JPH03156308A - Ultrasonic transducer - Google Patents
Ultrasonic transducerInfo
- Publication number
- JPH03156308A JPH03156308A JP1295484A JP29548489A JPH03156308A JP H03156308 A JPH03156308 A JP H03156308A JP 1295484 A JP1295484 A JP 1295484A JP 29548489 A JP29548489 A JP 29548489A JP H03156308 A JPH03156308 A JP H03156308A
- Authority
- JP
- Japan
- Prior art keywords
- wave
- ultrasonic
- ultrasonic wave
- measured
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims 3
- 230000007423 decrease Effects 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000001228 spectrum Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
PURPOSE:To make it possible to measure the film thickness of the minute part of an object to be measured based on the spectrum of a reflected wave by providing the piezoelectric parts of a transmitting part and a receiving part at a concave surface part in a ring strip shape, converging ultrasonic waves, and obliquely projecting the ultrasonic waves on the object to be measured. CONSTITUTION:The piezoelectric parts of a transmitting part 31 and a receiving part 32 are formed on the concave part on a spherical surface. High frequency pulses are applied on electrodes 4, 34 and 35 of the transmitting part 31. Thus an ultrasonic wave is generated. The ultrasonic wave is made to advance on a medium 5 and converged. When an object to be measured 8 is placed in the vicinity of the converging point, the wave is inputted into the object 8 at an approximately constant incident angle with a certain width being provided. Then, the ultrasonic wave is reflected from the surface of the object and received with the receiving part 32. Since the ultrasonic wave reaches the surface of the object 8 in the converg ing pattern, the beam is narrowed, and the film thickness at the part of a minute area can be measured. The ultrasonic wave generated in the transmitted part 31 is the spherical wave, and the reflected ultrasonic wave is also the spherical wave. Since those waves are received with the receiving part 32, the film thickness can be measured even if the transducer part is slightly inclined with respect to the object surface 8.
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、基板上に形成された膜、たとえばメツキ、コ
ーティング、塗装等により形成された膜の膜厚を測定す
る超音波膜厚計に使用されるトランスデユーサに関し、
その目的とするところは測定対象物の微小域を測定でき
、測定対象物とトランスデユーサの相対的な角度調整に
余裕のある集束超音波トランスデユーサを提供すること
にある。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to an ultrasonic film thickness meter that measures the film thickness of a film formed on a substrate, such as a film formed by plating, coating, painting, etc. Regarding the transducer used,
The purpose is to provide a focused ultrasonic transducer that can measure a minute area of an object to be measured and that allows for relative angle adjustment between the object to be measured and the transducer.
〈従来技術〉<Conventional technology>
Claims (1)
波伝播用の液体から固体基板に入射する超音波の入射角
が基板、液体および膜の物質に固有の値で、かつ超音波
の波長（λ）と膜厚（ｄ）の比が基板、液体および膜の
物質に固有の値（Ｈ）のとき超音波の反射率が低下する
ことを利用して、反射率の強度が低下する超音波の波長
を測定し、下記（１）式 ｄ＝λ・Ｈ・・・（Ｉ） によって膜厚を求める場合に使用する超音波トランスデ
ューサにおいて、凹面部に送波部と受波部が輪帯状（円
形開口の中心部が小さい円盤で塞がれているような開口
が輪帯状のもの、アニュラー型ともいう。）に形成され
た超音波トランスデューサ。[Claims] 1) When measuring the thickness of a film formed on a solid substrate, the angle of incidence of the ultrasonic wave incident on the solid substrate from the liquid for ultrasonic propagation is unique to the substrate, the liquid, and the substance of the film. Taking advantage of the fact that the reflectance of ultrasonic waves decreases when the ratio of ultrasonic wavelength (λ) and film thickness (d) is a value (H) specific to the substrate, liquid, and film material, In the ultrasonic transducer used to measure the wavelength of the ultrasonic wave at which the intensity of the reflectance decreases and determine the film thickness using the following formula (1) d = λ H... (I), the wave is transmitted to the concave part. An ultrasonic transducer whose part and receiving part are formed in an annular shape (also called an annular type, where the center of the circular opening is blocked by a small disk).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1295484A JPH07117401B2 (en) | 1989-11-14 | 1989-11-14 | Ultrasonic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1295484A JPH07117401B2 (en) | 1989-11-14 | 1989-11-14 | Ultrasonic transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03156308A true JPH03156308A (en) | 1991-07-04 |
| JPH07117401B2 JPH07117401B2 (en) | 1995-12-18 |
Family
ID=17821208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1295484A Expired - Fee Related JPH07117401B2 (en) | 1989-11-14 | 1989-11-14 | Ultrasonic transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07117401B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579830A (en) * | 1991-09-25 | 1993-03-30 | Toppan Printing Co Ltd | Ultrasonic transducer |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524890A (en) * | 1978-07-17 | 1980-02-22 | Heineman Ralph A | Multipleepurpose machine tool |
| JPH01113606A (en) * | 1987-10-27 | 1989-05-02 | Toppan Printing Co Ltd | Method for measuring thickness of film |
-
1989
- 1989-11-14 JP JP1295484A patent/JPH07117401B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524890A (en) * | 1978-07-17 | 1980-02-22 | Heineman Ralph A | Multipleepurpose machine tool |
| JPH01113606A (en) * | 1987-10-27 | 1989-05-02 | Toppan Printing Co Ltd | Method for measuring thickness of film |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579830A (en) * | 1991-09-25 | 1993-03-30 | Toppan Printing Co Ltd | Ultrasonic transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07117401B2 (en) | 1995-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |