JPH03150425A - Vibration detector - Google Patents

Vibration detector

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Publication number
JPH03150425A
JPH03150425A JP29057289A JP29057289A JPH03150425A JP H03150425 A JPH03150425 A JP H03150425A JP 29057289 A JP29057289 A JP 29057289A JP 29057289 A JP29057289 A JP 29057289A JP H03150425 A JPH03150425 A JP H03150425A
Authority
JP
Japan
Prior art keywords
signal
vibration
error
detector
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29057289A
Other languages
Japanese (ja)
Other versions
JP2716818B2 (en
Inventor
Tsuneo Koseki
小関 常夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1290572A priority Critical patent/JP2716818B2/en
Publication of JPH03150425A publication Critical patent/JPH03150425A/en
Application granted granted Critical
Publication of JP2716818B2 publication Critical patent/JP2716818B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE:To improve the detection accuracy by detecting the error between the electric signal of a vibration detector and mechanical vibration, correcting the electric signal with the error signal, and adding its corrected signal and electric signal. CONSTITUTION:The detection AC signal e1 from the vibration detector 10 is sent to a linearity correcting device 20, an amplifier 21, a correcting amplifier 22, and a comparator 23 as an error detector through a rectifying and smoothing circuit 11 and the amplifier 22 where a correcting signal e5 determined according to the characteristics of the detector 10 is stored is connected to a switch 26. Then the comparator 23 closes the switch 26 when a DC signal e2 of the circuit 11 is larger than a set value e3 and sends a signal e5 to a 1st adder 24, which sends the sum signal to a 2nd adder 25 to adjust a measurement range, thereby obtaining a standardized reference signal e7.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は振動検出装置に係り、特に回転軸等の振動量を
検出するする振動検出装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a vibration detection device, and particularly to a vibration detection device for detecting the amount of vibration of a rotating shaft or the like.

(従来の技術) 一般に、蒸気タービン等の回転機械における回転軸や軸
受台等は運転中に所定以上の振動か生ずると、蒸気ター
ビンの性能を低下したり機械的損傷を招く。そのため、
これ等回転機械の回転軸や軸受台等にはこの振動を検出
する振動検出装置が設けられ、回転軸等の振動が常時監
視されている。
(Prior Art) Generally, when a rotating shaft, a bearing stand, etc. of a rotating machine such as a steam turbine generates vibrations exceeding a predetermined level during operation, the performance of the steam turbine decreases or mechanical damage occurs. Therefore,
The rotating shafts, bearing stands, etc. of these rotating machines are provided with vibration detection devices that detect this vibration, and the vibrations of the rotating shafts, etc. are constantly monitored.

この振動検出装置として従来第5図に示すようなものが
使用されている。
Conventionally, a vibration detecting device as shown in FIG. 5 has been used.

すなわち、図示しない回転機械の回転軸や軸受台等には
機械的振動を検出する振動検出器1oが取付けられてい
る。この振動検出器1oには図示しないか機械的振動を
電気的信号に変換する信号変換器か内臓されており、こ
の機械的振動は通常交流の電気的信号e〕として取り出
される。この交流信号e1は、整流器とコンデンサ等か
らなる整流・平滑回路11に送られ、リップル成分が除
去された直流信号e2にされる。この直流信号e2は増
幅器12に送られ、図示しない測定器のnJ定レンジ幅
であるO〜4vdcの範囲の直流信号e8に増幅される
。この直流1.;号e8は1iiJ記i’1lll定器
の読み、指示等を正確にするため、零値が移行される。
That is, a vibration detector 1o for detecting mechanical vibration is attached to a rotating shaft, a bearing stand, etc. of a rotating machine (not shown). The vibration detector 1o has a built-in signal converter (not shown) for converting mechanical vibrations into electrical signals, and the mechanical vibrations are usually extracted as an alternating current electrical signal e]. This AC signal e1 is sent to a rectification/smoothing circuit 11 consisting of a rectifier, a capacitor, etc., and is converted into a DC signal e2 from which ripple components have been removed. This DC signal e2 is sent to the amplifier 12, where it is amplified into a DC signal e8 in the range of 0 to 4 vdc, which is the nJ constant range width of the measuring instrument (not shown). This DC 1. ; For No. e8, a zero value is transferred to make the reading, indication, etc. of the 1iiJ mark i'1lll meter accurate.

すなわち、測定レンジ0〜4vdcを全体的に1vdc
上昇させる加算回路13に送られ、出力信号e9の測定
レンジを1〜5vdcとした統一基準信号にされる。
In other words, the entire measurement range 0 to 4vdc is 1vdc.
The output signal e9 is sent to the adding circuit 13 to be raised, and is made into a unified reference signal with the measurement range of the output signal e9 being 1 to 5 VDC.

かかる振動検出装置は振動が小さい場合や緩やかな場合
には、回転軸等の振動がそのまま統一基準信号として検
出される。この関係を第6図(a)乃至(e)により説
明すると、振動検出器10の交流信号e1は、振動量が
増大するとともに交流検出信号も増大する(第6図(a
))。この交流信号は整流・平滑回路11によりリップ
ル成分が除去され(第6図(b)) 、直流信号e2に
される(第6図(C))。この直流信号e2が増幅器1
2で0〜4vdcの範囲に増幅され(第6図(d)) 
、加算回路13で1〜5vdcの統一基準信号にされて
測定器により回転軸等の振動が測定される(第6図(e
))。
When the vibration is small or gentle, such a vibration detection device detects the vibration of the rotating shaft as it is as a unified reference signal. To explain this relationship with reference to FIGS. 6(a) to 6(e), the AC signal e1 of the vibration detector 10 increases as the amount of vibration increases (FIG. 6(a)
)). The ripple component of this AC signal is removed by the rectifier/smoothing circuit 11 (FIG. 6(b)), and the signal is converted into a DC signal e2 (FIG. 6(C)). This DC signal e2 is sent to the amplifier 1
2 is amplified to a range of 0 to 4 vdc (Figure 6 (d))
, is converted into a unified reference signal of 1 to 5 VDC by the adding circuit 13, and the vibration of the rotating shaft etc. is measured by the measuring device (see Fig. 6 (e).
)).

(発明が解決しようとする課題) ところで、このような振動検出装置において回転軸等の
振動が大きな値になると、振動検出器10等の特性から
機械的振動が正確に電気的信号に変換されず、増幅器、
加算器を介して取り出される出力信号に誤差を生じる問
題がある。
(Problem to be Solved by the Invention) By the way, in such a vibration detection device, when the vibration of the rotating shaft etc. reaches a large value, the mechanical vibration is not accurately converted into an electrical signal due to the characteristics of the vibration detector 10 etc. ,amplifier,
There is a problem in that an error occurs in the output signal taken out through the adder.

すなわち、第7図(a)において、振動検出器10によ
り検出される回転軸の振動量がpo以上の値になると振
動量に対する理想的な交流信号e1が実際にはealの
ような特性となり理想的なものとの間に誤差を生じる。
That is, in FIG. 7(a), when the amount of vibration of the rotating shaft detected by the vibration detector 10 becomes a value equal to or greater than po, the ideal AC signal e1 for the amount of vibration actually has a characteristic like eal, and the ideal This will cause an error between the two.

この誤差は機械的振動を検出するセンサ例えば接触片が
永久磁石あるいはコイルを駆動し、コイルに交流電力を
誘起させる場合、接触片の振動が永久磁石あるいはコイ
ルに正確に追従できないために生じるものである。
This error occurs when a sensor that detects mechanical vibrations, for example, when a contact piece drives a permanent magnet or coil and induces alternating current power in the coil, the vibration of the contact piece cannot accurately follow the permanent magnet or coil. be.

この誤差信号は、整流・平滑回路(第7図(b))、直
流信号(第7図(c)) 、増幅された直流信号(第7
図(d))、統一基準信号(第7図(e))でも追従し
て生じ、回転機械の回転軸等の振動が正確に測定できな
くなる。
This error signal is transmitted through the rectifier/smoothing circuit (Fig. 7(b)), the DC signal (Fig. 7(c)), and the amplified DC signal (Fig. 7(c)).
(D)) and the unified reference signal (FIG. 7(E)), the vibrations of the rotating shaft of the rotating machine cannot be measured accurately.

