JPH03126053U - - Google Patents

Info

Publication number
JPH03126053U
JPH03126053U JP3535990U JP3535990U JPH03126053U JP H03126053 U JPH03126053 U JP H03126053U JP 3535990 U JP3535990 U JP 3535990U JP 3535990 U JP3535990 U JP 3535990U JP H03126053 U JPH03126053 U JP H03126053U
Authority
JP
Japan
Prior art keywords
tip
wafer
suction surface
transfer arm
inclination angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3535990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3535990U priority Critical patent/JPH03126053U/ja
Publication of JPH03126053U publication Critical patent/JPH03126053U/ja
Pending legal-status Critical Current

Links

JP3535990U 1990-03-30 1990-03-30 Pending JPH03126053U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3535990U JPH03126053U (it) 1990-03-30 1990-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3535990U JPH03126053U (it) 1990-03-30 1990-03-30

Publications (1)

Publication Number Publication Date
JPH03126053U true JPH03126053U (it) 1991-12-19

Family

ID=31540647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3535990U Pending JPH03126053U (it) 1990-03-30 1990-03-30

Country Status (1)

Country Link
JP (1) JPH03126053U (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007076740A (ja) * 2005-08-15 2007-03-29 Kazuaki Kobayashi 容器運搬具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007076740A (ja) * 2005-08-15 2007-03-29 Kazuaki Kobayashi 容器運搬具

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