JPH03145603A - Production of color filter and color image sensor - Google Patents

Abstract

PURPOSE:To decrease the fluctuation in the spectral characteristics occurring the sectional shape of color sepn. filters by forming plural pieces of colored patterns, then packing a resin essentially consisting of the resin of the colored pattern into recessed parts that are non-pattern parts. CONSTITUTION:The colored pattern 2 of a 1st color is uniformly and directly formed at about 2 to 5mum film thickness on a substrate 1 by using an epoxy resin or acrylic resin mixed with a coloring material by a printing means. The colored pattern 3 of a 2nd color is then formed directly on the substrate 1 in proximity to the colored pattern 2 of the 1st color. Further, plural pieces of the colored patterns (for example, 3 kinds of 2 to 4) are similarly formed on the substrate 1. After the colored patterns of all the colors are formed, the patterns 5 are formed in the recessed parts that are non-pattern parts by using the resin essentially consisting of the same resin as the resin of the colored patterns. Thus, the individual colored patterns are made into one structural body 6 and the fluctuation in the spectral characteristics occurring in unequal thickness of the peripheral part of the colored patterns is decreased.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a color separation color film reticle used in a color image sensor that can read color originals easily and with high precision, and a manufacturing method.

Conventional technology In recent years, image sensors have been developed using intelligent OA technology.
With the introduction of A, facsimile, intelligent copy,
RARETTE is being developed as an image input device for computers, etc., or as an input section for various testing devices. In particular, demand for colorization is growing, and development is gaining momentum. To colorize an image sensor, it is necessary to insert a color separation filter somewhere in the optical path from the light source to the optical sensor 1. The methods include a light source switching method,
There are the b-filter switching method, the c-filter bonding method, the d-on-chip method, etc. The light source switching method of a, as shown in FIG.
66), the lights are repeatedly turned on and off sequentially, and the light collected by the condensing lens 52 is transmitted to one sensor 6 by time division.
1, the color original 53 can be read. In this method, the image sensor 51 may be one for monochrome color, but the space for the light source becomes large, the optical path becomes complicated, the amount of heat generated by the light source is also large, and there is no subframe in the overall design of the device. In the filter switching method b, as shown in FIG. 6, a plurality of color separation filter plates 62 each having different spectral characteristics are provided between the white light source 61 and the color original 53 or between the color original 63 and the image sensor 51. ~64 is used to switch the position of the filter plate by time division.
This is a method of reading with one image sensor 61. Even in this method, the image sensor may be a monochrome color image sensor, but color filter plates 62 to 65 having uniform spectral characteristics and a mechanism section 65 for moving them are required.

C is a method in which a color separation filter 73 formed on a transparent substrate 72 is pasted to an image sensor device 71 as shown in FIG.

Information on the color original 53 can be read by the light from the sunlight light source 61. Ota d is a method in which a color separation film 81 is directly printed on the image sensor device 71 as shown in FIG. read. In c and d, the image sensor device 71 is for color use, but the entire device is small and becomes a maintenance-free reading device.

On the other hand, the dyeing method is used to form the filter.

Printing methods, direct coating methods, interference film methods, etc. are being considered. Even if the contact type image sensor has a resolution of 400 dots/inch (DPI), the pitch is 63.5 μm. Therefore, as a color separation filter for contact type image sensors 5, -7 or liquid crystal displays, etc., which have a considerable resolution, the printing method, which has excellent mass production, two-spectral characteristics, and light resistance, although it has some difficulty in pattern resolution, is suitable for use. is being developed.

Problems to be Solved by the Invention In the configuration based on the printing method as described above, the cross section of the color separation filter generally has a shape in which the center portion is convex upward due to the surface tension of the coloring material and the resin. Figure 3a is an example.

On the other hand, as shown in FIG. 2a, the difference between the thickness t of the filter 21 and the spectral transmittance T is T=exp(-α(λ)1), if reflection at the filter interface is ignored. There is a relationship between the absorption coefficient of ut /Iin α(λ) and the two wavelengths λ. Therefore, the spectral transmittance T is easily influenced by the thickness t. An example is shown in Figure 2. The influence of thickness on spectral transmittance is expressed by the absolute amount of change: ct(λ)t
It is large around −1, and the relative amount becomes larger as α(λ) becomes larger.

6. Therefore, as shown in FIG. 3a, if there is local variation in the thickness of the color separation filter, it will also have an adverse effect on the spectral characteristics. For example, the influence of the color separation filter 31 on the spectral transmittance as shown in FIG.
When viewed as a function of t, changes like the one shown in FIG. 3C will cause variations in the spectral characteristics, especially in areas where the transmittance is low.

Here, in FIG. 3C, as an example, to=3 μm, but this is not necessarily limited.

In view of the above problems, the present invention provides a color filter manufacturing method and a color image sensor that reduce variations in spectral characteristics caused by the cross-sectional shape of a color separation filter formed by a printing method.

Means for Solving the Problems In order to achieve the above-mentioned object, the present invention forms a plurality of colored patterns, and then applies a resin whose main component is the same resin as the colored pattern to the concave portions, which are non-patterned portions. This manufacturing method is structured to include a filling step or a step of forming a colored pattern after printing a resin mainly composed of the same resin as that of the colored pattern in advance in a position that is to become a non-patterned area.

Further, the filter formed by the above manufacturing method is disposed on a chip, and the color image sensor is configured to obtain stable spectral characteristics.

According to the manufacturing method described above, in the case of a single pattern, a color filter with a convex structure with a protruding central part is filled in a non-pattern with a resin whose main component is the same as that of the color filter. This makes it possible to have a filter shape that is flattened by the mutual surface tension, and to obtain stable spectral characteristics.

EXAMPLE Hereinafter, a manufacturing method according to an example of the present invention will be explained with reference to the drawings. FIG. 1 shows a method of manufacturing a color filter according to a first embodiment of the present invention.

In FIG. 1, 1 is the substrate, 2 is the first color pattern, 3 is the second color pattern, and 4 is the third color pattern.

By printing means such as flat plate offset printing, letterpress offset printing, intaglio offset printing, or screen printing, a colored pattern 2 of the first color is formed on the substrate 1 using epoxy resin or acrylic resin mixed with a coloring material, and the film thickness is about 2
Directly and uniformly formed with a thickness of ~5 μm. Next, in a similar manner, a second colored pattern 3 is formed directly on the substrate 1 in proximity to the first colored pattern 2.

Similarly, multiple coloring patterns (for example, 2 to 4
(3 types) are formed on the substrate 1. Here, the colored patterns 2 to 4 may be in the form of a slide, or may be in the form of a mosaic, or may be in other shapes. After forming the coloring pattern of all colors,
In a similar manner, a pattern 5 is formed in the concave portion, which is a non-patterned portion, using a resin whose main component is the same resin as that of the colored pattern. As a result, the individual colored patterns are separated into one structure 6 by filling resin.
As a result, the surface shape changes as shown in Figure 1 e due to surface tension.
It will look like this. It will be more effective if you provide a leveling time during this time. Thereafter, the color filter 6 was obtained by vaining and drying and curing.

The filling resin may be formed after all colored patterns are formed, or may be formed in advance. Using the same printing method, pattern 5 is formed on the substrate 1 using filled resin at a position that will become a non-pattern area, and then a plurality of colored patterns (2 to 4) are sequentially formed at predetermined positions. After leveling, the color filter 6 may be formed by vaining and drying and curing.

A second embodiment will be described with reference to the drawings. FIG. 4 is a structural sectional view of a color image sensor showing a second embodiment of the present invention. In the figure, 41 is an image sensor chip, 42 is an optical sensor section, 43 is a light receiving section of the optical sensor, and 44 is a separation area that separates adjacent optical sensors. Using the manufacturing method according to the first embodiment, a filter is formed in a wafer state on an image sensor chip.

Here, the colored filters 46 to 47 are formed on the light receiving section 43 of the optical sensor 42, and the filling resin 48 is formed on the separation region 44. The filling resin 48 is generally preferably a black resin in order to shield the separation region 44 or the outer periphery of the photosensor light receiving section. However, especially in the case of close-contact type, even if the resolution (resolution is 400 dots per inch (DPI)), the pixel
Since it can be formed at a pitch of 3.6 .mu.m, the isolation region 44 can be relatively large, for example, about 10 to 2 .mu.m. Therefore, if there is no photosensitivity in the isolation region 44 or if light is blocked by aluminum wiring, it is better for the filling resin 48 to be transparent. This allows more margin for alignment when forming the filled resin 48, reducing the number of man-hours and increasing the yield.

Effects of the Invention As described above, the present invention utilizes an epoxy resin or acrylic resin mixed with a coloring agent to form a plurality of colored patterns each having predetermined spectral characteristics by a printing method. to the concave part that is the non-patterned part,
By making a color separation filter by filling it with resin whose main component is the same resin as the colored pattern, the surface shape is flattened by surface tension, which eliminates variations in spectral characteristics caused by uneven thickness around the colored filter. A color separation filter with reduced and stable characteristics can be obtained.

Furthermore, by forming a colored filler on the light-receiving part of the image sensor and printing the separated area with a filling resin, a color image sensor with stable spectral characteristics and high read quality can be obtained.

[Brief explanation of the drawing]

Figures 1(a) to (e) are process cross-sectional transmittance characteristic diagrams showing the method of manufacturing a color separation filter according to the first embodiment of the present invention, and Figure 3(a) is a transmittance characteristic diagram of the color filter. Cross-sectional view, question) is a cross-sectional view of a filter model to show the spectral characteristics that depend on the thickness non-uniformity of the color filter, and (0) is a characteristic diagram showing an example of the transmittance calculated with that model.
The figure is a cross-sectional view of a color image sensor formed with a color separation filter according to the second embodiment of the present invention, FIG. 5 is a configuration diagram of an image sensor unit using a light source switching method, and FIG. 6 is an image sensor unit using a filter switching method. FIG. 7 is a diagram showing the configuration of an image sensor unit using a half-fill bonding method, and FIG. 8 is a diagram showing the configuration of an image sensor unit using an on-chip method. 1...Substrate, 2...Coloring pattern of first color day, 3...Coloring pattern of second color, 4...
...Third coloring pattern, 6...Filled resin pattern, 6...Fino l/Yugun that has become one structure, 41...・Image sensor chip, 42... Optical sensor, 43... Light receiving section, 44... Separation area, 45, 46, 47...
...Coloring pattern, 48...Filled resin pattern.

Claims (4)

[Claims] (1) By using an epoxy resin or acrylic resin mixed with a coloring material on an optically transparent substrate, a first color pattern having predetermined spectral characteristics can be created.
Then, in the same manner, a second color pattern is formed adjacent to the first color pattern, and after that, colored patterns of a plurality of colors are sequentially formed adjacent to each other, and then heated and baked to form a colored filter layer. The method for manufacturing a color filter includes the step of, after forming all colored patterns, filling the concave portions, which are non-patterned portions, with a resin whose main component is the same resin as the colored pattern before heating and baking. A method for producing a color filter characterized by: (2) The method for manufacturing a color filter according to claim 1, wherein, before forming the colored pattern, a pattern is formed in a position that will be a non-patterned portion using a resin whose main component is the same resin as that of the colored pattern. (3) A color image sensor, characterized in that a colored pattern is formed on a light receiving portion of an optical sensor, and a pattern is formed with the filling resin on a separation area of the optical sensor. (4) The color image sensor according to claim 3, wherein the filling resin is an optically transparent resin.