そこで、本発明の目的は回転機械の回転軸の振動を誤差
なく検出するようにした振動検出器を得るにある。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to obtain a vibration detector capable of detecting vibrations of a rotating shaft of a rotating machine without error.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段) 本発明は、回転機械の回転軸あるいは軸受台等の振動を
検出しこの振動を電気信号に変換して取り出す振動検出
器と、この振動検出器により変換される電気信号が機械
的振動との間に誤差を牛じたときにこの誤差を検出し誤
差16号を発生ずる誤差検出器と、この誤差検出器の誤
差信号によって作動され前記電気信号を補正する補正信
号を発生する補正増幅器と、この補正増幅器の補正信号
と前記電気信号とを加算し統一基準信号を発生する加算
回路とを具備するようにしたものである。
(Means for Solving the Problems) The present invention provides a vibration detector that detects vibrations of a rotating shaft or a bearing stand of a rotating machine, converts the vibrations into electrical signals, and extracts the vibrations, and an error detector that detects an error when the electrical signal has an error with the mechanical vibration and generates an error No. 16; and a correction that is activated by the error signal of this error detector to correct the electrical signal. The apparatus includes a correction amplifier that generates a signal, and an addition circuit that adds the correction signal of the correction amplifier and the electric signal to generate a unified reference signal.

(作 用) 回転機械等が回転されとその回転軸が振動しながら回転
する。また、この回転軸の振動は軸受台にも伝達される
。これ等振動は振動検出器により検出され、電気信号に
変換されて後測定器により測定される。
(Function) When a rotating machine etc. rotates, its rotating shaft rotates while vibrating. Furthermore, this vibration of the rotating shaft is also transmitted to the bearing stand. These vibrations are detected by a vibration detector, converted into electrical signals, and then measured by a measuring device.

このような機械振動の測定において、振動検出器により
検出される機械的振動が大きくなると機械振動が電気信
号に適格に変換されず誤差を生じことがる。この誤差は
誤差検出器により検出され、その出力信号である誤差信
号により補正増幅器が作動される。補正増幅器の作動さ
れると補正信号が発生させられ、この補正信号により前
記電気信号が補正される。
In measuring such mechanical vibrations, if the mechanical vibrations detected by the vibration detector become large, the mechanical vibrations may not be properly converted into electrical signals, resulting in errors. This error is detected by an error detector, and its output signal, the error signal, activates a correction amplifier. Activation of the correction amplifier generates a correction signal, which corrects the electrical signal.

この補正された信号により機械的振動が正確に測定され
る。
This corrected signal allows accurate measurement of mechanical vibrations.

(実施例) 以下本発明振動検出装置の一実施例を添附図面について
説明する。なお、本発明振動検出装置と第5図乃至第7
図に示した振動検出装置と同一部分は同一符号をもって
説明しその詳細な説明は省略する。
(Embodiment) An embodiment of the vibration detection device of the present invention will be described below with reference to the accompanying drawings. The vibration detection device of the present invention and FIGS. 5 to 7
The same parts as those of the vibration detection device shown in the figures will be explained using the same reference numerals, and detailed explanation thereof will be omitted.

第1図に示す振動検出装置において、振動検出器10か
らの検出交流信号e1は整流・平滑回路11を介して直
線性補正装置20の増幅器21、補正増幅器22および
誤差検出器であるコンパレータ23等の入力端子21 
a +  22aおよび23aに送られる。
In the vibration detection device shown in FIG. 1, the detected AC signal e1 from the vibration detector 10 is passed through a rectification/smoothing circuit 11 to an amplifier 21 of a linearity correction device 20, a correction amplifier 22, a comparator 23 which is an error detector, etc. input terminal 21 of
a + sent to 22a and 23a.

増幅器21が直流信号e2を受けると、この直流信号e
2をe4に増幅し第1の加算器24に送られる。この第
1の加算器24の直流信号e6は第2の加算器25に送
られ測定レンジを1〜5vdcに調整され統一基準信号
にされる。
When the amplifier 21 receives the DC signal e2, this DC signal e
2 is amplified to e4 and sent to the first adder 24. The DC signal e6 from the first adder 24 is sent to the second adder 25, where the measurement range is adjusted to 1 to 5 vdc and made into a unified reference signal.

前記補正増幅器22は使用する振動検出器10の特性か
ら定まる補正信号e5を蓄積しておくものである。この
補正信号e5は回転機械の振動量が少ないときは小さく
、大きくなると暫時増大する信号である。−船釣には第
2図(d)のe5で示す直線的な信号であるが、曲線的
に増大するものもある。この補正増幅器22の出力端子
にはコンパレータ23の出力信号により作動される開閉
器26が接続され、開閉器25が閉じると補圧増幅器2
2からの補正信号が第1の加算器24に送られようにな
っている。
The correction amplifier 22 stores a correction signal e5 determined from the characteristics of the vibration detector 10 used. This correction signal e5 is a signal that is small when the amount of vibration of the rotating machine is small, and increases for a while when it becomes large. - In boat fishing, the signal is linear as shown by e5 in FIG. 2(d), but there is also a signal that increases in a curved manner. A switch 26 operated by the output signal of the comparator 23 is connected to the output terminal of the compensation amplifier 22, and when the switch 25 is closed, the compensation amplifier 2
The correction signal from 2 is sent to a first adder 24.

コンパレータ23は整流・平滑回路11の直流信号e2
を受けると、設定器の設定値e3と比較され直流信号e
2が設定値e3より大きな値になると、コンパレータ2
3から出力信号が発生させられ前記開閉器25を閉じよ
うになっている。
The comparator 23 is the DC signal e2 of the rectifier/smoothing circuit 11.
When received, it is compared with the setting value e3 of the setting device and the DC signal e
2 becomes larger than the set value e3, comparator 2
3 generates an output signal to close the switch 25.

この設定値e3は振動検出器10の特性から定まる誤差
が生じる値から実験的に決められている。
This set value e3 is experimentally determined from a value that causes an error determined from the characteristics of the vibration detector 10.

このコンパレータ23から出力信号が発生させられると
、前記開閉器25が閉じられ、補正増幅器22からの補
正信号が第1の加算器24に送られる。第1の加算器2
4では前記直流信号e4と補正信号e5とが加算され、
機械振動が適格な直流信号e6に補正され、第2の加算
器25に送られる。この第2の加算器25では測定レン
ジが1vdc上昇され統一基準信号e7とされてる。
When the output signal is generated from the comparator 23, the switch 25 is closed and the correction signal from the correction amplifier 22 is sent to the first adder 24. first adder 2
4, the DC signal e4 and the correction signal e5 are added,
The mechanical vibrations are corrected into a qualified DC signal e6 and sent to the second adder 25. In this second adder 25, the measurement range is increased by 1 Vdc to obtain a unified reference signal e7.

これ等の関係を第2図により説明する。すなわち、振動
検出器10により検…された交流1u号e1は、第2図
(a)のように回転機械の振動量が大きくなると、交流
出力信号も増大する。この振動量が例えばpo点以上に
なると、振動検出器10が検出する機械的振動が正確に
電気信号に変換されない電気信号すなわち誤差信号ef
となる(第2図(a))。この誤差信号efを含む交流
信号e1は整流され、リップルが除去された直流信号e
2として補正増幅器22およびコンパレータ23に送ら
れる。コンパレータ23が誤差信号efを受けると設定
値e3と比較され出力信号が発生させられる。この出力
信号が発生すると開閉器26が閉成され、前記補正増幅
器22の補正信号e5が第1の加算器24に送られる。
These relationships will be explained with reference to FIG. That is, when the amount of vibration of the rotating machine increases as shown in FIG. 2(a), the AC output signal of the AC 1u number e1 detected by the vibration detector 10 also increases. When the amount of vibration exceeds the po point, for example, the mechanical vibration detected by the vibration detector 10 is not accurately converted into an electric signal, that is, an error signal ef
(Figure 2(a)). The AC signal e1 including this error signal ef is rectified, and the ripple is removed from the DC signal e.
2 to the correction amplifier 22 and comparator 23. When the comparator 23 receives the error signal ef, it is compared with a set value e3 and an output signal is generated. When this output signal is generated, the switch 26 is closed, and the correction signal e5 of the correction amplifier 22 is sent to the first adder 24.

第1の加算器24が補正信号e5を受けると、この補正
信号e5が前記増幅信号e4と加算され、この加算信号
e6が機械振動に比例する直線性をもった直流信号とさ
れる(第2図(e))。この直流信号e6は第2の加算
器25に送られ、統一基準信号e7として測定器により
測定される(第2図(f))。このようにして回転機械
の回転軸、軸受台の振動を正確に検出することできる。
When the first adder 24 receives the correction signal e5, this correction signal e5 is added to the amplified signal e4, and this added signal e6 is made into a DC signal with linearity proportional to the mechanical vibration (second Figure (e)). This DC signal e6 is sent to the second adder 25 and measured by a measuring device as a unified reference signal e7 (FIG. 2(f)). In this way, vibrations of the rotating shaft and bearing stand of the rotating machine can be accurately detected.

第3図は第1図の振動検出器の他の実施例を示すもので
ある。基本的には第1図の振動検出器と同様である。
FIG. 3 shows another embodiment of the vibration detector shown in FIG. It is basically the same as the vibration detector shown in FIG.

ただ、回転機械の振動を検出する振動検出器が異なった
場合に、その振動検出器に適合するように補正増幅器3
2には調整器32mを、また、コンパレータ33には設
定値の調整器33mが設けられ、補正増幅器32の補正
信号およびコンパレータ33の設定値を調整できるよう
にしたものである。
However, if the vibration detector that detects the vibration of the rotating machine is different, the correction amplifier 3 is used to match the vibration detector.
2 is provided with an adjuster 32m, and the comparator 33 is provided with a set value adjuster 33m, so that the correction signal of the correction amplifier 32 and the set value of the comparator 33 can be adjusted.

第4図は、第3図の補正増幅器32の補正特性の調整方
法(第4図(a)) 、コンパレータ33の設定値の調
整方法(第4図(b))を示す説明図である。
FIG. 4 is an explanatory diagram showing a method for adjusting the correction characteristic of the correction amplifier 32 in FIG. 3 (FIG. 4(a)) and a method for adjusting the set value of the comparator 33 (FIG. 4(b)).

このようにすると、使用する振動検出器が異なっても、
都度調整して機械的振動を誤差なく正確に検出すること
ができる。
In this way, even if different vibration detectors are used,
Mechanical vibrations can be detected accurately without errors by adjusting each time.

〔発明の効果〕〔Effect of the invention〕

本発明振動検出装置によれば、振動検出器に誤差検出器
および補正増幅器を設け、誤差検出器が作動すると補正
増幅器により振動検出器の変換誤差信号を補正するよう
にしたから、H転機域等の機械的振動を正確な信号とし
て1illl定することができる。
According to the vibration detection device of the present invention, the vibration detector is provided with an error detector and a correction amplifier, and when the error detector is activated, the correction amplifier corrects the conversion error signal of the vibration detector. can be determined as an accurate signal.

