAND gate 55iS i=a+1=a+b to a high level, and sets the NAND gate 55i, i=1.
~a, a + b + 1 - Set one of the human power terminals of ~n to a low level. This is done as follows. That is, the RS flip-flop 74 is set at the timing of the rise of the clock operation signal S1 from the controller 48A (FIGS. 13A and 13E).
The non-inverted output Q is supplied to the data input terminal D of the shift register 75. The shift register 75 shifts the held content by one bit at the falling edge of the clock φ1 supplied to the clock input terminal CK, and at the same time takes in the data supplied to the data input terminal D into the least significant bit. This shift direction is determined by a signal supplied from the controller 48A to the shift direction input terminal R/L of the shift register 75. Further, the clock φ1 is the clock output from the clock generator 90 that passes through the NAND gate 92A, and the NAND gate 92A is opened by the clock operation signal Sl (see FIG. 13(A)).
(B)). The clock output from the clock generator 90 is also supplied to the controller 48A, and the controller 48A generates the clock operation signal S at the falling edge of this clock.
Launch l. Further, the frequency of the clock output from the clock generator 90 is set by the controller 48A. On the other hand, a latch circuit? LA and 71B respectively hold set values b and a-1-b supplied from the controller 48Δ before the clock operation signal S1 rises. The contents of the latch circuits 71A, 71B are the down counters 72A,
When the clock operation signal Sl supplied to the count/load terminal C/L of 72B is at a low level, the down counter 7
2A, 72B. When the clock operation signal Sl becomes high level, the down counters 72A and 72B enter a counting state, and their contents are decremented at the rising timing of the clock φl (see FIG. 13(C)).
), (F)). The count values of the down counters 72A and 72B are supplied to zero detection circuits 73A and 73B, respectively, and when the count values reach 0, the zero detection circuits 73A and 73B set their outputs to a low level (Fig. 13 (D) (G) ). The RS flip-flop 74 is reset at the timing of the rise of the output of the zero detection circuit 73A, and the non-inverted output Q becomes a low level (FIG. 13(E)). therefore,
After the contents of the shift register 75 become as shown in FIG. 15(A), the data input terminal D of the shift register 75 becomes low level. Thereafter, the count value of the down counter 72B becomes 0, and the contents of the shift register 75 are transferred to the latch circuit 7 at the timing of the rise of the output of the zero detection circuit 73B.
It is held at 6. At this time, the contents of the shift register 75 are as shown in FIG. 15(B). controller 4
8A sets the clock operation signal S1 to a low level in response to the zero detection signal from the zero detection circuit 73B (see FIG. 13).
A) (G)) In this way, among the input terminals of one of the NAND gates 55i, i=1 to n, only i=a+1 to a+b becomes high level, and the LEDs 30i, i=a+1 to a+b is the light emitting unit scanning range. Setting and scanning of the light emitting pattern is performed by a light emitting pattern setting/scanning circuit 80. The light emission pattern setting/scanning circuit 80 includes an RS flip-flop 84, a shift register 85, and a latch circuit 86 similar to the scanning range setting circuit 70. Non-inverting output Q of RS flip-flop 84
is supplied to the data input terminal D of the shift register 85,
A clock φ2 is supplied to the clock input terminal CK of the shift register 85 and the latch circuit 86. The shift register 85 performs a shift operation at the falling timing of the clock φ2, and the latch circuit 86 holds the contents of the shift register 85 at the rising timing of the clock φ2. This clock φ2 is the clock outputted from the clock generator 90 and passed through the NAND gate 92B.
92B is opened by the clock operation signal S2 from the controller 48A (Fig. 14 (A), (B)
