JPH03130515U - - Google Patents

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Publication number
JPH03130515U
JPH03130515U JP3978890U JP3978890U JPH03130515U JP H03130515 U JPH03130515 U JP H03130515U JP 3978890 U JP3978890 U JP 3978890U JP 3978890 U JP3978890 U JP 3978890U JP H03130515 U JPH03130515 U JP H03130515U
Authority
JP
Japan
Prior art keywords
thin film
glass tube
gas
precision thin
measures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3978890U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3978890U priority Critical patent/JPH03130515U/ja
Publication of JPH03130515U publication Critical patent/JPH03130515U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案の第1の実施例、第2図はこ
の考案の第2の実施例、第3図は従来の精密薄膜
流量計の概略図である。 1……ガス入口、2……ガス出口、3……石け
ん水、4……石けん薄膜、6,7……ガラス管、
6a,6b,6c,7a,7b,7c……直径の
異なるガラス管、a1,a2,b1,b2,c1
,c2……各ガラス管径に対するガス流量を測定
するセンサー。
FIG. 1 is a first embodiment of this invention, FIG. 2 is a second embodiment of this invention, and FIG. 3 is a schematic diagram of a conventional precision thin film flowmeter. 1... Gas inlet, 2... Gas outlet, 3... Soapy water, 4... Soap thin film, 6, 7... Glass tube,
6a, 6b, 6c, 7a, 7b, 7c...Glass tubes with different diameters, a1, a2, b1, b2, c1
, c2...Sensor that measures the gas flow rate for each glass tube diameter.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ガラス管内にガスを流し、ガラス管内にできた
石けんの薄膜が移動する時間によりガスの流量を
測定する精密薄膜流量計において、ガラス管径を
段階的に変えたことを特徴とする精密薄膜量量計
A precision thin film flowmeter that measures the flow rate of gas by flowing gas into a glass tube and measuring the time it takes for a thin film of soap formed inside the glass tube to move.A precision thin film flow meter that is characterized by changing the diameter of the glass tube in stages. Total.
JP3978890U 1990-04-13 1990-04-13 Pending JPH03130515U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3978890U JPH03130515U (en) 1990-04-13 1990-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3978890U JPH03130515U (en) 1990-04-13 1990-04-13

Publications (1)

Publication Number Publication Date
JPH03130515U true JPH03130515U (en) 1991-12-27

Family

ID=31549003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3978890U Pending JPH03130515U (en) 1990-04-13 1990-04-13

Country Status (1)

Country Link
JP (1) JPH03130515U (en)

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