JPH0314166U - - Google Patents
Info
- Publication number
- JPH0314166U JPH0314166U JP7365889U JP7365889U JPH0314166U JP H0314166 U JPH0314166 U JP H0314166U JP 7365889 U JP7365889 U JP 7365889U JP 7365889 U JP7365889 U JP 7365889U JP H0314166 U JPH0314166 U JP H0314166U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- solid raw
- carrier gas
- chamber
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 21
- 239000007787 solid Substances 0.000 claims description 15
- 239000012159 carrier gas Substances 0.000 claims description 11
- 238000000859 sublimation Methods 0.000 claims description 4
- 230000008022 sublimation Effects 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims 4
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7365889U JPH0726364Y2 (ja) | 1989-06-23 | 1989-06-23 | 気相成長装置用の固形原料供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7365889U JPH0726364Y2 (ja) | 1989-06-23 | 1989-06-23 | 気相成長装置用の固形原料供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314166U true JPH0314166U (US06312121-20011106-C00033.png) | 1991-02-13 |
| JPH0726364Y2 JPH0726364Y2 (ja) | 1995-06-14 |
Family
ID=31612668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7365889U Expired - Fee Related JPH0726364Y2 (ja) | 1989-06-23 | 1989-06-23 | 気相成長装置用の固形原料供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726364Y2 (US06312121-20011106-C00033.png) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001323374A (ja) * | 2000-05-15 | 2001-11-22 | Asm Microchemistry Oy | 気相反応物を反応室内へ供給するための方法および装置 |
| JP2008101420A (ja) * | 2006-10-20 | 2008-05-01 | Hidekazu Koyama | 目隠板の取付金具、及びその取付方法 |
| JP2009125703A (ja) * | 2007-11-27 | 2009-06-11 | Taiyo Nippon Sanso Corp | 固体原料供給方法及び装置 |
| JP2009127096A (ja) * | 2007-11-26 | 2009-06-11 | Ube Ind Ltd | 固体有機金属化合物の供給装置 |
| JP2012082527A (ja) * | 2004-12-08 | 2012-04-26 | Rohm & Haas Electronic Materials Llc | 供給装置 |
| WO2012120472A1 (en) * | 2011-03-08 | 2012-09-13 | L'air Liquide Societe, Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Supply apparatus and method of solid material gas |
| JP2015158015A (ja) * | 2002-07-23 | 2015-09-03 | インテグリス・インコーポレーテッド | 蒸発器配送アンプル |
| JPWO2015145907A1 (ja) * | 2014-03-27 | 2017-04-13 | 宇部興産株式会社 | 有機金属化合物含有ガスの供給装置 |
| CN116018426A (zh) * | 2020-09-15 | 2023-04-25 | 东京毅力科创株式会社 | 原料供给装置和原料供给方法 |
-
1989
- 1989-06-23 JP JP7365889U patent/JPH0726364Y2/ja not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001323374A (ja) * | 2000-05-15 | 2001-11-22 | Asm Microchemistry Oy | 気相反応物を反応室内へ供給するための方法および装置 |
| JP2015158015A (ja) * | 2002-07-23 | 2015-09-03 | インテグリス・インコーポレーテッド | 蒸発器配送アンプル |
| US10465286B2 (en) | 2002-07-23 | 2019-11-05 | Entegris, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
| JP2012082527A (ja) * | 2004-12-08 | 2012-04-26 | Rohm & Haas Electronic Materials Llc | 供給装置 |
| JP2008101420A (ja) * | 2006-10-20 | 2008-05-01 | Hidekazu Koyama | 目隠板の取付金具、及びその取付方法 |
| JP2009127096A (ja) * | 2007-11-26 | 2009-06-11 | Ube Ind Ltd | 固体有機金属化合物の供給装置 |
| JP2009125703A (ja) * | 2007-11-27 | 2009-06-11 | Taiyo Nippon Sanso Corp | 固体原料供給方法及び装置 |
| WO2012120472A1 (en) * | 2011-03-08 | 2012-09-13 | L'air Liquide Societe, Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Supply apparatus and method of solid material gas |
| JPWO2015145907A1 (ja) * | 2014-03-27 | 2017-04-13 | 宇部興産株式会社 | 有機金属化合物含有ガスの供給装置 |
| CN116018426A (zh) * | 2020-09-15 | 2023-04-25 | 东京毅力科创株式会社 | 原料供给装置和原料供给方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726364Y2 (ja) | 1995-06-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |