JPH03126053U - - Google Patents
Info
- Publication number
- JPH03126053U JPH03126053U JP3535990U JP3535990U JPH03126053U JP H03126053 U JPH03126053 U JP H03126053U JP 3535990 U JP3535990 U JP 3535990U JP 3535990 U JP3535990 U JP 3535990U JP H03126053 U JPH03126053 U JP H03126053U
- Authority
- JP
- Japan
- Prior art keywords
- tip
- wafer
- suction surface
- transfer arm
- inclination angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3535990U JPH03126053U (de) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3535990U JPH03126053U (de) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03126053U true JPH03126053U (de) | 1991-12-19 |
Family
ID=31540647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3535990U Pending JPH03126053U (de) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03126053U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007076740A (ja) * | 2005-08-15 | 2007-03-29 | Kazuaki Kobayashi | 容器運搬具 |
-
1990
- 1990-03-30 JP JP3535990U patent/JPH03126053U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007076740A (ja) * | 2005-08-15 | 2007-03-29 | Kazuaki Kobayashi | 容器運搬具 |