JPH0312816A - Thin metallic film type magnetic recording medium - Google Patents
Thin metallic film type magnetic recording mediumInfo
- Publication number
- JPH0312816A JPH0312816A JP14764189A JP14764189A JPH0312816A JP H0312816 A JPH0312816 A JP H0312816A JP 14764189 A JP14764189 A JP 14764189A JP 14764189 A JP14764189 A JP 14764189A JP H0312816 A JPH0312816 A JP H0312816A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- recording medium
- alloy
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 68
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 5
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 4
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 41
- 239000000203 mixture Substances 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 abstract description 12
- 239000000956 alloy Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 8
- 239000006249 magnetic particle Substances 0.000 abstract description 5
- 230000004907 flux Effects 0.000 abstract description 4
- 238000002955 isolation Methods 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract 1
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 6
- 239000010952 cobalt-chrome Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はノイズ特性にすくれた金属薄膜型磁気記録媒体
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a metal thin film magnetic recording medium with poor noise characteristics.
近時、磁気記録装置の記録媒体として、非磁性基体上の
磁性膜を強磁性金属薄膜とした金属薄膜型磁気記録媒体
が、その高密度記録性により、従来の所謂塗布型磁気記
録媒体に置き代わりつつある。その非磁性基体上に形成
される強磁性金属薄膜の成分構成は、磁気的性質、記録
再生特性、耐候性等の総合的評価に一基づいて決定され
、−船釣にＣｏ、、ＣｏＮｉ系、ＣｏＣｒ系、またはＣ
ｏＮｉＣｒ系合金が使用されている。Recently, metal thin film magnetic recording media, in which the magnetic film on a nonmagnetic substrate is a ferromagnetic metal thin film, have been used as recording media for magnetic recording devices, and due to their high density recording properties, they have been replaced by conventional so-called coated magnetic recording media. It is being replaced. The composition of the ferromagnetic metal thin film formed on the non-magnetic substrate is determined based on a comprehensive evaluation of magnetic properties, recording/reproducing characteristics, weather resistance, etc. CoCr-based or C
oNiCr alloy is used.
上記金属薄膜型磁気記録媒体は、これまでの塗布型磁気
記録媒体にまさる高密度の記録が可能であるが、次世代
の磁気記録媒体としては更に記録密度の向上が要求され
る。そのためには、変調ノイズや再生波形ピークシフト
等の記録再生ノイズ特性を改善することが必要である。The metal thin film type magnetic recording medium described above is capable of higher density recording than conventional coated type magnetic recording media, but next-generation magnetic recording media are required to further improve recording density. To this end, it is necessary to improve recording and reproduction noise characteristics such as modulation noise and reproduction waveform peak shift.
本発明は上記要請に応えるべくなされたものであり、記
録再生ノイズを可及的に低くして分解能とノイズのつり
合いのとれたピークシフトの低い高密度記録用金属薄膜
型磁気記録媒体を従供する。The present invention has been made in response to the above requirements, and provides a metal thin film magnetic recording medium for high-density recording with low peak shift and a good balance between resolution and noise by minimizing recording and reproducing noise. .
〔課題を解決するための手段および作用〕本発明の金属
薄膜型磁気記録媒体は、その磁性膜が、下式（Ｉ）また
は（ＩＩ）で示される成分組成を有する合金からなるこ
とを特徴としている。[Means and effects for solving the problems] The metal thin film magnetic recording medium of the present invention is characterized in that the magnetic film is made of an alloy having a component composition represented by the following formula (I) or (II). There is.
ＣＯ＋−ｘ−ｙ−ｚ Ｎ１）Ｉ Ｃｒｙ Ｍｚ −
（１１）Ｃｏ ＋−ｖ−ｚ Ｃｒ ｖ Ｍｚ
”・（１）式中、Ｍは、’Ｔａ、Ｎｂ、Ｖがら選ば
れる２種もしくは３種の元素であり、ｘ、 ｙ、
ｚは原子組成比を表し、Ｘは０．０５〜０．１０７
ｙは０．０７〜０．１４２は０．０２〜０．１０７ある
。CO+-x-y-z N1)I Cry Mz-
(11) Co +-v-z Cr v Mz
”・In the formula (1), M is two or three elements selected from Ta, Nb, and V, and x, y,
z represents the atomic composition ratio, and X is 0.05 to 0.107
y is 0.07-0.142 and 0.02-0.107.
本発明の磁気記録媒体の金属系磁性膜は、上記のように
ＣｏＣｒ系、またはＣｏＮｉＣｒ系合金をベースとし、
これにＭで表される元素、すなわちＴａ、Ｎｂ、Ｖがら
選ばれる２種もしくは３種の元素が複合添加された成分
構成を有している。ＣｏＣｒ系、またはＣｏＮｉＣｒ系
合金は、高保磁力（Ｈｃ）および高残留磁束密度（Ｂｒ
）を有する合金であり、本発明に従ってこれにＭで表さ
れる複数元素の適量が添加されると、Ｍ元素によるＣｒ
の粒界析出に伴い磁性粒子（磁区）の孤立化がもたらさ
れると共に、保磁力（Ｈｃ）の増加をみる。このＭ元素
の添加による保磁力増加と磁性粒子の孤立化とによって
顕著なノイズ特性改善効果が得られる。なお、Ｍ元素の
いずれか１種のみの単独添加においても磁性粒子の孤立
化、保磁力増加をみるが、後記実施例に示したように、
その顕著な改善効果はその複合添加によって確保される
。As mentioned above, the metal-based magnetic film of the magnetic recording medium of the present invention is based on CoCr-based or CoNiCr-based alloy,
It has a composition in which the element represented by M, that is, two or three elements selected from Ta, Nb, and V, is added in combination. CoCr-based or CoNiCr-based alloys have high coercive force (Hc) and high residual magnetic flux density (Br
), and when appropriate amounts of multiple elements represented by M are added to this according to the present invention, Cr due to the M element
Along with grain boundary precipitation, magnetic particles (magnetic domains) become isolated and coercive force (Hc) increases. The addition of the M element increases the coercive force and isolates the magnetic particles, resulting in a significant improvement in noise characteristics. It should be noted that even when only one of the M elements is added alone, the magnetic particles become isolated and the coercive force increases, but as shown in the examples below,
Its remarkable improvement effect is ensured by its combined addition.
本発明において磁性膜の合金成分組成につき、Ｃｒ量（
ｙ）を０．０７〜０．１４としたのは、０．０７未満で
は、磁性膜の耐候性が不足し、他方０．１４より多くな
ると、良好な磁気特性・電気特性を確保できなくなるか
らでである。また、Ｎｉを含む磁性膜である場合のＮｉ
量（Ｘ）の下限を０．０５としだのは、Ｎｉ添加による
耐候性改善効果を十分ならしめるためであり、上限を０
．２５としたのは、それをこえると、飽和磁束密度（Ｂ
ｓ）が減少し、良好な磁気特性および電気特性が得られ
なくなるからである。In the present invention, the amount of Cr (
The reason why y) is set to 0.07 to 0.14 is because if it is less than 0.07, the weather resistance of the magnetic film will be insufficient, while if it is more than 0.14, it will not be possible to ensure good magnetic and electrical properties. It is. In addition, in the case of a magnetic film containing Ni,
The reason why the lower limit of the amount (X) is set to 0.05 is to ensure that the effect of improving weather resistance by adding Ni is sufficient, and the upper limit is set to 0.05.
．． The reason for setting it to 25 is that when it exceeds the saturation magnetic flux density (B
s) decreases, making it impossible to obtain good magnetic and electrical properties.
更に、本発明の最も特徴とするＭ元素につき、その添加
量（複数元素の合計量）の下限値をｏ、ｏ２、としたの
は、その複合添加による磁性粒子の孤立化に伴う磁化遷
移幅の減少、高保磁力化の効果を確保するためである。Furthermore, for the M element, which is the most characteristic feature of the present invention, the lower limit value of its addition amount (total amount of multiple elements) is set to o and o2 because the magnetization transition width due to the isolation of magnetic particles due to the combined addition This is to ensure the effect of reducing the coercive force and increasing the coercive force.
好ましくは各元素の量をそれぞれ０．０１以上とする。Preferably, the amount of each element is 0.01 or more.
他方Ｍ元素の上限値を０゜１０、としたのは、それをこ
えると効果がほぼ飽和してしまうだけでなく、却って磁
気特性・電気特性の低下を招くからである。On the other hand, the upper limit of the M element is set to 0°10 because exceeding this value not only substantially saturates the effect, but also causes deterioration of the magnetic and electrical properties.
本発明の金属薄膜型磁気記録媒体は、磁気ディスクをは
じめ、磁気ドラム、磁気テープ、磁気シート等を包含す
る。これらは、いずれもその磁性膜が前記［Ｉ）式また
は〔■〕式で示される組成を有する合金からなる点を除
いて、公知の工程および条件に従って製作することがで
きる。例えば、面内記録用磁気ディスクについて述べれ
ば、アルミニウム合金板等を基体とし、その表面に無電
解めっきにより硬質のＮ１−Ｐめっき膜（膜厚：例えば
１５〜２５μｍ）を設け、めっき膜面にテキスチャ処理
を施したのち、磁性膜に面内異方性を与えるための下地
層としてＣｒ膜を適宜の膜厚（例えば５００〜３０００
人）に形成する。そのＣｒ膜面上に、前記組成をもつ磁
性膜（膜厚は例えば５００〜２０００人）を成膜する。The metal thin film magnetic recording medium of the present invention includes magnetic disks, magnetic drums, magnetic tapes, magnetic sheets, and the like. All of these can be manufactured according to known processes and conditions, except that the magnetic film is made of an alloy having a composition represented by the formula [I] or formula [■]. For example, regarding a magnetic disk for in-plane recording, the substrate is made of an aluminum alloy plate, etc., and a hard N1-P plating film (film thickness: e.g. 15 to 25 μm) is provided on the surface by electroless plating, and the plating film surface is After the texture treatment, a Cr film is deposited to an appropriate thickness (for example, 500 to 3000
person). A magnetic film (film thickness: 500 to 2000 layers, for example) having the above composition is formed on the Cr film surface.
ついで磁性膜の摩耗・損傷を防止するための保護膜とし
て、潤滑性と耐摩耗性を備えた被膜、例えば炭素質膜（
膜厚：例えば１５０〜６００人）を形成することにより
、多層積層構造を有する面内記録用磁気ディスクを得る
。その積層構造は上記の例に限定されず、例えば、磁性
膜の上に：炭素質膜を成膜するに先立って、Ｃｒ膜（膜
厚約１００〜５００人）を形成することにより、磁気デ
ィスクの耐候性をさらに高めることができ、また磁性膜
面に炭素質膜を形成したうえ、更にその表面に潤滑剤（
膜厚：例えば１０〜１００人）を設けて、磁気ヘッドに
対する保護潤滑機能をより良好なものとすることもでき
る。なお、各層の成膜は、スパッタリング法、イオンブ
レーティング法、真空蒸着法などにより行うことができ
る。Next, a coating with lubricity and wear resistance, such as a carbonaceous film (
By forming a film having a thickness of, for example, 150 to 600, a magnetic disk for in-plane recording having a multilayer laminated structure is obtained. The laminated structure is not limited to the above example, and for example, a Cr film (film thickness of about 100 to 500 ml) is formed on top of the magnetic film before forming the carbonaceous film. In addition to forming a carbonaceous film on the magnetic film surface, a lubricant (
The protective lubrication function for the magnetic head can be improved by providing a film with a thickness of, for example, 10 to 100. Note that each layer can be formed by a sputtering method, an ion blating method, a vacuum evaporation method, or the like.
実施丘↓（ＣｏＮｉＣｒ系磁性膜）
（１）供試磁気ディスクの製作
アルミニウム合金基板（外径１３０ｍｍ、内径４０ｍｍ
、厚さ１．９ｍｍ）の表面に、Ｎ１−Ｐ無電解めっき膜
（膜厚２０μｍ）を形成し、表面にボリンシュとテキス
チャ処理を行ったのち、マグネトロンスパッタリング法
（但し、アルゴン雰囲気圧：０．７ Ｘｌ０−２ｔｏｒ
ｒ ）により、Ｃｒ膜（下地層）、ＣｏＮｉＣｒ系磁性
膜および潤滑膜としての炭素質膜（膜厚３００人）とを
この順に積層成膜して供試磁気ディスクを得た。各供試
磁気ディスク同士の記録再生特性の正当な比較を行うた
めに、各供試磁気ディスクの保磁力（Ｈｃ）、および残
留磁束密度（Ｂｒ）と膜厚（δ）の積（Ｂｒ・δ）が互
いに等しくなるように下地層および磁性膜の成膜を行っ
た。そのＨｃは１２５００ｅとし、Ｂｒ・δは４５０Ｇ
−μとした。Implementation hill ↓ (CoNiCr magnetic film) (1) Production of test magnetic disk Aluminum alloy substrate (outer diameter 130 mm, inner diameter 40 mm)
A N1-P electroless plating film (film thickness: 20 μm) was formed on the surface of the N1-P electroless plated film (thickness: 1.9 mm), and the surface was subjected to a borinsh and texture treatment, followed by magnetron sputtering (argon atmosphere pressure: 0.5 mm). 7 Xl0-2tor
A test magnetic disk was obtained by laminating a Cr film (base layer), a CoNiCr magnetic film, and a carbonaceous film (thickness: 300 mm) as a lubricating film in this order. In order to make a fair comparison of the recording and reproducing characteristics of each magnetic disk under test, the coercive force (Hc) of each magnetic disk under test, the product of the residual magnetic flux density (Br) and the film thickness (δ) (Br・δ) ) The underlayer and magnetic film were formed so that their values were equal to each other. Its Hc is 12500e, and Br・δ is 450G
−μ.
（ＩＩ）記録再生特性試験
各供試磁気ディスクについて、フェライトヘッドを使用
し、記録線密度１９ＫＰＣＩ、および２８ＫＰＣＩで、
信号の記録再生試験を行い、再生信号出力とメディアノ
イズ強さの比（Ｓ／Ｎ、ｄＢ）を求めた。なお、ヘッド
仕様は、ギャップ幅：１３．５μ、ギャップ長さ： ０
．７９μ、インダクタンス二８μＩ］、フライングハイ
ド： ０．２０μ、ローディング・フォース： ９．５
ｇｆ、コイル巻数：２６である。(II) Recording/reproduction characteristics test For each sample magnetic disk, a ferrite head was used at recording linear densities of 19 KPCI and 28 KPCI.
A signal recording/reproducing test was conducted to determine the ratio (S/N, dB) between the reproduced signal output and the media noise intensity. The head specifications are: gap width: 13.5μ, gap length: 0
．． 79μ, inductance 28μI], flying hide: 0.20μ, loading force: 9.5
gf, number of coil turns: 26.
各供試磁気ディスクの試験結果を、その磁性膜の合金組
成と併せて第１表に示す。表中、Ｎｏ、 １１〜１４は
Ｍ元素を複合金有する発明例、Ｎｏ、１５，１６はＭ元
素の単独添加の比較例である。The test results for each sample magnetic disk are shown in Table 1 along with the alloy composition of the magnetic film. In the table, Nos. 11 to 14 are invention examples having composite gold containing the M element, and Nos. 15 and 16 are comparative examples in which the M element is added alone.
災脩尉２ （ＣｏＣｒ系磁性膜）
磁性膜合金をＣｏＣｒ系とした点を除いて実施例１と同
じ工程と条件で供試磁気ディスクを得、それぞれについ
て前記と同じ記録再生特性試験を行った。各供試磁気デ
ィスクの磁性膜合金組成および試験結果を第２表に示す
。Ｎｏ、２１〜２４はＭ元素を複合金有する発明例、Ｎ
ｏ、２５．２６は単独添加の例である。Disaster Fighter 2 (CoCr-based magnetic film) Sample magnetic disks were obtained using the same process and conditions as in Example 1, except that the magnetic film alloy was CoCr-based, and the same recording and reproducing characteristics tests as above were conducted on each disk. . Table 2 shows the magnetic film alloy composition and test results of each test magnetic disk. No. 21 to 24 are invention examples having composite gold containing M element, N
o, 25.26 are examples of single addition.
上記各実施例の試験結果から、ＣｏＣｒ系またはＣｏＮ
ｉＣｒ系合金にＭ元素が複合添加された磁性膜を有する
発明例の磁気ディスクは、Ｓ／Ｎ比が高く、改良された
ノイズ特性を有していることがわかる。From the test results of each of the above examples, it was found that CoCr-based or CoN
It can be seen that the magnetic disk of the invention example, which has a magnetic film in which M element is added in combination to an iCr-based alloy, has a high S/N ratio and improved noise characteristics.
本発明の金属薄膜型磁気記録媒体は、ノイズ特性にすぐ
れ、記録再生ノイズが低いことにより従来品を凌ぐ高密
度記録が可能であり、これにより磁気記録媒体のコラパ
フ１−化と高品質・高性能化等の効果を得ることができ
る。The metal thin film magnetic recording medium of the present invention has excellent noise characteristics and low recording/reproduction noise, making it possible to perform higher density recording than conventional products. Effects such as improved performance can be obtained.
Claims (1)
媒体において、該金属系磁性膜が、Ｃｏ＿１＿−＿Ｘ＿
−＿Ｙ−ＺＮｉ＿ＸＣｒ＿ＹＭ＿Ｚ〔但し、Ｍは、Ｔａ
、Ｎｂ、Ｖから選ばれる２種もしくは３種の元素を表す
。ｘ、ｙ、ｚは原子組成比であり、ｘは０．０５〜０．
２５、ｙは０．０７〜０．１４、ｚは０．０２〜０．１
０である〕 で示される組成を有することを特徴とするノイズ特性に
すぐれた金属薄膜型磁気記録媒体。 ２、非磁性基体上に金属系磁性膜が形成された磁気記録
媒体において、該金属系磁性膜が、Ｃｏ＿１＿−＿Ｙ＿
−＿ＺＣｒ＿ＹＭ＿Ｚ 〔但し、Ｍは、Ｔａ、Ｎｂ、Ｖから選ばれる２種もしく
は３種の元素を表す。ｙ、ｚは原子組成比であり、ｙは
０．０７〜０．１４、ｚは０．０２〜０．１０である〕
で示される組成を有することを特徴とするノイズ特性に
すぐれた金属薄膜型磁気記録媒体。[Claims] 1. In a magnetic recording medium in which a metal-based magnetic film is formed on a non-magnetic substrate, the metal-based magnetic film is Co_1_-_X_
-_Y-ZNi_XCr_YM_Z [However, M is Ta
, Nb, and V. x, y, z are atomic composition ratios, and x is 0.05 to 0.
25, y is 0.07-0.14, z is 0.02-0.1
0] A metal thin film magnetic recording medium having excellent noise characteristics. 2. In a magnetic recording medium in which a metal-based magnetic film is formed on a non-magnetic substrate, the metal-based magnetic film is Co_1_-_Y_
-_ZCr_YM_Z [However, M represents two or three elements selected from Ta, Nb, and V. y and z are atomic composition ratios, y is 0.07 to 0.14, and z is 0.02 to 0.10]
A metal thin film magnetic recording medium with excellent noise characteristics, characterized by having a composition represented by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1147641A JP2552546B2 (en) | 1989-06-09 | 1989-06-09 | Metal thin film magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1147641A JP2552546B2 (en) | 1989-06-09 | 1989-06-09 | Metal thin film magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0312816A true JPH0312816A (en) | 1991-01-21 |
| JP2552546B2 JP2552546B2 (en) | 1996-11-13 |
Family
ID=15434931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1147641A Expired - Fee Related JP2552546B2 (en) | 1989-06-09 | 1989-06-09 | Metal thin film magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2552546B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05109042A (en) * | 1991-10-14 | 1993-04-30 | Nec Corp | Magnetic recording medium |
| JPH05151553A (en) * | 1991-11-28 | 1993-06-18 | Nec Corp | Magnetic recording medium |
| US5334267A (en) * | 1992-08-03 | 1994-08-02 | Hitachi Metals, Ltd. | Sputtering target for magnetic recording medium and method of producing the same |
| AU2014288257B2 (en) * | 2013-07-09 | 2016-07-28 | Mitsubishi Power, Ltd. | Combustion device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222023A (en) * | 1985-03-28 | 1986-10-02 | Victor Co Of Japan Ltd | Vertical magnetic recording medium |
| JPS6364623A (en) * | 1986-09-04 | 1988-03-23 | Fuji Electric Co Ltd | Magnetic recording medium |
-
1989
- 1989-06-09 JP JP1147641A patent/JP2552546B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222023A (en) * | 1985-03-28 | 1986-10-02 | Victor Co Of Japan Ltd | Vertical magnetic recording medium |
| JPS6364623A (en) * | 1986-09-04 | 1988-03-23 | Fuji Electric Co Ltd | Magnetic recording medium |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05109042A (en) * | 1991-10-14 | 1993-04-30 | Nec Corp | Magnetic recording medium |
| JPH05151553A (en) * | 1991-11-28 | 1993-06-18 | Nec Corp | Magnetic recording medium |
| US5334267A (en) * | 1992-08-03 | 1994-08-02 | Hitachi Metals, Ltd. | Sputtering target for magnetic recording medium and method of producing the same |
| AU2014288257B2 (en) * | 2013-07-09 | 2016-07-28 | Mitsubishi Power, Ltd. | Combustion device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2552546B2 (en) | 1996-11-13 |
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