JPS62137438U - - Google Patents

Info

Publication number
JPS62137438U
JPS62137438U JP1986024754U JP2475486U JPS62137438U JP S62137438 U JPS62137438 U JP S62137438U JP 1986024754 U JP1986024754 U JP 1986024754U JP 2475486 U JP2475486 U JP 2475486U JP S62137438 U JPS62137438 U JP S62137438U
Authority
JP
Japan
Prior art keywords
light
main surface
transmitting substrate
pattern
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986024754U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986024754U priority Critical patent/JPS62137438U/ja
Publication of JPS62137438U publication Critical patent/JPS62137438U/ja
Pending legal-status Critical Current

Links

JP1986024754U 1986-02-21 1986-02-21 Pending JPS62137438U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986024754U JPS62137438U (sv) 1986-02-21 1986-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986024754U JPS62137438U (sv) 1986-02-21 1986-02-21

Publications (1)

Publication Number Publication Date
JPS62137438U true JPS62137438U (sv) 1987-08-29

Family

ID=30824273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986024754U Pending JPS62137438U (sv) 1986-02-21 1986-02-21

Country Status (1)

Country Link
JP (1) JPS62137438U (sv)

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