JPH03153011A - Laminated transformer - Google Patents

Laminated transformer

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Publication number
JPH03153011A
JPH03153011A JP1292830A JP29283089A JPH03153011A JP H03153011 A JPH03153011 A JP H03153011A JP 1292830 A JP1292830 A JP 1292830A JP 29283089 A JP29283089 A JP 29283089A JP H03153011 A JPH03153011 A JP H03153011A
Authority
JP
Japan
Prior art keywords
coil
electrodes
insulating layer
coil element
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1292830A
Other languages
Japanese (ja)
Other versions
JPH0777175B2 (en
Inventor
Takashi Kobayashi
隆 小林
Satoshi Murata
諭 村田
Nobuhito Ooshima
序人 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP1292830A priority Critical patent/JPH0777175B2/en
Publication of JPH03153011A publication Critical patent/JPH03153011A/en
Publication of JPH0777175B2 publication Critical patent/JPH0777175B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To prevent a drop in a self-resonance frequency due to capacitive coupling between coil electrodes by a method wherein insulating layers where the coil electrodes constituting a first coil element and a second coil element have been formed are laminated alternately, the coil electrodes corresponding to the individual coil elements are connected and the spiral-shaped coil element is formed. CONSTITUTION:In a laminated transformer, three layers each of ceramic insulating layers 2A to 2C and 3A to 3C constituting a first coil element and a second coil element L5, L6 are laminated alternately; protective substrates 4, 1 are laminated on the surface and the rear surface. In said insulating layers, coil electrodes 5A to 5C, 6A to 6C which constitute parts of the coil elements and whose winding diameter becomes smaller toward the lower-layer side are formed; the coil electrodes 6B and 6C are connected via a through-hole connecting piece 13b formed in the insulating layer 2C and a through-hole terminal 13c of the coil electrode 6C of the insulating layers 3C; the coil electrodes 6B and 6A are connected via a through-hole connecting piece 12b formed in the insulating layer 2B and a through-hole terminal 12c of the coil electrode 6B of the insulating layer 3B; the second spiral-shaped coil element L6 is constituted between external lead-out electrodes 11, 14 of the coil electrode 6A, 6C. In the same manner, the first coil element L5 is formed.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、各種トランスやコモンモードチョークコイル
、バラン等として用いることのできる積層トランスに関
する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laminated transformer that can be used as various transformers, common mode choke coils, baluns, and the like.

[背景技術] 第10図には、従来の積層トランスの構造を示しである
。この図は、積層前における保護基板及び絶縁層を展開
して示す平面図であり、導体膜を形成された各絶縁層5
2A、52B、53A、53Bを順次下から積層し、そ
の積層体の上下戸面にさらに、保護基板54.51を積
層される。このうち、下から第2層の絶縁基板52Bに
は、約2ターン程度の渦巻き状した線輪電極55Bが導
体膜によって形成されており、線輪電極55Bの一端は
外部引出し電極59となり、他端にはスルーホール構造
のスルーホール端子58Bが設けられている。また、こ
の下に積層される第1層の絶縁層52Aの表面°には、
導体膜によって直線状の線輪電極55Aが形成されてお
り、この線輪電極55Aの一端は外部引出し電極57と
なり、他端には上層のスルーホール電極58bと対向さ
せて子端子58aが形成されている。しかして、この第
1層の絶縁層52Aと52Bが積層されることにより、
スルーホール端子58bを介して、上下の線輪電極55
B、55Aが接続され、外部引出し電極57.59間に
一方のコイル素子(−次コイル)が形成される。また、
下から3層目の絶縁層53Aの表面には、導体膜によっ
て渦巻き状をした2ターン未満の線輪電極56Aが形成
されており、線輪電極56Aの一端は外部引出し電極6
0となり、他端には子端子61aが設けられている。
[Background Art] FIG. 10 shows the structure of a conventional laminated transformer. This figure is an expanded plan view showing the protective substrate and insulating layer before lamination, and each insulating layer 5 on which a conductive film is formed.
2A, 52B, 53A, and 53B are laminated sequentially from the bottom, and protective substrates 54 and 51 are further laminated on the upper and lower door surfaces of the laminated body. Among these, on the insulating substrate 52B, which is the second layer from the bottom, a spiral wire electrode 55B with about two turns is formed of a conductive film, and one end of the wire wire electrode 55B becomes an external extraction electrode 59, and the other end is formed of a conductive film. A through-hole terminal 58B having a through-hole structure is provided at the end. Moreover, on the surface of the first insulating layer 52A laminated below,
A linear wire electrode 55A is formed of a conductor film, one end of this wire electrode 55A serves as an external lead electrode 57, and a child terminal 58a is formed at the other end to face the upper layer through-hole electrode 58b. ing. By stacking the first insulating layers 52A and 52B,
Upper and lower coil electrodes 55 are connected via through-hole terminals 58b.
B and 55A are connected, and one coil element (-secondary coil) is formed between the external extraction electrodes 57 and 59. Also,
On the surface of the third insulating layer 53A from the bottom, a coil electrode 56A having a spiral shape of less than two turns is formed by a conductor film, and one end of the coil electrode 56A is connected to the external extraction electrode 6.
0, and a child terminal 61a is provided at the other end.

一方、その上に積層される第4層の絶縁層53Bの表面
には、導体膜によって直線状した線輪電極58Bが形成
されており、この線輪電極56Bの一端は外部引出し電
極62となり、他端には下層の子端子81aと対向させ
てスルーホール構造のスルーホール端子61bが設けら
れている。しかして、第3層及び第4層の絶縁層53A
、53Bを積層することにより、スルーホール端子81
bを介して、上下の線輪電極56B、58Aが接続され
、外部引出し電極60.82間に他方のコイル素子(二
次コイル)が形成される。そして、保護基板51と各絶
縁層52A、52B、53A。
On the other hand, on the surface of the fourth insulating layer 53B laminated thereon, a linear wire electrode 58B is formed of a conductor film, and one end of this wire wire electrode 56B becomes an external extraction electrode 62. At the other end, a through-hole terminal 61b having a through-hole structure is provided to face the lower-layer child terminal 81a. Therefore, the third and fourth insulating layers 53A
, 53B, the through-hole terminal 81
The upper and lower wire ring electrodes 56B and 58A are connected via b, and the other coil element (secondary coil) is formed between the external extraction electrodes 60 and 82. And the protective substrate 51 and each insulating layer 52A, 52B, 53A.

53Bと保護基板54を順次積層及び焼成した後、その
積層体の外面に外部電極を形成することにより(両コイ
ル素子の外部引出し電極57と60は、外部電極によっ
て接続される。)第4図と同様な等節回路を持つ積層ト
ランスが構成される。
53B and the protective substrate 54 are sequentially laminated and fired, and then an external electrode is formed on the outer surface of the laminated body (the external lead electrodes 57 and 60 of both coil elements are connected by the external electrode). A laminated transformer with an equinodal circuit similar to is constructed.

第12図には、別な従来例の積層トランスの構造を示し
である。各絶縁層72A、72B、72C,72D、7
3A、73B、73Cの表面には、導体膜によってほぼ
等しい巻径を有する1ターン未満の線輪電極75A、7
5B、75C,75D。
FIG. 12 shows the structure of another conventional laminated transformer. Each insulating layer 72A, 72B, 72C, 72D, 7
On the surfaces of 3A, 73B, and 73C, coil electrodes 75A, 7 with less than one turn and having approximately equal winding diameters are formed by conductive films.
5B, 75C, 75D.

76A、18B、76Cがそれぞれ設けられており、こ
れらの絶縁層72A、72B、72C,72D、73A
、73B、73Cを順次下から積層し、さらにその積層
体の上下に保護基板74,71を積層して積層トランス
が構成される。このうち、下から第1層の絶縁層72A
の表面に形成された線輪電極75Aの一端は外部引出し
電極78となり、他端には子端子79aが設けられてい
る。
76A, 18B, 76C are provided respectively, and these insulating layers 72A, 72B, 72C, 72D, 73A
, 73B, and 73C are sequentially stacked from the bottom, and protective substrates 74 and 71 are stacked on top and bottom of the stack to form a multilayer transformer. Among these, the first insulating layer 72A from the bottom
One end of the coil electrode 75A formed on the surface becomes an external lead electrode 78, and the other end is provided with a child terminal 79a.

その上の第2層の絶縁層72Bの表面に形成された線輪
型!75Bの一端には下層の子端子7θaと対向させて
スルーホール端子79bが設けられ、他端には子端子8
0aが設けられている。その上の第3層の絶縁層72C
の線輪型t!75Cの一端には下層の子端子80aと対
向させてスルーホール端子80bが設けられ、他端には
子端子81aが設けられている。さらに、その上の第4
層の絶縁層72Dの線輪電極75Dの一端には下層の子
端子81aと対向させてスルーホール端子81bが設け
られ、他端は外部引出し電極82となっている。そして
、各絶縁層?2A、72B、72C。
A wire ring shape formed on the surface of the second insulating layer 72B above it! A through-hole terminal 79b is provided at one end of 75B to face the child terminal 7θa in the lower layer, and a child terminal 8 is provided at the other end.
0a is provided. The third insulating layer 72C thereon
The wire type t! A through-hole terminal 80b is provided at one end of 75C to face the child terminal 80a in the lower layer, and a child terminal 81a is provided at the other end. Furthermore, the fourth
A through-hole terminal 81b is provided at one end of the coil electrode 75D of the insulating layer 72D to face the child terminal 81a of the lower layer, and the other end is an external lead-out electrode 82. And each insulation layer? 2A, 72B, 72C.

72Dを積層すると、各スルーホール端子79b。When 72D are stacked, each through-hole terminal 79b is formed.

80b、81bを通して線輪電極75A、75B。Wire electrodes 75A, 75B are passed through 80b, 81b.

75C,75Dが接続され、第13図に示すように積層
体77内に一方のコイル素子が形成される。
75C and 75D are connected to form one coil element in the stacked body 77 as shown in FIG.

同様に、下から第5層〜第7層の絶縁層を積層し、第5
層の絶縁層73Aの表面に形成された線輪電極78Aの
一端の子端子84aと第6層の絶縁層73Bの表面の線
輪電極76Bの一端に設けられたスルーホール端子84
bを接続させ、線輪電極76Bの他端に設けられた子端
子85aと第7層の絶縁層’73Cの表面に形成された
線輪電極76Cの一端に設けられたスルーホール端子8
5bを接続させ、線輪電極78A、76B、78Cによ
って外部引出し電極83及び86間に他方のコイル素子
が形成される。
Similarly, the fifth to seventh insulating layers are stacked from the bottom, and the fifth to seventh insulating layers are stacked.
A child terminal 84a at one end of the coil electrode 78A formed on the surface of the insulating layer 73A of the layer, and a through-hole terminal 84 provided at one end of the coil electrode 76B on the surface of the sixth layer insulating layer 73B.
b, and a child terminal 85a provided at the other end of the coil electrode 76B and a through-hole terminal 8 provided at one end of the coil electrode 76C formed on the surface of the seventh layer insulating layer '73C.
5b are connected, and the other coil element is formed between the external extraction electrodes 83 and 86 by the coil electrodes 78A, 76B, and 78C.

「発明が解決しようとする課題] 第10図に示した第一の従来例にあっては、絶縁層52
B、53Aの表面には、巻数が1ターン以上の渦巻き状
した線輪電極55B、5E!Aが形成されているので、
絶縁層52B、53Aの表面において線輪電極55B、
58Aが接近することになり、第11図に示すように隣
接する線輪電極間に大きなストレー容量C8が発生して
いる。
“Problems to be Solved by the Invention” In the first conventional example shown in FIG.
On the surfaces of B and 53A, spiral wire electrodes 55B and 5E with one turn or more are formed. Since A is formed,
On the surfaces of the insulating layers 52B and 53A, wire electrodes 55B,
58A, and as shown in FIG. 11, a large stray capacitance C8 is generated between adjacent wire electrodes.

また、第12図に示し−た第二の従来例にあっては、上
下に連続して積層された絶縁層72A〜72D + 7
3A〜73C上の線輪電極75A〜75D ; 78A
〜76Cによって各コイル素子が形成されているので、
絶縁層(誘電体)を挟んで上下に線輪電極が対向する構
造となり、しかもその導体膜間の距離も絶縁層−層の厚
みだけの小さなものであり、第13図に示すように上下
に対向した線輪電極75A〜75D : 76A〜76
C間に大きなストレー容量C4が発生している。
Moreover, in the second conventional example shown in FIG.
Wire ring electrodes 75A to 75D on 3A to 73C; 78A
Since each coil element is formed by ~76C,
The wire electrodes are arranged vertically facing each other with an insulating layer (dielectric) in between, and the distance between the conductor films is as small as the thickness of the insulating layer. Opposed coil electrodes 75A to 75D: 76A to 76
A large stray capacitance C4 occurs between C and C.

このように、従来のいずれの積層トランスにあっても、
線輪電極間に大きなストレー容量が発生しており、この
ストレー容量を介して生じる線輪電極間の容量結合によ
り高周波導体膜によって1ターン未満の線輪電極を形成
された第一種及び第二種の各複数枚の絶縁層を積層し、
第一種の各絶縁層の線輪電極同士を接続して渦巻ぎ状を
した第一のコイル素子を形成し、第二種の各絶縁層の線
輪電極同士を接続して渦巻き状をした第二のコイル素子
を形成した積層トランスにおいて、第一種の絶縁層と第
二種の絶縁層を交互に積層し、第一種及び第二種の絶縁
層に各絶縁層の表裏間で導通した接続子を設け、第二種
の絶縁層に設けた接続子を介して第一種の絶縁層の線輪
電極同士を接続させて第一のコイル素子を形成子、第一
種の絶縁層に設けた接続子を介して第二種の絶縁層の線
輪電極同士を接続させて第二のコイル素子を形成したこ
とを特徴とする領域における自己共振周波数が低下し、
所定のインダクタンスやインピーダンスを得るのが困難
になっていた。
In this way, no matter what type of conventional laminated transformer it is,
A large stray capacitance occurs between the coil electrodes, and due to the capacitive coupling between the coil electrodes that occurs through this stray capacitance, the coil electrodes of less than one turn are formed with a high frequency conductor film. Laminate multiple insulating layers for each species,
The coil electrodes of each of the first type insulating layers are connected to each other to form a spiral-shaped first coil element, and the coil electrodes of each of the second type of insulating layers are connected to each other to form a spiral shape. In the laminated transformer in which the second coil element is formed, the first type of insulation layer and the second type of insulation layer are alternately laminated, and conduction is established between the front and back of each insulation layer between the first type and the second type of insulation layer. The coil electrodes of the first type insulating layer are connected to each other through the connector provided on the second type insulating layer to form a first coil element. The self-resonant frequency in the region characterized by forming the second coil element by connecting the coil electrodes of the second type of insulating layer to each other via the connector provided in the second type of insulation layer decreases,
It has become difficult to obtain a predetermined inductance or impedance.

しかして、本発明は斜上の従来例の欠点に鑑みてなされ
たものであり、その目的とするところは線輪電極間の容
量結合による自己共振周波数の低下を防止し、積層トラ
ンスの高周波特性を良好にすることにある。
However, the present invention was made in view of the drawbacks of the conventional example of the inclined top, and its purpose is to prevent the self-resonant frequency from decreasing due to capacitive coupling between the coil electrodes, and improve the high frequency characteristics of the laminated transformer. The goal is to make things better.

[課題を解決するための手段コ この貯め、本発明の積層トランスは、導体膜によって1
ターン未満の線輪電極を形成された第−種及び第二種の
各複数枚の絶縁層を積層し、第一種の各絶縁層の線輪電
極同士を接続して渦巻き状をした第一のコイル素子を形
成し、第二種の各絶縁層の線輪電極同士を接続して渦巻
き状をした第二のコイル素子を形成した積層トランスに
おいて、コイル素子の入出力部を形成された絶縁層を除
いて第一種の絶縁層と第二種の絶縁層を交互に積層し、
第一種及び第二種の絶縁層に各絶縁層の表裏間で導通し
た接続子を設け、第二種の絶縁層に設けた接続子を介し
て第一種の絶縁層の線輪電極同士を接続させて第一のコ
イル素子を形成し、第一種の絶縁層に設けた接続子を介
して第二種の絶縁層の線輪電極同士を接続させて第二の
コイル素子を形成したことを特徴としている。
[Means for Solving the Problems] The laminated transformer of the present invention has one
A plurality of insulating layers of the first type and the second type each having a coil electrode of less than a turn are laminated, and the coil electrodes of each of the first type insulating layers are connected to each other to form a spiral-shaped first layer. In a laminated transformer in which a coil element is formed, and a coil electrode of each second type insulating layer is connected to each other to form a spiral second coil element, the input/output part of the coil element is formed with an insulator. The first type of insulating layer and the second type of insulating layer are alternately laminated except for the layer,
Connectors that are electrically connected between the front and back sides of each insulating layer are provided on the first and second type insulating layers, and the coil electrodes of the first type insulating layer are connected to each other via the connectors provided on the second type insulating layer. were connected to form a first coil element, and wire electrodes of the second type of insulating layer were connected to each other via a connector provided on the first type of insulating layer to form a second coil element. It is characterized by

[作用] 本発明にあっては、第一のコイル素子を構成している線
輪電極を形成された絶縁層と第二のコイル素子を構成し
ている線輪電極を形成された絶縁層とを交互に積層し、
しかも各コイル素子が螺旋状をしていて線輪電極毎に巻
径が変化しているので、第一のコイル素子における線輪
電極間の距離及び第二のコイル素子における線輪電極間
の距離が絶縁層の厚み方向で絶縁層の厚みの2倍となり
、しかも線輪電極同士が斜めにずれており、この結果線
輪電極間の距離が絶縁層の厚みの2倍以上となる。従っ
て、各コイル素子内部における線輪電極間のストレー容
量が172以下になる。
[Function] In the present invention, an insulating layer formed with a coil electrode forming the first coil element and an insulating layer forming a coil electrode forming the second coil element. Stacked alternately,
Moreover, since each coil element has a spiral shape and the winding diameter changes for each coil electrode, the distance between the coil electrodes in the first coil element and the distance between the coil electrodes in the second coil element is twice the thickness of the insulating layer in the thickness direction of the insulating layer, and the coil electrodes are diagonally shifted from each other, and as a result, the distance between the coil electrodes is more than twice the thickness of the insulating layer. Therefore, the stray capacitance between the coil electrodes inside each coil element becomes 172 or less.

