JPS63193843U - - Google Patents
Info
- Publication number
- JPS63193843U JPS63193843U JP8513487U JP8513487U JPS63193843U JP S63193843 U JPS63193843 U JP S63193843U JP 8513487 U JP8513487 U JP 8513487U JP 8513487 U JP8513487 U JP 8513487U JP S63193843 U JPS63193843 U JP S63193843U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- transfer device
- wafers
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000284 extract Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8513487U JPS63193843U (it) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8513487U JPS63193843U (it) | 1987-05-30 | 1987-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193843U true JPS63193843U (it) | 1988-12-14 |
Family
ID=30940263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8513487U Pending JPS63193843U (it) | 1987-05-30 | 1987-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193843U (it) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0528041U (ja) * | 1991-09-20 | 1993-04-09 | 東京応化工業株式会社 | 縦型ウエハー処理装置のウエハー移載機構 |
| JP2002270674A (ja) * | 2001-03-14 | 2002-09-20 | Disco Abrasive Syst Ltd | 搬出装置 |
| JP2015076507A (ja) * | 2013-10-09 | 2015-04-20 | 株式会社ディスコ | ウエーハの搬送装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61273441A (ja) * | 1985-05-23 | 1986-12-03 | Canon Inc | ウエハ搬送装置 |
-
1987
- 1987-05-30 JP JP8513487U patent/JPS63193843U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61273441A (ja) * | 1985-05-23 | 1986-12-03 | Canon Inc | ウエハ搬送装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0528041U (ja) * | 1991-09-20 | 1993-04-09 | 東京応化工業株式会社 | 縦型ウエハー処理装置のウエハー移載機構 |
| JP2002270674A (ja) * | 2001-03-14 | 2002-09-20 | Disco Abrasive Syst Ltd | 搬出装置 |
| JP2015076507A (ja) * | 2013-10-09 | 2015-04-20 | 株式会社ディスコ | ウエーハの搬送装置 |