また、誤差検出器が機械的振動を電気的信号に変換する
場合、その変換特性が悪化する部分で検出し補正するか
ら、機械的振動が電気的信号に比例する小さい振動部分
に悪影響を与えることがない。
In addition, when the error detector converts mechanical vibration into an electrical signal, it detects and corrects the part where the conversion characteristics deteriorate, so the mechanical vibration does not have an adverse effect on the small vibration part that is proportional to the electrical signal. There is no.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明振動検出装置の主要部を示す電気的ブ
ロック線図、第2図は第1図に示した振動検出装置の動
作特性を説明する説明図、第3図は、第1図に示した振
動検出装置の他の変形実施例を示す電気的ブロック線図
、第4図は第3図に示した振動検出装置の動作特性を説
明する説明図、第5図は、従来の振動検出装置を示す電
気的ブロック線図、第6図および第7図は、第5図に示
した振動検出装置の動作特性を説明する説明図である。 10・・・振動検出器、11・・・整流・平滑回路、1
2・・・増幅器、13・・・加算器、20・・・直線性
補正装置、21・・・増幅器、22・・・補正増幅器、
23・・コンパレータ、24・・・第1の加算器、25
・・・第2の加算器、26・・・開閉器、32・・・補
正増幅器、32m・・・調整器、33・・・コンパレー
タ、33m・・・調整設定器。
FIG. 1 is an electrical block diagram showing the main parts of the vibration detection device of the present invention, FIG. 2 is an explanatory diagram explaining the operating characteristics of the vibration detection device shown in FIG. 1, and FIG. An electrical block diagram showing another modification of the vibration detecting device shown in the figure, FIG. 4 is an explanatory diagram explaining the operating characteristics of the vibration detecting device shown in FIG. 3, and FIG. Electrical block diagrams of the vibration detection device, FIGS. 6 and 7, are explanatory diagrams for explaining the operating characteristics of the vibration detection device shown in FIG. 5. 10... Vibration detector, 11... Rectifier/smoothing circuit, 1
2... Amplifier, 13... Adder, 20... Linearity correction device, 21... Amplifier, 22... Correction amplifier,
23... Comparator, 24... First adder, 25
...Second adder, 26...Switch, 32...Correction amplifier, 32m...Adjuster, 33...Comparator, 33m...Adjustment setting device.

Claims (1)

【特許請求の範囲】[Claims] 回転機械の回転軸あるいは軸受台等の振動を検出しこの
振動を電気信号に変換して取り出す振動検出器と、この
振動検出器により変換される電気信号が機械的振動との
間に誤差を生じたときにこの誤差を検出し誤差信号を発
生する誤差検出器と、この誤差検出器の誤差信号によっ
て作動され前記電気信号を補正する補正信号を発生する
補正増幅器と、この補正増幅器の補正信号と前記電気信
号とを加算し統一基準信号を発生する加算回路とを具備
する振動検出装置。
A vibration detector detects the vibration of the rotating shaft or bearing stand of a rotating machine, converts this vibration into an electrical signal, and extracts it. There is an error between the electrical signal converted by this vibration detector and the mechanical vibration. an error detector that detects this error and generates an error signal when the error occurs; a correction amplifier that is activated by the error signal of the error detector and generates a correction signal that corrects the electric signal; and a correction signal of the correction amplifier. A vibration detection device comprising: an addition circuit that adds the electrical signals and generates a unified reference signal.
JP1290572A 1989-11-08 1989-11-08 Vibration detector Expired - Lifetime JP2716818B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1290572A JP2716818B2 (en) 1989-11-08 1989-11-08 Vibration detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1290572A JP2716818B2 (en) 1989-11-08 1989-11-08 Vibration detector

Publications (2)

Publication Number Publication Date
JPH03150425A true JPH03150425A (en) 1991-06-26
JP2716818B2 JP2716818B2 (en) 1998-02-18

Family

ID=17757762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1290572A Expired - Lifetime JP2716818B2 (en) 1989-11-08 1989-11-08 Vibration detector

Country Status (1)

Country Link
JP (1) JP2716818B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139629A (en) * 1981-02-24 1982-08-28 Mitsubishi Electric Corp Non-contact type vibration measuring device
JPS6166933A (en) * 1984-09-10 1986-04-05 Tokyu Constr Co Ltd Method and device for investigating characteristic of oscillation sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139629A (en) * 1981-02-24 1982-08-28 Mitsubishi Electric Corp Non-contact type vibration measuring device
JPS6166933A (en) * 1984-09-10 1986-04-05 Tokyu Constr Co Ltd Method and device for investigating characteristic of oscillation sensor

Also Published As

Publication number Publication date
JP2716818B2 (en) 1998-02-18

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