このため、各コイル素子の線輪電極間の容量結合が小さ
(なり、高周波領域における自己共振周波数が従来の2
倍以上となって自己共振が起こる周波数が高周波側へ大
きく移動し、所望のインダクタンスやインピーダンスを
得ることが容易になり、高周波特性の良好な積層トラン
スを製造することかできる。
Therefore, the capacitive coupling between the coil electrodes of each coil element is small (and the self-resonance frequency in the high frequency region is lower than that of the conventional 2).
The frequency at which self-resonance occurs is more than doubled, and the frequency at which self-resonance occurs largely shifts to the higher frequency side, making it easier to obtain desired inductance and impedance, and making it possible to manufacture a laminated transformer with good high frequency characteristics.

また、第一のコイル素子を形成している線輪電極と第二
のコイル素子を形成している線輪電極とが、交互に配置
されているので、互いの交鎖磁束量が増加して両コイル
素子の結合が密になり、結合係数を大きくとることがで
きる。
In addition, since the wire electrodes forming the first coil element and the wire electrodes forming the second coil element are arranged alternately, the amount of cross-linked magnetic flux between them increases. The coupling between both coil elements becomes tighter, and the coupling coefficient can be increased.

[実施例] 以下、本発明の実施例を添付図に基づいて詳述する。[Example] Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

第1図〜第5図に示すものは、本発明の一実施例であっ
て、第一のコイル素子La(−次コイル)と第二のコイ
ル素子t、a(二次コイル)の一端を互いに共通に接続
した第4図のような等両回路な持つ2分配トランスであ
る。この積層トランス19は1、第一のコイル素子L6
を構成する3層のセラミック絶縁層2A、2B、2Cと
第二のコイル素子L6を構成する3層のセラミック絶縁
層3A、3B、3Cとを交互に積層し、その積層体15
の上下両面にさらに保護基板4.1を積層したものであ
る。下から第1層の絶縁層2Aの表面には、導電ペース
トを一定幅に印刷することによって第一のコイル素子L
6の一部を構成する線輪電極5Aが形成されており、線
輪電極5Aの一端は外部引出し電極7となり、他端には
子端子8aが設けられている。第2層の絶縁層3Aの表
面には、導電ペーストを印刷することによって第二のコ
イル素子L6の一部を構成する線輪電極6Aが配線され
ており、線輪電極6Aの一端は外部引出し電極11とな
り、他端には子端子12aが設けられている。さらに、
第2層の絶縁層には、下層の子端子8aと対応させてス
ルーホール構造のスルーホール接続子8bが設けられて
いる。ここで、スルーホール接続子とは、絶縁層に貫通
させたスルーホール孔の上面周囲及びスルーホール孔内
周及びスルーホール孔の下面周囲に導電ペーストを印刷
及び焼き付けしたものであり、スルーホール接続子の部
分で絶縁層の表裏両面を導通させることができる。第3
層の絶縁層2Bの表面には、第一のコイル素子L6の一
部を構成する線輪電極5Bが配線されており、線輪電極
5Bの一端には下層のスルーホール接続子8bと対向さ
せてスルーホール構造のスルーホール端子8cが設けら
れ、他端には子端子9aが設けられている。このスルー
ホール端子も前記スルーホール接続子と同様な構造を有
し、絶縁層の表裏両面を導通させることができるもので
ある。さらに、絶縁層2Bには下層の子端子12aと対
向させてスルーホール接続子12bを設けである。また
、4層目の絶縁層3Bの表面には、導体膜により第二の
コイル素子L6の一部を構成する線輪電極6Bが配線さ
れており、線輪電極6Bの一端には下層のスルーホール
接続子12bと対向させてスルーホール端子12cを設
け、他端には子端子13aを設けである。さらに、絶縁
層3Bには下層の子端子9aと対向させてスルーホール
接続子9bが設けられている。第5層の絶縁層2Cの表
面には、第一のコイル素子Lllの一部を構成する線輪
電極5Cが設けられており、線輪電極5Cの一端には下
層のスルーホール接続子9bと対向させてスルーホール
端子9Cが設けられており、他端は外部引出し電極10
となっており、さらに下層の子端子13aと対向させて
スルーホール接続子13bが設けられている。
What is shown in FIGS. 1 to 5 is an embodiment of the present invention, in which one end of the first coil element La (-secondary coil) and the second coil element t, a (secondary coil) are connected. This is a two-way distribution transformer with both circuits connected in common, as shown in Figure 4. This laminated transformer 19 includes 1, a first coil element L6
The three ceramic insulating layers 2A, 2B, 2C constituting the second coil element L6 and the three ceramic insulating layers 3A, 3B, 3C constituting the second coil element L6 are alternately laminated to form a laminate 15.
A protective substrate 4.1 is further laminated on both the upper and lower surfaces of the substrate. The first coil element L is printed on the surface of the first insulating layer 2A from the bottom by printing a conductive paste with a constant width.
A coil electrode 5A constituting a part of the coil electrode 6 is formed, one end of the coil electrode 5A serves as an external lead electrode 7, and a child terminal 8a is provided at the other end. A coil electrode 6A forming a part of the second coil element L6 is wired on the surface of the second insulating layer 3A by printing a conductive paste, and one end of the coil electrode 6A is connected to an external drawer. It becomes an electrode 11, and a child terminal 12a is provided at the other end. moreover,
The second insulating layer is provided with through-hole connectors 8b having a through-hole structure in correspondence with the child terminals 8a on the lower layer. Here, a through-hole connector is one in which a conductive paste is printed and baked around the upper surface of a through-hole that penetrates an insulating layer, the inner periphery of the through-hole, and the lower surface of the through-hole. Both the front and back sides of the insulating layer can be electrically connected in the child part. Third
A coil electrode 5B constituting a part of the first coil element L6 is wired on the surface of the insulating layer 2B, and one end of the coil electrode 5B is wired to face the through-hole connector 8b in the lower layer. A through-hole terminal 8c having a through-hole structure is provided at one end, and a child terminal 9a is provided at the other end. This through-hole terminal also has a structure similar to that of the through-hole connector, and is capable of electrically conducting both the front and back surfaces of the insulating layer. Further, the insulating layer 2B is provided with a through-hole connector 12b facing the lower layer child terminal 12a. In addition, on the surface of the fourth insulating layer 3B, a coil electrode 6B constituting a part of the second coil element L6 is wired with a conductive film, and one end of the coil electrode 6B is connected to a through-hole of the lower layer. A through-hole terminal 12c is provided opposite the hole connector 12b, and a child terminal 13a is provided at the other end. Furthermore, through-hole connectors 9b are provided in the insulating layer 3B to face the child terminals 9a in the lower layer. A coil electrode 5C that constitutes a part of the first coil element Lll is provided on the surface of the fifth insulating layer 2C, and one end of the coil electrode 5C is connected to the lower layer through-hole connector 9b. Through-hole terminals 9C are provided facing each other, and the other end is an external extraction electrode 10.
Further, a through-hole connector 13b is provided facing the child terminal 13a in the lower layer.

また、第6層の絶縁層3Cの表面には、第二のコイル素
子しeを構成する線輪電極6Cが設けられており、線輪
電極6Cの一端には下層のスルーホール接続子13bと
対向させてスルーホール端子13cが設けられており、
他端は外部引出し電極14となっている。しかも、各コ
イル素子L6゜L6を構成している線輪電極5A、5B
、5C及び6A、6B、6Cは、下層側のものほど、そ
の巻径が小さくなっている。
Further, on the surface of the sixth insulating layer 3C, a coil electrode 6C constituting the second coil element e is provided, and one end of the coil electrode 6C is connected to the lower layer through-hole connector 13b. Through-hole terminals 13c are provided facing each other,
The other end is an external lead electrode 14. Moreover, the coil electrodes 5A and 5B forming each coil element L6゜L6
, 5C, 6A, 6B, and 6C, the lower the layer, the smaller the winding diameter.

しかして、上記保護基板1及び絶縁層2A、3A、2B
、3B、2C,SC及び保護基板4をグリーンシートの
状態で下から順次積層し、互いに圧着させた後、焼成す
る。この結果、保護基板1゜4及び各絶縁層2A〜20
.3A〜3Cは焼結して接合された積層体15となり、
第3図に示すように積層体15内の各層間に導体膜が埋
め込まれる。しかも、第5図に一部を拡大して示してい
るように、スルーホール接続子13bとスルーホール端
子13cを介して線輪電極6Bと60が接続され、スル
ーホール接続子12bとスルーホール端子12cを介し
て線輪電極6Bと6Aが接続され、外部引出し電極11
及び14間に下層側で巻径が小さくなった渦巻ぎ状の第
二のコイル素子L8が構成され、同様にスルーホール接
続子9bとスルーホール電極9aを介して線輪電極5C
と5Bが接続され、スルーホール接続子8bとスルーホ
ール端子8aを介して線輪電極5Bと5Aが接続され、
外部引出し電極7及び10間に下層側で巻径が小さ(な
った渦巻き状の第一のコイル素子し。が形成される。こ
の後、第2図に示すように、外部引出し電極7,14及
び11.10の露出している箇所に導電ペーストを印刷
及び焼き付けして外部電極16,17.18が形成され
る。外部引出し電極7及び14は、外部電極16によっ
て接続され、第4図のような等価回路となるように両コ
イル素子L6とL8が結線される。
Therefore, the protective substrate 1 and the insulating layers 2A, 3A, 2B
, 3B, 2C, SC, and the protective substrate 4 are sequentially laminated from the bottom in the form of green sheets, pressed together, and then fired. As a result, the protective substrate 1°4 and each insulating layer 2A to 20
.. 3A to 3C are sintered and bonded laminates 15,
As shown in FIG. 3, a conductor film is embedded between each layer in the laminate 15. Moreover, as shown in a partially enlarged view in FIG. The coil electrodes 6B and 6A are connected via the wire electrode 12c, and the external extraction electrode 11
A second spiral coil element L8 with a smaller winding diameter on the lower layer side is constructed between and 14, and similarly connected to the coil electrode 5C via the through-hole connector 9b and the through-hole electrode 9a.
and 5B are connected, and the wire electrodes 5B and 5A are connected via the through-hole connector 8b and the through-hole terminal 8a.
A spiral first coil element with a smaller winding diameter is formed on the lower layer side between the external lead electrodes 7 and 10. After this, as shown in FIG. External electrodes 16, 17, 18 are formed by printing and baking a conductive paste on the exposed parts of 11 and 11.10.External lead electrodes 7 and 14 are connected by external electrode 16, and Both coil elements L6 and L8 are connected to form an equivalent circuit as shown in FIG.

なお、上記の説明では1つの積層トランスを単体で製造
するものとして説明したが、実際の製造工程では、各絶
縁層のマザーシートの上に数10〜数100の線輪電極
のパターンが形成され、これらのマザーシートを積層し
て積層体のマザーボディを形成した後、これを各素子単
位の積層体にカットし、焼成し、さらに積層体の外面に
外部電極を形成する。
Although the above explanation assumes that one laminated transformer is manufactured as a single unit, in the actual manufacturing process, patterns of several tens to hundreds of coil electrodes are formed on the mother sheet of each insulating layer. After laminating these mother sheets to form a mother body of a laminate, this is cut into laminates for each element, fired, and further external electrodes are formed on the outer surface of the laminate.

この結果、第3図及び第5図に示すように、第一のコイ
ル素子Lll用の絶縁層2A、2B、2C同士は、中間
に第二のコイル素子L6用の絶縁層3A、3Bを挟まれ
ているため、第一のコイル素子L6を構成する線輪電極
5A、5B、5C同士は絶縁層の厚み方向でその厚みの
2倍だけ離れており、同様に第二のコイル素子L6を構
成する線輪電極eA、6B、6C同士も絶縁層の厚み方
向でその厚みの2倍だけ離れており、しかも各コイル素
子La、Leは渦巻ぎ状をしていて線輪電極5A〜5C
,6A〜6C同士が斜めにずれているので、各線輪電極
5A〜5C,8A〜6C間の距離が絶縁層の厚みの2倍
以上に大きくなり、このため線輪電極5A、5B、5C
間に発生するストレー容量C1及び線輪電極eA、6B
、eC間に発生するストレー容量子、が非常に小さくな
る。すなわち、第12図及び第13図に示した従来例と
比較してもストレー容量が1/2以下となり、自己共振
周波数も従来の2倍以上となる。また、このような構成
によれば、第一のコイル素子L6と第一のコイル素子り
。が、交互に咬み合うように配置されているので、両コ
イル素子り、、 L、、1間の相互誘導係数を大きくす
ることができる。また、2分配トランスのような広帯域
トランスや高周波トランスに使用する場合には、第一の
コイル素子と第二のコイル素子とで均一な分布容量を得
ることができる。
As a result, as shown in FIGS. 3 and 5, the insulating layers 2A, 2B, 2C for the first coil element Lll are sandwiched between the insulating layers 3A, 3B for the second coil element L6. Therefore, the coil electrodes 5A, 5B, and 5C that constitute the first coil element L6 are separated from each other by twice the thickness in the thickness direction of the insulating layer, and similarly constitute the second coil element L6. The coil electrodes eA, 6B, and 6C are also separated from each other by twice the thickness in the thickness direction of the insulating layer, and each coil element La and Le has a spiral shape.
, 6A to 6C are diagonally shifted from each other, the distance between each coil electrode 5A to 5C, 8A to 6C becomes larger than twice the thickness of the insulating layer.
Stray capacitance C1 and coil electrodes eA, 6B generated between
, the stray capacitance generated between eC becomes very small. That is, even when compared to the conventional examples shown in FIGS. 12 and 13, the stray capacitance is less than 1/2, and the self-resonant frequency is also more than twice that of the conventional example. Moreover, according to such a structure, the first coil element L6 and the first coil element L6. are arranged so as to mesh with each other alternately, so that the mutual induction coefficient between both coil elements L, , 1 can be increased. Further, when used in a wideband transformer or a high frequency transformer such as a two-distribution transformer, uniform distributed capacitance can be obtained between the first coil element and the second coil element.

第6図〜第9図に示すものは、本発明の他側であり、第
−及び第二のコイル素子L251 L28の両端の外部
引出し電極27,31,32.35にそれぞれ別々に外
部電極37.38.39.40を設けたものであり、パ
ルストランスやコモンモードチョークコイルとして用い
られるものである。
What is shown in FIGS. 6 to 9 is the other side of the present invention, in which external electrodes 37 are provided separately at external lead-out electrodes 27, 31, 32, and 35 at both ends of the first and second coil elements L251 and L28. .38, 39, and 40, and is used as a pulse transformer or common mode choke coil.

この実施例における線輪電極のパターンは、第1の実施
例のパターンとほぼ同じであるが、外部引出し電極の位
置が異なっており、そのため第4層〜第7層の線輪電極
25C,26B、25D、26Cのパターンは第1の実
施例の第3層〜第6層の線輪電極5B、eB、5C,8
Cと同じであるが、第1層〜第3層の線輪電極25A、
25B。
The pattern of the coil electrodes in this embodiment is almost the same as the pattern of the first embodiment, but the positions of the external extraction electrodes are different, so that the coil electrodes 25C and 26B of the fourth to seventh layers are , 25D, and 26C are the wire electrodes 5B, eB, 5C, and 8 of the third to sixth layers of the first embodiment.
Same as C, but first to third layer coil electrodes 25A,
25B.

28Aのパターンは第1の実施例とは異なっている。し
かして、この実施例では、保護基板21、各絶縁層22
A、22B、23A、22C,23B、22D、23C
及び保護基板24を順次下から積層し、焼成して一体化
された積層体36内に導電膜の両コイル素子を形成する
ことによって積層トランス41を構成したものであり、
スルーホール端子34c、スルーホール接続子34b及
び平端子34aを介して線輪電極26Cと26Bを接続
し、スルーホール端子33C,スルーホール接続子33
b及び平端子33aを介して線輪電極26Bと28Aを
接続し、外部引出し電極35゜32間に第二のコイル素
子L2Bを構成している。
The pattern of 28A is different from the first embodiment. Therefore, in this embodiment, the protective substrate 21, each insulating layer 22
A, 22B, 23A, 22C, 23B, 22D, 23C
The laminated transformer 41 is constructed by sequentially laminating the protective substrate 24 from the bottom and baking and forming both coil elements of the conductive film in the integrated laminated body 36.
The coil electrodes 26C and 26B are connected via the through-hole terminal 34c, the through-hole connector 34b and the flat terminal 34a, and the through-hole terminal 33C and the through-hole connector 33 are connected.
The coil electrodes 26B and 28A are connected through the flat terminals 33a and 33a, and a second coil element L2B is formed between the external lead electrodes 35 and 32.

一方、スルーホール端子30C1スルーホール接続子3
0b及び平端子30aを介して線輪電極25Dと25C
を接続し、スルーホール端子29c、スルーホール接続
子29b及び平端子29aを介して線輪電極25Cと2
5Bを接続し、スルーホール端子28cを介して線輪電
極25Bと25Aを接続し、外部引出し電極31及び2
7間に第一のコイル素子bQaを構成しである。また、
この実施例にあっても、両コイル素子L26+ TJ2
Bは、渦巻き状をしており、下層の線輪電極25A〜2
5D、28A〜26Cはど巻径が小さくなっている。
On the other hand, through-hole terminal 30C1 through-hole connector 3
0b and the wire electrodes 25D and 25C via the flat terminal 30a.
and connect wire electrodes 25C and 2 via through-hole terminal 29c, through-hole connector 29b and flat terminal 29a.
5B, connect wire electrodes 25B and 25A via through-hole terminal 28c, and connect external lead electrodes 31 and 2.
The first coil element bQa is constructed between the two. Also,
Even in this example, both coil elements L26+TJ2
B has a spiral shape, and the lower wire ring electrodes 25A to 2
5D and 28A to 26C have smaller winding diameters.

そして、積層体の積層後、各外部引出し電極27゜32
.31.35に対応して積層体36の外面に外部引出し
電極37,38,39.40を設けである。
After laminating the laminate, each external lead electrode 27°32
.. External lead electrodes 37, 38, 39, and 40 are provided on the outer surface of the laminate 36 in correspondence to 31.35.

しかして、この従来例にあっても、第一のコイル素子L
2aの入出力部を構成する第1層の線輪電極25Aと第
2層の線輪電極25Bを除と、第一のコイル素子L26
を構成する線輪電極25B、25 C+−25Dと第二
のコイル素子Lu1lを構成する線輪電極2E3A、2
6B、26Cが斜めにずらせて交互に積層されているの
で、第8図に示すように、第一のコイル素子L26を構
成する線輪電jjfA25B、25C,26D間の距離
及び第二のコイル素子し26を構成する線輪電極28A
、28B、26C間の距離が絶縁層の厚みの2倍以上と
なり、第1の実施例と同様、線輪電極間のストレー容量
C2が従来の172以下となり、自己共振周波数が従来
の2倍以上の値になり、積層トランスの高周波特性を良
好にすることができる。また、第一のコイル素子と第二
のコイル素子の間にも容量が生じるので、コモンモード
の除去を主目的とするコモンモードチョークコイルに使
用する場合には、ノーマルモードのノイズの除去も同時
に行なうことができる。
However, even in this conventional example, the first coil element L
2a, except for the first layer coil electrode 25A and the second layer coil electrode 25B, which constitute the input/output section of
Coil electrodes 25B, 25C+-25D constituting the coil element and coil electrodes 2E3A, 2 constituting the second coil element Lu1l.
6B and 26C are stacked alternately with diagonal shifts, so as shown in FIG. Wiring electrode 28A that constitutes the wire 26
, 28B, and 26C is more than twice the thickness of the insulating layer, and as in the first embodiment, the stray capacitance C2 between the coil electrodes is 172 or less than the conventional one, and the self-resonant frequency is more than twice the conventional one. , and the high frequency characteristics of the multilayer transformer can be improved. In addition, since capacitance is generated between the first coil element and the second coil element, when used in a common mode choke coil whose main purpose is to remove common mode, it also removes normal mode noise at the same time. can be done.

なお、上記のいずれの実施例においても、絶縁層の積層
枚数を増やすことにより、コイル素子のターン数を増加
させることがでとる。
In any of the above embodiments, the number of turns of the coil element can be increased by increasing the number of laminated insulating layers.

[発明の効果] 本発明によれば、渦巻き状をした第一のコイル素子を形
成する線輪電極を設けた絶縁層と渦巻ぎ状をした第二の
コイル素子を形成する線輪電極を設けた絶縁層を交互に
積層しているので、同じコイル素子を構成している線輪
電極間の距離が絶縁層の厚みの2倍以上となり、線輪電
極間の距離が大きくなるので、線輪電極間に発生するス
トレー容量が172以下に小さくなる。このため、高周
波領域における自己共振周波数が従来の2倍以上になっ
て自己共振が起こる周波数が高周波側へ移動する。した
がって、自己共振周波数の低下による高周波特性の劣化
を防止することができ、良好な高周波特性の積層トラン
スを得ることができる。
[Effects of the Invention] According to the present invention, an insulating layer provided with a coil electrode forming a first coil element having a spiral shape and a coil electrode forming a second coil element forming a spiral shape are provided. Since the insulating layers are alternately laminated, the distance between the coil electrodes that make up the same coil element is more than twice the thickness of the insulating layer, and the distance between the coil electrodes becomes large. The stray capacitance generated between the electrodes is reduced to 172 or less. Therefore, the self-resonant frequency in the high frequency region becomes more than twice that of the conventional one, and the frequency at which self-resonance occurs shifts to the high frequency side. Therefore, deterioration of high frequency characteristics due to a decrease in self-resonant frequency can be prevented, and a laminated transformer with good high frequency characteristics can be obtained.

また、本発明によれば、第一のコイル素子を構成する線
輪電極と第二のコイル素子を構成する線輪電極とが交互
に積層されているので、積層トランスの相互誘導係数を
大きくすることができる。
Further, according to the present invention, since the coil electrodes constituting the first coil element and the coil electrodes constituting the second coil element are alternately laminated, the mutual induction coefficient of the laminated transformer is increased. be able to.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の積層前における各絶縁層を
示す平面図、第2図は第1図の各絶縁層を積層して形成
された積層トランスの斜視図、第3図は第2図のX−X
線断面図、第4図は同上の積層トランスの等価回路図、
第5図は同上の積層トランスの一部を拡大して示す断面
図、第6図は本発明の他側の積層前における各絶縁層を
示す平面図、第7図は第6図の各絶縁層を積層して形成
された積層トランスの斜視図、第8図は第7図のY−Y
線断面図、第9図は同上の積層トランスの等価回路図、
第10図は第一の従来例の積層前における各絶縁層を示
す平面図、第11図は同上の積層トランス内に発生する
ストレー容量を示す説明図、第12図は第二の従来例の
積層前における各絶縁層を示す平面図、第13図は同上
の各絶縁層を積層して形成された積層トランスの断面図
である。 2A〜2C,3A〜3C・・・絶縁層 5A〜5C,eA〜6C・・・線輪電極8b、9b、1
2b、13b・・・スルーホール接続子 り、1. L6・・・コイル素子 22A〜22D、23A〜23C・・・絶縁層25A〜
25D、2f3A〜26C・・・線輪電極29b、30
b、33b、34b・・・スルーホール接続子
FIG. 1 is a plan view showing each insulating layer before lamination according to an embodiment of the present invention, FIG. 2 is a perspective view of a laminated transformer formed by laminating the insulating layers shown in FIG. 1, and FIG. XX in Figure 2
Line sectional view, Figure 4 is an equivalent circuit diagram of the same laminated transformer as above,
FIG. 5 is an enlarged cross-sectional view of a part of the laminated transformer described above, FIG. 6 is a plan view showing each insulating layer before lamination on the other side of the present invention, and FIG. 7 is a cross-sectional view showing each insulating layer in FIG. A perspective view of a laminated transformer formed by laminating layers, FIG. 8 is taken along Y-Y in FIG.
Line sectional view, Figure 9 is an equivalent circuit diagram of the above laminated transformer,
Fig. 10 is a plan view showing each insulating layer before lamination in the first conventional example, Fig. 11 is an explanatory diagram showing the stray capacitance generated in the same laminated transformer, and Fig. 12 is a plan view of the second conventional example. FIG. 13 is a plan view showing each insulating layer before lamination, and a sectional view of a laminated transformer formed by laminating the above insulating layers. 2A to 2C, 3A to 3C...Insulating layers 5A to 5C, eA to 6C... Wire electrodes 8b, 9b, 1
2b, 13b...Through hole connector, 1. L6... Coil elements 22A to 22D, 23A to 23C... Insulating layer 25A to
25D, 2f3A to 26C... coil electrodes 29b, 30
b, 33b, 34b...Through hole connector

Claims (1)

【特許請求の範囲】[Claims] (1)導体膜によって1ターン未満の線輪電極を形成さ
れた第一種及び第二種の各複数枚の絶縁層を積層し、第
一種の各絶縁層の線輪電極同士を接続して渦巻き状をし
た第一のコイル素子を形成し、第二種の各絶縁層の線輪
電極同士を接続して渦巻き状をした第二のコイル素子を
形成した積層トランスにおいて、 コイル素子の入出力部を形成された絶縁層を除いて第一
種の絶縁層と第二種の絶縁層を交互に積層し、第一種及
び第二種の絶縁層に各絶縁層の表裏間で導通した接続子
を設け、第二種の絶縁層に設けた接続子を介して第一種
の絶縁層の線輪電極同士を接続させて第一のコイル素子
を形成し、第一種の絶縁層に設けた接続子を介して第二
種の絶縁層の線輪電極同士を接続させて第二のコイル素
子を形成したことを特徴とする積層トランス。
(1) A plurality of insulating layers of the first type and the second type each each having a coil electrode of less than one turn formed by a conductor film are laminated, and the coil electrodes of each of the first type insulating layers are connected to each other. In a laminated transformer, a first coil element is formed in a spiral shape, and a second coil element is formed in a spiral shape by connecting the coil electrodes of each of the second type insulating layers. The first type of insulation layer and the second type of insulation layer are alternately laminated except for the insulation layer forming the output part, and conduction is established between the front and back of each insulation layer between the first type and the second type of insulation layer. A connector is provided, and the coil electrodes of the first type of insulation layer are connected to each other via the connector provided on the second type of insulation layer to form a first coil element, and the first type of insulation layer is A laminated transformer characterized in that a second coil element is formed by connecting coil electrodes of a second type of insulating layer to each other via a provided connector.
JP1292830A 1989-11-10 1989-11-10 Laminated transformer Expired - Lifetime JPH0777175B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1292830A JPH0777175B2 (en) 1989-11-10 1989-11-10 Laminated transformer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1292830A JPH0777175B2 (en) 1989-11-10 1989-11-10 Laminated transformer

Publications (2)

Publication Number Publication Date
JPH03153011A true JPH03153011A (en) 1991-07-01
JPH0777175B2 JPH0777175B2 (en) 1995-08-16

Family

ID=17786904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1292830A Expired - Lifetime JPH0777175B2 (en) 1989-11-10 1989-11-10 Laminated transformer

Country Status (1)

Country Link
JP (1) JPH0777175B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0634216U (en) * 1992-10-02 1994-05-06 太陽誘電株式会社 Multilayer chip inductor
JPH07254513A (en) * 1994-03-14 1995-10-03 Hitachi Ferrite Ltd Laminated transformer for high frequency
EP0852428A2 (en) * 1997-01-07 1998-07-08 TDK Corporation Multilayered balance-to-unbalance signal transformer
JP2007311753A (en) * 2006-05-17 2007-11-29 Samsung Electronics Co Ltd Device for remedying amplitude imbalance of on-chip transformer balun
JP2012205195A (en) * 2011-03-28 2012-10-22 Tdk Corp Laminated balun
JP2014216370A (en) * 2013-04-23 2014-11-17 株式会社村田製作所 Laminated inductor element and manufacturing method thereof
WO2017065143A1 (en) * 2015-10-16 2017-04-20 株式会社村田製作所 Common-mode choke coil
WO2020170882A1 (en) * 2019-02-22 2020-08-27 株式会社村田製作所 Coil device, phase-shift circuit, and communication device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0634216U (en) * 1992-10-02 1994-05-06 太陽誘電株式会社 Multilayer chip inductor
JPH07254513A (en) * 1994-03-14 1995-10-03 Hitachi Ferrite Ltd Laminated transformer for high frequency
EP0852428A2 (en) * 1997-01-07 1998-07-08 TDK Corporation Multilayered balance-to-unbalance signal transformer
EP0852428A3 (en) * 1997-01-07 1998-09-16 TDK Corporation Multilayered balance-to-unbalance signal transformer
US5949299A (en) * 1997-01-07 1999-09-07 Tdk Corporation Multilayered balance-to-unbalance signal transformer
JP2007311753A (en) * 2006-05-17 2007-11-29 Samsung Electronics Co Ltd Device for remedying amplitude imbalance of on-chip transformer balun
JP4684244B2 (en) * 2006-05-17 2011-05-18 三星電子株式会社 Apparatus for improving amplitude imbalance of on-chip transformer balun
JP2012205195A (en) * 2011-03-28 2012-10-22 Tdk Corp Laminated balun
JP2014216370A (en) * 2013-04-23 2014-11-17 株式会社村田製作所 Laminated inductor element and manufacturing method thereof
WO2017065143A1 (en) * 2015-10-16 2017-04-20 株式会社村田製作所 Common-mode choke coil
JPWO2017065143A1 (en) * 2015-10-16 2018-04-26 株式会社村田製作所 Common mode choke coil
WO2020170882A1 (en) * 2019-02-22 2020-08-27 株式会社村田製作所 Coil device, phase-shift circuit, and communication device
JPWO2020170882A1 (en) * 2019-02-22 2021-09-13 株式会社村田製作所 Coil device, phase shift circuit and communication device
US11961651B2 (en) 2019-02-22 2024-04-16 Murata Manufacturing Co., Ltd. Coil device, phase shift circuit, and communication apparatus

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