JPH0315297B2 - - Google Patents

Info

Publication number
JPH0315297B2
JPH0315297B2 JP54003958A JP395879A JPH0315297B2 JP H0315297 B2 JPH0315297 B2 JP H0315297B2 JP 54003958 A JP54003958 A JP 54003958A JP 395879 A JP395879 A JP 395879A JP H0315297 B2 JPH0315297 B2 JP H0315297B2
Authority
JP
Japan
Prior art keywords
anode
vacuum
chamber
cathode
heating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54003958A
Other languages
English (en)
Japanese (ja)
Other versions
JPS551062A (en
Inventor
Hideo Todokoro
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP395879A priority Critical patent/JPS551062A/ja
Publication of JPS551062A publication Critical patent/JPS551062A/ja
Publication of JPH0315297B2 publication Critical patent/JPH0315297B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP395879A 1979-01-19 1979-01-19 Electric field-radiation electronic gun Granted JPS551062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP395879A JPS551062A (en) 1979-01-19 1979-01-19 Electric field-radiation electronic gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP395879A JPS551062A (en) 1979-01-19 1979-01-19 Electric field-radiation electronic gun

Publications (2)

Publication Number Publication Date
JPS551062A JPS551062A (en) 1980-01-07
JPH0315297B2 true JPH0315297B2 (enrdf_load_stackoverflow) 1991-02-28

Family

ID=11571601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP395879A Granted JPS551062A (en) 1979-01-19 1979-01-19 Electric field-radiation electronic gun

Country Status (1)

Country Link
JP (1) JPS551062A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130672U (enrdf_load_stackoverflow) * 1981-02-09 1982-08-14
JPS63120683U (enrdf_load_stackoverflow) * 1987-01-30 1988-08-04
WO2000016372A1 (fr) * 1998-09-11 2000-03-23 Japan Science And Technology Corporation Appareil de diffraction d'electrons a haute energie
DE112010002551B4 (de) 2009-06-16 2019-10-31 Hitachi High-Technologies Corporation Geladene teilchen abstrahlende vorrichtung
JP7068117B2 (ja) 2018-09-18 2022-05-16 株式会社日立ハイテク 荷電粒子線装置

Also Published As

Publication number Publication date
JPS551062A (en) 1980-01-07

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