JPH0314146U - - Google Patents

Info

Publication number
JPH0314146U
JPH0314146U JP7480289U JP7480289U JPH0314146U JP H0314146 U JPH0314146 U JP H0314146U JP 7480289 U JP7480289 U JP 7480289U JP 7480289 U JP7480289 U JP 7480289U JP H0314146 U JPH0314146 U JP H0314146U
Authority
JP
Japan
Prior art keywords
film thickness
vapor deposition
correction means
back sides
posture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7480289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069013Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7480289U priority Critical patent/JPH069013Y2/ja
Publication of JPH0314146U publication Critical patent/JPH0314146U/ja
Application granted granted Critical
Publication of JPH069013Y2 publication Critical patent/JPH069013Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7480289U 1989-06-26 1989-06-26 真空蒸着装置 Expired - Lifetime JPH069013Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7480289U JPH069013Y2 (ja) 1989-06-26 1989-06-26 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7480289U JPH069013Y2 (ja) 1989-06-26 1989-06-26 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0314146U true JPH0314146U (US20100268047A1-20101021-C00003.png) 1991-02-13
JPH069013Y2 JPH069013Y2 (ja) 1994-03-09

Family

ID=31614816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7480289U Expired - Lifetime JPH069013Y2 (ja) 1989-06-26 1989-06-26 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH069013Y2 (US20100268047A1-20101021-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006312765A (ja) * 2005-05-09 2006-11-16 Fujinon Sano Kk 真空蒸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006312765A (ja) * 2005-05-09 2006-11-16 Fujinon Sano Kk 真空蒸着装置

Also Published As

Publication number Publication date
JPH069013Y2 (ja) 1994-03-09

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