JPH0314147U - - Google Patents
Info
- Publication number
- JPH0314147U JPH0314147U JP7587089U JP7587089U JPH0314147U JP H0314147 U JPH0314147 U JP H0314147U JP 7587089 U JP7587089 U JP 7587089U JP 7587089 U JP7587089 U JP 7587089U JP H0314147 U JPH0314147 U JP H0314147U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- substrate
- film forming
- forming substrate
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 claims 5
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7587089U JPH072608Y2 (ja) | 1989-06-28 | 1989-06-28 | 加熱成膜用基板ホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7587089U JPH072608Y2 (ja) | 1989-06-28 | 1989-06-28 | 加熱成膜用基板ホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314147U true JPH0314147U (cs) | 1991-02-13 |
| JPH072608Y2 JPH072608Y2 (ja) | 1995-01-25 |
Family
ID=31616833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7587089U Expired - Lifetime JPH072608Y2 (ja) | 1989-06-28 | 1989-06-28 | 加熱成膜用基板ホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH072608Y2 (cs) |
-
1989
- 1989-06-28 JP JP7587089U patent/JPH072608Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH072608Y2 (ja) | 1995-01-25 |