JPH03159092A - Flat exothermic body - Google Patents
Flat exothermic bodyInfo
- Publication number
- JPH03159092A JPH03159092A JP29792589A JP29792589A JPH03159092A JP H03159092 A JPH03159092 A JP H03159092A JP 29792589 A JP29792589 A JP 29792589A JP 29792589 A JP29792589 A JP 29792589A JP H03159092 A JPH03159092 A JP H03159092A
- Authority
- JP
- Japan
- Prior art keywords
- exothermic
- heat
- heating
- sheet
- heat generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 107
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000020169 heat generation Effects 0.000 abstract description 3
- 238000010276 construction Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は加熱電流によって発熱面がジュール発熱する面
状発熱体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a planar heating element whose heating surface generates Joule heat by heating current.
従来の技術
面状発熱体は面としての拡がりをもって発熱面の全面が
発熱する。そのため、面状発熱体は、シート材の熱処理
や、加熱温度の一様性が重視される半導体基板の加熱な
ど、種々の分野で不可欠な加熱熱源とされている。A conventional technical planar heating element spreads out as a surface and generates heat over the entire surface of the heating surface. Therefore, planar heating elements are considered as an indispensable heating heat source in various fields, such as heat treatment of sheet materials and heating of semiconductor substrates where uniformity of heating temperature is important.
従来の典型的な面状発熱体は、渦巻き状の電熱線を２枚
の金属板で挟んだサンドインチ構造のものである。しか
し、このサンドインチ構造によれば、電熱線と金属板と
の間の熱伝達（熱伝導）が完全でなく１発熱面となる金
属板の面上での温度分布が悪い、しかも、電熱線が加熱
して焼損し易いばかりでなく、均温化のための金属板の
熱容量に起因して、昇温時や降温時の応答特性が遅くな
るという欠点をもっていた。しかも、最近では、１００
０℃以上に高温加熱できる面状発熱体の要請が高まって
いる。A typical conventional planar heating element has a sandwich structure in which a spiral heating wire is sandwiched between two metal plates. However, according to this sandwich structure, heat transfer (thermal conduction) between the heating wire and the metal plate is not perfect, and the temperature distribution on the surface of the metal plate, which is one heating surface, is poor. Not only is it easy to heat up and burn out, but also the response characteristics when the temperature rises or falls is slow due to the heat capacity of the metal plate used for temperature equalization. Moreover, recently, 100
There is an increasing demand for planar heating elements that can be heated to temperatures above 0°C.
そこで、従来のサンドインチ構造の面状発熱体に替えて
、１枚シートで形成した面状発熱体が使用されつつある
。このシート状の面状発熱体は。Therefore, instead of the conventional sheet heating element having a sandwich-inch structure, a sheet heating element formed from a single sheet is being used. This sheet-shaped heating element is.
モリブデンやカーボンなどの高温耐熱性に富んだ発熱材
料を用い、１枚の発熱材料を平板や円筒に形成して発熱
面を構成し、被加熱物を主として輻射加熱するものであ
る。A heat-generating material with excellent high-temperature heat resistance such as molybdenum or carbon is used, and a single heat-generating material is formed into a flat plate or a cylinder to constitute a heat-generating surface, and the object to be heated is mainly heated by radiation.
発明が解決しようとする課題
ところが、上記の従来技術によれば、１枚のシートの発
熱材料で形成した面状発熱体は、高温加熱と高速応答の
要請には応えるものの、例えば裏面から無駄な熱放散が
多く、多大な加熱ｉ！流が必要である。しかも、発熱面
内での温度分布の均温性に欠けるという問題があった。Problems to be Solved by the Invention However, according to the above-mentioned prior art, although a planar heating element formed from a single sheet of heat-generating material meets the demands for high-temperature heating and high-speed response, for example, it produces unnecessary waste from the back side. There is a lot of heat dissipation and a lot of heating i! Flow is necessary. Moreover, there is a problem in that the temperature distribution within the heat generating surface lacks uniformity.
１枚シートの発熱面は、その表裏両面から熱を放散する
からであり、高融点金属やＩＡ素材は高い導電率を持っ
ているからである。加熱電流を少なく抑えるために、１
枚シートの面内にスリットを切り込むことも可能だが、
当然ながらスリット部分は発熱しないので１発熱面の面
内での温度分布が劣悪になってしまう。This is because the heat generating surface of a single sheet radiates heat from both the front and back surfaces, and the high melting point metal and IA material have high electrical conductivity. In order to keep the heating current low, 1
It is also possible to cut slits within the plane of the sheet, but
Naturally, since the slit portion does not generate heat, the temperature distribution within one heating surface becomes poor.
本発明は、従来技術が未解決に残していた上記の課題に
鑑み、少ない加熱電流で高温に発熱し、しかも、発熱面
の温度分布の均温性に優れた面状発熱体を提供すること
を１」的とする。In view of the above-mentioned problems left unsolved by the prior art, the present invention provides a planar heating element that generates heat at a high temperature with a small heating current and has excellent uniformity of temperature distribution on the heating surface. Let 1 be the target.
課ｉｆｉを解決するための手段
本発明は、上記の目的を達成するために、加熱電流の流
路が面内に定められている２以上の発熱面を間隔をあけ
て平行に重ねることにより、面状発熱体を構成するもの
である。また、平行に重ねた発熱面の内の少なくとも１
の発熱面には、その発熱面上での周辺部分の温度が中央
部分の温度よりも高温に発熱する流路を設けるものであ
る。Means for Solving the Issues The present invention achieves the above object by stacking two or more heating surfaces in parallel with a space between them, each of which has a heating current flow path defined within the surface. This constitutes a planar heating element. In addition, at least one of the heating surfaces stacked in parallel
The heat generating surface is provided with a flow path that causes the temperature of the peripheral portion of the heat generating surface to be higher than the temperature of the central portion.
作 用
上記の構成によれば、加熱電流のジュール熱によって自
己発熱した発熱面は、熱を周囲に放散し、平行に重なる
他の発熱面を加熱（補助加熱）する。Function According to the above configuration, the heat generating surface that self-generates heat due to the Joule heat of the heating current radiates heat to the surroundings and heats other heat generating surfaces that overlap in parallel (auxiliary heating).
そして、該他の発熱面は自己のジュール発熱に加えて補
助加熱を受け、少ない加熱電流でも容易に高温になる。The other heating surface receives auxiliary heating in addition to its own Joule heating, and easily reaches a high temperature even with a small heating current.
しかも、平行に向きあった発熱面の間では、上記の自己
発熱と補助加熱により１両者がほぼ同等の温度で熱を輻
射しあうとともに、お互いが他の発熱面からの熱輻射に
対しては、熱を反射しあう作用をする。そして、平行に
向きあった発熱面同志が協調して発熱し１面状発熱体か
ら外部へ漏れる無駄な熱損失を防ぎながら発熱面の面内
での熱的均衡を保つ働きをする。Furthermore, between the heating surfaces facing parallel to each other, both sides radiate heat to each other at approximately the same temperature due to the above-mentioned self-heating and auxiliary heating, and each side is resistant to heat radiation from other heating surfaces. , act to reflect heat. The parallel heating surfaces cooperate to generate heat, and work to maintain thermal balance within the plane of the heating surfaces while preventing wasteful heat loss from leaking to the outside from the one-plane heating element.
また１発熱面に形成された、周辺部分が中央部分より高
温に加熱する発熱面の流路は、面状発熱体の発熱血縁端
からの熱放散に対して、それを補うように作用し１発熱
面の面上での温度分布を均温化する働きをする。In addition, the flow path of the heat generating surface, in which the peripheral portion is heated to a higher temperature than the central portion, acts to compensate for heat dissipation from the heat generating edge of the planar heating element. It works to equalize the temperature distribution on the heat generating surface.
実施例
以下、本発明のいくつかの実施例について、図面を参照
して説明する。なお、以下の図面の説明において、同一
要素には同一符号を付し、その説明の重複をさけている
。Embodiments Hereinafter, some embodiments of the present invention will be described with reference to the drawings. In addition, in the following description of the drawings, the same elements are given the same reference numerals to avoid duplication of the description.
第１図は１本発明の第一の実施例の要部構成を示す構造
図であり、同図（２）は一部を切り欠いた上面図、同図
（ハ）は側面図を示している８図において、面状発熱体
１０は１間隔をあけて平行に重ねた３枚の発熱面１ （
ｌａ、 ｌｂ、ｌｃ）と、発熱面１ （ｌａ、 ｌｂ、
ｌｃ）を電気的に直列接続する導電性の接続コマ３（３
ａ、３ｂ）と、発熱面１ （ｌａ、１ｂ、ｌｃ）を３−
間隔に支持する絶縁性の支持コマ４ （４ａ、 ４ｂ）
により構成されている６発熱面１ （ｌａ、 ｌｂ、
Ｉｃ）は、−辺の長さが約１００−の概ね正方形の板状
体であり、板厚が３ｗｍの炭素／炭素繊維複合材料（以
下、ｃ／ｃ）の板材から切り出されている。そして１発
熱面１ （ｌａ、１ｂ、ｌｃ）には、幅が３ｗ１１のス
リット２１ （２１ａ、 ２１ｂ、２１ｃ）が切り込ま
れ１発熱面１ （１ａ、 ｌｂ、 ｌｃ）の面上には、
ジグザグ状の加熱電流流路２（２ａ、２ｂ、２ｃ）が形
成されている。発熱面１ （ｌａ、１ｂ、ｌｃ）の電気
抵抗値は、１０００℃に加熱した時、約０．３Ωである
。面状発熱体１０全体での抵抗値は、約１Ωである。そ
して、発熱面１ａ、１ｃに接続されている電極５（５ａ
、ｓｂ）経由で面状発熱体１０に加熱電流を流したとこ
ろ、電流値が３５Ａのとき、発熱面１ａの温度は１００
０℃になった。FIG. 1 is a structural diagram showing the main part configuration of the first embodiment of the present invention, FIG. 1 (2) is a partially cutaway top view, and FIG. In Figure 8, the planar heating element 10 consists of three heating surfaces 1 (
la, lb, lc) and heating surface 1 (la, lb,
conductive connecting piece 3 (3
a, 3b) and heating surface 1 (la, 1b, lc) as 3-
Insulating support pieces 4 (4a, 4b) supported at intervals
6 heating surfaces 1 (la, lb,
Ic) is a generally square plate-like body with a side length of approximately 100 mm, and is cut from a plate of carbon/carbon fiber composite material (hereinafter referred to as C/C) with a plate thickness of 3wm. A slit 21 (21a, 21b, 21c) with a width of 3w11 is cut into each heat generating surface 1 (la, 1b, lc), and on the surface of each heat generating surface 1 (1a, lb, lc),
A zigzag heating current flow path 2 (2a, 2b, 2c) is formed. The electrical resistance value of the heat generating surfaces 1 (la, 1b, lc) is approximately 0.3Ω when heated to 1000°C. The resistance value of the sheet heating element 10 as a whole is about 1Ω. Then, the electrodes 5 (5a
, sb), when a heating current is passed through the sheet heating element 10, when the current value is 35A, the temperature of the heating surface 1a is 100.
The temperature has reached 0℃.
この実施例の構成によれ゛ば、発熱面ｉ （Ｉａ、１ｂ
、ｌｃ）の流路２（２ａ、２ｂ、２ｃ）は、加熱電流の
ジュール熱により自己発熱する。そして、発熱面１ａは
。According to the configuration of this embodiment, the heating surface i (Ia, 1b
, lc), the flow paths 2 (2a, 2b, 2c) self-heat by Joule heat of the heating current. And the heat generating surface 1a.
発熱面１ａの自己発熱に加えて発熱面１ｂ、１ｃからも
補助加熱を受ける。このため、発熱面１ａは１発熱面１
ｂ、１ｃなしで発熱面１ａのみが単独で発熱する場合に
比べ、低い加熱電流値で高温になる。−ちなみに、発熱
面１ｂ、１ｃを取付けずに発熱面１ａのみに加熱電流を
加えた場合には１発熱面１ａを１ｏｏｏ”ｃに加熱する
ために、６５Ａ以上の加熱電流が必要であった。In addition to the self-heating of the heat-generating surface 1a, auxiliary heating is also received from the heat-generating surfaces 1b and 1c. Therefore, the heating surface 1a is 1 heating surface 1
Compared to the case where only the heat generating surface 1a generates heat independently without b and 1c, the temperature becomes high with a lower heating current value. -By the way, when heating current was applied only to the heating surface 1a without attaching the heating surfaces 1b and 1c, a heating current of 65 A or more was required to heat one heating surface 1a to 1ooo''c.
そして、上記のように１本発明によれば面状発熱体の加
熱電流を少なくできるので、電極５（５ａ、５ｂ）に要
求される許容電流定格を低減でき、電極の構造を簡素化
できる。しかも、加熱電流を供給する電源装置や制御装
置の負担や定格を大幅に軽減することもできる。As described above, according to the present invention, the heating current of the planar heating element can be reduced, so the allowable current rating required for the electrodes 5 (5a, 5b) can be reduced, and the structure of the electrodes can be simplified. Moreover, the burden and rating of the power supply device and control device that supply the heating current can be significantly reduced.
また、上記の実施例の構成によれば、発熱面１ａのスリ
ット２１ａと発熱面１ｂの流路２ｂは直交している。そ
して、発熱面１ａのスリット２１ａを通過して発熱面１
ｂから熱が発熱面１ａの面上に放射する。その結果、実
質的に発熱面１ａから放射する熱を均質化し、発熱面ｌ
ａ上に設置される図示されぬ被加熱物を均温で加熱して
加熱ｌ、うを生じない。Further, according to the configuration of the above embodiment, the slit 21a of the heat generating surface 1a and the flow path 2b of the heat generating surface 1b are perpendicular to each other. Then, the heat generating surface 1 passes through the slit 21a of the heat generating surface 1a.
Heat is radiated from b onto the heat generating surface 1a. As a result, the heat radiated from the heat generating surface 1a is substantially homogenized, and the heat radiating from the heat generating surface 1a is substantially homogenized.
An object to be heated (not shown) placed on top (a) is heated at a uniform temperature so that heating does not occur.
さらにまた、発熱面１ｂは発熱面１ａが輻射する熱の一
部を反射して発熱面１ａにもどす、同様に１発熱面１ｃ
も発熱面１ｂの輻射熱を反射して発熱面１ｂにもどす。Furthermore, the heat generating surface 1b reflects a part of the heat radiated by the heat generating surface 1a and returns it to the heat generating surface 1a.Similarly, the heat generating surface 1c
also reflects the radiant heat from the heat generating surface 1b and returns it to the heat generating surface 1b.
その結果、発熱面１ａは累積的な反射を受けて短時間で
高温になる。As a result, the heat generating surface 1a receives cumulative reflection and becomes hot in a short time.
発熱面１ｃの温度を発熱面１ａ、 ｌｂより低くするで
とで外部への熱の放散（損失）を抑えることもできる。By making the temperature of the heat generating surface 1c lower than that of the heat generating surfaces 1a and lb, it is also possible to suppress heat dissipation (loss) to the outside.
すなわち、上記の実施例の説明では、発熱面１ （ｌａ
、１ｂ、ｌｃ）の抵抗値は同じとして例示したが、これ
らの発熱面１ （ｌａ、 ｌｂ、 ｌｃ）の抵抗値を違
えることで可能である０発熱面１ｃの抵抗値を発熱面ｌ
Ｏの抵抗値より小さく設定すれば、発熱面Ｌｃの加熱温
度は、発熱面１ａの加熱温度よりも低くなる。その結果
１発熱面１ｃがら外部に放散する熱量を少なくでき、面
状発熱体の発熱効率を一段と高くすることができる。That is, in the description of the above embodiment, the heat generating surface 1 (la
, 1b, lc) are the same, but it is possible to change the resistance value of the heating surface 1c by changing the resistance value of the heating surface 1 (la, lb, lc).
If it is set smaller than the resistance value of O, the heating temperature of the heat generating surface Lc will be lower than the heating temperature of the heat generating surface 1a. As a result, the amount of heat dissipated to the outside from one heating surface 1c can be reduced, and the heating efficiency of the planar heating element can be further increased.
次に第２図に示す構造図を参照して第二の実施例を説明
する。なお、同図０は上面図、同図（ｂ）は側面図を示
している。そして、この第二の実施例の構造が第一の実
施例の構成と異なる主な点は。Next, a second embodiment will be described with reference to the structural diagram shown in FIG. Note that FIG. 0 shows a top view, and FIG. 0 shows a side view. What are the main points in which the structure of this second embodiment differs from that of the first embodiment?
発熱面１ｄ、 ｌｅが２枚の円板で形成されており、し
かも、発熱面１ｅ↓こは中央部分を中空部とするＣ字状
の流路２ｅが形成されている点である。なお、発熱面１
ｄ、 ｌｅは板厚が３ｍのｃ／ｃ板がら切り出された外
径が約９０＋ｎｏ＋の円板である。そして、発熱面１ｄ
にはスリット２１ｄが切り込まれてジグザグパターンの
流路２ｄが形成されている。The heating surfaces 1d and 1e are formed of two discs, and the heating surface 1e is formed with a C-shaped flow path 2e with a hollow central portion. In addition, heating surface 1
d and le are disks with an outer diameter of about 90+no+ cut out from a C/C plate with a thickness of 3 m. And the heating surface 1d
A slit 21d is cut in to form a flow path 2d in a zigzag pattern.
この第二の実施例の構成によれば１発熱面１ｄの流路２
ｄは発熱面１ｅの流路２ｅと直列に接続している。According to the configuration of this second embodiment, the flow path 2 of the 1 heat generating surface 1d
d is connected in series with the flow path 2e of the heat generating surface 1e.
発熱面１ｅの流路２ｅは、加熱電流によってドーナツ状
に発熱する。そして、発熱面１ｄの周辺部分を補助加熱
する働きをする。このため１発熱面１ｄは自己発熱に加
えて発熱面１ｅからも熱を受け、発熱面ｌｄの縁端部分
で生じる放散を補うことになる。その結果、発熱面１ｅ
が無い場合には、発熱面１ｄの面上温度分布が激しく山
なりであったが１発熱を備えたことにより温度分布が均
温化し、平坦な温度分布が得られた。なお、発熱面１ｄ
の中央部に開いた中空部分は、発熱板１ｄの中央部分か
らの熱の放散を容易にし、該中央部分の温度を下げて温
度分布を一段と平坦化する働きをしている。The flow path 2e of the heat generating surface 1e generates heat in a donut shape due to the heating current. Then, it functions to auxiliary heat the peripheral portion of the heat generating surface 1d. Therefore, the heat generating surface 1d receives heat from the heat generating surface 1e in addition to self-heating, thereby supplementing the radiation generated at the edge portion of the heat generating surface ld. As a result, the heating surface 1e
When there was no heat generation surface, the temperature distribution on the surface of the heat generating surface 1d was extremely hilly, but by providing one heat generation, the temperature distribution became uniform and a flat temperature distribution was obtained. In addition, the heating surface 1d
The hollow portion opened at the center of the heating plate 1d facilitates the dissipation of heat from the center of the heat generating plate 1d, lowers the temperature of the center, and further flattens the temperature distribution.
次に第３図を参照して、本発明の第三の実施例について
説明する．なお１図面（ａ）は平行に重ねて設けられる
１の発熱体１ｆの上面図，同図（ハ）は上記■の発熱体
Ｉｆと平行に設けられる他Ｑ発熱体１ｇの上面図を示し
ている。Next, referring to FIG. 3, a third embodiment of the present invention will be described. Note that drawing 1 (a) is a top view of heating element 1 f that is provided in parallel and superimposed, and drawing (c) is a top view of heating element 1 g that is provided parallel to heating element If of above (■). There is.
この第三の実施例の構成が第２の実施例の構成と異なる
主な点は、次の通りである．すなわち、第１に、発熱面
Ｉｆ， Ｉｇには渦巻状のスリット２１ｆ、２１ｇが切
り込まれているとと、第２に、発熱面１ｇの中央部分に
は幅の広い流路２ ｇ ｌが形成されていることである
．なお、上記の幅の広い流路２ｇ ｌを除き，他の流路
２ｆ、２ｇは、幅が等しく形成されている。そして、図
法の発熱面ｉｆ、１ｇは互い多こ平行に間隔をあけて積
み重ねられ、これらの発熱面１ｆ、Ｉｇの流路２ｆ、２
ｇ （２ｇ″）は図示されぬ接続コマで直列に接続され
ている。The main points in which the configuration of this third embodiment differs from the configuration of the second embodiment are as follows. That is, firstly, spiral slits 21f and 21g are cut into the heat generating surfaces If and Ig, and secondly, a wide channel 2gl is formed in the center of the heat generating surface 1g. It is being formed. Note that, except for the wide channel 2gl, the other channels 2f and 2g are formed to have the same width. The heating surfaces if and 1g of the projection are stacked parallel to each other at intervals, and the flow paths 2f and 2 of these heating surfaces 1f and Ig are stacked parallel to each other at intervals.
g (2g'') are connected in series by a connecting piece (not shown).
この第三の実施例の構成によれば、加熱電流の供給を受
けた発熱面１ｇは，中央部分の幅の広い流路２ｇ′を除
いて、その周辺をとり巻く流路２ｇのみが高温に発熱す
る．そして、発熱面１ｇは，それに重なる発熱面Ｉｆの
周辺部分を集中的に補助加熱する．一方、発熱面１ｇの
中央部分では、流路２ｇ＋の幅が広く抵抗値も小さい．
このため、中央部分の流路２ｇ″は、高温には発熱せず
、もっばら発熱面１ｆからの熱を受けてその一部を発熱
面！ｆに反射する働きをする。その結果、発熱面Ｉｆの
温度分布は平坦になる。この第三の実施例によれば、発
熱面１ｇの中央部分に設けた流路２ｇ′は、発熱面ｉｆ
の熱を外部に逃さず反射する。そして、面状発熱体の裏
面への熱の拡りを抑え、発熱体周囲の断熱構造を簡易化
可能にする効果がある。According to the configuration of the third embodiment, in the heat generating surface 1g supplied with heating current, except for the wide channel 2g' in the central portion, only the channel 2g surrounding it becomes high temperature. I get a fever. The heat generating surface 1g intensively auxiliary heats the peripheral portion of the heat generating surface If overlapping with it. On the other hand, in the central part of the heat generating surface 1g, the width of the flow path 2g+ is wide and the resistance value is small.
Therefore, the flow path 2g'' in the center does not generate heat at a high temperature, but rather receives heat from the heat generating surface 1f and reflects a part of it to the heat generating surface !f.As a result, the heat generating surface The temperature distribution of If becomes flat.According to this third embodiment, the flow path 2g' provided in the center of the heating surface 1g
Reflects the heat without escaping it to the outside. This has the effect of suppressing the spread of heat to the back surface of the planar heating element and simplifying the insulation structure around the heating element.
なお、１−記の本発明の詳細な説明では、発熱面を平面
状としたが、それに限らない。例えば。In addition, in the detailed description of the present invention in item 1-, the heat generating surface is assumed to be planar, but the invention is not limited thereto. for example.
発熱面を円筒状に形成して同軸状に筒状の発熱面を重ね
ることも可能である。It is also possible to form the heat generating surfaces in a cylindrical shape and overlap the cylindrical heat generating surfaces coaxially.
さらにまた、発熱面に使用する材料は、ｃ／ｃに限られ
ず、他の金属（例えば、モリブデンやタングステン）、
カーボン、あるいは、１ｆｒｉ性のセラミックス材料を
用いることもできる。Furthermore, the material used for the heat generating surface is not limited to C/C, but may also include other metals (for example, molybdenum or tungsten),
Carbon or a 1fri ceramic material can also be used.
いずれにせよ１本発明は上記の実施例の説明に限定され
ることなく、各種の改変が可能である。In any case, the present invention is not limited to the explanation of the above embodiments, and various modifications can be made.
発明の効果
本発明は以上のように構成したので、少ない加熱電流で
高温に発熱し、しかも、温度分布が平坦で均温性に優れ
た面状発熱体を提供できる。さ−らに、この発明の面状
発熱体は均温化するための金属板を要しないので、無駄
な熱損失が少なく、昇温や降温を高速に行えるという顕
著な効果を奏する。Effects of the Invention Since the present invention is configured as described above, it is possible to provide a planar heating element that generates heat at a high temperature with a small heating current, has a flat temperature distribution, and is excellent in temperature uniformity. Furthermore, since the planar heating element of the present invention does not require a metal plate for temperature equalization, there is little wasted heat loss and the temperature can be raised or lowered quickly, which is a remarkable effect.
第１図（２）、ら）は本発明の第一の実施例の構成図、
第２図（ａ）、（ｂ）は本発明の第二の実施例の構造図
。
第３図（ａ）、（ｂ）は本発明の第三の実施例に係る発
熱面の上面図である。
１・・・発熱面、 ２・・・流路、 ３・・・接続コマ
。
２１・・・スリット、 ５・・・電極（ａ）
コ０
第 ２ 図
第 １
ヌFIG. 1 (2), et al.) is a configuration diagram of the first embodiment of the present invention,
FIGS. 2(a) and 2(b) are structural diagrams of a second embodiment of the present invention. FIGS. 3(a) and 3(b) are top views of a heat generating surface according to a third embodiment of the present invention. 1... Heat generating surface, 2... Channel, 3... Connection piece. 21...Slit, 5...Electrode (a) 0 Fig. 2 1 N
Claims (2)
間隔をあけて平行に重ねたことを特徴とする面状発熱体
。(1) A planar heating element characterized in that two or more heating surfaces that define a heating current flow path within the plane are stacked in parallel with an interval.
分が中央部分より高温に発熱する加熱電流の流路を形成
していることを特徴とする特許請求項第１項に記載の面
状発熱体。(2) The surface according to claim 1, wherein the at least one heat generating surface has a peripheral portion on the heat generating surface forming a flow path for a heating current that generates heat at a higher temperature than a central portion. shaped heating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29792589A JP2849415B2 (en) | 1989-11-16 | 1989-11-16 | Planar heating element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29792589A JP2849415B2 (en) | 1989-11-16 | 1989-11-16 | Planar heating element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03159092A true JPH03159092A (en) | 1991-07-09 |
| JP2849415B2 JP2849415B2 (en) | 1999-01-20 |
Family
ID=17852867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29792589A Expired - Fee Related JP2849415B2 (en) | 1989-11-16 | 1989-11-16 | Planar heating element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2849415B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007250816A (en) * | 2006-03-16 | 2007-09-27 | Nokodai Tlo Kk | Crystal growth apparatus |
| JP2009187948A (en) * | 2008-02-08 | 2009-08-20 | Ngk Insulators Ltd | Base board heating device |
| JP2017228361A (en) * | 2016-06-20 | 2017-12-28 | 日本特殊陶業株式会社 | Heating member and electrostatic chuck |
| WO2018143288A1 (en) * | 2017-02-01 | 2018-08-09 | 日本特殊陶業株式会社 | Holding device |
-
1989
- 1989-11-16 JP JP29792589A patent/JP2849415B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007250816A (en) * | 2006-03-16 | 2007-09-27 | Nokodai Tlo Kk | Crystal growth apparatus |
| JP4631072B2 (en) * | 2006-03-16 | 2011-02-16 | 農工大ティー・エル・オー株式会社 | Crystal growth equipment |
| JP2009187948A (en) * | 2008-02-08 | 2009-08-20 | Ngk Insulators Ltd | Base board heating device |
| JP2017228361A (en) * | 2016-06-20 | 2017-12-28 | 日本特殊陶業株式会社 | Heating member and electrostatic chuck |
| WO2018143288A1 (en) * | 2017-02-01 | 2018-08-09 | 日本特殊陶業株式会社 | Holding device |
| JPWO2018143288A1 (en) * | 2017-02-01 | 2019-02-14 | 日本特殊陶業株式会社 | Holding device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2849415B2 (en) | 1999-01-20 |
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