JPH03155648A - Wafer cassette - Google Patents

Abstract

PURPOSE:To eliminate the need for inclination by a jig, etc., of wafer cassette itself by tilting the wafer holding groove of a wafer cassette to a vertical surface so that a wafer is slanted fixedly. CONSTITUTION:Since wafer holding grooves 3 are tilted, wafers 2 in a wafer cassette 1 are brought down positively in the direction of the inclination of the wafer holding grooves 3 regardless of the looseness sections of the wafers 2 in the wafer holding grooves 3 by their own weight. Consequently, when the wafer cassette 1 is transferred, the wafers 2 are not moved in the wafer cassette 1 even dusting the transfer because the wafers 2 are brought down in the fixed direction regardless of the looseness of the wafers 2 in the wafer holding grooves 3 in the wafer holding grooves 3, thus preventing during. The wafers 2 in the wafer cassette 1 are sucked through evacuation by a sucking section 5. When the wafers 2 are sucked by the sucking section 5, the wafers 2 are brought down in the fixed direction without regard to the looseness of the wafers 2 in the wafer holding grooves 3, thus preventing the mistake of suction.

Description

[Detailed description of the invention] [Industrial application field 1 The present invention relates to a wafer cassette.

[Prior Art] Conventionally, as shown in FIGS. 3 and 4, a wafer holding groove 3 of a wafer cassette 1 holds a wafer 2 perpendicularly to a plane.

[Problems to be Solved by the Invention] However, in the prior art, since the thickness of the wafer holding groove 3 is thicker than the thickness of the wafer 2, when the wafer 2 is held, the wafer is 2, play occurs within the wafer holding groove 3 and the wafer 2 moves;
Therefore, it causes dust generation.

Further, when automatically transferring the Unibar 2 from the wafer cassette l to a different wafer cassette or wafer port, the position of the wafer 2 is not determined due to the play in the wafer holding groove 3. Therefore, in order to determine the position of the wafer 2, the wafer cassette 1 itself is mechanically tilted using a tilting jig 4 as shown in FIG. There was a problem in that the position within the groove 3 had to be determined.

[Means for Solving the Problems 1] In order to solve the above problems, the wafer cassette of the present invention stores wafers, and the wafer holding groove of the wafer cassette is arranged in a vertical plane so that the wafers are tilted in a certain direction. It is characterized by being oblique to the

[Examples] Examples of the present invention will be described below with reference to the drawings. In FIG. 1, the wafer holding groove 3 of the wafer cassette l
is oblique to the vertical plane. FIG. 2 shows the position of the wafer 2 with respect to the wafer holding groove 3 as seen from the top surface of the wafer cassette l. Because the wafer holding groove 3 is slanted, the wafer 2 in the wafer cassette l always moves in the direction in which the wafer holding groove 3 is inclined, regardless of the amount of play of the wafer 2 in the wafer holding groove 3 due to its own weight. falls down. By doing this, when the wafer cassette 1 is transported, the wafer 2 is moved in the wafer holding groove 3 regardless of the play of the wafer 2 in the wafer holding groove 3.
Since the wafer 2 falls in a fixed direction, the wafer 2 does not move within the wafer cassette 1 even during transportation, and dust generation can be prevented.

FIG. 6 shows an embodiment in which wafers are automatically transferred from the wafer cassette 2 to the wafer port 6. The wafer 2 in the wafer cassette 1 is sucked by the suction unit 5 by vacuum suction.

When the wafer 2 is sucked by the suction unit 5, the wafer 2 is
Since the wafer 2 in the wafer holding groove 3 is tilted in a fixed direction regardless of its play, suction errors are less likely to occur.The suctioned wafer 2 is transferred onto the wafer port 6 and transferred.

[Effects of the Invention] As described above, the wafer cassette of the present invention can eliminate the looseness of the wafer in the wafer holding groove by making the wafer holding groove oblique with respect to the vertical plane. It has the effect of preventing Furthermore, when transferring a wafer, the position of the wafer is determined within the wafer holding groove, so there is no need to tilt the wafer cassette itself using a jig or the like.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a wafer cassette according to the present invention. FIG. 2 is a diagram showing the position of wafers as seen from the top of the wafer cassette of the present invention. FIG. 3 is a cross-sectional view of a conventional wafer cassette. FIG. 4 is a diagram showing the positions of wafers seen from the top of a conventional wafer cassette. FIG. 5 is a diagram showing a method of positioning wafers in a conventional wafer cassette. FIG. 6 is a diagram showing an embodiment in which wafers are transferred using the wafer cassette of the present invention. Figure 1 Figure 2 Wafer cassette wafer Wafer holding groove Inclined jig Adsorption part Wafer port 'I63 diagram! ! 4 or more Broom S diagrams

Claims (1)

[Claims] A wafer cassette for storing wafers, characterized in that a wafer holding groove of the wafer cassette is oblique to a vertical plane so that the wafer is tilted in a certain direction.