JPH03127404A - Porcelain composition for reduction re-oxidation semiconductor condenser - Google Patents
Porcelain composition for reduction re-oxidation semiconductor condenserInfo
- Publication number
- JPH03127404A JPH03127404A JP26465389A JP26465389A JPH03127404A JP H03127404 A JPH03127404 A JP H03127404A JP 26465389 A JP26465389 A JP 26465389A JP 26465389 A JP26465389 A JP 26465389A JP H03127404 A JPH03127404 A JP H03127404A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 8
- 238000007254 oxidation reaction Methods 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract 2
- 229910052715 tantalum Inorganic materials 0.000 claims abstract 2
- 239000000919 ceramic Substances 0.000 claims description 13
- 239000003990 capacitor Substances 0.000 claims description 12
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 239000011572 manganese Substances 0.000 claims description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910002113 barium titanate Inorganic materials 0.000 abstract description 4
- 239000011656 manganese carbonate Substances 0.000 abstract description 4
- 235000006748 manganese carbonate Nutrition 0.000 abstract description 4
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 abstract description 4
- 239000002344 surface layer Substances 0.000 abstract description 4
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium oxide Inorganic materials [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229920003002 synthetic resin Polymers 0.000 abstract description 3
- 239000000057 synthetic resin Substances 0.000 abstract description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 239000003985 ceramic capacitor Substances 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010405 reoxidation reaction Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000004807 desolvation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000029305 taxis Effects 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
Landscapes
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体磁器組成物に係り、特に表面層形半導体
磁器コンデンサに通した還元再酸化形の半導体磁器組成
物に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor ceramic composition, and more particularly to a reduced and reoxidized semiconductor ceramic composition passed through a surface layer type semiconductor ceramic capacitor.
受動電子部品としての半導体磁器コンデンサは粒界層形
と表面層形に大別され、粒界層形としては粒界絶縁形半
導体磁器コンデンサ、表面層形には基層容量形半導体磁
器コンデンナと還元再酸化形半導体磁器コンデンサ等が
ある。Semiconductor ceramic capacitors as passive electronic components are broadly classified into grain boundary layer type and surface layer type. Grain boundary layer type includes grain boundary insulated semiconductor ceramic capacitors, and surface layer type includes base layer capacitance type semiconductor ceramic capacitors and reduction recycle type. There are oxidized semiconductor ceramic capacitors, etc.
それぞれに特徴があるが、粒界層形は基層容量形に比べ
て容量が小さく、還元再酸化形に比べて耐電圧か小さい
。Each type has its own characteristics, but the grain boundary layer type has a smaller capacity than the base layer capacitive type, and the withstand voltage is lower than the reduced and reoxidized type.
基層容量形は周波数特性が悪く、誘電体損失が大きく耐
電圧が小さい。The base capacitive type has poor frequency characteristics, large dielectric loss, and low withstand voltage.
1)元再酸化形は単位面積当たりの容fitc (μF
/cm”)を大きくしようとすれば破壊電圧値が小さく
なり、誘電体損失tanδが大きくなるか、または容量
の温度特性T−Cが大きくなる。1) The original reoxidized form has a volume per unit area fitc (μF
/cm''), the breakdown voltage value becomes smaller, the dielectric loss tan δ becomes larger, or the temperature characteristic of capacitance T-C becomes larger.
従って、本発明の目的は還元再酸化形半導体(R器コン
デンサに適した単位面積当たりの容量が大きく、耐電圧
も高くしかも温度特性が良好な半導体磁器組成物を得る
ものである。Therefore, an object of the present invention is to obtain a semiconductor ceramic composition suitable for a reduced reoxidation type semiconductor (R type capacitor), which has a large capacity per unit area, has a high withstand voltage, and has good temperature characteristics.
このため本発明者等は鋭意研究の結果、主成分としてB
aTto 3を(100−x−y )モル%、副成分と
してX・”FaxOsを0.3〜3.0モル%及びy−
Nds○3を0.3〜3.0モル%含有する(100−
X−)’) ・BaTiO3+x−Ta*Os+y−
Ndx03系の半導体磁器組成物が、上記目的を達成す
ることを見出した。Therefore, as a result of intensive research, the present inventors found that B.
(100-x-y) mol% of aTto 3, 0.3 to 3.0 mol% of X・"FaxOs as accessory components, and y-
Contains 0.3 to 3.0 mol% of Nds○3 (100-
X-)') ・BaTiO3+x-Ta*Os+y-
It has been found that a Ndx03-based semiconductor ceramic composition achieves the above object.
更に、上記成分に対して、コバルトをCO3O4に換算
して0.8重量%以下添加するか、マンガンをMnCO
3に換算して0.50重鼠%以下添加するか、SiO2
を0.20重星%以下添加することによって、本発明の
半導体磁器組成物の電気的特性壱更に向上することを見
出した。Furthermore, to the above components, add 0.8% by weight or less of cobalt in terms of CO3O4, or add manganese to MnCO
Add 0.50% or less in terms of SiO2
It has been found that the electrical properties of the semiconductor ceramic composition of the present invention can be further improved by adding 0.20% or less of .
上記の組成から成る還元再酸化形半導体コンデンサ用磁
器組成物は単位面積当たりの容量が大きく、耐電圧も高
く、温度特性が良好なものが得られる。The ceramic composition for a reduced and reoxidized semiconductor capacitor having the above composition has a large capacity per unit area, a high withstand voltage, and good temperature characteristics.
本発明の詳細な説明する。 The present invention will be described in detail.
出発原料としてBaCO3、TiO2、Ta205、N
d2O3、CO3O4、MnCO3,5in2を生成後
の成分m酸比が第1表の如くになるように秤量する(第
1図X参照)。BaCO3, TiO2, Ta205, N as starting materials
d2O3, CO3O4, MnCO3, 5in2 are weighed so that the component m-acid ratio after generation is as shown in Table 1 (see Figure 1X).
秤量した原料を例えば合成樹脂ボールミル中で水、玉石
とともにに約20時間回転し、湿式混合する(第1図X
参照)。The weighed raw materials are wet-mixed by rotating them together with water and cobblestones for about 20 hours in a synthetic resin ball mill, for example (see Figure 1
reference).
次に、脱水、乾燥しく第1図X参照)、約1200℃の
温度で2時間位安定にし仮焼成を行う(第1図X参照)
。Next, dehydrate and dry (see Figure 1
.
これを再び合成樹脂ボールξル中で水、玉石とともに約
20時間回転し、粉砕する(第1図X参照)。This is again rotated for about 20 hours with water and cobblestones in a synthetic resin bowl and pulverized (see FIG. 1, X).
再び脱水、乾燥してから(第1図X参照)、固形分とし
て約2%のPVAの有機バインダとともに混合して造粒
し、約3トン/ cm 2の圧力で直径10n1厚み0
、5 mmの円板に成形する(第1図X参照)。After dehydration and drying again (see Figure 1
, into a 5 mm disk (see Figure 1, X).
成形した円板を約800℃で約1時間安定にし、PVA
をとりのぞき脱媒を行う(第1図X参照)。The molded disk was stabilized at about 800°C for about 1 hour, and then PVA
Remove the solvent and remove the solvent (see X in Figure 1).
脱媒後、成形した円板を1300℃で2時間安定にし、
本焼成を行い誘電体磁器を得る(第1図Xl照)。After desolvation, the formed disk was stabilized at 1300°C for 2 hours,
Main firing is performed to obtain dielectric porcelain (see Fig. 1, Xl).
得られた講′iu体磁器を800 ’Cの例えば水素ガ
ス雰囲気の如き還元性雰囲気中で2時間安定にし半導体
磁器とする(第1図X参照)。The obtained ceramic body porcelain is stabilized for 2 hours in a reducing atmosphere such as a hydrogen gas atmosphere at 800'C to form a semiconductor porcelain (see FIG. 1X).
この半導体磁器円板の両面に電極となる銀ペーストを印
刷する(第1図Xl参照)。Silver paste to serve as electrodes is printed on both sides of this semiconductor ceramic disk (see FIG. 1, Xl).
これを酸化性雰囲気中で再び800°Cで2時間安定に
し、その磁器表面に講電体層を形成するとともに電極を
形威し、還元再酸化性半導体コンデンサを完成する〈第
1図Xl参照)。This is stabilized again at 800°C for 2 hours in an oxidizing atmosphere, and a conductor layer is formed on the surface of the porcelain, and electrodes are formed to complete the reduction and reoxidation semiconductor capacitor (see Figure 1, Xl). ).
このようにして形成された半導体コンデンサについて、
電気的特性を測定した結果を第1表に示す(第1図皿参
照)。ここで単位面積当たりの容IC,誘電体損失ta
nδはIKIIz 、I Vでd(り定した値であり、
!!!縁抵抗抵抗は25Vの電圧を印加して測定した値
、温度特性′r −cは20°Cにおける容量を基準と
して一25°C〜85℃における容量の変化率を測定し
たものである。Regarding the semiconductor capacitor formed in this way,
The results of measuring the electrical characteristics are shown in Table 1 (see plate in Figure 1). Here, capacitance per unit area IC, dielectric loss ta
nδ is a value determined by IKIIz, IV and
! ! ! The edge resistance resistance is a value measured by applying a voltage of 25 V, and the temperature characteristic 'r-c' is a value measured by measuring the rate of change in capacitance from -25°C to 85°C with the capacitance at 20°C as a reference.
なお、第1表中×印を付したものはこの発明の範囲外の
ものである。In addition, those marked with an x in Table 1 are outside the scope of this invention.
以下余白
この発明の還元再酸化形半導体コンデンサ用磁器組成物
における組成の限定理由を第1表を参照して説明する。In the following margin, the reasons for limiting the composition of the ceramic composition for a reduced and reoxidized semiconductor capacitor of the present invention will be explained with reference to Table 1.
Taz05が0.3モル%未満の場合には焼結不足とな
ったり(試料N01).2.4参照)、単位面積当たり
の容量Cが低く、tanδが大きくなるとともに、直流
破壊電圧vbが小さくなり、容量の温度特性も悪化する
(試料N093参照)。When Taz05 is less than 0.3 mol%, sintering may be insufficient (sample No. 01). 2.4), the capacitance C per unit area is low and tan δ is large, the DC breakdown voltage vb is small, and the temperature characteristics of the capacitance are also deteriorated (see sample No. 093).
一方、Taxesが3モル%を越えると、温度特性が悪
化する(試料NO,14,16参照)。On the other hand, if Taxes exceeds 3 mol %, the temperature characteristics deteriorate (see samples Nos. 14 and 16).
また、Nd2O3が0.3モル%未満の場合には容量C
が低く、直流破壊電圧vbが小さく、温度特性も悪化す
る(試料N015.16参照)。In addition, when Nd2O3 is less than 0.3 mol%, the capacity C
is low, the DC breakdown voltage vb is small, and the temperature characteristics are also deteriorated (see sample No. 015.16).
Nd2O5が3モル%を越えると温度特性が悪化する(
試料N01lO1)4参照)。If Nd2O5 exceeds 3 mol%, temperature characteristics deteriorate (
See sample N011O1)4).
CO3O4が0.8重量%を越えると、単位面積当たり
の容量Cが低く且つ温度特性も悪化する(試料No、
19参照)。When CO3O4 exceeds 0.8% by weight, the capacity C per unit area is low and the temperature characteristics are also deteriorated (sample No.
(see 19).
またMnCCl3が0.50重量%を越えると、絶縁抵
抗IR1直流破壊電圧vbが小さくなる(試料NO,2
3参照)。Furthermore, when MnCCl3 exceeds 0.50% by weight, the insulation resistance IR1 DC breakdown voltage vb decreases (sample NO, 2
(See 3).
更にSiO2が0.20重量%を越えると、単位面積当
たりの容量Cが低くなり、かつ絶縁抵抗IR1直流破壊
電圧vbが低くなる(試料No、 27参照)。Further, when SiO2 exceeds 0.20% by weight, the capacitance C per unit area becomes low and the insulation resistance IR1 DC breakdown voltage vb becomes low (see sample No. 27).
なお、添加物CO3O4、MnCO3,5i02は各々
添加しなくても良好な電気的特性を有する半導体磁器組
成物を得ることが出来るが、これらの添加物を添加する
ことによって、更により良い特性が得られるものである
(試料NO,17,18,21,22,25,26参照
)。Although it is possible to obtain a semiconductor ceramic composition having good electrical properties without adding each of the additives CO3O4, MnCO3, and 5i02, even better properties can be obtained by adding these additives. (See sample No. 17, 18, 21, 22, 25, 26).
本発明の組成の還元再酸化形半導体コンデンサ用Vlf
t器組成物を用いて半導体コンデンサを形成することに
より電気的緒特性、特にその温度特性のすぐれたものを
得ることができる。Vlf for reduced and reoxidized semiconductor capacitors having the composition of the present invention
By forming a semiconductor capacitor using a T-type capacitor composition, it is possible to obtain excellent electrical characteristics, particularly excellent temperature characteristics.
第1図は本発明の実施例の製造工程説明図である。 FIG. 1 is an explanatory diagram of the manufacturing process of an embodiment of the present invention.
Claims (4)
タルをTa_2O_5に換算して0.3〜3.0モル%
、ネオジウムをNd_2O_3に換算して0.3〜3.
0モル%含有することを特徴とする(100−x−y)
・BaTiO_3+x・Ta_2O_5+y・Nd_2
O_3系還元再酸化形半導体コンデンサ用磁器組成物。(1) BaTiO_3 as the main component and tantalum as a subcomponent of 0.3 to 3.0 mol% in terms of Ta_2O_5
, 0.3 to 3.0 when neodymium is converted to Nd_2O_3.
(100-xy) characterized by containing 0 mol%
・BaTiO_3+x・Ta_2O_5+y・Nd_2
Ceramic composition for O_3-based reduced and reoxidized semiconductor capacitors.
換算して0.8重量%以下(但し0を除く)含有するこ
とを特徴とする請求項(1)記載の還元再酸化形半導体
コンデンサ用磁器組成物。(2) The porcelain for reduced and reoxidized semiconductor capacitors according to claim (1), characterized in that it contains 0.8% by weight or less (excluding 0) of cobalt in terms of Co_3O_4 based on the component. Composition.
して0.50重量%以下(但し0を除く)含有すること
を特徴とする請求項(1)記載の還元再酸化形半導体コ
ンデンサ用磁器組成物。(3) The ceramic composition for a reduced and reoxidized semiconductor capacitor according to claim (1), characterized in that it contains 0.50% by weight or less (excluding 0) of manganese in terms of MnCO_3 based on the component. thing.
20重量%以下(但し0を除く)含有することを特徴と
する請求項(1)記載の還元再酸化形半導体コンデンサ
用磁器組成物。(4) Silicon oxide SiO_2 is 0.0% of the above components.
The ceramic composition for a reduced and reoxidized semiconductor capacitor according to claim 1, characterized in that it contains 20% by weight or less (excluding 0).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26465389A JPH03127404A (en) | 1989-10-11 | 1989-10-11 | Porcelain composition for reduction re-oxidation semiconductor condenser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26465389A JPH03127404A (en) | 1989-10-11 | 1989-10-11 | Porcelain composition for reduction re-oxidation semiconductor condenser |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03127404A true JPH03127404A (en) | 1991-05-30 |
Family
ID=17406342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26465389A Pending JPH03127404A (en) | 1989-10-11 | 1989-10-11 | Porcelain composition for reduction re-oxidation semiconductor condenser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03127404A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004093109A3 (en) * | 2003-04-09 | 2005-06-16 | Mra Lab Inc | High dielectric constant very low fired x7r ceramic capacitor, and powder for making |
-
1989
- 1989-10-11 JP JP26465389A patent/JPH03127404A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004093109A3 (en) * | 2003-04-09 | 2005-06-16 | Mra Lab Inc | High dielectric constant very low fired x7r ceramic capacitor, and powder for making |
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