JPH0314420U - - Google Patents
Info
- Publication number
- JPH0314420U JPH0314420U JP7354089U JP7354089U JPH0314420U JP H0314420 U JPH0314420 U JP H0314420U JP 7354089 U JP7354089 U JP 7354089U JP 7354089 U JP7354089 U JP 7354089U JP H0314420 U JPH0314420 U JP H0314420U
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- receiving section
- gratings
- predetermined pitch
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989073540U JPH0733134Y2 (ja) | 1989-06-26 | 1989-06-26 | 光学式変位検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989073540U JPH0733134Y2 (ja) | 1989-06-26 | 1989-06-26 | 光学式変位検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0314420U true JPH0314420U (sv) | 1991-02-14 |
JPH0733134Y2 JPH0733134Y2 (ja) | 1995-07-31 |
Family
ID=31612442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989073540U Expired - Lifetime JPH0733134Y2 (ja) | 1989-06-26 | 1989-06-26 | 光学式変位検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0733134Y2 (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001289674A (ja) * | 2000-02-03 | 2001-10-19 | Mitsutoyo Corp | 変位測定装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6224315U (sv) * | 1985-07-26 | 1987-02-14 | ||
JPS63249015A (ja) * | 1987-04-03 | 1988-10-17 | Mitsutoyo Corp | 光学式変位検出器 |
-
1989
- 1989-06-26 JP JP1989073540U patent/JPH0733134Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6224315U (sv) * | 1985-07-26 | 1987-02-14 | ||
JPS63249015A (ja) * | 1987-04-03 | 1988-10-17 | Mitsutoyo Corp | 光学式変位検出器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001289674A (ja) * | 2000-02-03 | 2001-10-19 | Mitsutoyo Corp | 変位測定装置 |
JP4588227B2 (ja) * | 2000-02-03 | 2010-11-24 | 株式会社ミツトヨ | 変位測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0733134Y2 (ja) | 1995-07-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH01180615U (sv) | ||
DE69117369D1 (de) | Holographische Beugungsgitterstrukturen und Herstellungsverfahren | |
JPH0251315U (sv) | ||
SE8605437D0 (sv) | Anordning for indikering av vinkellege | |
JPH0314420U (sv) | ||
JPH0444148U (sv) | ||
JPS61155801U (sv) | ||
JPS628649U (sv) | ||
JPH038453U (sv) | ||
JPS63185101U (sv) | ||
JPS6372639U (sv) | ||
JPS62137438U (sv) | ||
JPH01140631U (sv) | ||
JPH0240211U (sv) | ||
JPH02107022U (sv) | ||
JPH0247518U (sv) | ||
JPH0331782U (sv) | ||
JPS59131900U (ja) | 光学装飾装置 | |
JPH0316151U (sv) | ||
JPH0428339U (sv) | ||
JPH01149174U (sv) | ||
JPS6249104U (sv) | ||
JPH0313759U (sv) | ||
JPS61134059U (sv) | ||
JPH0471069U (sv) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |