JPH03129635A - Exposure method for image screen of color picture tube - Google Patents

Exposure method for image screen of color picture tube

Info

Publication number
JPH03129635A
JPH03129635A JP21172290A JP21172290A JPH03129635A JP H03129635 A JPH03129635 A JP H03129635A JP 21172290 A JP21172290 A JP 21172290A JP 21172290 A JP21172290 A JP 21172290A JP H03129635 A JPH03129635 A JP H03129635A
Authority
JP
Japan
Prior art keywords
film
forming
light source
stripe
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21172290A
Other languages
Japanese (ja)
Other versions
JPH0616376B2 (en
Inventor
Koji Kuki
久木 浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2211722A priority Critical patent/JPH0616376B2/en
Publication of JPH03129635A publication Critical patent/JPH03129635A/en
Publication of JPH0616376B2 publication Critical patent/JPH0616376B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE:To enhance tolerance in forming a black matrix(BM) film and adhesive strength in forming a phosphor(PH) film and prevent both the films from deviating from the positions, by performing exposure at the time of forming the BM film keeping a greater distance between a light source and a shadow mask than at the time of forming the PH film. CONSTITUTION:An exposure unit having a diameter A of a light source larger than that in forming a phosphor(PH) film stripe 7 is exposed in forming a black matrix(BM) film stripe 6. Therefore, tolerance in forming the BM film strip 6 as well as adhesive strength of the PH film stripe 7 can be enhanced. Since the difference in thickness between a photoresist and a phosphor slurry is considerable, exposure is performed at the time of forming the BM film, keeping a greater distance between the light source and a shadow mask than at the time of forming the PH film in consideration of the difference, thereby preventing the PH film and the BM film from deviating from the positions.

Description

【発明の詳細な説明】 本発明はカラー受像管映像スクリーンの露光方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for exposing a color picture tube video screen.

カラー受像管の映像スクリーンであるけい光膜を形成す
るための露光方法は、ブラックマトリックス膜(以下8
M膜という)形成とけい光膜(以下PHIl!!という
)形成とを同一条件で行なう方法が8M膜とPH膜の位
置ずれがなく、またその抽圧も不要となる。しかしなが
ら、BM膜形成時のホトレジストの膜厚は例えば0.6
μm程度と非常に薄いのに対し、PH膜形成時のけい光
体スラリーの膜厚は例えば30μm程度と前記ホトレジ
の膜71.(に比べ非常に厚く、またホトレジストとけ
い光体スラリーとでは感光特性が異なり、更に8M膜は
シャドウマスクの開口孔より小さく、すなわちスロット
形の開口孔の場合は8M膜漠の幅がスロットの帽より小
さく、円形の開口孔ではBM脱の径が円形の径より小さ
く、PH膜は膜厚の関係からシャドウマスクの開口孔よ
り大きく、すなわちスロット形の開口孔の場合はPH膜
の幅がスロットの蝙より大きく、円形の開口孔の場合は
pH111が円形の径より大きく形成しているので、向
者を同一条件で形成するのは、B M膜形成の裕度が代
ドすると共に、P )i膜形成の接着強度(照度×時間
)が不利となる。
The exposure method for forming the fluorescent film, which is the image screen of a color picture tube, is a black matrix film (hereinafter referred to as 8
The method of forming the 8M film and the fluorescent film (hereinafter referred to as PHIl!!) under the same conditions eliminates the misalignment of the 8M film and the PH film, and also eliminates the need for extraction pressure. However, the thickness of the photoresist when forming the BM film is, for example, 0.6
The film thickness of the phosphor slurry during formation of the PH film is, for example, about 30 μm, whereas the photoresist film 71. In addition, the photoresist and phosphor slurry have different photosensitive characteristics, and the 8M film is smaller than the aperture of the shadow mask.In other words, in the case of a slot-shaped aperture, the width of the 8M film is the width of the slot cap. In the case of a smaller, circular aperture, the diameter of the BM protrusion is smaller than the circular diameter, and the PH film is larger than the shadow mask aperture due to film thickness.In other words, in the case of a slot-shaped aperture, the width of the PH film is smaller than the slot. In the case of circular apertures, the pH value of 111 is larger than the diameter of the circular aperture, so forming the pores under the same conditions increases the margin of BM film formation and increases the ) The adhesive strength (illuminance x time) of i-film formation is disadvantageous.

本発明は上記背景に立ってなされたもので、bM膜形成
の裕度およびPH膜形成の接着強度をそれぞれ向上させ
ると共に8M膜とPH膜の位置ずれを防止することがで
きるカラー受像管映像スクリーンの露光方法を提供する
ことを目的とする。
The present invention has been made against the above background, and is a color picture tube image screen that can improve the margin of bM film formation and the adhesion strength of PH film formation, as well as prevent misalignment of the 8M film and PH film. The purpose of this invention is to provide an exposure method.

以下、本発明を図示の一実施例により説明する。Hereinafter, the present invention will be explained with reference to an illustrated embodiment.

第1図に示すように、カラー受像管のけい光面形成は、
パネル1の内面に塗布したホトレジストまたはけい光体
スラリー2上に水銀灯を直接線状光ij、g 3とした
露光装置によりシャドウマスク4に形成された開口孔の
スリットパターン5の露光感光を行なって、第2図に示
すように、BMll!aストライプ6およびPH[スト
ライプ7を形成している。
As shown in Figure 1, the fluorescent surface formation of a color picture tube is
The photoresist or phosphor slurry 2 coated on the inner surface of the panel 1 is exposed to light in the slit pattern 5 of the openings formed in the shadow mask 4 using an exposure device using a mercury lamp as direct linear light ij, g3. , as shown in Figure 2, BMll! a stripe 6 and PH [forming stripe 7].

この時、光スポット8の最小露光範囲Dmax、最小露
光範囲Dminは、光源3の直径をA、スリットパター
ン5のスリット幅をB、光源3からシャドウマスク4ま
での距離をP、シャドウマスク4からパネル1内面まで
の距離をQとすると、概略幾何学的に次式で表わされる
At this time, the minimum exposure range Dmax and minimum exposure range Dmin of the light spot 8 are the diameter of the light source 3 as A, the slit width of the slit pattern 5 as B, the distance from the light source 3 to the shadow mask 4 as P, and the distance from the shadow mask 4 as P. Letting Q be the distance to the inner surface of the panel 1, it is approximately geometrically expressed by the following equation.

Dma x=(B+A)XQ/)’+BDmi n=(
B  A)XQ/P+Bこの関係を図示すると第3図の
ように表わされる。
Dmax=(B+A)XQ/)'+BDmin=(
B A) XQ/P+B This relationship is illustrated as shown in FIG.

さて、BM膜ストライプ6の幅Cは、ピユリティ裕度を
向上させるため、電子ビームの幅より小さく、すなわち
スリットパターン5のスリット幅Bより小さく形成する
。このことを第3図によって説明すると、光スポット9
のDminの方で露光感光するようにする。すなわち、
光源径Aが大きくなるとDminは小さくなり、小さい
BMI′lAストライプ6を形成するのに有利になる。
Now, the width C of the BM film stripe 6 is formed to be smaller than the width of the electron beam, that is, smaller than the slit width B of the slit pattern 5, in order to improve the purity margin. To explain this with reference to FIG. 3, the light spot 9
Exposure should be made at Dmin. That is,
As the light source diameter A increases, Dmin decreases, which is advantageous for forming small BMI′lA stripes 6.

PH膜ストライプ7の形成は、吸尽が例えば30μmと
厚いけい光体スラリーを露光感光するため、充分な露光
量が必要となる。このことを第3図によって説明すると
、露光量を多くすることはDmaxの方で感光させるこ
とになる。すなわち、PHrlAストライプ7の幅Eは
スリットパターン5のスリット幅Bより大きくなるが、
最大幅は相隣接するPH膜ストライプ7にはみ出さない
幅にする。このためには、Dmaxがなるべく小さく、
DminとDmaxの差が小さい程有利となる。
In order to form the PH film stripes 7, a sufficient amount of light is required because a thick phosphor slurry with an exhaustion of, for example, 30 μm is exposed to light. To explain this with reference to FIG. 3, increasing the exposure amount will result in exposure at Dmax. That is, although the width E of the PHrlA stripe 7 is larger than the slit width B of the slit pattern 5,
The maximum width is set to a width that does not protrude into adjacent PH film stripes 7. For this purpose, Dmax should be as small as possible,
The smaller the difference between Dmin and Dmax, the more advantageous it becomes.

これを補足するには光源径Aが小さい方が良い。To compensate for this, it is better to have a smaller light source diameter A.

そこで、BMl1%ストライプ6形成時は形成膜ストラ
イプ7形成時より太い光源径Aを備えた露光装置で露光
することにより、BM膜ストライプ6形成の裕度が向上
すると共に、PH膜ストライプ7形成の接着強度が向上
する。また、ホトレジストの膜厚と蛍光体スラリーの膜
厚とはその厚さに相当の差があるため、その麺を考慮し
て光源とシャドウマスク間の距離をBM膜形成時とPH
膜形成時とで異なる寸法とすることでPH膜と8M膜の
位置ずれを防止する。すなわち、第4図に示すようにa
点の光源3からシャドウマスク4の開口孔のスリットパ
ターン5を介してホトレンジスト膜2aを露光するとA
点が露光され、このA点を中心とした8M膜が形成され
る。一方蛍光体膜2bを8M膜の露光と同じa点から露
光すると膜厚の差によりA1点を中心として露光されて
A1点を中心としたPH膜が形成され、8M膜とPH膜
はABの距離だけ位置ずれが発生する。従って、蛍光膜
2bの露光をA点と中心が一致した0点を露光するよう
に、a点よりシャドウマスク4に近接したb点の光源3
から行うことによりBMMとPH膜の位置ずれを防止で
きる。例えば、光源径AはBM膜ストライプ6形成時に
1.5++aφを、P)11ストライプ7形成時に0.
9m+φをそれぞれ使用し、光源3からシャドウマスク
4までの距離Pは、BMl!i!ストライプ6形成時を
PH膜ストライプ7形成時より0.3m大きくして露光
位置ずれを補正して行なったところ、良奸な結果が得ら
れた。ここで、光源径の違いによるBM膜ストライプ6
とPH膜ストライブ7との露光位置ずれは、前記のよう
に距#IPを変えることによって対処できるが、この外
に補正レンズ、ガラス板(図示せず)の板厚を変えるこ
とでも対処できる。また、位置ずれ防止には光源径は8
M膜とPH1i!i!で同一であってもよい。
Therefore, when forming the BMl 1% stripe 6, by performing exposure with an exposure device equipped with a larger light source diameter A than when forming the formed film stripe 7, the margin for forming the BM film stripe 6 is improved, and the margin for forming the PH film stripe 7 is improved. Improves adhesive strength. In addition, since there is a considerable difference in the thickness of the photoresist film and the film thickness of the phosphor slurry, the distance between the light source and the shadow mask should be adjusted in consideration of the thickness of the photoresist and the phosphor slurry.
By making the dimensions different during film formation, misalignment of the PH film and the 8M film can be prevented. That is, as shown in Figure 4, a
When the photoresist film 2a is exposed from the point light source 3 through the slit pattern 5 of the aperture of the shadow mask 4, A is obtained.
The point is exposed to light, and an 8M film centered on this point A is formed. On the other hand, if the phosphor film 2b is exposed from point a, which is the same as the exposure of the 8M film, due to the difference in film thickness, the exposure will be centered on point A1, and a PH film will be formed centered on point A1, and the 8M film and PH film will be exposed at point A1. A positional shift occurs by the distance. Therefore, the light source 3 at point b, which is closer to the shadow mask 4 than point a, is configured to expose the fluorescent film 2b to point 0 whose center coincides with point A.
By performing this step, it is possible to prevent misalignment between the BMM and the PH film. For example, the light source diameter A is 1.5++aφ when forming BM film stripe 6, and 0.
9m+φ, respectively, and the distance P from the light source 3 to the shadow mask 4 is BMl! i! When the stripe 6 was formed 0.3 m larger than the PH film stripe 7 to correct the exposure position shift, satisfactory results were obtained. Here, BM film stripe 6 due to the difference in light source diameter
The exposure position deviation between the PH film strip 7 and the PH film strip 7 can be dealt with by changing the distance #IP as described above, but it can also be dealt with by changing the thickness of the correction lens and the glass plate (not shown). . In addition, to prevent positional deviation, the light source diameter is 8.
M membrane and PH1i! i! may be the same.

このように光源とシャドウマスクとの距離を変えること
によってBM膜ストライプ6形成とPH膜ストライプ7
形成の品質を向上できるが、ストライプけい光面を形成
する場合には、第5図に示すようにスリットパターン5
の長手方向のブリッジ部9を消去する場合がある。この
ブリッジ部9を消去するためには、ブリッジ部9のピッ
チをF、線状光源3の長さをαとすると、12=(P+
Q)/Q −?’の長さの線状光源3が必要となる。
By changing the distance between the light source and the shadow mask in this way, BM film stripe 6 and PH film stripe 7 can be formed.
Although the quality of formation can be improved, when forming a striped fluorescent surface, a slit pattern 5 as shown in FIG.
The bridge portion 9 in the longitudinal direction may be deleted. In order to erase this bridge part 9, if the pitch of the bridge part 9 is F and the length of the linear light source 3 is α, then 12=(P+
Q)/Q-? A linear light source 3 with a length of ' is required.

しかしながら、この線状光源3の長さQをBM膜ストラ
イプ6形成時とPH膜ストライプ7形形成とを同一長さ
で露光を行なうと、BH膜ストライプ6よりPH膜スト
ライプ7の有効面が長手方向において小さく形成される
ため、長手方向の端部に未発光部が生じ、けい光面の欠
点となる。これは8M膜ストライプ6の露光時の光源長
さQよりPH膜ストライプ7の露光時の光源長さ悲を、
例えば3〜4wm長くすることにより未発光部を除去で
きた。また、このことはvfJjIg光時の光源の長さ
Qを変えることなく光源の移動距離を金えても対処でき
る。
However, if the length Q of the linear light source 3 is the same when the BM film stripe 6 is formed and when the PH film stripe 7 is formed, the effective surface of the PH film stripe 7 becomes longer than the BH film stripe 6. Since it is formed small in the direction, a non-light emitting part occurs at the end in the longitudinal direction, which becomes a drawback of the fluorescent surface. This means that from the light source length Q during exposure of 8M film stripe 6, the light source length during exposure of PH film stripe 7 is
For example, by increasing the length by 3 to 4 wm, the non-light emitting part could be removed. Further, this problem can be dealt with by increasing the moving distance of the light source without changing the length Q of the light source during vfJjIg light.

なお、上記実施例においては、ストライブタイプのカラ
ー受像管について説明したが、ドツトタイプのカラー受
像管のけい光面形成にも通用できる。
In the above embodiments, a stripe type color picture tube has been described, but the present invention can also be applied to forming a fluorescent surface of a dot type color picture tube.

以上の説明から明らかな如く、本発明の方法によれば、
8M膜の形成裕度が向上すると共に、PHPtAの接着
強度が向上し、さらに両膜の位置のずれを防止できる。
As is clear from the above explanation, according to the method of the present invention,
The latitude for forming the 8M film is improved, the adhesive strength of PHPtA is improved, and misalignment of both films can be prevented.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明になる方法の一実施例を示し、第1図は真先
方法のIM理説明図、第2図はストライプタイプけい先
部の平面説明図、第3図は露光強度を示す説明図、第4
図は光源の位置と軸点とを説明するための原理説明図、
第5図はシャドウマスクのブリッジ部を消去するための
縁線状光源長さを示す原理説明図である。 1・・・パネル、2・・・ホトレジストまたはけい光体
スラリー 3・・・線状光源、4・・・シャドウマスク
、5・・・スリットパターン、6・・BMIiストライ
ブタイプ・・PH1l!4ストライ第 図 第 図 第 図 第 図
The figures show an example of the method according to the present invention, Fig. 1 is an IM diagram of the straight-edge method, Fig. 2 is a plan view of the stripe type tip, and Fig. 3 is an explanation showing the exposure intensity. Figure, 4th
The figure is a principle explanatory diagram for explaining the position of the light source and the axis point,
FIG. 5 is a principle explanatory diagram showing the length of the edge line light source for erasing the bridge portion of the shadow mask. 1... Panel, 2... Photoresist or phosphor slurry 3... Linear light source, 4... Shadow mask, 5... Slit pattern, 6... BMIi stripe type... PH1l! 4-strike diagram diagram diagram diagram diagram diagram

Claims (1)

【特許請求の範囲】[Claims] 1、パネル内面に塗布したホトレジストおよびけい光体
スラリーに光源からの光線をシャドウマスクの開口孔を
通して露光感光を行なってブラックマトリックス膜およ
びけい光膜をそれぞれ露光装置で形成するカラー受像管
映像スクリーンの露光方法において、前記ブラックマト
リックス膜形成時は前記けい光膜形成時より前記光源と
シャドウマスク間の距離を大きくして露光を行なうこと
を特徴とするカラー受像管映像スクリーンの露光方法。
1. A color picture tube video screen in which the photoresist and phosphor slurry coated on the inner surface of the panel are exposed to light from a light source through the apertures of a shadow mask to form a black matrix film and a phosphor film using an exposure device, respectively. An exposure method for a color picture tube video screen, characterized in that when forming the black matrix film, the distance between the light source and the shadow mask is made larger than when forming the fluorescent film.
JP2211722A 1990-08-13 1990-08-13 Color picture tube screen exposure method Expired - Lifetime JPH0616376B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2211722A JPH0616376B2 (en) 1990-08-13 1990-08-13 Color picture tube screen exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2211722A JPH0616376B2 (en) 1990-08-13 1990-08-13 Color picture tube screen exposure method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP12299881A Division JPS5825036A (en) 1981-08-07 1981-08-07 Exposure of color picture tube video screen

Publications (2)

Publication Number Publication Date
JPH03129635A true JPH03129635A (en) 1991-06-03
JPH0616376B2 JPH0616376B2 (en) 1994-03-02

Family

ID=16610521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2211722A Expired - Lifetime JPH0616376B2 (en) 1990-08-13 1990-08-13 Color picture tube screen exposure method

Country Status (1)

Country Link
JP (1) JPH0616376B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5082964A (en) * 1973-11-09 1975-07-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5082964A (en) * 1973-11-09 1975-07-04

Also Published As

Publication number Publication date
JPH0616376B2 (en) 1994-03-02

Similar Documents

Publication Publication Date Title
JP2596897B2 (en) Exposure method and apparatus of face plate for screen formation of color television picture tube
US4001018A (en) Method for making a stripe screen on a face plate of a cathode ray tube by rotating correction lens
JPH03129635A (en) Exposure method for image screen of color picture tube
JPS5825036A (en) Exposure of color picture tube video screen
US4855200A (en) Fluorescent screens of color picture tubes and manufacturing method therefor
JPS6315695B2 (en)
US3738233A (en) Camera process for color tube screen printing
JP3119112B2 (en) Exposure method
EP0675518B1 (en) Exposing apparatus
JPS6333258B2 (en)
JPS62154525A (en) Correcting lens
KR200175588Y1 (en) Exposure filter of panel exposuring filter
JPS6041819B2 (en) Method for manufacturing color picture tube fluorescent surface
US5991554A (en) Exposure apparatus for manufacturing color cathode ray tube
JPS60163336A (en) Exposure of fluorescent screen of color picture tube
KR19980041499A (en) Correction Lens for Exposure Equipment
KR100232581B1 (en) Exposure method with square pattern and apparatus thereof
KR100252064B1 (en) An exposing device for crt
JPS5841715Y2 (en) exposure equipment
JPH06150820A (en) Exposure device of color picture tube
JPH1040811A (en) Exposure device for forming fluorescent screen of color cathode-ray tube
JPH11306975A (en) Photo-exposure device for formation of fluorescent screen of color cathode-ray tube
KR19980066233A (en) Color Brown Tube Exposure Equipment
JPS5952506B2 (en) "Kei" Exposure device for light surface formation
JPH04294026A (en) Light source for exposure