)). The controller 48A raises the clock operation signal S2 at the falling timing of the clock from the clock generator 90. Similarly to the scanning range setting circuit 70, the light emission pattern setting/scanning circuit 80 also includes a cascade-connected latch circuit 81A1.
Down counter 82A1 zero detection circuit 83A1 and latch circuit 81B1 down counter 82B1 zero detection circuit 83
It is equipped with B. The count/load terminal C/L of this down counter 82A is supplied with the inverted output 6 of the RS flip-flop 84, and the count/load terminal C/L of the down counter 82B is supplied with the non-inverted output Q of the RS flip-flop 84. has been done. Additionally, the zero detection circuit 83A
The output of the zero detection circuit 83B is supplied to the set terminal S of the RS flip-flop 84, and the output of the zero detection circuit 83B is supplied to the reset terminal R of the RS flip-flop 84. Furthermore, the clock φ2 is supplied to the clock terminals CK of the down counters 82A and 82B. Number of light emitting elements in the light emitting part, i.e. consecutive simultaneous lighting LEDs
If the number of LEDs is C and the number of unlit LEDs between the light emitting parts is d, then the latch circuits 8 1 A, 8 1 B dI;! Values d and c are supplied from the controller 48A, respectively. Initially, the RS flip-flop 84 is in a reset state, and at this time, the down counter 82B is in a loading state and the down counter 82A is in a counting state. The down counter 82A is decremented at the rising edge of the clock φ2 (Fig. 14 (B), (C)), and when the count value reaches O, the output of the zero detection circuit 83A becomes high level (Fig. 14 (D)). , the RS flip-flop 84 enters the set state at the rising timing (the 14th
Figure (E)). As a result, the down counter 82A becomes a load state and the down counter 82B becomes a count state. Therefore, the contents of the down counter 82B are the clock φ
It is decremented at the rising edge of 2 (Fig. 14 (F)'
), when the count value reaches 0, the output of the zero detection circuit 83B becomes high level (Fig. 14 (G)), and the RS flip-flop 84 is reset at the rising timing (Fig. 14 (E)). ), down counter 82A
is in a counting state, and the down counter 82B is in a loading state. Similar operations are performed thereafter. Therefore, the contents of the shift register 85 and latch circuit 86 are as shown in FIG.
Bits of 0 are arranged alternately, and this pattern scans in the set direction. The light emission pattern setting/scanning circuit 80 also includes a latch circuit 8
1B, a down counter 82B, and a zero detection circuit 83B, a latch circuit 81C, a down counter 82C, and a zero detection circuit 83C are connected in series. However, the down counter 82C has a separate count enable terminal E and a load terminal L instead of the count/load terminal C/L, and the inverted output d of the RS flip-flop 84 is supplied to the count enable terminal E. , the non-inverted output Q of the RS flip-flop 84 is supplied to the load terminal L. A is supplied to the latch circuit 81C from the controller 48A. Therefore, the down counter 82C is loaded with the contents of the latch circuit 81C when the RS flip-flop 84 is set, and when the RS flip-flop 84 is reset, it becomes a count state and its contents are decremented (see FIG. 14). H)>, only when the count value becomes 0, the output of the zero detection circuit 83C becomes high level (
Figure 14 (I)). The output of this zero detection circuit 83C has a period of (c+d) clock cycles, and as shown in FIG. is output and used as a scanning synchronization signal. Note that FIG. 16(B) shows the case where d=b−c. In this sixth embodiment, the scanning range and scanning period can be easily changed depending on the size of the object to be measured, for example, the check 10A with stamped characters and the moving speed of the stage 12A.

【Effect of the invention】

As explained above, in the height measuring device according to the present invention, the light source has a large number of point light emitting elements, and when the point light emitting elements are turned on, a light spot is formed on the measurement surface, and this light spot is electrically Because it is scanned, there is no need to use expensive polygon mirrors or f-theta lenses, making it possible to lower the cost and extend the life of the device.Furthermore, by using an appropriate light emission pattern, it can be used efficiently according to the measurement target. This provides an excellent effect in that optical scanning is possible. Furthermore, if the pattern generation means is configured as shown in FIG. IB, an excellent effect can be obtained in that the scanning range and scanning period can be easily changed depending on the size and moving speed of the object to be measured.

[Brief explanation of the drawing]

FIG. IA is a diagram showing the principle structure of the present invention, and FIG. IB is a diagram showing the principle structure of one form of the invention. 2A to 5 relate to the first embodiment of the present invention, and FIG.
Figure 2B is a configuration diagram of the height/brightness measurement device, Figure 2B is a configuration diagram of the optical system of the multiple light spot scanning height/brightness measurement device, Figure 3 is an explanatory diagram of various scanning modes, and Figure 4 ( A) to (P) and Fig. 5 (A) to (P) are the third
FIG. 2 is a timing chart of the main parts of the circuit shown in FIGS. 2A and 2B corresponding to the scanning mode shown in FIG. 6 and 7 relate to the second embodiment of the present invention, FIG. 6 is a block diagram showing the structure of the pattern bottom of the height/brightness measuring device, and FIG. 7 is a diagram explaining the scanning mode. be. 8 to 10 are diagrams showing the optical system configuration of the height/brightness measuring apparatus according to the third to fifth embodiments of the present invention, respectively. 11 to 16 relate to the sixth embodiment of the present invention, FIG. 11 is a block diagram of a height/brightness measuring device, FIG. 12 is a detailed diagram of the main part of the circuit in FIG. 11, and FIG. 13 is a timing chart of the scanning range setting circuit 70, FIG. 14 is a timing chart of the light emitting pattern setting/scanning circuit 80, FIG. 15 is an explanatory diagram of the contents of the shift register 75, and FIG.
D is an explanatory diagram of the contents of the shift register 85 and the latch circuit 86. FIG. 17 is a partial perspective view showing an example of the object to be inspected, and FIGS. 18(A) to 18(D) are diagrams showing how the lid shown in FIG. 17 is connected to the board. FIG. 19 is a diagram showing the configuration of an optical system of a conventional height/brightness measuring device. In the figure, 26 and 32 are imaging lenses 28, PSD 30, 30A to 30D are LED arrays 34, 36 is an I/V converter 38, a height/brightness calculation circuit 40, a capture calculation circuit 42 is a binarization Circuit 44 is a pattern generator, circuit 46 is a scan mode setter 48, 48A is a controller 50, 50Δ, 50B is a shift register 2 is a latch circuit 4, 54A is a switch circuit 6 is an OR circuit 0 is a plasma display panel 0 is a scan range setting Circuit 0 is light emitting pattern setting/scanning circuit 1: Light source Figure 1A Figure IB Optical system of height/brightness measuring device ("a diffused point scanning type) Figure 2B Scanning direction Pattern of height/brightness measuring device Generation unit (second embodiment)
Fig. 6 Optical scanning mode whistle 7 Group Fig. 8 30B Fig. 9 60 Fig. ○ b Contents of bit shift register 75 Fig. 15 Shift register 85 and latch times 1! ! 86 contents 1st
Figure 6

Claims (1)

[Claims] 1) A light source (1) in which a large number of point-like light emitting elements are arranged; a pattern generating means (2) that turns on and off the light emitting elements to scan the light emitting portion; and the point. a first imaging optical means (3) that images the light emitted from the shaped light emitting element on the measurement surface (4) to form a light spot (P); The optical position detector (5) detects the position of a light spot, and the optical position detector (5) forms an image of the light spot (P) formed on the measurement surface (4) on the light receiving surface of the optical position detector (5). 2. Imaging optical means (
6) A height measuring device comprising: 2), the pattern generation means (2) includes a first setting means (2) for setting a scanning range of the light emitting part of the light source;
a); second setting means (2b) for setting the size of the light emitting part of the light source and the scanning period of the light emitting part; and setting the on/off pattern of the light emitting element based on the settings of the second setting means. scanning means (2c) for generating and scanning the pattern; and a switch circuit (2c) for turning on and off the light emitting elements in the light emitting unit scanning range set by the first setting means in accordance with the on/off pattern. 2d); The height measuring device according to claim 1, characterized in that it has: